Exposure device
By introducing an adjustable blowing assembly into the exposure device, the pseudo-vacuum and oxygen bubble problems caused by too small mask gap in the traditional exposure device are solved, and the full exposure of the photosensitive layer and the product substrate and mask plate are realized. Smooth separation improves exposure and development effects and production capacity.
Patent Information
- Application Number
- CN202421230882.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-31
- Publication Date
- 2025-01-10
- Estimated Expiration
- 2034-05-31
AI Technical Summary
In traditional proximity exposure devices, the mask gap is too small, resulting in the presence of pseudo-vacuum and tiny oxygen bubbles, which affects the exposure effect and separation of the product substrate from the mask plate, and the protection gas inflow position and angle cannot be adjusted, reducing the inflow. The effect of protecting gas.
An exposure device is designed, including a mask plate, an exposure platform and an adjustable blowing assembly, which is mounted on the mounting assembly, capable of blowing protective gas into the mask gap, and the position and/or angle of the blowing assembly Adjustable to remove oxygen and tiny bubbles, ensuring full exposure of the photosensitive layer and smooth separation of the product substrate from the mask plate.
Through the position and angle adjustment of the blowing components, the exposure and development effects are improved, the plating widening abnormalities during metallization are reduced, production capacity is ensured, and the separation efficiency between the product substrate and the mask plate is enhanced.
Smart Images
Figure CN222337465U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of photovoltaic cell processing, in particular to an exposure device. Background Art
[0002] The exposure device is a mechanism that projects the required pattern onto the photoetching surface of the product substrate through an exposure light source. The exposure device can be used to realize the processing of photovoltaic cells.
[0003] When a conventional proximity exposure device is exposing a product substrate, in order to reduce the influence of the diffraction effect in the exposure process, the mask gap between the mask and the product substrate is generally less than 30μm. However, due to the small mask gap, a false vacuum is easily formed between the mask and the product substrate. After the exposure of the product substrate is completed, it is not convenient to separate the product substrate from the mask, which greatly reduces the production capacity of the product substrate processing. In addition, a certain amount of oxygen and tiny bubbles are likely to exist in the mask gap between the mask and the product substrate. Due to the "oxygen inhibition" effect, it is easy to cause incomplete exposure of the photosensitive coating on the product substrate during exposure, which reduces the effect of exposure and also reduces the effect of developing the photosensitive coating.
[0004] In the related art, the exposure device includes a carrying plate and a wafer stage. The carrying plate is used to carry the mask, and the wafer stage is used to carry the product substrate. A protective gas can flow into the gap between the wafer stage and the carrying plate to promote rapid separation of the mask and the product substrate. However, the position and angle of the inflow of the protective gas cannot be adjusted, and the position and angle of the inflow of the protective gas cannot be adjusted according to specific needs, which greatly reduces the effect of introducing the protective gas. Utility Model Content
[0005] The utility model aims to provide an exposure device to improve the exposure and development effects, so that the product substrate and the mask are separated smoothly, the production capacity is guaranteed, and the blowing effect of the blowing component in the mask gap is also improved.
[0006] To achieve this purpose, the utility model adopts the following technical solutions:
[0007] An exposure device, comprising:
[0008] Mask;
[0009] An exposure platform, the exposure platform is located below the mask plate, the exposure platform is used to support a product substrate, and a mask gap is formed between the product substrate and the mask plate;
[0010] A mounting assembly and a blowing assembly, wherein the blowing assembly is mounted on the mounting assembly, the blowing assembly is configured to blow protective gas into the mask gap, and the blowing position and / or angle of the blowing assembly is adjustable.
[0011] As an optional solution, the installation component includes:
[0012] A mounting frame, in which the mask is mounted; and
[0013] A fixing member, wherein a first end of the fixing member is connected to the blowing assembly, and a second end of the fixing member and an installation position of the installation frame are adjustable along a vertical direction.
