Protection structure for turbo molecular pump

Abstract

The utility model relates to a protection structure for a turbo molecular pump. The protection structure for the turbo molecular pump comprises a pump body, a fixing assembly, a first adjusting assembly, a first clamping assembly, a lifting assembly, a second adjusting assembly and a second clamping assembly. A fixing assembly is arranged on the bottom face of the pump body, a first adjusting assembly is arranged on one side of the fixing assembly, two first clamping assemblies are arranged on one side of the first adjusting assembly, a lifting assembly is further arranged on one side of the fixing assembly, and a second adjusting assembly is arranged on one side of the lifting assembly. Two second clamping assemblies are arranged on one side of the second adjusting assembly. Compared with a traditional protection structure for the turbo molecular pump, fixing protection operation is conducted according to the actual size of the turbo molecular pump by adjusting the structure fixing radius, the application range of the protection structure is widened, and the practical value of the protection structure is enhanced.

Description

Technical Field

[0001] The utility model relates to the technical field of protection structures for turbomolecular pumps, in particular to a protection structure for turbomolecular pumps. Background Art

[0002] A turbomolecular pump is a high vacuum pump that uses a rotating impeller to suck in and accelerate gas molecules from the inlet, and then discharge them out of the pump body to achieve the purpose of vacuuming. Turbomolecular pumps are usually used in laboratories and semiconductor manufacturing fields that require a high vacuum environment. Their advantages include fast pumping speed, wide vacuum range, stable operation, etc. Turbomolecular pumps usually need to be used in combination with other types of vacuum pumps, such as rotary vane pumps, adsorption pumps, etc. to achieve a higher vacuum degree. When in use, the pump body will produce vibration displacement, and the position of the pump body needs to be fixed by a protective structure to ensure the stable operation of the pump body. However, the problem with the existing technology is that most protective structures used for turbomolecular pumps are often difficult to meet the protection requirements of turbomolecular pumps of different sizes, resulting in a relatively limited scope of application. Utility Model Content

[0003] In order to overcome the problem that most protection structures for turbomolecular pumps have a fixed size, they can often only protect turbomolecular pumps of the same size, resulting in a small scope of application and affecting the flexibility of the protection structure.

[0004] In a first aspect of the present disclosure, a protective structure for a turbomolecular pump is proposed, comprising a pump body, a fixed component, a first adjustment component, a first clamping component, a lifting component, a second adjustment component and a second clamping component; a fixed component is arranged on the bottom surface of the pump body, a first adjustment component is arranged on one side of the fixed component, a first clamping component is arranged on one side of the first adjustment component, two groups of first clamping components are arranged, a lifting component is also arranged on one side of the fixed component, a second adjustment component is arranged on one side of the lifting component, a second clamping component is arranged on one side of the second adjustment component, and two groups of second clamping components are arranged.

[0005] Preferably, a fixing component is provided to place and support the pump body, and at the same time, the position of the first adjustment component is fixed by the fixing component, the distance between the two groups of first clamping components is adjusted by the first adjusting component, the pump body is initially clamped and fixed by the first clamping component, and then the height of the second adjustment component is adjusted by the lifting component, the distance between the two groups of second clamping components is adjusted by the second adjusting component, and the pump body is further clamped and fixed by the second clamping component, thereby achieving fixed protection operations according to the actual size of the turbomolecular pump, expanding the use range of the protection structure, and enhancing the practical value of the protection structure.

[0006] Preferably, the fixing assembly includes a base and a support rod; the base is arranged on the bottom surface of the pump body, the support rod is arranged on the bottom surface of the base, and there are multiple groups of support rods; the pump body is placed through the base, and the support rod is used to support and fix the base.

[0007] Preferably, the first adjustment component includes a first bidirectional screw, a first motor and a connecting block; a first bidirectional screw is arranged on one side of the base, a first motor is arranged on the other side of the base, an output end of the first motor is connected to the first bidirectional screw, a connecting block is arranged on the outside of the first bidirectional screw, and two groups of connecting blocks are arranged; the first bidirectional screw is driven to rotate by the first motor, and the position of the connecting block is moved by rotating the first bidirectional screw, and the first clamping component is connected and fixed by using the connecting block, thereby realizing the effect of flexibly adjusting the spacing between the two groups of first clamping components according to the actual size of the pump body.

