Crucible assembly and silicon carbide powder manufacturing device

Abstract

The utility model discloses a crucible assembly and a silicon carbide powder manufacturing device.The crucible assembly comprises a crucible and a cover, the crucible comprises a crucible body and a crucible cover, the crucible body is provided with a cavity, the top end of the crucible body is provided with a cavity opening communicating with the cavity, and the crucible cover is detachably connected to the top end of the crucible body and used for blocking or opening the cavity opening; wherein an annular limiting table is formed on the outer wall of the crucible body; a cover body opening is formed in the first end of the cover body, the cover body is arranged on the outer sides of the crucible body and the crucible cover in a sleeving mode, the first end of the cover body is connected with the annular limiting table in a sealed mode, and an airtight space is formed among the cover body, the annular limiting table, the outer wall of the crucible body and the crucible cover; the air tightness between the cover body and the crucible is improved, the leakage of atmosphere in the crucible can be effectively controlled, and the service life of the device is prolonged.

Description

Technical Field

[0001] The present application relates to the technical field of crystal growth, and in particular to a crucible assembly and a silicon carbide powder manufacturing device. Background Art

[0002] In the process of crystal growth, solid phase method, liquid phase method and gas phase method are usually used for crystal growth. The methods are mature, easy to manufacture, and the crystal growth process is easy to control.

[0003] In actual operation, the researchers of this application found that during the crystal growth process, especially in the manufacturing process of silicon carbide (SiC) powder, the synthesis temperature is generally above 1800°C, which will cause part of the silicon carbide (SiC) to exist in the form of atmosphere. At the same time, due to factors such as the volatilization of the Si atmosphere, part of the atmosphere will crystallize in the thermal field of powder synthesis, causing the thermal field to be corroded, thereby reducing the service life of the thermal field. Utility Model Content

[0004] The main technical problem solved by the present application is to provide a crucible assembly and a silicon carbide powder manufacturing device, which can effectively control the leakage of the atmosphere in the crucible body and improve the service life of the thermal field.

[0005] To solve the above technical problems, a technical solution adopted in the present application is: providing a crucible assembly, comprising a crucible and a cover body, wherein the crucible comprises a crucible body and a crucible cover, the crucible body having a chamber, the top of the crucible body being provided with a chamber opening communicating with the chamber, the crucible cover being detachably connected to the top of the crucible body for sealing or opening the chamber opening; wherein an annular limit platform is formed on the outer wall of the crucible body; a cover body opening is provided on the first end of the cover body, the cover body is sleeved on the outer sides of the crucible body and the crucible cover, the first end of the cover body is sealedly connected to the annular limit platform, and an airtight space is formed between the cover body, the annular limit platform, the outer wall of the crucible body and the crucible cover.

[0006] To solve the above technical problems, another technical solution adopted in the present application is: to provide a silicon carbide powder manufacturing equipment, including a crucible assembly and a heating assembly, wherein the heating assembly is arranged outside the crucible assembly, and the crucible assembly is the above-mentioned crucible assembly.

[0007] Different from the current technology, the crucible assembly provided by the present application comprises a crucible and a cover body, the crucible comprising a crucible body and a crucible cover, the crucible body having a chamber, the top of the crucible body being provided with a chamber opening connected to the chamber, the crucible cover being detachably connected to the top of the crucible body for sealing or opening the chamber opening; wherein, an annular limit platform is formed on the outer wall of the crucible body; a cover opening is formed on the first end of the cover body, the cover body is sleeved on the outside of the crucible body and the crucible cover, the first end of the cover body is sealedly connected to the annular limit platform, and an airtight space is formed between the cover body, the annular limit platform, the outer wall of the crucible body and the crucible cover, thereby improving the airtightness between the cover body and the crucible, effectively preventing the atmosphere in the crucible from leaking, thereby improving the service life of the device and reducing the cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work. Among them:

[0009] Figure 1 is a structural schematic diagram of the first embodiment of the crucible assembly in the present application;

[0010] Figure 2 is a structural schematic diagram of a second embodiment of a crucible assembly in the present application;

[0011] Figure 3 is a top view of a second embodiment of a crucible assembly in the present application;

[0012] Figure 4 is a structural schematic diagram of a third embodiment of a crucible assembly in the present application;

[0013] Figure 5 is a structural schematic diagram of a fourth embodiment of a crucible assembly in the present application;

[0014] Figure 6 It is a structural schematic diagram of an embodiment of a silicon carbide powder manufacturing device in the present application.

[0015] In the accompanying drawings, there are a silicon carbide powder manufacturing device 1, a crucible assembly 10, a crucible 100, a crucible body 110, a chamber 111, a chamber opening 1111, a crucible cover 120, an annular limit platform 130, a first limit ring 131, a second limit ring 132, a cover body 200, a through hole 201, a cover body cover 210, a cover body cover opening 211, a first cover body cover 212, a first cover body cover opening 2121, a second cover body cover 213, a second cover body cover opening 2131, an airtight space 300, a first cavity 400, an insulation layer 500, a second cavity 600, and a heating assembly 20. DETAILED DESCRIPTION

[0016] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. It will be appreciated that the specific embodiments described herein are only used to explain the present application, rather than to limit the present application. It should also be noted that, for ease of description, only some but not all structures related to the present application are shown in the drawings. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the art without making creative work are within the scope of protection of the present application.

[0017] Reference to "embodiments" in an application means that a particular feature, structure, or characteristic described in conjunction with the embodiment may be included in at least one embodiment of the application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0018] The terms "first", "second", etc. in this application are used to distinguish different objects, rather than to describe a specific order. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but optionally includes steps or units that are not listed, or optionally includes other steps or units inherent to these processes, methods, products or devices.

