Universal exposure jig

Abstract

The utility model provides a universal exposure jig which comprises a base component and a substrate fixing component, the substrate fixing component is rotatably connected with the base component, a fixing part is arranged in the substrate fixing component, and a substrate to be exposed is fixed in the fixing part. Through rotation of the substrate fixing component relative to the base component, the substrate to be exposed is fixed at different angles in the exposure jig, and then exposure operation in different directions is realized on the substrate, so that grating lines in corresponding directions are obtained on the substrate, and the exposure requirements of different items are met. Compared with the prior art, the design time of the exposure jig is shortened, the manufacturing cost of the exposure jig is reduced, the exposure operation efficiency is improved, the exposure jig cannot be stacked, and an operator is prevented from misusing the exposure jig.

Description

Technical Field

[0001] The utility model belongs to the technical field of exposure, and in particular relates to a universal exposure fixture. Background Art

[0002] The production process of holographic grating is generally as follows:

[0003] 1. Prepare a grating mask on a substrate: spin-coat a layer of photoresist of a certain thickness on the surface of the substrate to obtain a substrate with a photoresist mask; place the substrate with the photoresist mask in a holographic exposure system for exposure, the photoresist mask on the substrate is modulated by the periodic light and dark stripes of the exposure light field, the properties of the photoresist mask change, and thus a photoresist mask with changed properties is obtained on the substrate; develop the photoresist mask with changed properties on the substrate to obtain a grating mask on the substrate.

[0004] 2. Use the grating mask to make a grating on the substrate: Use an ion beam etcher to etch the substrate, copy the morphology distribution of the grating mask to the substrate, and complete the grating production.

[0005] In existing holographic exposure systems, an exposure jig is usually used to place the substrate. In actual work, according to the needs of different projects, the substrate needs to be fixed at different angles in the exposure jig, and then exposure operations in different directions are performed on the substrate, so as to obtain grating lines in corresponding directions on the substrate.

[0006] However, the existing exposure jig cannot fix the substrate at multiple different angles. It is necessary to design a special exposure jig according to the fixing angle of the substrate in the exposure jig required by different projects, which increases the design time of the exposure jig, increases the production cost of the exposure jig, reduces the exposure operation efficiency, and causes the exposure jig to pile up. Utility Model Content

[0007] In order to overcome the defects of the prior art, the utility model provides a universal exposure fixture.

[0008] The utility model is realized by the following technical solutions:

[0009] The utility model provides a universal exposure fixture, comprising a base component and a substrate fixing component;

[0010] The base fixing component is rotatably connected to the base component;

[0011] A fixing portion is provided in the base fixing component;

[0012] The substrate to be exposed is fixed in the fixing portion.

[0013] Furthermore, a first connecting through hole is provided inside the base component, and the first connecting through hole is a circular through hole;

[0014] An annular protrusion is provided on one side where the base fixing component is connected to the base component, and the annular protrusion is provided close to the edge of the base fixing component;

[0015] The outer wall of the annular protrusion is rotatably engaged in the circular through hole.

[0016] Further, it also includes a bearing;

[0017] The bearing is clamped in the circular through hole;

[0018] The annular protrusion is clamped in the bearing.

[0019] Furthermore, a mounting through hole is provided in the base fixing component;

[0020] The substrate to be exposed is clamped in the mounting through hole.

[0021] Furthermore, one end of the mounting through hole close to the surface to be exposed of the substrate to be exposed extends inward to form a first limiting portion, and the first limiting portion contacts and limits the edge position of the surface to be exposed of the substrate to be exposed.

[0022] Furthermore, it also includes a first crimping assembly;

[0023] The first crimping assembly includes a first crimping block, a first threaded rod and a second threaded rod;

[0024] A second connecting through hole and a third connecting through hole are respectively provided at two ends of the first pressing block, and a thread is provided in the second connecting through hole;

[0025] The base fixing component is provided with a fourth connecting through hole at an edge position close to the mounting through hole, and a thread is provided in the fourth connecting through hole;

[0026] The first threaded rod passes through the third connecting hole from the non-exposure surface side of the substrate to be exposed and is threadedly connected to the fourth connecting hole; the rod body of the second threaded rod is threadedly connected to the second connecting hole, and the top of the second threaded rod passes through the second connecting hole and abuts against the edge of the non-exposure surface of the substrate to be exposed.

