Energy detection mechanism

Abstract

An energy detection mechanism is applied to detection of an optical lens of an LDI exposure machine, and comprises a detection module which comprises a detection camera used for detecting a gray value of the optical lens; the energy probe is used for detecting the power of the optical lens; the highest height of the two correlation gratings is not lower than the highest height of the detection camera and the energy probe, and whether the highest height of the detection module is lower than the lowest height of the optical lens is judged by sensing whether an article exists between the two correlation gratings; the lifting module is used for driving the detection module to lift; and the transverse moving module is used for driving the detection module to move transversely. According to the utility model, detection is carried out through the two correlation gratings, and when there is no article between the two correlation gratings, the highest height of the detection camera and the energy probe is lower than the lowest height of the optical lens, so that the heights of the detection camera and the energy probe can be rapidly and accurately adjusted.

Description

Technical Field

[0001] The utility model relates to the technical field of direct writing exposure machines, in particular to an energy detection mechanism. Background Art

[0002] The LDI exposure machine has multiple optical lenses, which are generally arranged in one or two rows. Each optical lens is connected to an independent laser. Under the same light output current, the light output power of each laser will be different, and the laser transmittance of each optical lens will also be different. This leads to a large difference in the light output power of each optical lens under the same current, which needs to be calibrated by a power sensor.

[0003] The power sensor is an instrument for measuring signal power. It is a standard device for measuring RF microwave power and is often used as a power calibration device for other instruments. Modern power sensors (probes) are connected to a host or other controller via USB to achieve test functions. The power sensor detects signals and obtains test data, while the host or controller implements user operations, display interfaces, and data storage.

[0004] At the same time, the price of power sensors is relatively high, and smaller energy sensors are generally used to reduce costs. However, the actual installation positions of the lenses are not arranged very neatly. Generally, a cylinder is used to control the sensor to move back and forth between the front and rear rows of lenses. This results in a relatively fixed position for the energy sensor to move forward and backward, and it cannot be accurately moved to the center of the optical lens, resulting in inaccurate measured data.

[0005] When adjusting the height of the energy probe and the optical lens, it is impossible to accurately judge whether the height of the energy probe and the optical lens is higher than the lowest height of the optical lens. When adjusting the height, if the height is not adjusted enough, it is easy to collide with the optical lens and damage the parts. If the height is adjusted too much, the operation time will be longer and it will affect the subsequent focusing speed.

[0006] To this end, we propose an energy detection mechanism. Utility Model Content

[0007] In view of the shortcomings of the above-mentioned existing production technology, the applicant provides an energy detection mechanism, which sets two opposing gratings to sense whether there is an object between the two opposing gratings to determine whether the highest height of the detection module is lower than the lowest height of the optical lens.

[0008] The technical solution adopted by the utility model is as follows:

[0009] An energy detection mechanism, applied to the detection of an optical lens of an LDI exposure machine, comprises:

[0010] The detection module comprises:

[0011] A detection camera is used to detect the grayscale value of the optical lens;

[0012] Energy sensor, used to detect the power of the optical lens;

[0013] The highest height of the two opposing gratings is not lower than the highest height of the detection camera and the energy probe. By sensing whether there is an object between the two opposing gratings, it is determined whether the highest height of the detection module is lower than the lowest height of the optical lens;

[0014] A lifting module is used to drive the detection module to rise and fall;

[0015] The transverse movement module is used to drive the detection module to move transversely.

[0016] It is further characterized by:

[0017] The detection module also includes a support frame, two opposing gratings are respectively arranged at the two ends of the top of the support frame, a movable detection moving block is arranged on the support frame, a placement groove is arranged on the top of the detection moving block, the energy probe is arranged in the placement groove, and the detection camera is arranged on one side of the detection moving block.

[0018] The side wall of the detection moving block is provided with a camera mounting member for limiting the detection camera.

[0019] The support frame is provided with a guide rail, the detection moving block is slidably arranged on the guide rail, the support frame is also provided with a detection motor, the output shaft of the detection motor is provided with a detection screw rod, the detection screw rod passes through the detection moving block, and the detection moving block is provided with a thread matching the detection screw rod.