[0019] In addition, although the terms "first", "second", etc. are used many times in this application to describe various data (or various components or various applications or various instructions or various operations), etc., these data (or components or applications or instructions or operations) should not be limited by these terms. These terms are only used to distinguish one data (or component or application or instruction or operation) from another data (or component or application or instruction or operation). For example, the first position information can be called the second position information, and the second position information can also be called the first position information. It is just that the scopes included by the two are different, and it does not deviate from the scope of this application. The first position information and the second position information are both collections of various position and posture information, but the two are not the same collections of position and posture information.

[0020] In current technology, the methods used in crystal growth, especially in the manufacture of silicon carbide powder, are mainly divided into three categories: the first category is the solid phase method, which has a wide source of raw materials, low price, and is easy to industrialize. Among them, the self-propagating method is the main one. In this method, Si powder and C powder are fully mixed, the reaction body is ignited by an external heat source, and then the chemical reaction heat of the substance itself is used to make the subsequent chemical reaction process continue spontaneously. After improvement, the synthesis temperature is increased and the heating is continuously supplied to ensure the continuous synthesis reaction; the second category is the liquid phase method, which has a relatively complicated process and is easy to produce substances harmful to the human body. Among them, the sol-gel method and the polymer thermal decomposition method are the main ones; the third category is the gas phase method, which has high cost and low output, and is not suitable for mass production. Among them, the chemical vapor transport method is the main one; in addition, there is the propagation method, which is widely used in the preparation of high-purity silicon carbide (SiC) powder. Because the temperature of synthesizing silicon carbide (SiC) is generally above 1800℃, part of the silicon carbide (SiC) will exist in the form of atmosphere. At the same time, due to factors such as the volatilization of Si atmosphere, part of the atmosphere will crystallize in the thermal field of powder synthesis, causing the thermal field to be corroded, thereby reducing the service life of the thermal field and increasing costs.

[0021] Therefore, a crucible assembly and a silicon carbide powder manufacturing device are proposed, which can effectively prevent the atmosphere in the crucible body from leaking out, thereby increasing the service life of the device and reducing the cost.

[0022] See also Figure 1 , Figure 1 It is a structural schematic diagram of the first embodiment of the crucible assembly in this application.

[0023] like Figure 1 As shown, the crucible assembly 10 includes: a crucible 100 and a cover body 200; wherein the crucible 100 includes a crucible body 110 and a crucible cover 120, the crucible body 110 has a chamber 111, the top of the crucible body is provided with a chamber opening connected to the chamber 111, the chamber 111 is used to place raw materials and synthetic silicon carbide powder, the crucible cover 120 is detachably connected to the top of the crucible body, and is used to block or open the chamber opening, and an annular limiting platform 130 is formed on the outer wall of the crucible body 110; and a cover opening is provided at the first end of the cover body 200, the cover body 200 is sleeved on the outside of the crucible body 110 and the crucible cover 120, the first end of the cover body is sealed and connected to the annular limiting platform 130, and an airtight space is formed between the cover body 200, the annular limiting platform 130, the outer wall of the crucible body 110 and the crucible cover 120.

[0024] Among them, the crucible 100 and the cover body 200 are both made of purified high-purity graphite; the raw materials are the raw materials required for the manufacture of silicon carbide powder, including silicon (Si) powder and carbon (C) powder, and the amount of silicon (Si) powder and carbon (C) powder placed is the amount that can fully synthesize silicon carbide (SiC) powder, and after placing the silicon (Si) powder and carbon (C) powder, there is still a part of the cavity in the chamber 111.

[0025] In some embodiments, an annular limiting platform may be formed at the bottom, middle or top of the outer wall of the crucible body 110 .

[0026] Take the example of an annular stopper 130 formed epitaxially at the bottom of the outer wall of the crucible body 110 as an example: specifically, a chamber 111 is formed inside the crucible body 110, and a chamber opening connected to the chamber 111 is provided at the top of the crucible body 110, and silicon (Si) powder and carbon (C) powder required for the manufacture of silicon carbide powder are placed at the bottom of the chamber 111; the crucible cover 120 is detachably connected to the top of the crucible body 110, and is used to block or open the chamber opening; the bottom of the outer wall of the crucible body 110 is formed by epitaxy. There is an annular limit platform 130; the first end of the cover body 200 is provided with a cover body opening, and the cover body 200 is sleeved on the outside of the crucible body 110 and the crucible cover 120, and the first end of the cover body is just sealed and connected with the annular limit platform 130, wherein there is a gap between the inner wall of the cover body 200 and the outer wall of the crucible body 110, and there is a gap between the inner wall of the cover body 200 and the crucible cover 120, so that an airtight space is formed between the cover body 200, the annular limit platform 130, the outer wall of the crucible body 110 and the crucible cover 120.

[0027] In some embodiments, the cover body 200 is a concave structure, which is inverted on the crucible 100, and the open end of the cover body opening is sealed with the annular limit platform 130 on the outer wall of the crucible 100, that is, the cover body 200 is inverted on the annular limit platform 130, and the annular limit platform 130 can block the cover body opening; so that the crucible 100 and the cover body 200 form a whole. When hoisting, the bottom of the crucible 100 is used as the force point, and the crucible 100 and the cover body 200 can be hoisted as a whole, which is convenient for placement and hoisting.

[0028] In other embodiments, the cover body 200 is directly formed on the annular limit platform 130 to form an integrated structure, that is, the cover body 200 and the crucible 100 are an integrated structure. During hoisting, different parts of the crucible 100 can be used as force points, which facilitates the placement and hoisting of the whole composed of the cover body 200 and the crucible 100.