[0027] Furthermore, it also includes a first crimping assembly;

[0028] The first crimping assembly includes a first pressing block and a first threaded rod;

[0029] A second connecting through hole is provided at one end of the first pressing block, a thread is provided in the second connecting through hole, and a protrusion is provided at the other end of the first pressing block;

[0030] The base fixing component is provided with a fourth connecting through hole at an edge position close to the mounting through hole, and a thread is provided in the fourth connecting through hole;

[0031] The first threaded rod passes through the second connecting hole from the non-exposure surface side of the substrate to be exposed and is threadedly connected to the fourth connecting hole, so that the protrusion of the first pressing block abuts against the edge of the non-exposure surface of the substrate to be exposed.

[0032] Furthermore, the substrate fixing component is provided with scale lines on one side of the non-exposure surface of the substrate to be exposed.

[0033] Furthermore, it also includes a second crimping assembly;

[0034] The second crimping assembly includes a second pressing block, a third threaded rod and a fourth threaded rod;

[0035] A fifth connecting through hole and a sixth connecting through hole are respectively provided at two ends of the second pressing block, and a thread is provided in the sixth connecting through hole;

[0036] The base component is provided with a seventh connecting through hole at an edge position close to the circular through hole, and a thread is provided in the seventh connecting through hole;

[0037] The third threaded rod passes through the fifth connecting through hole from the non-exposure surface side of the substrate to be exposed and is threadedly connected to the seventh connecting through hole;

[0038] The shaft of the fourth threaded rod is threadedly connected to the sixth connecting through hole, and the top of the fourth threaded rod passes through the sixth connecting through hole and abuts against the edge of the base fixing component.

[0039] Furthermore, a pick-up and placement groove is provided at a position of the base fixing component close to the mounting through hole, and the pick-up and placement groove is communicated with the top end of the side wall of the mounting through hole close to the top end of the side wall of the mounting through hole.

[0040] Furthermore, a side of the circular through hole close to the exposure surface of the substrate to be exposed extends inward to form a second limiting portion, and the second limiting portion contacts and limits the outer ring edge of the bearing.

[0041] Furthermore, an eighth connecting through hole is provided on the base component, and a thread is provided in the eighth connecting through hole;

[0042] One side of the eighth connecting through hole is connected to the inner wall of the circular through hole, and the other side of the eighth connecting through hole is connected to the outer wall of the base component.

[0043] Furthermore, it also includes a snap-on assembly;

[0044] The clamping assembly comprises a clamping block and a threaded connector;

[0045] The threaded connector includes a fifth threaded rod and a stopper, and one end of the fifth threaded rod is fixedly connected to the stopper;

[0046] The base fixing component is provided with a ninth connecting through hole, one end of the clamping block is provided with a tenth connecting through hole, and a thread is arranged in the tenth connecting through hole;

[0047] The free end of the fifth threaded rod passes through the ninth connecting hole from the non-exposure side of the substrate to be exposed and is threadedly connected to the tenth connecting hole at one end of the block, and the other end of the block abuts against the inner ring edge of the bearing.

[0048] Compared with the prior art, the technical solution of the utility model has the following beneficial effects:

[0049] The utility model provides a universal exposure jig, comprising a base component and a substrate fixing component, wherein the substrate fixing component is rotatably connected to the base component, a fixing part is arranged inside the substrate fixing component, and a substrate to be exposed is fixed inside the fixing part. By rotating the substrate fixing component relative to the base component, the substrate to be exposed is fixed at different angles in the exposure jig, and then exposure operations in different directions are realized on the substrate, so that grating lines in corresponding directions are obtained on the substrate, meeting the exposure requirements of different projects. Compared with the prior art, the design time of the exposure jig is reduced, the production cost of the exposure jig is reduced, the exposure operation efficiency is improved, the exposure jig will not be piled up, and the operator is prevented from misusing the exposure jig. BRIEF DESCRIPTION OF THE DRAWINGS