[0014] As an optional solution, the mounting assembly also includes a fastener, and an adjustment hole extending along the vertical direction is provided on one of the second end of the fixing member and the mounting frame, and a mounting hole is provided on the other of the two, and the fastener passes through the adjustment hole and is fixedly connected to the mounting hole.
[0015] As an optional solution, the installation component includes:
[0016] A mounting frame, in which the mask is mounted; and
[0017] A fixing member, wherein a first end of the fixing member is rotatably connected to the blowing assembly, and a second end of the fixing member is fixedly connected to the mounting frame.
[0018] As an optional solution, the mounting assembly further includes a connecting bolt, the axis of which extends in a horizontal direction, a first connecting hole is provided at the first end of the fixing piece, a second connecting hole is provided on the blowing assembly, and the connecting bolt passes through the first connecting hole and extends into the second connecting hole; when the connecting bolt is in a loosened state, the blowing assembly can drive the connecting bolt to rotate relative to the fixing piece around the axis of the connecting bolt.
[0019] As an optional solution, the installation assembly includes two fixing members, and the fixing members are arranged on two opposite sides of the blowing assembly.
[0020] As an optional solution, the exposure device includes two blowing assemblies, and the two blowing assemblies are arranged opposite to each other in a horizontal direction.
[0021] As an optional solution, the blowing assembly includes:
[0022] Air inlet connector; and
[0023] A blowing body is installed on the mounting assembly, an air inlet cavity is arranged in the blowing body, the air inlet connector is connected to the blowing body and communicated with the air inlet cavity, and a blowing port communicated with the air inlet cavity is arranged on one side of the blowing body facing the mask gap.
[0024] As an optional solution, the blowing assembly further includes a flow regulating valve, and the flow regulating valve is arranged on the air inlet connector.
[0025] As an optional solution, the blowing body includes:
[0026] An air knife body, wherein the air knife body is mounted on the mounting assembly and the air inlet cavity is provided on the air knife body;
[0027] A wind knife gap sheet, wherein the wind knife gap sheet is fixedly covered on the wind knife body; and
[0028] A wind knife cover plate is fixedly covered on the wind knife gap sheet, and an air port connected to the air inlet cavity is formed between the wind knife cover plate and the wind knife body.
[0029] Beneficial effects of the utility model:
[0030] The utility model provides an exposure device, which includes a mask, an exposure platform, a mounting assembly and a blowing assembly. The exposure platform is located below the mask, the exposure platform is used to support a product substrate, a mask gap is formed between the product substrate and the mask, the blowing assembly is mounted on the mounting assembly, the blowing assembly is used to blow a protective gas into the mask gap, and the blowing position and / or angle of the blowing assembly is adjustable. By setting the blowing assembly to blow the protective gas into the mask gap, the oxygen and tiny bubbles in the mask gap can be driven out, so that the photosensitive layer on the product substrate is fully exposed, the bonding force between the photosensitive layer of the light-receiving part and the product substrate is enhanced, and the abnormal widening of the infiltration plating on both sides of the groove during the metallization process is reduced, and the exposure and development effects are effectively improved. In addition, by blowing the protective gas into the mask gap by the blowing assembly, a false vacuum is avoided between the product substrate and the mask due to the mask gap being too small, so that the product substrate and the mask are separated smoothly, and the production capacity is guaranteed. In addition, since the blowing position and / or angle of the blowing component is adjustable, the blowing position and / or angle can be adjusted according to specific needs, which effectively improves the effect of the blowing component blowing into the mask gap. BRIEF DESCRIPTION OF THE DRAWINGS
[0031] Figure 1 It is a schematic structural diagram of an exposure device provided by an embodiment of the utility model;
[0032] Figure 2 This is a schematic diagram of the partial structure of the exposure device provided by the embodiment of the utility model. Figure 1 ;
[0033] Figure 3 This is a schematic diagram of the partial structure of the exposure device provided by the embodiment of the utility model. Figure 2 ;
[0034] Figure 4 yes Figure 3 A magnified view of the structure at center A;
[0035] Figure 5 It is an exploded view of the blowing assembly provided in the embodiment of the utility model.