[0029] In this embodiment, an annular limit platform 130 is formed on the outer wall of the crucible body 110, and the cover body 200 can be directly sleeved on the outside of the crucible body 110. The first end of the cover body is sealed and connected to the annular limit platform 130, and the crucible cover in the crucible body is detachably connected to the top of the crucible body, which is used to block or open the chamber opening, so that an airtight space is formed between the cover body 200, the annular limit platform 130, the outer wall of the crucible body 110 and the crucible cover 120, thereby improving the airtightness between the cover body 200 and the crucible 100, effectively controlling the leakage of the atmosphere in the crucible 100, and improving the service life of the thermal field; at the same time, the crucible 100 and the cover body 200 form a whole, which is convenient for placement and lifting.

[0030] See also Figure 2 and Figure 3 , Figure 2 is a schematic structural diagram of the second embodiment of the crucible assembly in the present application, Figure 3 It is a top view of the second embodiment of the crucible assembly in the present application.

[0031] like Figure 2 As shown, the crucible assembly 10 includes: a crucible 100 and a cover body 200; wherein the crucible 100 includes a crucible body 110 and a crucible cover 120, the crucible body 110 has a chamber 111, the top of the crucible body 110 is provided with a chamber opening connected to the chamber, the crucible cover 120 is detachably connected to the top of the crucible body 110, and is used to block or open the chamber opening, and an annular limiting platform 130 is formed on the outer wall of the crucible body 110; a cover opening is provided at the first end of the cover body 200, and the cover body 200 is sleeved on the outside of the crucible body 110 and the crucible cover 120, the first end of the cover body is sealed with the annular limiting platform 130, and an airtight space is formed between the cover body 200, the annular limiting platform 130, the outer wall of the crucible body 110 and the crucible cover 120.

[0032] Among them, the top of the crucible body 110 is provided with a chamber opening 1111 connected to the chamber 111, and the crucible cover 120 is detachably connected to the top of the crucible body 110, and is used to seal or open the chamber opening 1111. When sealed, a sealed chamber 111 is formed inside the crucible body 110, and raw materials can be placed at the bottom of the chamber 111, that is, silicon (Si) powder and carbon (C) powder required for the manufacture of silicon carbide powder can be placed, and then silicon carbide powder can be synthesized through the chamber 111.

[0033] In some embodiments, the outer wall of the crucible body 110 is extended toward the outside of the crucible body 110 to form at least two annular limit steps to constitute an annular limit platform 130; wherein, the first end of the cover body 200 is sealedly connected to the annular limit step of the first level away from the chamber 111, that is, the first end of the cover body 200 is sealedly connected to the annular limit step of the first level that is farthest from the chamber 111, so that there is a gap between the cover body 200 and the crucible body 110, forming a corresponding airtight space 300, thereby ensuring the airtightness between the cover body 200 and the crucible body 110.

[0034] Specifically, a two-stage annular limiting step is taken as an example for explanation: that is, a first limiting ring 131 and a second limiting ring 132 are formed on the outer wall of the crucible body 110 toward the outer side of the crucible body 110, wherein the first limiting ring 131 is sleeved on the outer side of the crucible body 110 and is integrally formed with the outer wall of the crucible body 110 to form a first-stage annular limiting step, and the second limiting ring 132 is sleeved on the outer side of the first limiting ring 131 and is integrally formed with the first limiting ring 131, wherein in the axial direction of the crucible body 110 The height of the second limiting ring 132 is smaller than the height of the first limiting ring 131 to form a second-level annular limiting step; that is, the first-level annular limiting step is the annular limiting step closest to the crucible body 110, and the second-level annular limiting step is the annular limiting step farthest from the crucible body 110. The outer wall of the crucible body 110, the first limiting ring 131 and the second limiting ring 132 are integrally formed, which can effectively prevent gas leakage from between the annular limiting step and the crucible body 110, thereby improving the airtightness of the crucible assembly 10.

[0035] The first limiting ring 131 has a top surface and a bottom surface that are disposed opposite to each other in the axial direction of the crucible body 110; in the axial direction of the crucible body 110, the distance H1 between the top surface of the first limiting ring 131 and the crucible cover 120 is smaller than the distance H2 between the bottom surface of the first limiting ring 131 and the crucible cover 120, that is, the top surface of the first limiting ring 131 is closer to the crucible cover 120 than the bottom surface of the first limiting ring 131. The second limiting ring 132 has a top surface and a bottom surface that are disposed opposite to each other in the axial direction of the crucible body 110; in the axial direction of the crucible body 110, the distance H3 between the top surface of the second limiting ring 132 and the crucible cover 120 is smaller than the distance H4 between the bottom surface of the second limiting ring 132 and the crucible cover 120, that is, the top surface of the second limiting ring 132 is closer to the crucible cover 120 than the bottom surface of the second limiting ring 132.

[0036] Among them, in the axial direction of the crucible body 110, the bottom surface of the second limiting ring 132 is flush with the bottom surface of the first limiting ring 131, and the distance H3 between the top surface of the second limiting ring 132 and the crucible cover 120 is greater than the distance H1 between the top surface of the first limiting ring 131 and the crucible cover 120; that is, the top surface of the first limiting ring 131 is closer to the crucible cover 120 than the top surface of the second limiting ring 132; and the first end of the cover body 200 abuts against the top surface of the second limiting ring 132, and abuts against the side wall of the first limiting ring 131 close to the second limiting ring 132; at this time, the cover body 200 is sleeved on the outside of the crucible body 110, and the first end of the cover body 200 is located on the second limiting ring 132, so that the cover body 200 and the crucible 100 form a whole, which can effectively prevent gas leakage from the contact point between the cover body 200 and the crucible body 110, and further improve the airtightness of the crucible assembly.