[0008] Preferably, the first clamping assembly includes a first clamping plate, a first electric telescopic rod and a first pressure plate; a first clamping plate is provided on one side of the connecting block, a first electric telescopic rod is also provided on one side of the connecting block, and a first pressure plate is provided at one end of the first electric telescopic rod; the first clamping plate is used to clamp the outer side of the pump body, the first electric telescopic rod is extended and retracted to adjust the height of the first pressure plate, and the first pressure plate is used to press and fix the pump body, thereby achieving the effect of preliminarily fixing the position of the pump body.

[0009] Preferably, the lifting assembly includes a second electric telescopic rod, a fixed plate and a sliding telescopic rod; a second electric telescopic rod is also provided on one side of the base, a fixed plate is provided on one end of the second electric telescopic rod, a sliding telescopic rod is provided on the bottom surface of the fixed plate, and the other end of the sliding telescopic rod is connected to one side of the base; the height of the fixed plate is adjusted by extending and retracting the second electric telescopic rod, and the second adjustment assembly is fixed by using the fixed plate. At the same time, the second electric telescopic rod is extended and retracted to drive the sliding telescopic rod to extend and retract synchronously, thereby ensuring the stable lifting and lowering movement of the fixed plate.

[0010] Preferably, the second adjustment component includes a second bidirectional screw and a second motor; a second bidirectional screw is arranged on one side of the fixed plate, and a second motor is arranged on the other side of the fixed plate, and the output end of the second motor is connected to the second bidirectional screw; the second bidirectional screw is driven to rotate by the second motor, and the second bidirectional screw is rotated to adjust the spacing between the two groups of second clamping components, thereby achieving the effect of adjusting the spacing of the second clamping components according to the actual size of the pump body.

[0011] Preferably, the second clamping assembly includes a connecting rod, a second pressure plate and a second clamping plate; a connecting rod is arranged on the outside of the second bidirectional screw, and two groups of connecting rods are arranged, a second pressure plate is arranged at one end of the connecting rod, and a second clamping plate is arranged on one side of the second pressure plate; the second pressure plate is connected and fixed by the connecting rod, the second pressure plate is used to press and fix the pump body, and the outer side of the pump body is clamped and fixed by the second clamping plate, thereby effectively ensuring the stable operation of the pump body.

[0012] Preferably, two first clamping assemblies are provided, and the first clamping plates of the first clamping assemblies are arranged to face each other.

[0013] Preferably, the first clamping assembly is arranged on the connecting block, and the inner side of the connecting block is provided with a thread that cooperates with the first bidirectional screw rod.

[0014] Preferably, the second clamping assembly is arranged on a side of the fixed plate facing the fixed assembly.

[0015] The beneficial effects of the utility model are:

[0016] 1. Compared with the traditional protection structure for turbomolecular pumps, most of them use blocks to fix and protect turbomolecular pumps. The size of the fixed structure is mostly fixed, and it can often only be used for fixed protection of turbomolecular pumps of the same size, resulting in a small scope of application. By adjusting the fixed radius of the structure, the fixed protection operation can be performed according to the actual size of the turbomolecular pump, expanding the scope of use of the protection structure and enhancing the practical value of the protection structure;

[0017] 2. When adjusting the protective structure according to the actual size of the pump body, the first motor drives the first bidirectional screw to rotate, thereby driving the first clamping plates on the two sets of connecting blocks to move, so that they clamp the outside of the pump body, and the second electric telescopic rod drives the sliding telescopic rod to synchronously extend and retract, thereby adjusting the height of the fixed plate, and the second motor drives the second bidirectional screw to rotate, thereby driving the second clamping plates on the two sets of connecting rods to move, further clamping and fixing the outside of the pump body, so as to solve the problem that most turbomolecular pump protective structures are often difficult to meet the protection requirements of turbomolecular pumps of different sizes, and enhance the flexibility of the protective structure;

[0018] 3. When fixing the position of the pump body, use the support rod to support the fixed base, place the pump body through the base, extend and retract the first electric telescopic rod to flexibly adjust the height of the first pressure plate, use the first pressure plate to press and fix the pump body, extend and retract the second electric telescopic rod to drive the sliding telescopic rod to extend and retract synchronously, thereby adjusting the height of the fixed plate, thereby flexibly adjusting the height of the second pressure plate, and use the second pressure plate to further press and fix the pump body. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A schematic diagram of a three-dimensional structure of a protection structure for a turbomolecular pump according to an embodiment of the present disclosure is shown;