[0036] In the figure:
[0037] 1. Mask plate; 2. Exposure platform; 20. Product substrate; 21. Mask gap; 3. Installation assembly; 31. Installation frame; 32. Fixing piece; 321. Adjustment hole; 322. First connecting hole; 4. Blowing assembly; 41. Air inlet connector; 42. Blowing body; 421. Air knife body; 4211. Second connecting hole; 4212. Air inlet cavity; 422. Air knife gap piece; 423. Air knife cover; 424. Blowing port. DETAILED DESCRIPTION
[0038] In order to make the technical problems solved by the present invention, the technical solutions adopted and the technical effects achieved more clearly, the technical solutions of the present invention are further explained below with reference to the accompanying drawings and through specific implementation methods.
[0039] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected", and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0040] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may include that the first and second features are in direct contact, or may include that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, a first feature being "above", "above" and "above" a second feature includes that the first feature is directly above and obliquely above the second feature, or simply indicates that the first feature is higher in level than the second feature. A first feature being "below", "below" and "below" a second feature includes that the first feature is directly below and obliquely below the second feature, or simply indicates that the first feature is lower in level than the second feature.
[0041] In the description of this embodiment, the terms "upper", "lower", "left", "right" and other directions or positional relationships are based on the directions or positional relationships shown in the drawings, and are only for the convenience of description and simplified operation, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as a limitation of the present invention. In addition, the terms "first" and "second" are only used to distinguish in the description and have no special meaning.
[0042] When a traditional proximity exposure device exposes a product substrate, in order to reduce the impact of the diffraction effect in the exposure process, the mask gap between the mask and the product substrate is generally less than 30μm. However, due to the small mask gap, a false vacuum is easily formed between the mask and the product substrate. After the exposure of the product substrate is completed, it is not convenient to separate the product substrate from the mask, which greatly reduces the production capacity of the product substrate processing. In addition, a certain amount of oxygen and tiny bubbles are likely to exist in the mask gap between the mask and the product substrate. Due to the "oxygen inhibition" effect, it is easy to cause incomplete exposure of the photosensitive coating on the product substrate during exposure, which reduces the effect of exposure and also reduces the effect of photosensitive coating development. In the related art, the exposure device includes a carrying plate and a wafer stage. The carrying plate is used to carry the mask, and the wafer stage is used to carry the product substrate. A protective gas can flow into the gap between the wafer stage and the carrying plate to promote rapid separation of the mask and the product substrate. However, the position and angle of the inflow of the protective gas cannot be adjusted, and the position and angle of the inflow of the protective gas cannot be adjusted according to specific needs, which greatly reduces the effect of introducing the protective gas.
[0043] In order to solve the above problems, Figure 1 to Figure 3As shown, this embodiment provides an exposure device, which includes a mask 1, an exposure platform 2, a mounting assembly 3 and a blowing assembly 4, wherein the exposure platform 2 is located below the mask 1, the exposure platform 2 is used to support the product substrate 20, a mask gap 21 is formed between the product substrate 20 and the mask 1, and the blowing assembly 4 is mounted on the mounting assembly 3, and the blowing assembly 4 is used to blow a protective gas into the mask gap 21, and the blowing position and / or angle of the blowing assembly 4 is adjustable. The exposure device provided in this embodiment can drive out oxygen and tiny bubbles in the mask gap 21 by setting the blowing assembly 4 to blow a protective gas into the mask gap 21, so that the photosensitive layer on the product substrate 20 is fully exposed, the bonding force between the photosensitive layer of the light-receiving part and the product substrate 20 is enhanced, and the abnormal widening of the infiltration plating on both sides of the slot during the metallization process is reduced, and the exposure and development effects are effectively improved. In addition, by blowing protective gas into the mask gap 21 through the air blowing component 4, a false vacuum is avoided between the product substrate 20 and the mask plate 1 due to the mask gap 21 being too small, so that the product substrate 20 and the mask plate 1 are separated smoothly, ensuring the production capacity. In addition, since the position and / or angle of the air blowing component 4 is adjustable, the effect of the air blowing component 4 blowing into the mask gap 21 is effectively improved.
