Slicing machine

Abstract

The slicing machine comprises a machine frame, a take-up and pay-off unit, a cutting unit, a wire guide unit, a cutting wire and a piece conveying jig, the cutting wire is associated with a wire storage barrel in the take-up and pay-off unit, is wound around cutting rollers of the cutting unit and a wire guide wheel of the wire guide unit and then forms a cutting wire net between the cutting rollers, the wire storage barrel is provided with a wire storage barrel driving part, the cutting roller is provided with a cutting roller driving part, the wire guide wheel is provided with a wire guide wheel driving part, and the wire guide wheel driving part, the wire storage barrel driving part and the cutting roller driving part keep synchronous operation, so that in the cutting operation process, synchronization of the cutting roller, the wire guide wheel and a cutting wire is guaranteed, and the cutting efficiency is improved. The problems of pulling, tension difference on the two sides and the like are avoided, the tension balance of the cutting line is realized, the loss of the cutting line is reduced, the line breaking risk of the cutting line is greatly reduced, the thinning of the cutting line becomes possible, meanwhile, more tension can act on the cutting line for slicing operation, the cutting efficiency is improved, and the purposes of reducing cost and increasing efficiency are achieved.

Description

Technical Field

[0001] The present application relates to the technical field of hard material workpiece processing, and in particular to a slicer for processing silicon wafers. Background Art

[0002] Multi-wire cutting technology is the most advanced silicon wafer processing technology in the world. Its principle is to use a high-speed cutting wire to rub hard and brittle materials such as quartz crystals, semiconductors, rare earth materials, sapphire, etc. to achieve the purpose of cutting. Compared with traditional saw blades, grinding wheels and internal circle cutting, wire cutting technology has the advantages of high efficiency, high production capacity and high precision.

[0003] Existing multi-wire cutting equipment, such as a crystal silicon rod slicer or a sapphire slicer, usually includes at least: a frame, a workbench for fixing a workpiece, a wire reel (also called a wire storage reel) for collecting and releasing the cutting wire, a wire guide wheel, and a cutting roller, wherein a drive motor is configured on the wire reel and the cutting roller. In the actual cutting process of the workpiece, the cutting wire is guided by the wire guide wheel to form a cutting wire net between the cutting rollers. During the slicing operation, the cutting wire is driven to reciprocate at a high speed, so that a relative grinding motion is formed between the cutting wire and the workpiece, thereby cutting the workpiece into many slices at one time, for example, hundreds or even thousands of slices.

[0004] Generally, during the slicing operation, the cutting line will be alternately driven to move at high speed. For example, at a certain moment, the cutting line runs at high speed in the first running direction (the running speed of the cutting line can be as high as about 3000 meters / minute), and then the drive motors on the reel and the cutting roller quickly decelerate until it stops. For example, the running speed of the cutting line is reduced from 3000 meters / minute to stop within a few seconds. After that, the drive motors on the reel and the cutting roller quickly accelerate. For example, the running speed of the cutting line is increased from stop to 3000 meters / minute within a few seconds, and so on. In this use process, the reel and the cutting roller are both equipped with drive motors, and the reel and the cutting roller can complete operations such as forward acceleration, forward deceleration and emergency stop, reverse acceleration, and reverse deceleration and emergency stop under the control of the corresponding drive motors. However, compared with the reel and cutting roller, each wire wheel is unpowered. Each wire wheel must complete operations such as forward acceleration, forward deceleration and emergency stop, reverse acceleration, reverse deceleration and emergency stop, etc., all of which are assisted by the wound cutting line. For example, during acceleration, the accelerated cutting line drives the wire wheel to rotate through friction. During deceleration and emergency stop, the decelerated and stopped cutting line brakes the wire wheel to decelerate and stop through friction. This not only increases the loss of the cutting line and the wire wheel, but also causes uneven tension of the cutting line on opposite sides of the wire wheel, which makes it easy for the cutting line to break. Not only does it waste the cost of the cutting line material, but it also increases the time and labor costs of re-changing the line.

[0005] Especially under the current trend of thinning cutting wires, the risk of wire breakage is increasing. In the current technology, the industry is thinking about improving the cutting wire and using tungsten diamond wire to replace steel diamond wire, but this will increase production costs and will not help reduce the loss of the wire wheel. In addition, in order to prevent the cutting wire from breaking, for example, the tension of the cutting wire provides a large redundancy. When the cutting wire is used for cutting operations, the actual tension used by the wire cutting wire needs to be appropriately reduced by a certain amount (for example, the actual set cutting wire tension is 1N to 2N less than the achievable tension) to prevent the cutting wire from breaking due to sudden changes in tension during forward and reverse acceleration and deceleration (for example, forward acceleration, forward deceleration emergency stop, reverse acceleration, reverse deceleration emergency stop, etc.). However, reducing the tension of the cutting wire will weaken the cutting ability of the cutting wire saw, prolong the cutting time, and reduce the cutting efficiency. Summary of the invention

[0006] In view of the shortcomings of the related art described above, the purpose of the present application is to disclose a slicer for solving the problems in the existing related art such as uneven cutting wire tension that easily leads to wire breakage, increased wire wheel loss and increased production costs.

[0007] To achieve the above-mentioned purpose and other related purposes, the present application discloses a slicer, comprising: a frame; a wire retracting and releasing unit, comprising a first wire storage drum, a second wire storage drum, and a wire storage drum driving member arranged on the frame; a cutting unit, comprising at least two cutting rollers arranged on the frame, wherein each cutting roller is configured with a cutting roller driving member; a wire guide unit, comprising a wire guide wheel and a wire guide wheel driving member for driving the wire guide wheel; a cutting wire, one end of the cutting wire being connected to the first wire storage drum, and the other end of the cutting wire being connected to the second wire storage drum, the cutting wire being sequentially wound around the first wire storage drum, at least two cutting rollers, the wire guide wheel, and the second wire storage drum to form a cutting wire net between the at least two cutting rollers; a workpiece conveying jig, arranged on the frame, for conveying the workpiece to be cut to the cutting wire net between the at least two cutting rollers for cutting.