[0020] The lifting module includes a moving block, an optical axis, a lifting screw nut, a lifting screw and a lifting motor. The optical axis is liftable and penetrates the moving block. The bottom of the optical axis is fixedly connected to the support frame. The lifting motor is installed on the support frame. One end of the lifting screw is fixedly connected to the output shaft of the lifting motor. The lifting screw nut is sleeved outside the lifting screw and fixed on the moving block. The moving block is fixed on the transverse module.

[0021] The exposure machine includes a platform, a Y-axis guide rail and a gantry column arranged on the platform, a Y-axis mover seat is arranged on the Y-axis guide rail, a lifting platform is arranged on the Y-axis mover seat, a suction cup is arranged on the lifting platform, a gantry is arranged on the gantry column, an X-axis guide rail is arranged on the side wall of the gantry, a camera assembly is arranged on the X-axis guide rail, and an optical lens is arranged on the top of the gantry.

[0022] A foot pad is provided at the bottom of the platform.

[0023] The beneficial effects of the utility model are as follows:

[0024] The utility model has a compact and reasonable structure and is easy to operate. By setting two opposing gratings, the highest height of which is not lower than the highest height of the detection camera and the energy probe, when adjusting the height of the detection camera and the energy probe, detection is performed through the two opposing gratings. When there are objects between the two opposing gratings, the detection camera and the energy probe continue to be adjusted downward. When there are no objects between the two opposing gratings, the detection camera and the energy probe do not need to be adjusted downward. At this time, the highest height of the detection camera and the energy probe is lower than the lowest height of the optical lens, which is convenient for quickly and accurately adjusting the height of the detection camera and the energy probe.

[0025] At the same time, the utility model also has the following advantages:

[0026] (1) By setting the camera mounting part, when installing the detection camera, ensure that the left side of the detection camera is in close contact with the right side of the detection moving block, and the rear end face of the detection camera is in close contact with the front end face of the camera mounting part, thereby ensuring that the detection camera and the energy probe are in the same position in the Y direction.

[0027] (2) By setting a guide rail, a detection motor, a detection lead screw, and a detection moving block, the detection camera is moved until the circular light spot appears in the field of view of the detection camera through the coordinated movement of the lateral movement module and the detection motor.

[0028] (3) The detection camera and the energy lens are no longer fixed on the suction cup or the lifting platform, but can be adjusted away from the lifting platform, making the adjustment of the detection camera and the energy lens more convenient and quick. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 Schematic diagram of the exposure machine of the utility model Figure 1 .

[0030] Figure 2 Schematic diagram of the exposure machine of the utility model Figure 2 .

[0031] Figure 3 The energy detection mechanism of the utility model is shown in FIG. Figure 1 .

[0032] Figure 4 The energy detection mechanism of the utility model is shown in FIG. Figure 2 .

[0033] Figure 5 It is a top view of the detection camera and energy probe of the utility model.

[0034] Figure 6 It is a top view of the gantry of the present utility model.

[0035] Among them: 1. foot pad; 2. platform; 3. Y-axis guide rail; 4. Y-axis mover seat; 5. lifting platform; 6. suction cup; 7. gantry column; 8. gantry; 9. X-axis guide rail; 10. optical lens; 11. camera assembly; 12. transverse movement module; 13. support frame; 14. moving block; 15. optical axis; 16. lifting screw nut; 17. lifting screw; 18. lifting motor; 131. beam grating; 132. detection motor; 133. detection screw; 134. detection moving block; 135. detection camera; 136. guide rail; 137. energy probe; 138. camera mounting parts. DETAILED DESCRIPTION

[0036] The specific implementation of the present utility model is described below in conjunction with the accompanying drawings.

[0037] like Figure 1-6 As shown, an energy detection mechanism is applied to an LDI exposure machine, and the energy detection mechanism includes a lateral movement module 12, a lifting module and a detection module; the lifting module is arranged on the lateral movement module 12, and the detection module is arranged on the lifting module.