[0050] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0051] Figure 1 It is a three-dimensional schematic diagram of a universal exposure fixture according to an example of the present utility model at a first angle;

[0052] Figure 2 It is a three-dimensional schematic diagram of a universal exposure fixture according to an example of the present utility model at a second angle;

[0053] Figure 3 is a schematic structural diagram of an exemplary substrate fixing component at a first angle;

[0054] Figure 4 is a schematic structural diagram of an exemplary substrate fixing component at a second angle;

[0055] Figure 5is a schematic structural diagram of an exemplary base component at a first angle;

[0056] Figure 6 A schematic diagram of the structure of an exemplary base component at a second angle;

[0057] Figure 7 It is a schematic structural diagram of the first pressing block of the first example at a first angle;

[0058] Figure 8 It is a schematic structural diagram of the first pressing block of the first example at a second angle;

[0059] Fig. 9 It is a schematic structural diagram of the first pressing block of the second example at a first angle;

[0060] Fig.10 is a schematic structural diagram of the first pressing block of the second example at a second angle;

[0061] Fig.11 A schematic diagram of the structure of the second pressing block at a first angle;

[0062] Fig.12 A schematic diagram of the structure of the second pressing block at a second angle;

[0063] Fig.13 A schematic diagram of the structure of a bearing as an example;

[0064] Fig.14 A partial cross-sectional view of a connection structure between an exemplary base component, a bearing, and a base fixing component;

[0065] Fig.15 A schematic diagram of the structure of an exemplary card block at a first angle;

[0066] Fig.16 It is a schematic diagram of the structure of an exemplary card block at a second angle.

[0067] Among them, 1-base component, 2-base fixing component, 3-first connecting through hole, 4-annular protrusion, 5-installing through hole, 6-scale line, 7-first limiting part, 8-first pressure block, 9-second connecting through hole, 10-third connecting through hole, 11-fourth connecting through hole, 12-second pressure block, 13-fifth connecting through hole, 14-sixth connecting through hole, 15-seventh connecting through hole, 16-pick-up and release groove, 17-bearing, 18-second limiting part, 19-eighth connecting through hole, 20-block, 21-ninth connecting through hole, 22-tenth connecting through hole. DETAILED DESCRIPTION

[0068] The following will be combined with the embodiments of the utility model to clearly and completely describe the technical solution of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0069] In this article, the terms "first", "second" and other similar words are not intended to imply any order, quantity and importance, but are only used to distinguish different elements. In this article, the terms "one", "an" and other similar words are not intended to indicate that there is only one of the things described, but rather indicate that the relevant description is only for one of the things described, and the things described may have one or more. In this article, the terms "comprise", "include" and other similar words are intended to indicate logical mutual relationships, and cannot be regarded as indicating spatial structural relationships. For example, "A includes B" is intended to indicate that B belongs to A logically, but does not indicate that B is located inside A spatially. In addition, the meanings of the terms "comprise", "include" and other similar words should be regarded as open, rather than closed. For example, "A includes B" is intended to indicate that B belongs to A, but B does not necessarily constitute the whole of A, and A may also include other elements such as C, D, and E.

[0070] In this document, the terms "embodiment", "present embodiment", "preferred embodiment" and "one embodiment" do not mean that the relevant description is only applicable to a specific embodiment, but rather that the description may also be applicable to one or more other embodiments. Those skilled in the art should understand that in this document, any description of a certain embodiment can be replaced, combined, or combined in other ways with the relevant description in one or more other embodiments, and the new embodiment generated by the replacement, combination, or combination in other ways is easily conceivable by those skilled in the art and belongs to the protection scope of the present utility model.

[0071] In the description herein, “plurality” means at least two, for example, two, three, etc., unless otherwise clearly and specifically defined.

[0072] like Figure 1 as well as Figure 2 As shown, the utility model provides a universal exposure fixture, including a base component 1 and a substrate fixing component 2.