[0044] Optionally, in this embodiment, the protective gas blown by the blowing component 4 to the mask gap 21 may be nitrogen, but is not limited thereto, and the protective gas blown by the blowing component 4 to the mask gap 21 may also be other inert gases. It should be noted that, in this embodiment, the mask gap 21 may be less than 30 μm, thereby reducing the influence of the diffraction effect during the exposure process, and further ensuring the quality of the exposure.
[0045] It should be noted that, in the present embodiment, after the product substrate 20 to be exposed is placed on the exposure platform 2, the exposure platform 2 is driven by the lifting drive assembly to drive the exposure platform 2 to rise, so as to lift the product substrate 20 to the exposure position. After the exposure operation of the product substrate 20 is completed, the lifting drive assembly drives the exposure platform 2 to descend, so that the product substrate 20 moves downward away from the mask 1, thereby facilitating the unloading of the product substrate 20 after the exposure is completed. Optionally, in the present embodiment, the lifting drive assembly can be a lifting cylinder, and the output end of the lifting cylinder is transmission-connected to the exposure platform 2.
[0046] Optionally, in this embodiment, if Figure 1 As shown, the exposure device includes two blowing assemblies 4, and the two blowing assemblies 4 are relatively arranged in the horizontal direction (left and right direction in the figure), the two blowing assemblies 4 blow toward each other, and the two blowing assemblies 4 blow protective gas toward the mask gap 21 together, which is more convenient for separating the product substrate 20 from the mask plate 1, and also improves the effect of removing oxygen and tiny bubbles in the mask gap 21.
[0047] Optionally, in this embodiment, if Figure 2 to Figure 4 As shown, the mounting assembly 3 includes a mounting frame 31 and a fixing member 32, wherein the mask 1 is mounted in the mounting frame 31, the first end of the fixing member 32 is connected to the blowing assembly 4, and the mounting position of the second end of the fixing member 32 and the mounting frame 31 is adjustable in the vertical direction (up and down direction in the figure). The above arrangement enables the blowing position of the blowing assembly 4 to be adjusted in the up and down direction. Preferably, in this embodiment, the blowing assembly 4 blows air close to the bottom of the mask 1, thereby preventing the blown gas from impacting the product substrate 20, ensuring the exposure quality of the product substrate 20, and also ensuring the effect of the blowing assembly 4 blowing toward the mask gap 21. Optionally, in this embodiment, the fixing member 32 is an L-shaped plate.
[0048] In this embodiment, if Figure 3 and Figure 4 As shown, the mounting assembly 3 also includes a fastener (not shown in the figure), and an adjustment hole 321 extending in the vertical direction is provided on the second end of the fixing member 32 and the mounting frame 31, and a mounting hole is provided on the other of the two, and the fastener passes through the adjustment hole 321 and is fixedly connected with the mounting hole. When it is necessary to adjust the installation position of the fixing member 32 and the mounting frame 31 in the vertical direction, the fastener is loosened, and then the fixing member 32 drives the blowing assembly 4 to move relative to the fastener in the vertical direction. After adjusting the position of the fixing member 32, the fastener is tightened again to achieve the fixed connection between the fixing member 32 and the mounting frame 31. The above structural design realizes the adjustment of the position of the blowing assembly 4 in the vertical direction, and then realizes the adjustment of the blowing position of the blowing assembly 4 in the vertical direction. Specifically, in this embodiment, the fastener can be a bolt, the second end of the fixing member 32 is provided with an adjustment hole 321, and the mounting frame 31 is provided with a mounting hole. In other embodiments, the second end of the fixing member 32 can also be provided with a mounting hole, and the mounting frame 31 can be provided with an adjustment hole 321.