[0038] The traverse module 12 may be provided in a movement mode in which a stepping motor and a lead screw cooperate, or in other feasible movement modes.

[0039] like Figure 3 As shown, the lifting module includes a moving block 14, a movable and liftable optical axis 15 is passed through the moving block 14, a wing support frame 13 is fixed at the bottom of the optical axis 15, a lifting motor 18 is arranged on the support frame 13, a lifting screw rod 17 is fixed on the output shaft of the lifting motor 18, a lifting screw rod nut 16 is arranged on the outer sleeve of the lifting screw rod 17, and the lifting screw rod nut 16 is fixed on the moving block 14;

[0040] The detection module includes an energy probe 137, a detection camera 135 and two opposing gratings 131, and the two opposing gratings 131 are respectively arranged at the two ends of the top of the support frame 13, and the two opposing gratings 131 are used to detect whether the highest points of the detection camera 135 and the energy probe 137 are below the bottom of the optical lens 10; a guide rail 136 is arranged on the support frame 13, and a detection moving block 134 is arranged on the guide rail 136. A detection motor 132 is also arranged on the support frame 13, and a detection screw rod 133 is fixed on the output shaft of the detection motor 132. The detection screw rod 133 passes through the detection moving block 134, and a thread matching the detection screw rod 133 is arranged in the detection moving block 134. The energy probe 137 is arranged on the top of the detection moving block 134, and the detection camera 135 is arranged on one side of the detection moving block 134. The detection camera 135 is restricted by the camera mounting member 138, so as to ensure that the detection camera 135 and the energy probe 137 are in the same position in the Y direction. The height of the two opposing gratings 131 is not lower than the highest height of the detection camera 135 and the energy probe, so that when the two opposing gratings 131 are detected, it is detected that there are no objects in the two opposing gratings 131 and the height of the first optical lens 10.

[0041] like Figure 1 As shown, the LDI exposure machine includes a platform 2, a Y-axis guide rail 3 and a gantry column 7 arranged on the platform 2, a Y-axis mover seat 4 is arranged on the Y-axis guide rail 3, a lifting platform 5 is arranged on the Y-axis mover seat 4, a suction cup 6 is arranged on the lifting platform 5, a gantry 8 is arranged on the gantry column 7, an X-axis guide rail 9 is arranged on the side wall of the gantry 8, a camera assembly 11 is arranged on the X-axis guide rail 9, and an optical lens 10 is arranged on the top of the gantry 8; a foot pad 1 is arranged at the bottom of the platform 2.

[0042] like Figure 6 As shown, the ideal distance between two adjacent lenses in the X direction is X. The top surface of the detection moving block 134 is provided with a mounting groove for cooperating with the energy probe 137. When installing the detection camera 135, ensure that the left side of the detection camera 135 is in close contact with the right side of the detection moving block 134, and the rear end surface of the detection camera 135 is in close contact with the front end surface of the camera mounting member 138, thereby ensuring that the detection camera 135 and the energy probe 137 are in the same position in the Y direction; a wide-angle lens is installed at the top of the detection camera 135 to ensure that the camera field of view completely covers the projection range of the optical lens 10.

[0043] When used for the first time, the lifting motor 18 is controlled to work, and the output shaft of the lifting motor 18 drives the lifting screw 17 to rotate, thereby driving the lifting screw 17 and the lifting motor 18 to move downward, thereby driving the support frame 13 to move downward, and simultaneously starting the two opposing gratings 131. When no object is detected blocking between the two opposing gratings 131, the highest height of the detection camera 135 and the energy probe 137 is lower than the lowest end of the optical lens 10. At this time, when the height of the detection camera 135 and the energy probe 137 is moved again, the detection camera 135 and the energy probe 137 will not collide with the optical lens 10. The host computer controls the center position of the first optical lens 10 to project Figure 1 A circular light spot is formed, and the detection camera 135 is moved until the circular light spot appears in the field of view of the detection camera 135 through the coordinated movement of the lateral movement module 12 and the detection motor 132. The detection camera 135 is moved to the optimal focal plane Z1 by controlling the lifting motor 18 through the camera focus search algorithm of the host computer. The detection camera 135 is moved to the center position of the light spot irradiated on the camera field of view through the target search algorithm of the host computer, and the current axial positions (X1, Y1, Z1) of the lateral movement module 12, the detection motor 132 and the lifting motor 18 are recorded. The first optical lens 10 is controlled to project a graphic of the size of the light surface, and the gray value average M1 is measured by the detection camera 135. After the detection is completed, the host computer stops the first lens from emitting light;