[0008] In certain embodiments of the present application, the first wire drum is configured with a first wire drum drive and the second wire drum is configured with a second wire drum drive, or the first wire drum and the second wire drum are configured with a common wire drum drive.

[0009] In certain embodiments of the present application, the cutting unit includes a first cutting roller and a second cutting roller, and a wound cutting wire forms a cutting wire net for cutting the workpiece between the first cutting roller and the second cutting roller.

[0010] In certain embodiments of the present application, the cutting unit includes a first cutting roller, a second cutting roller, and a third cutting roller, wherein the first cutting roller, the second cutting roller, and the third cutting roller form a triangle, and the wound cutting wire forms a cutting wire net for cutting the workpiece between the first cutting roller and the second cutting roller, or the wound cutting wire forms a first cutting wire net and a second cutting wire net for cutting the workpiece between the first cutting roller and the second cutting roller and between the first cutting roller and the third cutting roller, respectively.

[0011] In certain embodiments of the present application, the cutting unit includes a first cutting roller, a second cutting roller, a third cutting roller, and a fourth cutting roller, the first cutting roller, the second cutting roller, the third cutting roller, and the fourth cutting roller form a quadrilateral, the wound cutting wire forms a cutting wire net for cutting the workpiece between the first cutting roller and the second cutting roller, the wound cutting wire forms the first cutting wire net and the second cutting wire net for cutting the workpiece between the first cutting roller and the fourth cutting roller and between the second cutting roller and the third cutting roller, or the wound cutting wire forms the first cutting wire net, the second cutting wire net, and the third cutting wire net for cutting the workpiece between the first cutting roller and the second cutting roller, between the second cutting roller and the third cutting roller, and between the fourth cutting roller and the first cutting roller.

[0012] In certain embodiments of the present application, at least one cutting roller in the cutting unit is provided with a traction mechanism for traction of the at least one cutting roller to move so as to adjust the cutting line length or cutting angle of the cutting wire web.

[0013] In some embodiments of the present application, the wire wheel driving member includes a wire wheel motor.

[0014] In certain embodiments of the present application, the cutting wire is a steel diamond wire or a tungsten diamond wire.

[0015] In certain embodiments of the present application, the slicer further includes a tension control unit, which includes a tension sensor, a tension wheel, and a tension adjustment mechanism associated with the tension wheel.

[0016] In certain embodiments of the present application, the running speed of the cutting line is 2000 m / min to 3500 m / min.

[0017] The slicer disclosed in the present application includes a frame, a wire reel unit, a cutting unit, a wire unit, a cutting wire, and a feeding jig. The cutting wire is associated with a wire storage drum in the wire reel unit and is wound around a cutting roller of the cutting unit and a wire wheel of the wire unit to form a cutting wire net between the cutting rollers. The wire storage drum is provided with a wire storage drum driving member, the cutting roller is provided with a cutting roller driving member, and the wire wheel is provided with a wire wheel driving member. The wire wheel driving member operates synchronously with the wire storage drum driving member and the cutting wheel driving member. In this way, during the cutting operation, the synchronization of the cutting roller, the wire wheel and the cutting wire can be ensured without problems such as pulling and tension difference on both sides. The tension balance of the cutting wire is achieved, the loss of the cutting wire is reduced, the risk of wire breakage of the cutting wire is greatly reduced, and the thinning of the cutting wire becomes possible. At the same time, more tension can be applied to the cutting wire for slicing operations, thereby improving the cutting efficiency and achieving the purpose of reducing costs and increasing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The specific features of the present application are shown in the attached claims. The features and advantages of the invention involved in the present application can be better understood by referring to the exemplary embodiments and drawings described in detail below. A brief description of the drawings is as follows:

[0019] Figure 1 Shown is a schematic structural diagram of a slicer of the present application in one embodiment.

[0020] Figure 2 It is a schematic diagram of the corresponding relationship among the wire-retracting and -releasing unit, the cutting unit, the wire unit and the cutting wire in the slicer of the present application in one embodiment. DETAILED DESCRIPTION

[0021] The following is an explanation of the implementation of the present application by means of specific embodiments. People familiar with the art can easily understand other advantages and effects of the present application from the contents disclosed in this specification.

[0022] In the following description, with reference to the accompanying drawings, several embodiments of the present application are described. It should be understood that other embodiments may also be used, and mechanical composition, structure, electrical and operational changes may be made without departing from the spirit and scope of the present disclosure. The following detailed description should not be considered restrictive, and the scope of the embodiments of the present application is limited only by the claims of the published patents. The terms used here are only to describe specific embodiments and are not intended to limit the present application. Spatially related terms, such as "upper", "lower", "left", "right", "below", "below", "lower", "above", "upper", etc., may be used in the text to facilitate the description of the relationship between an element or feature shown in the figure and another element or feature.

[0023] Although the term first, second etc. is used to describe various elements or parameters in this article in some instances, these elements or parameters should not be limited by these terms.These terms are only used to distinguish one or parameter part from another or parameter.For example, the first direction can be referred to as the second direction, and similarly, the second direction can be referred to as the first direction, and for example, the first cutting device can be referred to as the second cutting device, and similarly, the second cutting device can be referred to as the first cutting device, without departing from the scope of the various described embodiments.