[0049] Optionally, in this embodiment, the first end of the fixing member 32 is rotatably connected to the blowing assembly 4. The above arrangement enables the blowing angle of the blowing assembly 4 to be adjustable. Preferably, in this embodiment, the blowing assembly 4 can be tilted upward to blow toward the bottom of the mask 1.
[0050] Optionally, in this embodiment, if Figure 3 and Figure 4As shown, the mounting assembly 3 also includes a connecting bolt (not shown in the figure), the axis of the connecting bolt extends in the horizontal direction (front-to-back direction in the figure), the first end of the fixing member 32 is provided with a first connecting hole 322, and the blowing assembly 4 is provided with a second connecting hole 4211, the connecting bolt passes through the first connecting hole 322 and extends into the second connecting hole 4211, when the connecting bolt is in a loose state, the blowing assembly 4 can drive the connecting bolt to rotate relative to the fixing member 32 around the axis of the connecting bolt, thereby adjusting the blowing angle of the blowing assembly 4 in the up-down direction, when the blowing angle is adjusted, the connecting bolt can be tightened, thereby achieving a stable fixation of the fixing member 32 and the blowing assembly 4. The above arrangement not only realizes the rotatable connection between the fixing member 32 and the blowing assembly 4, but also has a simple structure.
[0051] Optionally, in this embodiment, the mounting assembly 3 includes two fixing members 32, and each blowing assembly 4 is provided with fixing members 32 on opposite sides along the front-to-back direction, which effectively improves the stability of the installation of the blowing assembly 4 and ensures the reliability of the position and angle adjustment of the blowing assembly 4.
[0052] In this embodiment, if Figure 3 to Figure 5 As shown, the blowing assembly 4 includes an air inlet connector 41 and a blowing body 42, wherein the blowing body 42 is mounted on the mounting assembly 3, an air inlet cavity 4212 is provided in the blowing body 42, the air inlet connector 41 is connected to the blowing body 42 and communicates with the air inlet cavity 4212, and a blowing port 424 communicated with the air inlet cavity 4212 is provided on the side of the blowing body 42 facing the mask gap 21. When the blowing assembly 4 needs to be blown, the protective gas is passed through the air inlet connector 41, and the protective gas enters the air inlet cavity 4212 and is discharged through the blowing port 424. Optionally, in this embodiment, the blowing port 424 is linear, and the blowing port 424 extends in the front-to-back direction to ensure the blowing effect.
[0053] Optionally, in this embodiment, the blowing assembly 4 further includes a flow regulating valve (not shown in the figure), which is arranged on the air inlet connector 41. By providing the flow regulating valve, it is convenient to adjust the flow of the protective gas blown out of the blowing port 424, and it is also convenient to adjust the blowing pressure, so that the blowing assembly 4 is more intelligent and meets the blowing needs in different situations.
[0054] Specifically, in this embodiment, if Figure 5As shown, the air blowing body 42 includes an air knife body 421, an air knife gap sheet 422 and an air knife cover plate 423, wherein the air knife body 421 is provided with a second connection hole 4211, the air knife body 421 is mounted on the mounting assembly 3, and an air inlet cavity 4212 is provided on the air knife body 421, the air knife gap sheet 422 is fixedly covered on the air knife body 421, the air knife cover plate 423 is fixedly covered on the air knife gap sheet 422, and an air blowing port 424 connected to the air inlet cavity 4212 is formed between the air knife cover plate 423 and the air knife body 421. This embodiment has the advantages of high efficiency, energy saving, safety and reliability by designing the air blowing body 42 into the form of air knife blowing.