[0073] The base fixing member 2 is rotatably connected to the base member 1. For example, a first connecting through hole 3 is provided inside the base member 1, and the first connecting through hole 3 is a circular through hole (such as Figure 5 as well as Figure 6 The end surface of the base fixing part 2 connected to the base part 1 is provided with an annular protrusion 4 (as shown in FIG. Figure 4 As shown in FIG. 1 , preferably, the annular protrusion is arranged around the edge of the substrate fixing component. The outer wall of the annular protrusion 4 can be rotatably engaged in the circular through hole. The engagement here can be understood as an interference fit connection, that is, the outer wall of the annular protrusion is connected to the inner wall of the circular through hole by an interference fit.

[0074] There is no specific requirement for the location of the first connecting through hole (i.e., the circular through hole) in the base component, and there is no specific requirement for the diameter of the circular through hole. Those skilled in the art can make corresponding settings based on factors such as the shape and size of the base component and the substrate to be exposed.

[0075] A fixing part is provided in the substrate fixing component, and the substrate to be exposed is fixed in the fixing part. Figure 3 as well as Figure 4 As shown, a mounting through hole 5 is provided in the substrate fixing component 2, and the substrate to be exposed is clamped in the mounting through hole 5. The substrate to be exposed here can be made of glass or other materials.

[0076] There is no specific requirement for the location of the above-mentioned mounting through hole in the substrate fixing component, and there is no specific requirement for the shape and diameter of the mounting through hole. Those skilled in the art can make corresponding settings based on factors such as the shape and size of the substrate fixing component and the substrate to be exposed. For example, Figure 3 as well as Figure 4 The mounting through hole 5 is shown as a rectangular mounting through hole.

[0077] By rotating and clamping the substrate fixing component relative to the base component, the substrate to be exposed on the substrate fixing component is driven to rotate, so that the substrate to be exposed can be fixed at different angles in the exposure jig, and then exposure operations in different directions can be performed on the substrate, so that grating lines in corresponding directions can be obtained on the substrate to meet the exposure requirements of different projects. Compared with the existing technology, the design time of the exposure jig is reduced, the production cost of the exposure jig is reduced, the exposure operation efficiency is improved, the exposure jig will not be piled up, and the operator is prevented from misusing the exposure jig.

[0078] And further preferably, the substrate fixing component 2 is provided with a scale line 6 (such as Figure 3 As shown in FIG. 1 , the substrate fixing member is connected to the base member to rotate the substrate to be exposed on the substrate fixing member, and the required fixed angle of the substrate to be exposed in the exposure jig can be quickly determined. In order to improve the accuracy of the fixed angle of the substrate to be exposed in the exposure jig, the engraved line accuracy of the scale line can be controlled within 0.5°-1°.

[0079] In order to increase the fixing stability of the substrate to be exposed on the substrate fixing component, as a preferred embodiment, a first limiting portion 7 (such as Figure 3 As shown in the figure), the first limiting portion contacts and limits the edge position of the surface to be exposed of the substrate to be exposed. Taking the rectangular mounting through hole as an example, at least one side of the mounting through hole close to the end of the surface to be exposed of the substrate to be exposed can extend inward to form a first limiting portion for contacting and limiting the edge position of the surface to be exposed of the substrate to be exposed.

[0080] In order to further increase the fixing stability of the substrate to be exposed on the substrate fixing component, the universal exposure fixture of the utility model may further include a first crimping assembly.

[0081] Exemplarily, the first crimping assembly can adopt the following two structures:

[0082] Scenario 1:

[0083] The first crimping assembly includes a first pressing block 8 (such as Figure 7 as well as Figure 8 shown), a first threaded rod and a second threaded rod (not shown in the figure).

[0084] The two ends of the first pressing block 8 are respectively provided with a second connecting through hole 9 and a third connecting through hole 10 (such as Figure 7 as well as Figure 8 As shown), a thread is arranged in the second connecting through hole 9.

[0085] The fourth connecting through hole 11 (such as Figure 3 as well as Figure 4 As shown), a thread is arranged in the fourth connecting through hole 11.

[0086] The first threaded rod passes through the third connecting hole 10 from the non-exposure surface side of the substrate to be exposed and is threadedly connected to the fourth connecting hole 11. The rod body of the second threaded rod is threadedly connected to the second connecting hole 9, and the top of the second threaded rod passes through the second connecting hole 9 and abuts against the edge of the non-exposure surface of the substrate to be exposed.