[0024] Furthermore, as used in this article, the singular forms "one", "an" and "the" are intended to include plural forms as well, unless there is an indication to the contrary in the context. It should be further understood that the terms "comprise", "include" indicate the presence of the described features, steps, operations, elements, components, projects, kinds, and / or groups, but do not exclude the presence, occurrence or addition of one or more other features, steps, operations, elements, components, projects, kinds, and / or groups. The terms "or" and "and / or" used herein are interpreted as inclusive, or mean any one or any combination. Therefore, "A, B or C" or "A, B and / or C" means "any of the following: A; B; C; A and B; A and C; B and C; A, B and C". Exceptions to this definition will only occur when the combination of elements, functions, steps or operations is inherently mutually exclusive in some way.

[0025] The present application is further described in detail below in conjunction with the accompanying drawings and specific embodiments. The technical solutions in the embodiments of the present application are clearly and completely described. Obviously, the described embodiments are only embodiments of a part of the present application, not all embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application. The "one embodiment", "implementation method" or similar expressions mentioned in the whole text of this specification mean that the specific features, structures or characteristics described together with the implementation method are included in at least one embodiment of the present application. Therefore, in the whole text of this specification, the appearance of the phrases "in one embodiment", "in an implementation method" and similar expressions may (but not necessarily) relate to the same implementation method.

[0026] See also Figure 1 and Figure 2 , Figure 1 Shown is a schematic diagram of the structure of a slicer in one embodiment of the present application, Figure 2The following is a schematic diagram of the corresponding relationship between the retractable wire unit, the cutting unit, the wire unit and the cutting wire in the slicer of the present application in one embodiment. As shown in the figure, the slicer disclosed in the present application is used to slice the workpiece to be cut. In the present embodiment, the workpiece is made of a hard material (such as quartz crystal, semiconductor, rare earth material, sapphire, etc.), and the workpiece is cylindrical, including a relative top surface, a bottom surface and a circumferential surface located between the top surface and the bottom surface. In the present embodiment, the slicer at least includes: a frame 1, a retractable wire unit, a cutting unit, a wire unit, a cutting wire 5 and a feeding jig.

[0027] The wire-reeling and wire-taking unit comprises a first wire storage drum 21 and a second wire storage drum 23 provided on the frame 1, and the first wire storage drum 21 and the second wire storage drum 23 are used for winding the cutting wire 5, that is, one end of the cutting wire 5 is connected to the first wire storage drum 21 and then wound around the first wire storage drum 21, and the other end of the cutting wire 5 is connected to the second wire storage drum 23 and then wound around the second wire storage drum 23. In the present application, the slicer adopts a reciprocating cutting process, that is, the workpiece is cut by driving the cutting wire to reciprocate, so the first wire storage drum 21 and the second wire storage drum 23 are the wire-reeling drum and the wire-taking drum to each other, that is, in one case (for example, when the cutting wire is running forward), the first wire storage drum 21 is the wire-reeling drum and the second wire storage drum 23 is the wire-taking drum, and in another case (for example, when the cutting wire is running reversely), the second wire storage drum 23 is the wire-reeling drum and the first wire storage drum 21 is the wire-taking drum.

[0028] In addition, the first wire storage drum and the second wire storage drum are also configured with a wire storage drum driving member.

[0029] In some embodiments, the first wire drum is equipped with a first wire drum drive and the second wire drum is equipped with a second wire drum drive. In practical applications, the wire drum drive may be, for example, a wire drum motor. In some embodiments, the wire drum motor may be, for example, a wire drum servo motor. Figure 1 and Figure 2 In the illustrated embodiment, the first wire drum 21 and the second wire drum 23 are respectively arranged on the left and right sides of the frame 1, and the first wire drum 21 is equipped with a first wire drum motor (not shown in the figure) as a first wire drum driving member, and the output shaft of the first wire drum motor is connected to the bearing of the first wire drum 21, and the first wire drum motor can be used to drive the first wire drum 21 to rotate forward and reverse to realize the retraction and winding of the cutting line, and the second wire drum 23 is equipped with a second wire drum motor 24 as a second wire drum driving member, and the output shaft of the second wire drum motor 24 is connected to the bearing of the second wire drum 23, and the second wire drum motor 24 can be used to drive the second wire drum 23 to rotate forward and reverse to realize the retraction and winding of the cutting line.

[0030] In some embodiments, the first wire drum and the second wire drum are equipped with a common wire drum driving member. For example, the first wire drum and the second wire drum are coaxially arranged and disposed on one side of the frame, and the wire drum driving member may include a wire drum motor and a transmission shaft, the transmission shaft passes through the axial hole between the first wire drum and the second wire drum, the output end of the wire drum motor is connected to the transmission shaft through a coupling, and the wire drum motor can be used to simultaneously drive the first wire drum and the second wire drum to rotate forward and reverse to achieve the winding and release of the cutting line.

[0031] The cutting unit is used to form a cutting line network and slice the workpiece with cutting. The cutting unit includes at least two cutting rollers arranged on the frame, wherein each cutting roller is equipped with a cutting roller driving member. In some embodiments, the cutting roller driving member is a cutting roller motor, and the output shaft of the cutting roller motor is connected to the bearing of the cutting roller. The cutting roller motor can be used to drive the cutting roller to rotate forward and reverse to drive the reciprocating movement of the cutting line. In some embodiments, the cutting roller motor can be, for example, a cutting roller servo motor.

[0032] In some embodiments, the cutting unit includes a first cutting roller and a second cutting roller, and the wound cutting wire forms a cutting wire net for cutting the workpiece between the first cutting roller and the second cutting roller. For example, in some embodiments, the cutting unit includes a first cutting roller and a second cutting roller, the first cutting roller and the second cutting roller are respectively arranged on the left and right sides of the frame, the first cutting roller and the second cutting roller can be located at the same horizontal height, the cutting wire is sequentially wound around the first cutting roller and the second cutting roller and forms a cutting wire net between the first cutting roller and the second cutting roller, and each section of the cutting wire saw in the cutting wire net is parallel to each other and arranged horizontally.