[0055] Obviously, the above embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation methods of the present invention. For those skilled in the art, other different forms of changes or modifications can be made based on the above description. It is not necessary and impossible to list all implementation methods here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included in the protection scope of the claims of the present invention.
Claims
1. An exposure device, characterized in that: include: Mask (1); An exposure platform (2), the exposure platform (2) being located below the mask plate (1), the exposure platform (2) being used to support a product substrate (20), a mask gap (21) being formed between the product substrate (20) and the mask plate (1); A mounting assembly (3) and a blowing assembly (4), wherein the blowing assembly (4) is mounted on the mounting assembly (3), the blowing assembly (4) is configured to blow protective gas into the mask gap (21), and the blowing position and / or angle of the blowing assembly (4) is adjustable.
2. The exposure device according to claim 1, characterized in that The installation component (3) comprises: A mounting frame (31), wherein the mask (1) is mounted in the mounting frame (31); and A fixing member (32), wherein a first end of the fixing member (32) is connected to the blowing assembly (4), and a second end of the fixing member (32) and an installation position of the installation frame (31) are adjustable in a vertical direction.
3. The exposure device according to claim 2, characterized in that The mounting assembly (3) further comprises a fastener, an adjustment hole (321) extending along the vertical direction is provided on one of the second end of the fixing member (32) and the mounting frame (31), and a mounting hole is provided on the other of the two, and the fastener passes through the adjustment hole (321) and is fixedly connected to the mounting hole.
4. The exposure device according to claim 1, characterized in that The installation component (3) comprises: A mounting frame (31), wherein the mask (1) is mounted in the mounting frame (31); and A fixing member (32), wherein a first end of the fixing member (32) is rotatably connected to the blowing assembly (4), and a second end of the fixing member (32) is fixedly connected to the mounting frame (31).
5. The exposure device according to claim 4, characterized in that The mounting assembly (3) further comprises a connecting bolt, the axis of which extends in a horizontal direction, a first connecting hole (322) is provided at a first end of the fixing member (32), a second connecting hole (4211) is provided on the blowing assembly (4), and the connecting bolt passes through the first connecting hole (322) and extends into the second connecting hole (4211); When the connecting bolt is in a loosened state, the blowing assembly (4) can drive the connecting bolt to rotate relative to the fixing member (32) around the axis of the connecting bolt.
6. The exposure device according to any one of claims 2 to 5, characterized in that: The mounting assembly (3) comprises two fixing members (32), and the fixing members (32) are arranged on two opposite sides of the blowing assembly (4).
7. The exposure device according to any one of claims 1 to 5, characterized in that: The exposure device comprises two blowing assemblies (4), and the two blowing assemblies (4) are arranged opposite to each other in a horizontal direction.
8. The exposure device according to any one of claims 1 to 5, characterized in that: The blowing assembly (4) comprises: an air inlet connector (41); and A blowing body (42), wherein the blowing body (42) is mounted on the mounting assembly (3), an air inlet cavity (4212) is provided in the blowing body (42), the air inlet connector (41) is connected to the blowing body (42) and communicated with the air inlet cavity (4212), and a blowing port (424) communicated with the air inlet cavity (4212) is provided on a side of the blowing body (42) facing the mask gap (21).
9. The exposure device according to claim 8, characterized in that The air blowing assembly (4) further comprises a flow regulating valve, wherein the flow regulating valve is arranged on the air inlet connector (41).
10. The exposure device according to claim 8, characterized in that The blowing body (42) comprises: A wind knife body (421), wherein the wind knife body (421) is mounted on the mounting assembly (3), and the air inlet cavity (4212) is provided on the wind knife body (421); A wind knife gap sheet (422), wherein the wind knife gap sheet (422) is fixedly covered on the wind knife body (421); and A wind knife cover plate (423), wherein the wind knife cover plate (423) is fixedly covered on the wind knife gap sheet (422), and an air outlet (424) connected to the air inlet cavity (4212) is formed between the wind knife cover plate (423) and the wind knife body (421).