[0037] In some embodiments, the first limiting ring 131 is sleeved on the outer side of the bottom end of the crucible body 110 away from the crucible cover 120, and the bottom surface of the first limiting ring 131 is flush with the end surface A of the bottom end of the crucible body 110 away from the crucible cover 120, so that the end surface A of the bottom end of the crucible body 110 away from the crucible cover 120 is flush, which facilitates the placement of the crucible body 110.

[0038] In some embodiments, the shape of the cover opening is adapted to the shape of the first limiting ring 131, and the caliber of the cover opening is adapted to the outer diameter of the first limiting ring 131, that is, when the cover is inverted on the crucible body, the cover opening is just in contact with the first limiting ring 131 and sealed; in the radial direction of the crucible body 110, the thickness of the second limiting ring 132 is greater than or equal to the side wall thickness of the cover 200 to ensure the sealing of the contact between the cover 200 and the annular limiting platform 130.

[0039] In other embodiments, the absolute value of the difference between the outer diameter of the second limiting ring 132 and the inner diameter of the second limiting ring is greater than the side wall thickness of the cover body 200 to ensure the sealing of the contact between the cover body 200 and the annular limiting platform 130 .

[0040] In some embodiments, a cover opening is provided at the first end of the cover body 200 close to the annular limit platform 130, and a corresponding groove can be provided on the limit step in contact with the cover opening so that the open end of the cover opening is embedded in the groove, further increasing the airtightness of the airtight space.

[0041] In some embodiments, the cover body 200 is cylindrical, the annular limit platform 130 is annular, and the annular limit platform 130 is arranged corresponding to the cover body 200, wherein there is a gap between the inner wall of the cover body 200 and the outer wall of the crucible body 110, and there is a gap between the inner wall of the cover body 200 and the crucible cover 120, so that an airtight space 300 is formed between the cover body 200, the annular limit platform 130, the outer wall of the crucible body 110 and the crucible cover 120.

[0042] Specifically, the crucible 100 is cylindrical, and the annular limit platform 130 formed by the extension of the outer wall of the crucible body 110 is annular and surrounds the outer wall of the crucible body 110; the cover body 200 is also cylindrical, and in the top view, the diameter of the cover body 200 is larger than the diameter of the crucible body 110; in the horizontal direction, the end surface of the cover body 200 away from the annular limit platform is higher than the end surface of the crucible body 110 away from the annular limit platform 130; therefore, the cover body 200 is arranged corresponding to the annular limit platform 130, and an airtight space 300 is formed between the cover body 200, the annular limit platform 130, the outer wall of the crucible body 110 and the crucible cover 120, that is, the airtight space 300 is a cavity formed by the annular limit platform 130, the cover body 200, the outer wall of the crucible body 110 and the crucible cover 120.

[0043] In some embodiments, the second end of the cover body 200 away from the annular limiting platform 130 is provided with a through hole 201, and the through hole 201 is arranged opposite to the chamber opening 1111. In addition, the cover body 200 also includes a cover cover 210, the cover cover 210 has a first cavity 400, and the first end of the cover cover 210 is provided with a cover cover opening 211 communicating with the first cavity 400, and then connected with the second end of the cover body 200 through the first end of the cover cover 210, the cover cover 210 can block the through hole 201, and the first cavity 400 is communicated with the airtight space 300 through the cover cover opening 211 and the through hole 201, thereby creating a gradient space in the axial direction of the crucible body 110.

[0044] The cover 210 is a cylindrical structure or a bowl-shaped structure, or other structures having a first cavity.

[0045] In some embodiments, the diameter of the through hole 201 is smaller than the chamber opening 1111 , so that the diameter of the corresponding first cavity 400 is smaller than the diameter of the airtight space, thereby forming a gradient space.

[0046] In other embodiments, the central axis of the through hole 201 coincides with or is parallel to the central axis of the chamber opening 1111 , so that the through hole 201 and the chamber opening 1111 correspond to each other in the axial direction.

[0047] In some further embodiments, the caliber of the through hole 201 is smaller than the chamber opening 1111, and the central axis of the through hole 201 coincides with or is parallel to the central axis of the chamber opening 1111; so that the caliber of the corresponding first cavity 400 is smaller than the caliber of the airtight space, thereby forming an axial gradient space.

[0048] The cover body 210 may be made of graphite, and the structure of the cover body 210 may be a cylindrical structure or a bowl-shaped structure.

[0049] Specifically, a through hole 201 is provided on the end face of the second end of the cover body 200 away from the annular limit platform 130, and the through hole 201 is arranged opposite to the chamber opening 1111 of the crucible body 110, and is connected to the second end of the cover body 200 through the first end of the cover body cover 210, so that the cover body cover 210 can block the through hole 201; a first cavity 400 is provided in the cover body cover 210, and a cover body cover opening 211 connected to the first cavity 400 is provided at the first end of the cover body cover 210, and the first cavity 400 is connected to the airtight space 300 through the cover body cover opening 211 and the through hole 201.

[0050] In some embodiments, the diameter of the cover 210 is smaller than the diameter of the cover opening.

[0051] Specifically, the caliber is viewed from a top-down direction, that is, in the top-down direction, the caliber of the cover body cover 210 is smaller than the caliber of the cover body opening, so that the first cavity 400 is located above the airtight space 300. Because the temperature at the position of the cover body cover 210 is relatively low, the cavities at different horizontal plane heights can create a larger axial temperature gradient, which can guide the atmosphere generated and leaked from the crucible 100 during the silicon carbide powder manufacturing process to converge and crystallize in the first cavity 400, and can effectively reduce the outflow of atmosphere from the annular limit platform 130 of the crucible 100.