[0033] For example, in some embodiments, the cutting unit includes a first cutting roller and a second cutting roller, the first cutting roller and the second cutting roller are respectively arranged on the upper and lower sides of the frame, the first cutting roller and the second cutting roller can be located in the same vertical direction, the cutting wire is wound around the first cutting roller and the second cutting roller in sequence and forms a cutting wire net between the first cutting roller and the second cutting roller, and each segment of the cutting wire saw in the cutting wire net is parallel to each other and arranged vertically. Of course, the arrangement of the first cutting roller and the second cutting roller can still be changed in other ways, so that each segment of the cutting wire saw in the cutting wire net formed between the first cutting roller and the second cutting roller has different angle changes.

[0034] In some embodiments, the cutting unit includes a first cutting roller, a second cutting roller, and a third cutting roller, wherein the first cutting roller, the second cutting roller, and the third cutting roller form a triangle, and a wound cutting line forms a cutting line network for cutting the workpiece between the first cutting roller and the second cutting roller.

[0035] For example, in some embodiments, the cutting unit includes a first cutting roller, a second cutting roller, and a third cutting roller, the first cutting roller and the second cutting roller are respectively arranged on the left and right sides of the frame, the first cutting roller and the second cutting roller can be located at the same horizontal height, the third cutting roller is arranged between the first cutting roller and the second cutting roller and is located above or below the same horizontal plane as the first cutting roller and the second cutting roller, the cutting wire is sequentially wound around the first cutting roller, the second cutting roller, and the third cutting roller and forms a cutting wire net between the first cutting roller and the second cutting roller, and each segment of the cutting wire saw in the cutting wire net is parallel to each other and arranged horizontally.

[0036] For example, in some embodiments, the cutting unit includes a first cutting roller, a second cutting roller, and a third cutting roller, the first cutting roller and the second cutting roller are respectively arranged on the upper and lower sides of the frame, the first cutting roller and the second cutting roller can be located in the same vertical direction, the third cutting roller is arranged between the first cutting roller and the second cutting roller and is located on the left or right side of the same horizontal plane as the first cutting roller and the second cutting roller, the cutting wire is sequentially wound around the first cutting roller, the second cutting roller, and the third cutting roller and forms a cutting wire net between the first cutting roller and the second cutting roller, and each section of the cutting wire saw in the cutting wire net is parallel to each other and arranged vertically.

[0037] Of course, according to the teachings of the present application, the settings of the first cutting roller, the second cutting roller and the third cutting roller can still be changed in other ways, so that each section of the cutting wire saw in the cutting wire net formed by the wound cutting wire between the first cutting roller, the second cutting roller and the third cutting roller has different angle changes.

[0038] In such Figure 1 and Figure 2In the illustrated embodiment, the cutting unit includes a first cutting roller 31, a second cutting roller 33, and a third cutting roller 35, each of which is equipped with a cutting roller motor, that is, the first cutting roller 31 is equipped with a first cutting roller motor 32, the second cutting roller 33 is equipped with a second cutting roller motor 34, and the third cutting roller 35 is equipped with a third cutting roller motor 36. In addition, the first cutting roller 31 and the second cutting roller 33 are respectively arranged on the left and right sides of the frame 1, the first cutting roller 31 and the second cutting roller 33 are located at the same horizontal height, the third cutting roller 35 is arranged between the first cutting roller 31 and the second cutting roller 33 and is located below the same horizontal plane of the first cutting roller 31 and the second cutting roller 33, the cutting wire 5 is sequentially wound around the first cutting roller 31, the second cutting roller 33, and the third cutting roller 35 and forms a cutting wire net between the first cutting roller 31 and the second cutting roller 33, and each section of the cutting wire saw in the cutting wire net is parallel to each other and arranged horizontally.

[0039] In some embodiments, the cutting unit includes a first cutting roller, a second cutting roller, and a third cutting roller, wherein the first cutting roller, the second cutting roller, and the third cutting roller form a triangle, and the wound cutting lines form a first cutting line net and a second cutting line net for cutting the workpiece between the first cutting roller and the second cutting roller and between the first cutting roller and the third cutting roller, respectively.

[0040] For example, in some embodiments, the cutting unit includes a first cutting roller, a second cutting roller, and a third cutting roller, the second cutting roller and the third cutting roller are respectively arranged on the left and right sides of the frame, the second cutting roller and the third cutting roller can be located at the same horizontal height, the first cutting roller is arranged between the second cutting roller and the third cutting roller and is located above or below the same horizontal plane as the second cutting roller and the third cutting roller, the cutting line is sequentially wound around the first cutting roller, the second cutting roller, and the third cutting roller and forms a first cutting line net and a second cutting line net between the first cutting roller and the second cutting roller and between the first cutting roller and the third cutting roller.

[0041] In some embodiments, the cutting unit includes a first cutting roller, a second cutting roller, and a third cutting roller, the second cutting roller and the third cutting roller are respectively arranged on the upper and lower sides of the frame, the second cutting roller and the third cutting roller can be located in the same vertical direction, the first cutting roller is arranged between the second cutting roller and the third cutting roller and is located on the left or right side of the same vertical plane of the second cutting roller and the third cutting roller, the cutting line is sequentially wound around the first cutting roller, the second cutting roller, and the third cutting roller and forms a first cutting line net and a second cutting line net between the first cutting roller and the second cutting roller and between the first cutting roller and the third cutting roller.

[0042] Of course, the settings of the first cutting roller, the second cutting roller and the third cutting roller can still be changed in other ways, so that the wound cutting wire forms a first cutting wire net between the first cutting roller and the second cutting roller and between the first cutting roller and the third cutting roller, and each section of the cutting wire saw in the second cutting wire net has a different angle change.