[0044] By controlling the lateral movement module 12 and the detection motor 132 to move the camera horizontally by an X distance and vertically by a Y distance, the detection camera 135 is moved to the bottom of the second optical lens 10, and the center position of the second lens is projected by the host computer. Figure 1 The host computer controls the lifting motor 18 to move the detection camera 135 to the optimal focal plane Z2 through the camera focus algorithm of the host computer, and moves the detection camera 135 to the center of the camera field of view through the target search algorithm of the host computer. The host computer stops the second lens from emitting light, records the current axis positions (X2, Y2, Z2) of the lateral movement module 12, the detection motor 132 and the lifting motor 18, controls the second optical lens 10 to project a pattern of the size of the light surface, and measures the detection camera 135. The average grayscale value is M2. After the detection is completed, the host computer stops the second lens from emitting light; the remaining lenses are measured in turn, and the current coordinate position (Xn, Yn, Zn), the best focal plane Zn and the average grayscale value Mn are recorded. After the detection is completed, the transverse movement module 12, the detection motor 132 and the lifting motor 18 first move to (0, 0, Z1), and then move to (0, 0, 0); when ZnMAX-ZnMIN≥0.2mm, the host computer software will prompt that the focal plane differences of each lens are too large.

[0045] When performing power detection, the host computer is controlled to move the lateral movement module 12, the detection motor 132 and the lifting motor 18 to (0, 0, Z1) first, and then to the axis position (X1+X, Y1, Z1). At this time, the energy probe 137 is at the center of the projection range of the first optical lens 10. The host computer controls the first optical lens 10 to project a pattern with the same shape and size as the energy probe 137 at the center. The energy probe 137 is used to perform power detection on the first optical lens 10, and the measured power reference value P1 of the first optical lens 10 is recorded.

[0046] The host computer is controlled to move the transverse movement module 12, the detection motor 132 and the lifting motor 18 to the axis position (X2+X, Y2, Z2). At this time, the energy probe 137 is at the center of the projection range of the second optical lens 10. The host computer controls the second optical lens 10 to project a pattern with the same shape and size as the energy probe 137 at the center position. The power of the second optical lens 10 is detected by the energy probe 137, and the measured power reference value P2 of the second optical lens 10 is recorded; the transverse movement module 12, the detection motor 132 and the lifting motor 18 are moved to the axis position (Xn+X, Yn, Zn) in turn, and the optical lens 10 is controlled to emit light by the host computer. The light output power reference value Pn of the optical lens 10 is measured and recorded in turn. After the detection is completed, the transverse movement module 12, the detection motor 132 and the lifting motor 18 are first moved to (0, 0, Z1), and then moved to (0, 0, 0).

[0047] During the production process, the light output power of each optical lens 10 is monitored regularly, and the power monitoring value pn of each optical lens 10 is detected in turn. When pm / Pn≤0.95, the detection camera 135 is moved to the bottom of the nth lens through the host computer, and the nth lens is controlled to project a graphic of the size of the light output surface. The detection camera 135 is used to take pictures, and the grayscale value mn of each pixel is measured. When mn / Mn≤0.95, the pixel is considered to be abnormal. After the detection is completed, the transverse movement module 12, the detection motor 132 and the lifting motor 18 first move to (0, 0, Z1), and then move to (0, 0, 0), record the abnormal data, and pop up a prompt. After-sales personnel can remotely view the abnormal photos and data, preliminarily determine the cause of the problem, so as to quickly deal with the problem.