[0052] In some embodiments, the connection between the first end of the cover cover 210 and the second end of the cover body 200 is a detachable connection, and an airtight material layer is provided at the connection between the first end of the cover cover 210 and the second end of the cover body 200. The airtight material layer may be a graphite glue layer made of graphite powder and alcohol. Therefore, when the leaked atmosphere of the crucible 100 converges and crystallizes at the first cavity 400, causing the cover cover 210 to be severely crystallized and corroded, the cover cover 210 can be directly replaced without replacing other parts, thereby ensuring the continued use of the crucible assembly and effectively reducing costs.

[0053] In some embodiments, a first connection method between the cover and the cover is as follows.

[0054] like Figure 2 As shown, the first end of the cover 210 is connected to the end surface of the second end of the cover 200 and covers the through hole 201 , so that the first cavity 400 of the cover 210 is connected to the airtight space 300 through the cover opening 211 and the through hole 201 .

[0055] Specifically, the connection between the first end of the cover body cover 210 and the second end of the cover body is an airtight detachable connection, such as a threaded connection, wherein the cover body cover 210 may be provided with an external thread and the through hole 201 may be provided with an internal thread, or the cover body cover 210 may be provided with an internal thread and the through hole 201 may be provided with an external thread; in addition, an airtight material layer is provided at the connection between the cover body cover 210 and the through hole 201 to prevent the atmosphere from entering the interior of the thread and corroding the thread structure, and the airtight material layer includes graphite, which may be a modulated graphite glue, such as graphite glue made of graphite powder and alcohol, which fills and seals the connection between the cover body cover 210 and the cover body opening like plasticine.

[0056] In other embodiments, the second connection method between the cover and the cover is as follows.

[0057] See also Figure 4 , Figure 4 It is a structural schematic diagram of another embodiment of the connection between the cover cover and the cover body in the present application.

[0058] like Figure 4 As shown, the first end of the cover 210 is inserted into the through hole 201 and connected to the hole wall of the through hole 201, so that the first cavity 400 of the cover 210 is connected to the airtight space 300 through the cover opening 211 and the through hole 201. At this time, the diameter of the cover opening 211 is smaller than the diameter of the through hole 201.

[0059] It is understandable that the connection between the cover cover 210 and the cover body 200 is to provide a gradient space in the axial direction so that the subsequently generated gas is gathered in the first cavity 400 of the cover cover 210 to prevent the relevant gas from overflowing from the connection between the cover body 200 and the annular limit platform 130.

[0060] In some embodiments, the crucible assembly 10 further includes an insulating layer 500, which surrounds the crucible body 110 and is disposed in the airtight space 300, and the insulating layer 500 contains porous fibers, wherein the insulating layer 500 can be the airtight space 300 of the filling portion, that is, the insulating layer 500 surrounds the outer wall of the crucible body 110 and contacts the outer wall of the crucible body 110, but does not contact the cover body 200; that is, the insulating layer 500 is attached to the outer wall of the crucible body 110, and there is an inner cavity between the insulating layer 500 and the cover body 200, the insulating layer 500 can absorb the atmosphere leaked from the chamber opening 1111 during the high-temperature synthesis process of the crucible body 110, such as part of the gaseous SiC and Si atmosphere, and at the same time, the cover body 200 further blocks the leaked atmosphere in the inner cavity, reduces the leaked atmosphere from entering the thermal field, effectively reduces the corrosion to the thermal field, and thus extends the service life of the device.

[0061] In other embodiments, the insulation layer 500 can fill the airtight space 300, such as filling the inner cavity corresponding to the outer wall of the crucible body 110 and the inner cavity of the surface of the crucible body 110 away from the annular limiting platform 130, and retaining the part of the cavity of the crucible body 110 away from the surface of the annular limiting platform 130, that is, the insulation layer 500 fills the airtight space 300 below the crucible cover 120 and the airtight space 300 above the crucible cover 120, so that the insulation layer 500 absorbs a large amount of leaked atmosphere. , and the remaining leaked atmosphere gathers into the partial cavity on the surface of the crucible body 110 away from the annular limiting platform 130 and the first cavity 400; or the thermal insulation layer 500 can fill the airtight space 300, so that the leaked atmosphere that is not adsorbed by the thermal insulation layer 500 gathers into the first cavity 400; or the thermal insulation layer 500 can fill the airtight space 300 and fill part of the first cavity 400, so that the leaked atmosphere that is not adsorbed by the thermal insulation layer 500 gathers into the remaining part of the first cavity 400.

[0062] In the top-down direction, Figure 3 As shown, the first circle 701 and the second circle 702 correspond to the first limiting ring 131 and the side wall of the cover body 200, the second circle 702 and the third circle 703 correspond to the second step 122 and the insulation layer 500, the third circle 703 and the fourth circle 704 correspond to the side wall of the crucible 100, the fourth circle 704 corresponds to the chamber 111, and the fifth circle 705 and the sixth circle 706 correspond to the cover body cover 210 and the cover body opening.