[0087] Scenario 2:

[0088] The first crimping assembly includes a first pressing block 8 (such as Fig. 9 as well as Fig.10 shown), a first threaded rod (not shown in the figure).

[0089] A second connecting through hole 9 is disposed at one end of the first pressing block 8 , a thread is disposed in the second connecting through hole 9 , and a protrusion is disposed at the other end of the first pressing block 8 .

[0090] The fourth connecting through hole 11 (such as Figure 3 as well as Figure 4 As shown), a thread is arranged in the fourth connecting through hole 11.

[0091] The first threaded rod passes through the second connecting hole 9 and is threadedly connected to the fourth connecting hole 11 from the non-exposure surface side of the substrate to be exposed, so that the protrusion of the first pressing block 8 abuts against the edge of the non-exposure surface of the substrate to be exposed.

[0092] The clamping stability of the substrate to be exposed on the substrate fixing component can be greatly improved by means of the first press assembly and the first limiting portion.

[0093] It should be noted that the fourth connecting through hole provided on the substrate fixing component is not limited to one, and those skilled in the art can provide multiple fourth connecting through holes at intervals at the edge of the substrate fixing component close to the mounting through hole according to actual needs. Correspondingly, the first crimping assembly is not limited to one, and when there are multiple fourth connecting through holes, multiple first crimping assemblies can also be used.

[0094] By rotating and clamping the substrate fixing component relative to the base component, the substrate to be exposed on the substrate fixing component is driven to rotate, so that the substrate to be exposed in the exposure jig is located at a required fixed angle. In order to further prevent the substrate fixing component from rotating relative to the base component again, thereby causing the required fixed angle of the substrate to be exposed in the exposure jig to shift, the universal exposure jig of the utility model can also include a second crimping assembly.

[0095] The second crimping assembly includes a second pressing block 12 (such as Fig.11 as well as Fig.12 shown), a third threaded rod and a fourth threaded rod (not shown in the figure).

[0096] The second pressing block 12 has a fifth connecting through hole 13 and a sixth connecting through hole 14 at both ends thereof. Fig.11 as well as Fig.12 As shown), a thread is arranged in the sixth connecting through hole 14.

[0097] The seventh connecting through hole 15 (such as Figure 5 as well as Figure 6 As shown), a thread is arranged in the seventh connecting through hole 15.

[0098] The third threaded rod passes through the fifth connecting through hole 13 from the non-exposure surface side of the substrate to be exposed and is threadedly connected to the seventh connecting through hole 15 .

[0099] The shaft of the fourth threaded rod is threadedly connected to the sixth connecting through hole 14 , and the top of the fourth threaded rod passes through the sixth connecting through hole 14 and abuts against the edge of the base fixing component 2 .

[0100] After the substrate to be exposed on the substrate fixing component is driven to rotate by rotating the substrate fixing component relative to the base component, so that the substrate to be exposed in the exposure jig is located at a desired fixed angle, the second crimping assembly is used to abut the edge of the substrate fixing component from the non-exposure surface side of the substrate to be exposed to prevent the substrate fixing component from rotating relative to the base component again, thereby preventing the desired fixed angle of the substrate to be exposed in the exposure jig from deviating.

[0101] At the same time, in order to facilitate the removal of the substrate to be exposed from the substrate fixing component, a removal groove 16 (such as Figure 3 The top of the side wall of the mounting through hole near the pick-and-place groove is connected to the top of the side wall of the mounting through hole. The number of the pick-and-place grooves is not limited to one, and multiple pick-and-place grooves can be arranged at intervals at the position of the substrate fixing component near the above-mentioned mounting through hole.

[0102] As a preferred embodiment, in order to increase the smoothness of the rotational connection between the substrate fixing component and the base component, the universal exposure fixture of the utility model may further include a bearing 17 (such as Fig.13 shown).

[0103] The bearing is clamped in the circular through hole in the base component.