[0020] Figure 2 A schematic diagram of the three-dimensional structure of a first clamping assembly of a protection structure for a turbomolecular pump according to an embodiment of the present disclosure is shown;

[0021] Figure 3 A schematic diagram of the three-dimensional structure of a second adjustment component of a protective structure for a turbomolecular pump according to an embodiment of the present disclosure is shown;

[0022] Figure 4 A schematic diagram showing a three-dimensional structure of a second clamping assembly of a protection structure for a turbomolecular pump according to an embodiment of the present disclosure; and

[0023] Explanation of the accompanying drawings: 1. Pump body; 2. Fixing assembly; 3. First adjusting assembly; 4. First clamping assembly; 5. Lifting assembly; 6. Second adjusting assembly; 7. Second clamping assembly; 201. Base; 202. Support rod; 301. First bidirectional screw rod; 302. First motor; 303. Connecting block; 401. First clamping plate; 402. First electric telescopic rod; 403. First pressure plate; 501. Second electric telescopic rod; 502. Fixing plate; 503. Sliding telescopic rod; 601. Second bidirectional screw rod; 602. Second motor; 701. Connecting rod; 702. Second pressure plate; 703. Second clamping plate. DETAILED DESCRIPTION

[0024] The utility model is further described below in conjunction with the accompanying drawings and embodiments. Although certain embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be construed as being limited to the embodiments described herein. On the contrary, these embodiments are provided to provide a more thorough and complete understanding of the present disclosure. It should be understood that the drawings and embodiments of the present disclosure are only for exemplary purposes and are not intended to limit the scope of protection of the present disclosure.

[0025] In the description of the embodiments of the present disclosure, the term "including" and similar terms should be understood as open inclusion, that is, "including but not limited to". The term "based on" should be understood as "based at least in part on". The term "one embodiment" or "the embodiment" should be understood as "at least one embodiment". The terms "first", "second", etc. can refer to different or the same objects.

[0026] See also Figure 1 The utility model provides an embodiment: a protective structure for a turbomolecular pump, comprising a pump body 1, a fixing component 2, a first adjusting component 3, a first clamping component 4, a lifting component 5, a second adjusting component 6 and a second clamping component 7; a fixing component 2 is arranged on the bottom surface of the pump body 1, a first adjusting component 3 is arranged on one side of the fixing component 2, a first clamping component 4 is arranged on one side of the first adjusting component 3, two groups of the first clamping component 4 are arranged, a lifting component 5 is also arranged on one side of the fixing component 2, a second adjusting component 6 is arranged on one side of the lifting component 5, a second clamping component 7 is arranged on one side of the second adjusting component 6, and two groups of the second clamping component 7 are arranged.

[0027] See also Figure 2In this embodiment, the fixing component 2 includes a base 201 and a support rod 202; the bottom surface of the pump body 1 is provided with a base 201, and the bottom surface of the base 201 is provided with a support rod 202, and the support rod 202 is provided with multiple groups, the pump body 1 is placed through the base 201, and the support rod 202 is used to support the fixed base 201; the first adjustment component 3 includes a first bidirectional screw rod 301, a first motor 302 and a connecting block 303; the first bidirectional screw rod 301 is provided on one side of the base 201, and the first motor 302 is provided on the other side of the base 201, the output end of the first motor 302 is connected to the first bidirectional screw rod 301, and the outer side of the first bidirectional screw rod 301 is provided with a connecting block 303, and the connecting block 303 is provided with two groups, and the first bidirectional screw rod 301 is driven by the first motor 302 Rotate, rotate the first bidirectional screw rod 301 to drive the connection block 303 to move, and use the connection block 303 to connect and fix the first clamping assembly 4, so as to achieve the effect of flexibly adjusting the distance between the two groups of first clamping assemblies 4 according to the actual size of the pump body 1; the first clamping assembly 4 includes a first clamping plate 401, a first electric telescopic rod 402 and a first pressure plate 403; a first clamping plate 401 is provided on one side of the connection block 303, and a first electric telescopic rod 402 is also provided on one side of the connection block 303, and a first pressure plate 403 is provided at one end of the first electric telescopic rod 402, the outer side of the pump body 1 is clamped by the first clamping plate 401, the first electric telescopic rod 402 is telescoped to adjust the height of the first pressure plate 403, and the first pressure plate 403 is used to press and fix the pump body 1, so as to achieve the effect of preliminarily fixing the position of the pump body 1. In some embodiments, the first clamping assembly 4 is disposed on the connecting block 303, and the inner side of the connecting block 303 is provided with a thread that cooperates with the first bidirectional screw rod 301, so that as the first bidirectional screw rod 301 rotates, the connecting block 303 can move in two directions along which the first bidirectional screw rod 301 extends.