[0063] In the present embodiment, at least two levels of annular limiting steps are formed on the outer wall of the crucible body extending toward the outside of the crucible body, and the cover body is arranged on the annular limiting step away from the crucible body, so that an airtight space is formed among the cover body, the annular limiting platform, the outer wall of the crucible body and the crucible cover, and an insulation layer surrounding the crucible is arranged in the airtight space, which can effectively improve the insulation effect of the crucible and make the powder in the crucible fully synthesized; in addition, a cover body opening and a corresponding cover body cover are arranged at the position of the cover body corresponding to the chamber opening of the crucible, so as to form a first cavity higher than the airtight space, create a larger axial temperature gradient, and guide the leaked atmosphere of the crucible to converge and crystallize at the first cavity during the manufacturing process of silicon carbide powder, effectively reduce the corrosion of the leaked atmosphere to the thermal field, and extend the service life of the device; and the cover body cover and the cover body opening are detachably connected, and when the crystallization corrosion of the cover body cover is serious, the cover body cover can be directly replaced, which effectively reduces the cost.

[0064] See also Figure 5 , Figure 5 It is a structural schematic diagram of the third embodiment of the crucible assembly in the present application.

[0065] The same parts as the second embodiment are not repeated here. Figure 5As shown, the silicon carbide powder manufacturing device 1 includes: a crucible 100 and a cover body 200; the crucible 100 includes a crucible body 110 and a crucible cover 120, wherein the crucible body 110 has a chamber 111, and the top of the crucible body 110 is provided with a chamber opening 1111 connected to the chamber 111, the chamber 111 is used to place raw materials and synthesize silicon carbide powder, and the crucible cover 120 is detachably connected to the top of the crucible body 110, wherein the outer wall of the crucible body 110 is formed with an annular limit platform 130; the first end of the cover body 200 is provided with a cover body opening, the cover body 200 is sleeved on the outside of the crucible body 110 and the crucible cover 120, the first end of the cover body is sealed with the annular limit platform 130, and an airtight space 300 is formed between the cover body 200, the annular limit platform 130, the outer wall of the crucible body 110 and the crucible cover 120.

[0066] Among them, at least two levels of annular limiting steps are formed at the bottom of the outer wall of the crucible body 110 extending toward the outer side of the crucible body 110 to form an annular limiting platform 130; wherein, the first end of the cover body 200 is sealedly connected to the first-level annular limiting step away from the chamber 111, that is, the first end of the cover body 200 is sealedly connected to the first-level annular limiting step that is the largest away from the chamber 111, so that there is a gap between the cover body 200 and the crucible body 110, forming a corresponding airtight space 300, thereby ensuring the airtightness between the cover body 200 and the crucible body 110.

[0067] Specifically, taking the secondary annular limiting step as an example, the following is explained: that is, a first limiting ring 131 and a second limiting ring 132 are formed at the bottom of the outer wall of the crucible body 110 toward the outer side of the crucible body 110, wherein the first limiting ring 131 is sleeved on the outer side of the crucible body 110 and is integrally formed with the outer wall of the crucible body 110 to form a first-level annular limiting step, and the second limiting ring 132 is sleeved on the outer side of the first limiting ring 131 and is integrally formed with the first limiting ring 131; in the axial direction of the crucible body 110, the bottom surfaces of the first limiting ring 131 and the second limiting ring 132 are flush with the crucible body. The bottom surface of the crucible 110 is flush with the bottom surface of the first limiting ring 131, and the distance between the top surface and the bottom surface is greater than the distance between the top surface and the bottom surface of the second limiting ring 132; and the cover opening of the cover body 200 is sealed with the first limiting ring 131, and the end surface of the cover body 200 away from the annular limiting platform 130 is higher than the end surface of the crucible body 110 away from the annular limiting platform 130, so that the cover body 200 can cover the entire crucible 100 to ensure the uniformity of the temperature field in the chamber 111 area of ​​the crucible 100, which can effectively improve the synthesis efficiency and crystallization degree of the raw materials, and then obtain high-purity and high-crystallinity silicon carbide powder.

[0068] Among them, the cover body 200 is cylindrical, the annular limit platform 130 is annular, and the annular limit platform 130 is arranged corresponding to the cover body 200, so that the cover body 200, the annular limit platform 130, the outer wall of the crucible body 110 and the crucible cover 120 form an airtight space 300, that is, the airtight space 300 surrounds the crucible body 110, that is, the airtight space 300 surrounds the entire crucible 100.

[0069] In some embodiments, the cover body cover 210 can have a multi-layer arrangement, and a two-layer cover body cover is used as an example: the cover body cover 210 includes a first cover body cover 212 and a second cover body cover 213, wherein the end face of the second end of the cover body 200 away from the annular limit platform 130 is provided with a first through hole (through hole), and the first through hole (through hole) is arranged opposite to the chamber opening 1111, and is connected to the second end of the cover body 200 through the first end of the first cover body cover 212, and the first cover body cover 210 can block the first through hole (through hole), and a first cavity 400 is provided in the first cover body cover 212, and a first cover body cover opening 2121 connected to the first cavity 400 is provided at the first end of the first cover body cover 212, and the first cavity 400 is connected to the airtight space 300 through the first cover body cover opening 2121 and the first through hole (through hole), wherein the first end of the first cover body cover 212 and the second end of the cover body are detachably connected to form a corresponding first cavity 400. The end surface of the second end of the first cover body cover 212 away from the annular limiting platform 130 is provided with a second through hole, and the second through hole is arranged opposite to the first through hole, and is connected to the second end of the first cover body cover 212 through the first end of the second cover body cover 213, and the second cover body cover 213 can block the second through hole, and a second cavity 600 is provided in the second cover body cover 213, and a second cover body cover opening 2131 communicating with the second cavity 600 is provided at the first end of the second cover body cover 213, and the second cavity 600 is communicated with the first cavity 400 through the second cover body cover opening 2131 and the second through hole, wherein the second cover body cover 213 The second end of the first cover body cover 212 is detachably connected to form a corresponding second cavity 600; and the detachable connection has an airtight material layer, which can be a graphite glue layer made of graphite powder and alcohol; in the radial direction, the diameter of the second cover body cover 213 is smaller than the diameter of the first cover body cover 212, and a corresponding second cavity 600 is also formed on the first cavity 400, and the first cavity 400 and the second cavity 600 are connected, and the multi-layer chamber in the axial direction can create a larger axial temperature gradient, which can further gather the leaked atmosphere into the second cavity 600.