[0043] In some embodiments, the cutting unit includes a first cutting roller, a second cutting roller, a third cutting roller, and a fourth cutting roller, the first cutting roller, the second cutting roller, the third cutting roller, and the fourth cutting roller form a quadrilateral, and the wound cutting line forms at least one cutting line net between the first cutting roller, the second cutting roller, the third cutting roller, and the fourth cutting roller. For example, in some embodiments, the cutting unit includes a first cutting roller, a second cutting roller, a third cutting roller, and a fourth cutting roller, the first cutting roller and the second cutting roller are arranged at the upper part of the frame and arranged left and right, the first cutting roller and the second cutting roller can be located at the same horizontal height, the third cutting roller and the fourth cutting roller are arranged at the lower part of the frame and arranged left and right, the third cutting roller and the fourth cutting roller can be located at the same horizontal height, and the first cutting roller, the second cutting roller, the third cutting roller, and the fourth cutting roller can form a trapezoid. In some examples, the wound cutting line forms a cutting line net for cutting the workpiece between the first cutting roller and the second cutting roller. In some examples, the wound cutting wires respectively form a first cutting wire net and a second cutting wire net for cutting the workpiece between the first cutting roller and the fourth cutting roller and between the second cutting roller and the third cutting roller. In some examples, the wound cutting wires respectively form a first cutting wire net, a second cutting wire net and a third cutting wire net for cutting the workpiece between the first cutting roller and the second cutting roller, between the second cutting roller and the third cutting roller, and between the fourth cutting roller and the first cutting roller.

[0044] Of course, the settings of the first cutting roller, the second cutting roller, the third cutting roller, and the fourth cutting roller can still be changed in other ways, so that the cutting wire saws of each section in the cutting wire net between the first cutting roller and the second cutting roller, the cutting wire saws of each section in the first cutting wire net and the second cutting wire net formed between the first cutting roller and the fourth cutting roller and between the second cutting roller and the third cutting roller, or the cutting wire saws of each section in the first cutting wire net, the second cutting wire net, and the third cutting wire net formed between the first cutting roller and the second cutting roller, between the second cutting roller and the third cutting roller, and between the fourth cutting roller and the first cutting roller have different angle changes.

[0045] In addition, at least one cutting roller in the cutting unit is provided with a traction mechanism for traction of the at least one cutting roller to move so as to adjust the cutting line length or cutting angle of the cutting wire web.

[0046] In certain embodiments, the traction mechanism may include a traction rail and a traction drive.

[0047] For example, in some embodiments, the cutting unit includes a first cutting roller and a second cutting roller, and the first cutting roller and the second cutting roller are respectively arranged on the left and right sides of the frame and are located at the same horizontal height (or the same vertical direction), then the traction guide rail is horizontally arranged (or vertically arranged), and the roller shaft of the first cutting roller and the roller shaft of the second cutting roller are arranged on the traction guide rail, and the traction drive member can be used to drive at least one of the first cutting roller and the second cutting roller (the first cutting roller, the second cutting roller, or the first cutting roller and the second cutting roller) to move along the traction guide rail, and the length of each segment of the cutting wire saw in the cutting wire net between the first cutting roller and the second cutting roller is adjusted by changing the position of the first cutting roller and / or the second cutting roller. Of course, the change in the length of each segment of the cutting wire saw in the cutting wire net between the first cutting roller and the second cutting roller will also change the tension of each segment of the cutting wire saw in the cutting wire net.

[0048] In some embodiments, the cutting unit includes a first cutting roller, a second cutting roller, and a third cutting roller, and the first cutting roller, the second cutting roller, and the third cutting roller form a triangle. For example, the first cutting roller and the second cutting roller are respectively arranged on the left and right sides of the frame, the first cutting roller and the second cutting roller can be located at the same horizontal height (or the same vertical direction), and the third cutting roller is arranged between the first cutting roller and the second cutting roller and is located above or below the same horizontal plane of the first cutting roller and the second cutting roller (the left side or the right side of the same vertical direction), so that the first cutting roller and the second cutting roller can be movably arranged on a first traction guide rail arranged horizontally (or vertically), and the third cutting roller can be movably arranged on a second traction guide rail arranged vertically (or horizontally), and at least one of the first cutting roller and the second cutting roller (the first cutting roller, the second cutting roller, or the first cutting roller and the second cutting roller) can be driven to move along the first traction guide rail by a first traction driving member, and the third cutting roller can be driven to move along the second traction guide rail by a second traction driving member. By changing the positions of the first cutting roller, the second cutting roller and the third cutting roller, the length, tension and angle of each cutting wire saw section in the cutting wire web can be adjusted.

[0049] For example, in Figure 1 and Figure 2In the embodiment shown, when the second traction drive member drives the third cutting roller to rise vertically along the second traction guide rail, the first traction drive member drives the first cutting roller and the second cutting roller to translate in opposite directions along the first traction guide rail; or, when the second traction drive member drives the third cutting roller to descend vertically along the second traction guide rail, the first traction drive member drives the first cutting roller and the second cutting roller to translate in opposite directions along the first traction guide rail. The length and tension of each cutting wire saw segment in the cutting wire web between the first cutting roller and the second cutting roller are adjusted by changing the positions of the first cutting roller, the second cutting roller and the third cutting roller.

