Gas mixing chamber with high mixing property

Abstract

The utility model relates to a gas mixing chamber with high mixing property, which comprises a first chamber and tail gas pipes, a cylindrical inner cavity is formed in the first chamber, the side surface of the first chamber is fixedly connected and communicated with a plurality of tail gas pipes, the tail gas pipes are circumferentially and uniformly distributed around the first chamber, and outlets of the tail gas pipes do not face the axis of the first chamber. Tail gas forms cyclone, mixing of the tail gas, fuel gas and combustion-supporting gas is accelerated, the mixing effect is improved, the combustion efficiency of the next step is further improved, and the problem that the mixing effect of the tail gas, the fuel gas and the combustion-supporting gas is poor is solved. The tail gas pipe inclines downwards, formed cyclone moves downwards, tail gas is prevented from being accumulated in the first chamber, follow-up airflow of the tail gas pipe can smoothly enter the first chamber, and the problem that follow-up tail gas entering the gas mixing chamber is blocked is solved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor tail gas treatment, in particular to a high-mixability gas mixing chamber. Background Art

[0002] In semiconductor exhaust gas treatment equipment, the exhaust gas must first pass through a gas mixing chamber and then enter a reaction chamber for combustion, thereby eliminating harmful gases in the exhaust gas.

[0003] The tail gas pipe of the prior art is located in the radial direction of the mixing chamber, and the direction of the tail gas ejected from the tail gas pipe is toward the axis of the mixing chamber. Since the tail gas flows are all toward the same axis, multiple tail gas streams collide at the axis, which is not conducive to the subsequent tail gas entering the mixing chamber through the tail gas pipe, and the mixing effect of the tail gas, fuel gas and combustion-supporting gas is not ideal. Utility Model Content

[0004] The utility model aims to solve the above problems and provides a high-mixability mixing chamber, which solves the problem of subsequent tail gas being blocked from entering the mixing chamber and solves the problem of poor mixing effect of tail gas, fuel gas and combustion-supporting gas.

[0005] A high-mixability mixing chamber includes: a first chamber and an exhaust pipe, wherein a cylindrical inner cavity is formed inside the first chamber, and the side of the first chamber is fixedly connected and communicated with multiple exhaust pipes, the exhaust pipes are evenly arranged around the first chamber, and the outlet of the exhaust pipe does not face the axis of the first chamber.

[0006] Based on the above technical solution, the number of the exhaust pipes is at least three, and the air outlet of the front exhaust pipe faces the air outlet of the adjacent rear exhaust pipe.

[0007] Based on the above technical solution, the number of the exhaust pipes is four.

[0008] On the basis of the above technical solution, a through hole is formed at the upper end of the first chamber, and the through hole is connected to a pipeline for conveying fuel gas and combustion-supporting gas.

[0009] Based on the above technical solution, it also includes a second chamber, which is located at the lower end of the first chamber and fixedly connected to the first chamber, and the inner diameter of the second chamber is greater than the inner diameter of the first chamber.

[0010] Based on the above technical solution, the tail gas pipe includes a straight pipe and a bent pipe, one end of the straight pipe is fixedly connected to the first chamber, and the other end is integrally formed with the bent pipe.

[0011] Based on the above technical solution, the lower end of the curved pipe is inclined downward.

[0012] Based on the above technical solution, the angle between the axis of the curved pipe and the horizontal plane is 5° to 15°.

[0013] Based on the above technical solution, the angle between the axis of the curved pipe and the horizontal plane is 9°.

[0014] The utility model has the following advantages: the tail gas forms a cyclone, which accelerates the mixing of the tail gas with the fuel gas and the combustion-supporting gas, improves the mixing effect, further improves the efficiency of the next combustion, and solves the problem of poor mixing effect of the tail gas, the fuel gas and the combustion-supporting gas; the tail gas pipe is tilted downward, and the formed cyclone moves downward, avoiding the accumulation of tail gas inside the first chamber, so that the subsequent airflow of the tail gas pipe can smoothly enter the first chamber, solving the problem of subsequent tail gas being blocked from entering the mixing chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the prior art descriptions are briefly introduced below. Obviously, the drawings described below are only one embodiment of the utility model. For ordinary technicians in this field, other implementation drawings can be derived from the provided drawings without creative work.