[0070] Among them, the detachable connection between the cover body cover 210 and the cover body 200 can be: the first end of the first cover body cover 212 is connected to the end face of the second end of the cover body 200 and covers the first through hole, and the first end of the second cover body cover 213 is connected to the end face of the second end of the first cover body cover 212 and covers the second through hole; or the first end of the first cover body cover 212 is inserted into the first through hole at the second end of the cover body 200 and connected to the hole wall of the first through hole, and the first end of the second cover body cover 213 is inserted into the second through hole at the second end of the first cover body cover 212 and connected to the hole wall of the second through hole; so that the second cavity 600 of the second cover body cover 213 is connected to the first cavity through the second cover body cover opening 2131 and the second through hole, and the first cavity 400 is connected to the airtight space 300 through the first cover body cover opening 2121 and the first through hole.

[0071] In some embodiments, the crucible assembly 10 further includes an insulation layer 500 surrounding the crucible body 110, the insulation layer 500 is disposed in the airtight space 300, and the insulation layer 500 includes porous fibers, wherein the insulation layer 500 may fill part of the airtight space 300, that is, the insulation layer 500 surrounds the outside of the crucible body 110 and contacts the outer wall of the crucible body 110, but does not contact the cover body 200; that is, the insulation layer 500 is attached to the outer wall of the crucible body 110, and the insulation layer 500 and the cover body 200 are connected. 0; at this time, the insulation layer 500 wraps the entire crucible body 110, so that the regional temperature field of the chamber 111 in the crucible body 110 is uniform; and, during the high-temperature synthesis process of the crucible 100, the insulation layer 500 can absorb the leaked atmosphere at the chamber opening 1111, such as part of the gaseous SiC and Si atmosphere. At the same time, the cover body 200 further blocks the leaked atmosphere in the inner cavity, reduces the leaked atmosphere from entering the thermal field, effectively reduces the corrosion to the thermal field, and thus extends the service life of the device.

[0072] In other embodiments, the insulation layer 500 can fill the airtight space 300, such as filling the inner cavity corresponding to the outer wall of the crucible body 110 and the partial cavity on the surface of the crucible body 110 away from the annular limit platform 130, and retaining the partial cavity on the surface of the crucible body 110 away from the annular limit platform 130, so that the insulation layer 500 absorbs a large amount of leaked atmosphere, and the remaining leaked atmosphere gathers to the partial cavity on the surface of the crucible body 110 away from the annular limit platform 130 and the first cavity 400; or the insulation layer 500 can fill the airtight space 300, so that the leaked atmosphere that is not absorbed by the insulation layer 500 gathers to the first cavity 400 and the second cavity 600; or the insulation layer 500 can fill the airtight space 300 and fill part of the first cavity 400, so that the leaked atmosphere that is not absorbed by the insulation layer 500 gathers to the remaining part of the first cavity 400 and the second cavity 600.

[0073] In this embodiment, at least two levels of annular limit steps are formed at the bottom of the outer wall of the crucible body toward the outside of the crucible body, and the cover body is arranged on the annular limit step away from the chamber, so that an airtight space is formed between the cover body, the annular limit platform, the outer wall of the crucible body and the crucible cover; the first cover cover is detachably connected to the end face of the second end of the cover body to form a first chamber, and the second cover cover is detachably connected to the end face of the second end of the first cover cover to form a second chamber, that is, in the axial direction, the multiple chambers are connected to create a larger axial temperature gradient, which can guide the leaked atmosphere of the crucible in the process of manufacturing silicon carbide powder to converge and crystallize at the first cavity and the second cavity, effectively reducing the corrosion of the leaked atmosphere to the thermal field and extending the service life of the device; and an insulation layer surrounding the crucible is arranged in the airtight space, and the insulation layer wraps the part above the bottom of the crucible, which can further enhance the insulation effect of the crucible, so that the powder in the crucible can be manufactured more fully.

[0074] See also Figure 6 , Figure 6 It is a structural schematic diagram of an embodiment of a silicon carbide powder manufacturing device in the present application.

[0075] like Figure 6 As shown, the present application also includes a silicon carbide powder manufacturing device 1, including a crucible assembly 10 and a heating assembly 20, the heating assembly 20 is arranged outside the crucible assembly 10, and the crucible assembly is the above-mentioned crucible assembly.

[0076] The heating assembly 20 may be a device for heating the crucible assembly 10 . In order to make the temperature of the chamber 111 inside the crucible assembly 10 uniform, the heating assembly may be disposed around the crucible assembly 10 .

[0077] In some embodiments, the heating assembly 20 includes a heater, which is disposed around the crucible assembly 10 so that the crucible assembly 10 can reach the temperature and pressure required for powder synthesis.

[0078] Specifically, during the growth of silicon carbide powder, 1-15SLM Ar2 gas is introduced for raw material synthesis, wherein SLM represents liters per minute under standard conditions (0°C, 1atm); during the synthesis process, the pressure is controlled at 2-200mbar, where mbar is millibar, a unit of gas pressure. One square centimeter is subjected to 1 kilogram of atmospheric pressure, which is 1 bar, and 1 bar is 1000 millibar; after continuous growth in a high temperature environment of 1200°C-2300°C for 30-72 hours, the raw material synthesized has a purity greater than 6N as tested by glow discharge mass spectrometry (GDMS), and a particle size distribution of 150-1000um, with a yield greater than 90%.