[0050] In some embodiments, the cutting unit includes a first cutting roller, a second cutting roller, a third cutting roller, and a fourth cutting roller, and the first cutting roller, the second cutting roller, the third cutting roller, and the fourth cutting roller form a quadrilateral. For example, the first cutting roller and the second cutting roller are arranged at the upper part of the frame and arranged left and right, the first cutting roller and the second cutting roller can be located at the same horizontal height, the third cutting roller and the fourth cutting roller are arranged at the lower part of the frame and arranged left and right, the third cutting roller and the fourth cutting roller can be located at the same horizontal height, and the first cutting roller, the second cutting roller, the third cutting roller, and the fourth cutting roller can form a trapezoid. In this way, the first cutting roller and the second cutting roller can be movably arranged on a first horizontally arranged traction guide rail, the third cutting roller can be movably arranged on a second horizontally arranged traction guide rail, and the first traction drive can be used to drive at least one of the first cutting roller and the second cutting roller (the first cutting roller, the second cutting roller, or the first cutting roller and the second cutting roller) to move along the first traction guide rail, and the second traction drive can be used to drive the third cutting roller to move along the second traction guide rail. For example, when the first traction drive member drives the first cutting roller and the second cutting roller to translate in opposite directions along the first traction guide rail, the second traction drive member drives the third cutting roller and the fourth cutting roller to translate in opposite directions along the second traction guide rail. When the first traction drive member drives the first cutting roller and the second cutting roller to translate in opposite directions along the first traction guide rail, the second traction drive member drives the third cutting roller and the fourth cutting roller to translate in opposite directions along the second traction guide rail. By changing the positions of the first cutting roller, the second cutting roller, the third cutting roller, and the fourth cutting roller, the length, tension, and angle of each cutting wire saw in the cutting wire web can be adjusted.

[0051] The wire unit includes a wire wheel and a wire wheel driving member for driving the wire wheel. The wire wheel is arranged between the wire taking-up and unwinding unit and the cutting unit. Specifically, one or more wire wheels are arranged between the first wire storage drum of the taking-up and unwinding unit and the cutting roller of the cutting unit, and one or more wire wheels are arranged between the second wire storage drum of the taking-up and unwinding unit and the cutting roller of the cutting unit. Each wire wheel is equipped with a wire wheel driving member. In some embodiments, the wire wheel driving member is a wire wheel motor, and the output shaft of the wire wheel motor is connected to the bearing of the wire wheel. The wire wheel motor can be used to drive the wire wheel to rotate forward and reverse to match the reciprocating movement of the cutting line. In some embodiments, the wire wheel motor can be, for example, a wire wheel servo motor.

[0052] In such Figure 1 and Figure 2 In the illustrated embodiment, a plurality of first wire pulleys 41 are provided between the first wire storage drum 21 and the first cutting roller 31, and each of the first wire pulleys 41 is provided with a first wire pulley motor 42. A plurality of second wire pulleys 43 are provided between the second wire storage drum 23 and the second cutting roller 33, and each of the second wire pulleys 43 is provided with a second wire pulley motor 44. As described above, one end of the cutting wire is connected to the first wire storage drum, and the other end of the cutting wire is connected to the second wire storage drum. The cutting wire is sequentially wound around the first wire storage drum, at least two cutting rollers, the wire pulley, and the second wire storage drum to form a cutting wire net between the at least two cutting rollers.

[0053] In such Figure 1 and Figure 2 In the illustrated embodiment, one end of the cutting wire 5 is connected to and wound around the first wire storage drum 21, and the other end of the cutting wire 5 is connected to and wound around the second wire storage drum 23. The cutting wire 5 is sequentially wound around each first wire wheel 41, the first cutting roller 31, the second cutting roller 33, the third cutting roller 35, and each second wire wheel 43, and a cutting wire net is formed between the first cutting roller 31 and the second cutting roller 33, wherein each section of the cutting wire saw in the cutting wire net is parallel to each other and horizontally arranged.

[0054] In the present application, the wire wheel motor is used to control the corresponding wire wheel to realize forward and reverse rotation, the first wire wheel motor 42 is used to control the corresponding first wire wheel 41 to realize forward and reverse rotation, and the second wire wheel motor 44 is used to control the corresponding second wire wheel 43 to realize forward and reverse rotation, so as to adapt to the reciprocating movement of the cutting line 5 and realize synchronization, that is, the linear speed of the first wire wheel 41 driven by the first wire wheel motor 42 is consistent with the moving speed of the cutting line 5, and the linear speed of the second wire wheel 43 driven by the second wire wheel motor 44 is consistent with the moving speed of the cutting line 5.

[0055] For example, when the cutting line 5 is driven (for example, driven by the first wire storage drum 21 and each cutting roller 31, 33, 35) to run in the forward high-speed direction, the wire wheel motor drives the wire wheel (the first wire wheel motor 42 drives the first wire wheel 41, and the second wire wheel motor 44 drives the second wire wheel 43) to rotate in the forward high-speed direction to keep synchronization with the cutting line 5 in the same direction; when the cutting line 5 is driven (for example, driven by the first wire storage drum 21 and each cutting roller 31, 33, 35) to decelerate from the forward high-speed operation to a stop, the wire wheel motor drives the wire wheel (the first wire wheel motor 42 drives the first wire wheel 41, and the second wire wheel motor 44 drives the second wire wheel 43) to rotate in the forward direction to decelerate until it stops, so as to keep synchronization with the cutting line 5 in the same direction. step; when the cutting line 5 is driven (for example, driven by the second wire storage drum 23 and each cutting roller 31, 33, 35) to run in reverse high speed, the wire wheel motor drives the wire wheel (the first wire wheel motor 42 drives the first wire wheel 41, and the second wire wheel motor 44 drives the second wire wheel 43) to rotate in reverse high speed to keep synchronization with the cutting line 5 in the same direction; when the cutting line 5 is driven (for example, driven by the first wire storage drum 21 and each cutting roller 31, 33, 35) to decelerate from reverse high speed operation to a stop, the wire wheel motor drives the wire wheel (the first wire wheel motor 42 drives the first wire wheel 41, and the second wire wheel motor 44 drives the second wire wheel 43) to rotate in reverse and decelerate until it stops to keep synchronization with the cutting line 5 in the same direction.