[0028] See also Figure 3-4In this embodiment, the lifting component 5 includes a second electric telescopic rod 501, a fixed plate 502 and a sliding telescopic rod 503; a second electric telescopic rod 501 is also provided on one side of the base 201, and a fixed plate 502 is provided on one end of the second electric telescopic rod 501, and a sliding telescopic rod 503 is provided on the bottom surface of the fixed plate 502, and the other end of the sliding telescopic rod 503 is connected to one side of the base 201. The height of the fixed plate 502 is adjusted by extending and retracting the second electric telescopic rod 501, and the second adjustment component 6 is fixed by the fixed plate 502. At the same time, the second electric telescopic rod 501 drives the sliding telescopic rod 503 to extend and retract synchronously to ensure the stable lifting movement of the fixed plate 502; the second adjustment component 6 includes a second bidirectional screw rod 601 and a second motor 602; a second bidirectional screw rod 601 is provided on one side of the fixed plate 502, and a second bidirectional screw rod 601 is provided on the other side of the fixed plate 502. A second motor 602 is provided, and the output end of the second motor 602 is connected to the second bidirectional screw rod 601, and the second bidirectional screw rod 601 is driven to rotate by the second motor 602. The second bidirectional screw rod 601 is rotated to adjust the spacing between the two groups of second clamping assemblies 7, thereby achieving the effect of adjusting the spacing of the second clamping assemblies 7 according to the actual size of the pump body 1; the second clamping assembly 7 includes a connecting rod 701, a second pressure plate 702 and a second clamping plate 703; a connecting rod 701 is provided on the outside of the second bidirectional screw rod 601, and the connecting rod 701 is provided with two groups, a second pressure plate 702 is provided at one end of the connecting rod 701, and a second clamping plate 703 is provided on one side of the second pressure plate 702, the second pressure plate 702 is connected and fixed by the connecting rod 701, the second pressure plate 702 is used to press and fix the pump body 1, and the second clamping plate 703 is used to clamp and fix the outer side of the pump body 1, thereby effectively ensuring the stable operation of the pump body 1. In some embodiments, the second clamping assembly 7 is disposed on the side of the fixed plate 502 facing the fixed assembly 2, so that the second clamping assembly 7 can achieve the left-right or front-back clamping function shown in the figure. In addition, it should be noted that the second clamping assembly 7 is disposed on the side of the fixed plate 502 facing the fixed assembly 2, so that the second clamping assembly 7 can achieve the upper and lower clamping function shown in the figure.

[0029] When the position of the pump body 1 is initially fixed, the support rod 202 is used to support the fixed base 201, and the pump body 1 is placed on the surface of the base 201. Subsequently, the first motor 302 drives the first bidirectional screw rod 301 to rotate, and the first bidirectional screw rod 301 is rotated to drive the connection block 303 to move, thereby driving the two sets of first clamping plates 401 to clamp the outside of the pump body 1. At the same time, the first pressing plate 403 is driven to move above the pump body 1, and the first electric telescopic rod 402 is retracted to lower the first pressing plate 403, and the pump body 1 is pressed and fixed by the first pressing plate 403;

[0030] When further fixing the position of the pump body 1, contracting the second electric telescopic rod 501 drives the sliding telescopic rod 503 to contract synchronously, thereby lowering the height of the fixed plate 502, and the second motor 602 drives the second bidirectional screw rod 601 to rotate. Rotating the second bidirectional screw rod 601 drives the connecting rod 701 to move, thereby driving the two sets of second clamping plates 703 to clamp and fix the outer side of the pump body 1, and the second pressure plate 702 is used to press and fix the pump body 1.

[0031] Through the above steps, the pump body 1 is placed and supported by setting the fixing component 2, and at the same time, the position of the first adjusting component 3 is fixed by the fixing component 2, the distance between the two groups of first clamping components 4 is adjusted by the first adjusting component 3, and the pump body 1 is initially clamped and fixed by the first clamping component 4. Subsequently, the height of the second adjusting component 6 is adjusted by the lifting component 5, the distance between the two groups of second clamping components 7 is adjusted by the second adjusting component 6, and the pump body 1 is further clamped and fixed by the second clamping component 7.