[0079] In the present application, a crucible assembly includes a crucible and a cover body, the crucible includes a crucible body and a crucible cover, the crucible body has a chamber, the top of the crucible body is provided with a chamber opening connected to the chamber, the crucible cover is detachably connected to the top of the crucible body, and is used to block or open the chamber opening, wherein an annular limiting platform is formed on the outer wall of the crucible body; a cover body opening is provided at the first end of the cover body, the cover body is sleeved on the outside of the crucible body and the crucible cover, the first end of the cover body is sealed and connected to the annular limiting platform, and the cover body. An airtight space is formed between the annular limiting platform, the outer wall of the crucible body and the crucible cover, which improves the airtightness between the cover body and the crucible, can effectively control the leakage of the atmosphere in the crucible, and improves the service life of the device; at the same time, the crucible and the cover body form a whole, which is convenient for placement and hoisting.

[0080] In the several embodiments provided in this application, it should be understood that the disclosed device can be implemented in other ways. For example, the device implementation described above is only illustrative, for example, the division of the modules or units is only a logical function division, and there may be other division methods in actual implementation, such as multiple units or components can be combined or integrated into another device, or some features can be ignored or not executed.

[0081] The above description is only an implementation method of the present application, and does not limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the present application specification and drawings, or directly or indirectly used in other related technical fields, are also included in the patent protection scope of the present application.

Claims

1. A crucible assembly, characterized in that: include: A crucible, comprising a crucible body and a crucible cover; the crucible body has a chamber, and the top of the crucible body is provided with a chamber opening communicating with the chamber; the crucible cover is detachably connected to the top of the crucible body, and is used to block or open the chamber opening; wherein the outer wall of the crucible body is formed with an annular limit platform; A cover body, a cover body opening is provided at the first end, the cover body is sleeved on the outside of the crucible body and the crucible cover, the first end of the cover body is sealed and connected to the annular limit platform, and an airtight space is formed between the cover body, the annular limit platform, the outer wall of the crucible body and the crucible cover.

2. The crucible assembly according to claim 1, characterized in that: The outer wall of the crucible body extends toward the outside of the crucible body to form the annular limiting platform; the annular limiting platform has at least two levels of annular limiting steps, wherein the first end of the cover body is sealed and connected to the level of the annular limiting step farthest from the chamber.

3. The crucible assembly according to claim 2, characterized in that: The annular limiting platform comprises: A first limiting ring is sleeved on the outer side of the crucible body and is integrally formed with the outer wall of the crucible body to form a first-level annular limiting step; The second limiting ring is sleeved on the outer side of the first limiting ring and is formed integrally with the first limiting ring, wherein in the axial direction of the crucible body, the height of the second limiting ring is smaller than the height of the first limiting ring to form a second-level annular limiting step.

4. The crucible assembly according to claim 3, characterized in that: The first limiting ring has a top surface and a bottom surface which are arranged opposite to each other in the axial direction of the crucible body; in the axial direction of the crucible body, a distance H1 between the top surface of the first limiting ring and the crucible cover is smaller than a distance H2 between the bottom surface of the first limiting ring and the crucible cover; The second limiting ring has a top surface and a bottom surface which are arranged opposite to each other in the axial direction of the crucible body; in the axial direction of the crucible body, a distance H3 between the top surface of the second limiting ring and the crucible cover is smaller than a distance H4 between the bottom surface of the second limiting ring and the crucible cover; Wherein, in the axial direction of the crucible body, the bottom surface of the second limiting ring is flush with the bottom surface of the first limiting ring, and the distance H3 between the top surface of the second limiting ring and the crucible cover is greater than the distance H1 between the top surface of the first limiting ring and the crucible cover; the first end of the cover body abuts against the top surface of the second limiting ring, and abuts against the side wall of the first limiting ring close to the second limiting ring.

5. The crucible assembly according to claim 4, characterized in that: The shape of the cover opening is adapted to the shape of the first limiting ring, and the diameter of the cover opening is adapted to the outer diameter of the first limiting ring; in the radial direction of the crucible body, the thickness of the second limiting ring is greater than or equal to the side wall thickness of the cover.

6. The crucible assembly according to claim 4, characterized in that: The first limiting ring is sleeved on the outer side of the bottom end of the crucible body away from the crucible cover; the bottom surface of the first limiting ring is flush with the end surface of the bottom end of the crucible body.

7. The crucible assembly according to claim 1, characterized in that: A through hole is provided at the second end of the cover body away from the annular limiting platform, and the through hole is arranged opposite to the chamber opening; The crucible assembly further comprises: The cover body cover has a first cavity, the first end of the cover body cover is provided with a cover body cover opening connected to the first cavity, the first end of the cover body cover is connected to the second end of the cover body, the cover body cover can block the through hole, and the first cavity is connected to the airtight space through the cover body cover opening and the through hole.

8. The crucible assembly according to claim 7, characterized in that: The cover is a cylindrical structure or a bowl-shaped structure; and / or, The diameter of the through hole is smaller than the diameter of the chamber opening; and / or, The central axis of the through hole coincides with or is parallel to the central axis of the chamber opening.

9. The crucible assembly according to claim 7, characterized in that: The first end of the cover is detachably connected to the second end of the cover; An airtight material layer is provided at the connection between the first end of the cover and the second end of the cover.

10. A silicon carbide powder manufacturing device, characterized in that: The invention comprises a crucible assembly and a heating assembly, wherein the heating assembly is arranged outside the crucible assembly, and the crucible assembly is the crucible assembly according to any one of claims 1 to 9.

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