[0056] Since the guide wheels (the first guide wheel motor 42 drives the first guide wheel 41, and the second guide wheel motor 44 drives the second guide wheel 43) are driven by the guide wheel motor, it can be ensured that the guide wheels (the first guide wheel 41 and the second guide wheel 43) are kept in sync with the operation of the cutting line 5, thereby avoiding the problem of uneven tension of the guide wheels (the first guide wheel 41 and the second guide wheel 43) located on the opposite sides of the cutting line 5 due to the large friction between the guide wheels (the first guide wheel 41 and the second guide wheel 43) and the cutting line 5, especially compared with the prior art of the first first guide wheel adjacent to the first wire storage drum and the first second guide wheel adjacent to the second wire storage drum (in the prior art, since the first guide wheel has no guide wheel driving part, the start, high-speed operation and stop of the first guide wheel all rely on the friction traction of the cutting line coming out of the first wire storage drum. For example, when the cutting line is driven to slow down from high-speed operation to stop, The first wire wheel is still rotating at a high speed due to inertia, and it has to slow down until it stops through the friction of the slowed or stopped cutting wire. Under the action of this friction, a large pressure difference exists in the wire segment of the cutting wire on both sides of the first wire wheel, which will greatly increase the tension of the wire segment of the cutting wire located between the first wire wheel and the first wire storage drum. Similarly, since the second wire wheel has no wire wheel driving part, the start, high-speed operation and stop of the second wire wheel all rely on the friction traction of the cutting wire coming out of the second wire storage drum, which makes the wire segment of the cutting wire on both sides of the second wire wheel have a large pressure difference, which will greatly increase the tension of the wire segment of the cutting wire located between the second wire wheel and the second wire storage drum. The effect of balancing the tension is particularly obvious, which greatly reduces the risk of breaking of the cutting wire 5. At the same time, it also reduces the loss of the cutting wire 5 and the wire wheels (the first wire wheel 41 and the second wire wheel 43), prolongs their respective service life, and has a great cost advantage.

[0057] During the slicing operation, the cutting wire has to withstand high-frequency reciprocating motion and great tension. In actual production applications, the performance indicators of the cutting wire are mainly reflected in cutting ability, cutting quality, and wire breakage rate.

[0058] In some embodiments, the cutting wire may be a steel wire diamond wire, which is made of a steel wire as a main wire and a cutting blade material (such as corundum) attached to the steel wire. The corundum distribution density and consolidation strength, corundum cutting ability, and fatigue resistance of the steel wire directly affect the performance of the steel wire diamond wire.

[0059] With the industry's demand for cost reduction and efficiency improvement, the thinning of cutting wires is a major trend. Smaller wire diameters and medium particle sizes are conducive to reducing cutting losses and production costs. Among them, with regard to reducing the busbar diameter, with the trial and improvement of technology, the busbar diameter of the existing mainstream steel wire diamond wire has been refined from the previous 42μm~47μm to 36μm~40μm, but it is very difficult to continue to thin the wire. The steel wire diamond wire close to 35μm has problems such as low breaking tension and insufficient cutting ability, and it is very easy to break.

[0060] Taking steel diamond wire as an example, during the silicon wafer cutting process, the linear speed of the steel diamond wire mesh accelerates from a stationary state to 2000m / min to 3500m / min within 3 to 4 seconds, and continues to run at a linear speed of 2000m / min to 3500m / min for about 30 seconds, and then decelerates from 2000m / min to 3500m / min to 0m / min within 3 to 4 seconds; then reversely accelerates from a stationary state to 2000m / min to 3500m / min within 3 to 4 seconds, and continues to run at a linear speed of 2000m / min to 3500m / min for about 30 seconds, and then decelerates from 2000m / min to 3500m / min to 0m / min within 3 to 4 seconds, and repeats the process over and over again. Under such extreme acceleration, extreme speed running, and extreme speed deceleration operations, the steel diamond wire is at risk of breaking.

[0061] Broken wires may damage the workpiece being cut or reduce production efficiency due to the rearrangement of the wire network. The cutting time of a silicon rod is about 1.5 to 2 hours, and each wiring after a broken wire takes more than 1 hour, which often occupies the time of technicians and depends on the technical level of the technicians.

[0062] In view of this, the industry has focused its attention on other busbar materials, among which tungsten wire is receiving more and more attention because of its high breaking force and high corrosion resistance. Therefore, in some embodiments, the cutting wire may be, for example, a tungsten diamond wire, which is made of tungsten wire as the busbar and cutting blade material (such as corundum) on the tungsten wire. However, because the existing tungsten wire production capacity available for industry is limited, the tungsten wire busbar is about 4 to 5 times the price of conventional high-carbon steel busbar, resulting in a higher price for tungsten diamond wire, about 2 to 4 times the price of conventional steel wire diamond wire, which is also a major obstacle to its widespread application.

[0063] In the present application, by configuring a corresponding wire wheel driving component for each wire wheel, the driving component is used to drive the wire wheel to rotate forward and reverse to keep in the same direction as the operation of the cutting wire, thereby basically eliminating the friction and pulling of the wire wheel on the cutting wire, ensuring the tension balance of the cutting wire, and greatly reducing the risk of the cutting wire 5 breaking. In this way, the thinning of the cutting wire becomes a feasible improvement, regardless of whether the cutting wire is a steel wire diamond wire or a tungsten wire diamond wire. For example, for a steel wire diamond wire, it can have the ability to be further thinned. In this way, under the existing production conditions and workpiece products, the maximum cost optimization can be achieved.