[0016] Figure 1 : A schematic diagram of the three-dimensional structure of the utility model;

[0017] Figure 2 : The main structural diagram of the utility model is one;

[0018] Figure 3 : Figure 2 Schematic diagram of the cross-sectional structure at AA in the middle;

[0019] Figure 4 : The main structure schematic diagram of the utility model is the second. DETAILED DESCRIPTION

[0020] The utility model is further described below with reference to the accompanying drawings and examples:

[0021] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0022] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be directly connected or indirectly connected through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0023] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0024] like Figures 1 to 4 As shown, this embodiment provides a high-mixability mixing chamber, including: a first chamber 1 and an exhaust pipe 2, wherein a cylindrical inner cavity is formed inside the first chamber 1, and the side of the first chamber 1 is fixedly connected and communicated with multiple exhaust pipes 2, and the exhaust pipes 2 are evenly arranged around the first chamber 1 in a circle, and the exhaust port 10 of the exhaust pipe 2 is not facing the axis of the first chamber 1.

[0025] Based on the above technical solution, the number of the exhaust pipes 2 is at least three, and the outlet 10 of the front exhaust pipe 2 faces the outlet 10 of the adjacent rear exhaust pipe 2. The front exhaust will give the rear exhaust a tangential speed, further increasing the tendency of the exhaust to form a cyclone. The front and rear are front and rear along the clockwise or counterclockwise direction.

[0026] Based on the above technical solution, the number of the exhaust pipes 2 is four.

[0027] On the basis of the above technical solution, a through hole 11 is formed at the upper end of the first chamber 1, and the through hole 11 is connected to a pipeline for conveying fuel gas and combustion-supporting gas.

[0028] On the basis of the above technical solution, it further includes a second chamber 3 , which is located at the lower end of the first chamber 1 and fixedly connected to the first chamber 1 , and the inner diameter of the second chamber 3 is greater than the inner diameter of the first chamber 1 .

[0029] Based on the above technical solution, the exhaust pipe 2 includes a straight pipe 21 and a curved pipe 22 . One end of the straight pipe 21 is fixedly connected to the first chamber 1 , and the other end is integrally formed with the curved pipe 22 .

[0030] Based on the above technical solution, the lower end of the curved pipe 22 is inclined downward. Figure 4 As shown, the downward tilt gives the exhaust gas a downward velocity, allowing the exhaust gas to smoothly enter the combustion chamber below the mixing chamber for combustion.

[0031] Based on the above technical solution, the angle between the axis of the curved pipe 22 and the horizontal plane is 5° to 15°.

[0032] Based on the above technical solution, the angle between the axis of the curved pipe 22 and the horizontal plane is 9°.

[0033] During operation, the tail gas has a tangential velocity, and the airflows ejected from the multiple elbows 22 together form a rotating cyclone. The fuel gas and the combustion-supporting gas move from top to bottom and enter the first chamber 1. The fuel gas and the combustion-supporting gas are mixed with each other under the action of the rotating tail gas, and the mixing speed is greater than that of the prior art.

[0034] The present invention is described above by way of examples, but the present invention is not limited to the above specific embodiments, and any changes or modifications based on the present invention belong to the scope of protection required by the present invention.

Claims

1. A high-mixability gas mixing chamber, characterized in that: include: A first chamber (1) and an exhaust pipe (2), wherein a cylindrical inner cavity is formed inside the first chamber (1), the side surface of the first chamber (1) is fixedly connected to and communicates with a plurality of exhaust pipes (2), the exhaust pipes (2) are evenly arranged in a circle around the first chamber (1), and the exhaust outlet (10) of the exhaust pipe (2) does not face the axis of the first chamber (1).

2. A high-mixability gas mixing chamber according to claim 1, characterized in that: The number of the exhaust pipes (2) is at least three, and the air outlet (10) of a front exhaust pipe (2) faces the air outlet (10) of an adjacent rear exhaust pipe (2).

3. A high-mixability gas mixing chamber according to claim 2, characterized in that: The number of the exhaust pipes (2) is four.

4. A high-mixability gas mixing chamber according to claim 1, characterized in that: A through hole (11) is formed at the upper end of the first chamber (1), and the through hole (11) is connected to a pipeline for conveying fuel gas and combustion-supporting gas.

5. A high-mixability gas mixing chamber according to claim 1, characterized in that: It also comprises a second chamber (3), which is located at the lower end of the first chamber (1) and is fixedly connected to the first chamber (1), and the inner diameter of the second chamber (3) is greater than the inner diameter of the first chamber (1).

6. A high-mixability gas mixing chamber according to claim 1, characterized in that: The tail gas pipe (2) comprises a straight pipe (21) and a curved pipe (22); one end of the straight pipe (21) is fixedly connected to the first chamber (1), and the other end is integrally formed with the curved pipe (22).

7. A high-mixability gas mixing chamber according to claim 6, characterized in that: The lower end of the curved pipe (22) is inclined downward.

8. A high-mixability gas mixing chamber according to claim 7, characterized in that: The angle between the axis of the curved pipe (22) and the horizontal plane is 5° to 15°.

9. A high-mixability gas mixing chamber according to claim 8, characterized in that: The angle between the axis of the curved pipe (22) and the horizontal plane is 9°.

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