[0104] For example, the circular through hole of the base member 1 extends inwardly from one side close to the exposure surface of the substrate to be exposed to form a second limiting portion 18 (eg, Fig.14 As shown in FIG. 1 , the second limiting portion 18 contacts and limits the outer ring edge of the bearing 17. The second limiting portion for contacting and limiting the outer ring edge of the bearing can be formed by extending the partial edge of the circular through hole close to the exposure surface of the substrate to be exposed inward. The second limiting portion for contacting and limiting the outer ring edge of the bearing can also be formed by extending the entire edge of the circular through hole close to the exposure surface of the substrate to be exposed inward.

[0105] At the same time, an eighth connecting through hole 19 (such as Figure 5 as well as Fig.14 As shown in the figure, a thread is arranged in the eighth connecting through hole 19. One side of the eighth connecting through hole is connected to the inner side wall of the circular through hole, and the other side of the eighth connecting through hole is connected to the outer side wall of the base component. After placing the bearing in the circular through hole of the above-mentioned base component, the end of a connecting piece such as a screw is passed through the eighth connecting through hole from one end of the outer side wall of the base component and is threadedly connected with the thread in the eighth connecting through hole until the end of the connecting piece such as the screw passes through the inner side wall of the circular through hole and abuts against the side wall of the bearing.

[0106] The annular protrusion on the substrate fixing component is clamped in the bearing. For example, the outer wall of the annular protrusion 4 of the substrate fixing component 2 is clamped with the inner ring wall of the bearing 17 (such as Fig.14 shown).

[0107] At the same time, in order to further increase the connection stability of the substrate fixing component on the bearing, the universal exposure fixture of the present invention may also include a clamping assembly.

[0108] Exemplarily, the clamping assembly includes a clamping block 20 (such as Fig.15 as well as Fig.16 shown), threaded connections.

[0109] The threaded connector includes a fifth threaded rod and a stopper, and one end of the fifth threaded rod is fixedly connected to the stopper (not shown in the figure).

[0110] The base fixing member 2 defines a ninth connecting through hole 21 (eg Figure 3 As shown), a tenth connecting through hole 22 is formed at one end of the block 20 (as shown Fig.15 as well as Fig.16 As shown), a thread is provided in the tenth connecting through hole 22.

[0111] The free end of the fifth threaded rod (i.e., the end of the fifth threaded rod without a stopper) passes through the ninth connecting hole from the non-exposure side of the substrate to be exposed and is threadedly connected to the tenth connecting hole at one end of the block, and the other end of the block abuts against the inner ring edge of the bearing.

[0112] The above-mentioned bearings can be existing bearings.

[0113] The threaded connector can be made of existing parts, such as a jackscrew.

[0114] By arranging a bearing between the base component and the substrate fixing component as a rotational connection auxiliary part, not only can the rotational smoothness of the substrate fixing component relative to the base component be increased, but also, since the balls in the bearing are in point contact with the bearing wall, it is effectively prevented that external vibration sources are transmitted to the substrate to be exposed on the substrate fixing component.

[0115] The above embodiments are only used to illustrate the technical solutions of the present invention rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, ordinary technicians in the relevant field can still modify or replace the specific implementation methods of the present invention. Any modifications or equivalent replacements that do not depart from the spirit and scope of the present invention are within the scope of protection of the claims of the present invention to be approved.

Claims

1. A universal exposure fixture, characterized in that: It includes a base component and a base fixing component; The base fixing component is rotatably connected to the base component; A fixing portion is provided in the base fixing component; The substrate to be exposed is fixed in the fixing portion.

2. The universal exposure jig according to claim 1, characterized in that: A first connecting through hole is provided inside the base component, and the first connecting through hole is a circular through hole; An annular protrusion is provided on one side where the base fixing component is connected to the base component, and the annular protrusion is provided close to the edge of the base fixing component; The outer wall of the annular protrusion is rotatably engaged in the circular through hole.

3. The universal exposure jig according to claim 2, characterized in that: Also includes bearings; The bearing is clamped in the circular through hole; The annular protrusion is clamped in the bearing.

4. The universal exposure jig according to claim 1, characterized in that: A mounting through hole is provided in the base fixing component; The substrate to be exposed is clamped in the mounting through hole.