[0048] If the support frame 13 is not moved downward to the highest point of the detection camera 135 and the energy probe 137 below the lower end surface of the optical lens 10 by controlling the lifting motor 18 before the support frame 13 moves to the right, if the optical lens 10 appears between the two opposing gratings 131 during the movement, and the opposing grating 131 senses that there is an object between the two opposing gratings 131, the host computer will not allow the support frame 13 to move upward or right to prevent it from colliding with the optical lens 10 and causing damage; if the axial position of the transverse movement module 12, the detection motor 132 and the lifting motor 18 is not at (0,0,0,), the suction cup 6 will not be allowed to move forward and backward along the Y-axis guide rail to avoid collision between the detection module and the suction cup 6.

[0049] The above description is an explanation of the utility model, not a limitation of the utility model. The scope of the utility model is defined by the claims. Any form of modification can be made within the protection scope of the utility model.

Claims

1. An energy detection mechanism, used in the detection of an optical lens (10) of an LDI exposure machine, characterized in that: include: The detection module comprises: A detection camera (135) for detecting the grayscale value of the optical lens (10); An energy probe (137) for detecting the power of the optical lens (10); The two opposing gratings (131) have a maximum height not lower than the maximum height of the detection camera (135) and the energy probe (137), and whether the maximum height of the detection module is lower than the minimum height of the optical lens (10) is determined by sensing whether there is an object between the two opposing gratings (131); A lifting module is used to drive the detection module to rise and fall; The transverse movement module (12) is used to drive the detection module to move transversely.

2. An energy detection mechanism as claimed in claim 1, characterized in that: The detection module also includes a support frame (13), two opposing gratings (131) are respectively arranged at two ends of the top of the support frame (13), a movable detection moving block (134) is arranged on the support frame (13), a placement groove is arranged on the top of the detection moving block (134), an energy probe (137) is arranged in the placement groove, and a detection camera (135) is arranged on one side of the detection moving block (134).

3. An energy detection mechanism as claimed in claim 2, characterized in that: The side wall of the detection moving block (134) is provided with a camera mounting member (138) for limiting the detection camera (135).

4. An energy detection mechanism as claimed in claim 2, characterized in that: The support frame (13) is provided with a guide rail (136), and the detection moving block (134) is slidably arranged on the guide rail (136). The support frame (13) is also provided with a detection motor (132), and a detection screw rod (133) is arranged on the output shaft of the detection motor (132). The detection screw rod (133) passes through the detection moving block (134), and a thread matching the detection screw rod (133) is arranged inside the detection moving block (134).

5. An energy detection mechanism as claimed in claim 4, characterized in that: The lifting module comprises a moving block (14), an optical axis (15), a lifting screw nut (16), a lifting screw (17) and a lifting motor (18); the optical axis (15) is lifted and inserted into the moving block (14); the bottom of the optical axis (15) is fixedly connected to a support frame (13); the lifting motor (18) is mounted on the support frame (13); one end of the lifting screw (17) is fixedly connected to an output shaft of the lifting motor (18); the lifting screw nut (16) is sleeved outside the lifting screw (17) and fixed on the moving block (14); and the moving block (14) is fixed on the transverse moving module (12).

6. An energy detection mechanism as claimed in claim 1, characterized in that: The exposure machine comprises a platform (2), a Y-axis guide rail (3) and a gantry column (7) arranged on the platform (2); a Y-axis mover seat (4) is arranged on the Y-axis guide rail (3); a lifting platform (5) is arranged on the Y-axis mover seat (4); a suction cup (6) is arranged on the lifting platform (5); a gantry (8) is arranged on the gantry column (7); an X-axis guide rail (9) is arranged on the side wall of the gantry (8); a camera assembly (11) is arranged on the X-axis guide rail (9); and an optical lens (10) is arranged on the top of the gantry (8).

7. An energy detection mechanism as claimed in claim 6, characterized in that: A foot pad (1) is provided at the bottom of the platform (2).

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