[0032] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of those skilled in the art without departing from the purpose of the present invention.

Claims

1. A protection structure for a turbomolecular pump, comprising a pump body (1); characterized in that: The pump body (1) further comprises a fixing assembly (2), a first adjusting assembly (3), a first clamping assembly (4), a lifting assembly (5), a second adjusting assembly (6) and a second clamping assembly (7); the bottom surface of the pump body (1) is provided with a fixing assembly (2); one side of the fixing assembly (2) is provided with a first adjusting assembly (3); one side of the first adjusting assembly (3) is provided with a first clamping assembly (4); two groups of the first clamping assembly (4) are provided; one side of the fixing assembly (2) is also provided with a lifting assembly (5); one side of the lifting assembly (5) is provided with a second adjusting assembly (6); one side of the second adjusting assembly (6) is provided with a second clamping assembly (7); and two groups of the second clamping assembly (7) are provided.

2. The protective structure for a turbomolecular pump according to claim 1, characterized in that: The fixing assembly (2) comprises a base (201) and a support rod (202); the base (201) is arranged on the bottom surface of the pump body (1), the support rod (202) is arranged on the bottom surface of the base (201), and the support rod (202) is arranged in multiple groups.

3. The protection structure for a turbomolecular pump according to claim 2, characterized in that: The first adjustment component (3) comprises a first bidirectional screw rod (301), a first motor (302) and a connecting block (303); the first bidirectional screw rod (301) is arranged on one side of the base (201), the first motor (302) is arranged on the other side of the base (201), the output end of the first motor (302) and the first bidirectional screw rod (301) are connected to each other, the connecting block (303) is arranged on the outside of the first bidirectional screw rod (301), and two groups of connecting blocks (303) are arranged.

4. The protection structure for a turbomolecular pump according to claim 3, characterized in that: The first clamping assembly (4) comprises a first clamping plate (401), a first electric telescopic rod (402) and a first pressing plate (403); the first clamping plate (401) is arranged on one side of the connecting block (303), the first electric telescopic rod (402) is also arranged on one side of the connecting block (303), and the first pressing plate (403) is arranged on one end of the first electric telescopic rod (402).

5. The protection structure for a turbomolecular pump according to claim 3, characterized in that: The lifting assembly (5) comprises a second electric telescopic rod (501), a fixed plate (502) and a sliding telescopic rod (503); a second electric telescopic rod (501) is also arranged on one side of the base (201); a fixed plate (502) is arranged on one end of the second electric telescopic rod (501); a sliding telescopic rod (503) is arranged on the bottom surface of the fixed plate (502); and the other end of the sliding telescopic rod (503) is connected to one side of the base (201).

6. The protection structure for a turbomolecular pump according to claim 5, characterized in that: The second adjustment component (6) comprises a second bidirectional screw rod (601) and a second motor (602); the second bidirectional screw rod (601) is arranged on one side of the fixed plate (502), and the second motor (602) is arranged on the other side of the fixed plate (502); the output end of the second motor (602) is interconnected with the second bidirectional screw rod (601).

7. The protection structure for a turbomolecular pump according to claim 6, characterized in that: The second clamping assembly (7) comprises a connecting rod (701), a second pressure plate (702) and a second clamping plate (703); a connecting rod (701) is arranged on the outside of the second bidirectional screw rod (601), and two groups of connecting rods (701) are arranged, a second pressure plate (702) is arranged at one end of the connecting rod (701), and a second clamping plate (703) is arranged on one side of the second pressure plate (702).

8. The protection structure for a turbomolecular pump according to claim 6, characterized in that: The first clamping assembly (4) is provided in two, and the first clamping plates (401) of the first clamping assembly (4) are arranged to face each other.

9. The protection structure for a turbomolecular pump according to claim 6, characterized in that: The first clamping assembly (4) is arranged on the connecting block (303), and the inner side of the connecting block (303) is provided with a thread that matches the first bidirectional screw rod (301).

10. The protection structure for a turbomolecular pump according to claim 6, characterized in that: The second clamping assembly (7) is arranged on the side of the fixed plate (502) facing the fixed assembly (2).

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