5. The universal exposure jig according to claim 4, characterized in that: One end of the mounting through hole close to the exposure surface of the substrate to be exposed extends inward to form a first limiting portion, and the first limiting portion contacts and limits the edge position of the exposure surface of the substrate to be exposed.

6. The universal exposure jig according to claim 4, characterized in that: Also included is a first crimping assembly; The first crimping assembly includes a first crimping block, a first threaded rod and a second threaded rod; A second connecting through hole and a third connecting through hole are respectively provided at two ends of the first pressing block, and a thread is provided in the second connecting through hole; The base fixing component is provided with a fourth connecting through hole at an edge position close to the mounting through hole, and a thread is provided in the fourth connecting through hole; The first threaded rod passes through the third connecting hole from the non-exposure surface side of the substrate to be exposed and is threadedly connected to the fourth connecting hole; the rod body of the second threaded rod is threadedly connected to the second connecting hole, and the top of the second threaded rod passes through the second connecting hole and abuts against the edge of the non-exposure surface of the substrate to be exposed.

7. The universal exposure jig according to claim 4, characterized in that: Also included is a first crimping assembly; The first crimping assembly includes a first pressing block and a first threaded rod; A second connecting through hole is provided at one end of the first pressing block, a thread is provided in the second connecting through hole, and a protrusion is provided at the other end of the first pressing block; The base fixing component is provided with a fourth connecting through hole at an edge position close to the mounting through hole, and a thread is provided in the fourth connecting through hole; The first threaded rod passes through the second connecting hole from the non-exposure surface side of the substrate to be exposed and is threadedly connected to the fourth connecting hole, so that the protrusion of the first pressing block abuts against the edge of the non-exposure surface of the substrate to be exposed.

8. The universal exposure jig according to claim 1, characterized in that: The substrate fixing component is located on a side of the non-exposure surface of the substrate to be exposed and a scale line is arranged thereon.

9. The universal exposure jig according to claim 2, characterized in that: Also included is a second crimping assembly; The second crimping assembly includes a second pressing block, a third threaded rod and a fourth threaded rod; A fifth connecting through hole and a sixth connecting through hole are respectively provided at two ends of the second pressing block, and a thread is provided in the sixth connecting through hole; The base component is provided with a seventh connecting through hole at an edge position close to the circular through hole, and a thread is provided in the seventh connecting through hole; The third threaded rod passes through the fifth connecting through hole from the non-exposure surface side of the substrate to be exposed and is threadedly connected to the seventh connecting through hole; The shaft of the fourth threaded rod is threadedly connected to the sixth connecting through hole, and the top of the fourth threaded rod passes through the sixth connecting through hole and abuts against the edge of the base fixing component.

10. The universal exposure jig according to claim 4, characterized in that: The base fixing component is provided with a pick-up and placement groove at a position close to the mounting through hole, and the pick-up and placement groove is communicated with the top end of the side wall of the mounting through hole at a position close to the side wall of the mounting through hole.

11. The universal exposure jig according to claim 3, characterized in that: A side of the circular through hole close to the exposure surface of the substrate to be exposed extends inward to form a second limiting portion, and the second limiting portion contacts and limits the outer ring edge of the bearing.

12. The universal exposure jig according to claim 3, characterized in that: An eighth connecting through hole is provided on the base component, and a thread is provided in the eighth connecting through hole; One side of the eighth connecting through hole is connected to the inner wall of the circular through hole, and the other side of the eighth connecting through hole is connected to the outer wall of the base component.

13. The universal exposure jig according to claim 3, characterized in that: Also included is a snap-on assembly; The clamping assembly comprises a clamping block and a threaded connector; The threaded connector includes a fifth threaded rod and a stopper, and one end of the fifth threaded rod is fixedly connected to the stopper; The base fixing component is provided with a ninth connecting through hole, one end of the clamping block is provided with a tenth connecting through hole, and a thread is arranged in the tenth connecting through hole; The free end of the fifth threaded rod passes through the ninth connecting hole from the non-exposure side of the substrate to be exposed and is threadedly connected to the tenth connecting hole at one end of the block, and the other end of the block abuts against the inner ring edge of the bearing.

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