[0064] In addition, in the prior art, in order to reduce the risk of wire breakage, the tension of the cutting wire provides a large redundancy. In view of the fact that the tension of the cutting wire at the wire wheel may change suddenly (the wire wheel and the cutting wire generate friction due to the inconsistency of operation, and the forward start high-speed rotation, forward deceleration stop, reverse start high-speed rotation, and reverse deceleration stop of the wire wheel all require the friction of the cutting wire to be realized), therefore, when setting the tension of the cutting wire, it cannot be set too full, and a certain redundancy must be reserved, that is, a part of the extra tension that acts on the cutting wire to drive the wire wheel to quickly increase or decrease speed (rapidly increase speed and high-speed rotation or quickly decrease speed and stop) must be reserved. For example, assuming that the tolerable tension of the cutting wire used for slicing a workpiece is about 5 Newtons (N), if the cutting wire is directly given a tension of 5 Newtons (N) for slicing when running at high speed, when the cutting wire is rapidly increased or decreased in speed, the friction force drives the wire wheel to rapidly increase or decrease in speed, and the tension of the cutting wire will suddenly change from the original 5 Newtons (N) to a higher value, such as 6 Newtons (N). This sudden change will exceed the tolerance of the cutting wire and cause wire breakage. Therefore, in view of the tension imbalance and wire breakage risk caused by the friction force driving the wire wheel to rotate or stop quickly when the cutting wire is rapidly accelerated, in the prior art, the tension that the cutting wire can obtain is about 3 Newtons (N) during slicing operations, and an additional tension of about 2 Newtons (N) must be reserved on the cutting wire to drive the wire wheel to rapidly accelerate. In this way, when the cutting wire is rapidly accelerated, the friction force drives the wire wheel to rapidly accelerate, and the tension of the cutting wire suddenly changes from about 3 Newtons (N) to 4 Newtons (N) to 5 Newtons (N), and the wire will not break. Although this method avoids the occurrence of wire breakage, it is achieved at the cost of reducing the tension of the cutting wire and reducing the cutting efficiency. Reducing the tension of the cutting wire will weaken the cutting ability of the cutting wire saw, prolong the cutting time, and reduce the cutting efficiency. In the present application, each wire wheel is equipped with a corresponding wire wheel driving component (such as a wire wheel motor), which can be used to drive the wire wheel to rotate rapidly in forward and reverse directions to keep in sync with the operation of the cutting line, thereby basically eliminating the friction and pulling of the wire wheel on the cutting line, ensuring the tension balance of the cutting line, that is, there is no need to reserve additional tension for the cutting line to drive the wire wheel to quickly increase or decrease its speed, and more tension can be applied to the cutting line, so that the cutting line can be sliced ​​under a larger tension, thereby increasing the cutting tension and correspondingly improving the cutting efficiency.

[0065] In the present application, the slicer further comprises a tension control unit, which comprises a tension sensor, a tension wheel, and a tension adjustment mechanism associated with the tension wheel.

[0066] In such Figure 1 and Figure 2In the illustrated embodiment, the tension control unit includes a tension sensor (not shown in the drawings), a tension wheel 61 , and a tension adjustment mechanism associated with the tension wheel 61 .

[0067] The tension sensor can be arranged on the inner ring of the bearing of the tension wheel 61 to measure the line tension of the cutting line 5 .

[0068] The tension adjustment mechanism is associated with the tension wheel 61, and the tension of the cutting line 5 is adjusted by changing the position of the tension wheel 61. In some embodiments, the tension adjustment mechanism may be, for example, a tension wheel swing mechanism. Figure 1 In the illustrated embodiment, the tension wheel swing mechanism includes: a swing arm 63 and a swing arm driving member 64, wherein the first end of the swing arm 63 is connected to the axis of the tension wheel 61, and the second end of the swing arm 63 is connected to the swing arm driving member 64, the swing arm driving member 64 is fixedly arranged on the frame 1 or the mounting frame of the frame 1, and the swing arm driving member 64 is used to drive the swing arm 63 to swing with the second end of the swing arm 63 as a fulcrum. In some embodiments, the swing arm driving member 64 can be, for example, a swing motor, and the swing motor 64 can be connected to the swing arm 63 through a coupling, and the swing motor 64 has a torque adjustment function. In addition, in some embodiments, the tension adjustment mechanism can also include an angle sensor, which can be arranged in the swing motor or on the coupling, and is used to measure the swing angle of the swing arm 63. In addition, in some embodiments, the tension adjustment mechanism also includes a limiter, which is used to limit the swing of the swing arm 63 from being too large, and the limiter can be, for example, a limiter rod or a limiter plate, which is arranged on opposite sides of the swing arm 63 and corresponds to the maximum swingable angle of the swing arm 63.

[0069] In practical applications, the tension wheel is located between the wire storage drum of the reel-and-reel unit and the cutting roller of the cutting unit. The tension wheel can also function as a guide wheel. Therefore, in the present application, the tension wheel can be equipped with a guide wheel driving member. The guide wheel driving member can be, for example, a guide wheel motor. Figure 1 and Figure 2 In the illustrated embodiment, the tension wheel 61 is also correspondingly configured with a wire wheel motor 62 for driving the tension wheel 61 to rotate forward and reverse to achieve rapid speed increase and decrease to keep synchronization with the cutting line 5 .

[0070] The slicer of the present application also includes a workpiece delivery jig, which is arranged on the frame and used to transport the workpiece to the cutting wire net for slicing. In some embodiments, the workpiece delivery jig has an adhesive medium for bonding the workpiece. Specifically, the adhesive medium of the workpiece delivery jig is an adhesive, which bonds a piece of glass to the workpiece. After slicing is completed, hot water is used to melt the adhesive to separate the silicon wafer and the glass. Figure 1 and Figure 2In the embodiment shown, the delivery jig may be, for example, a delivery plate or a delivery arm driven by a lifting mechanism, and the lifting mechanism is used to drive the delivery plate or the delivery arm to move up and down in the vertical direction so as to drive the workpiece on the delivery plate or the delivery arm to approach or move away from the cutting line network formed between the first cutting roller 31 and the second cutting roller 33.

[0071] The slicing machine disclosed in the present application includes a frame, a wire reel unit, a cutting unit, a wire unit, a cutting wire, and a feeding jig. The cutting wire is associated with a wire storage drum in the wire reel unit and is wound around a cutting roller of the cutting unit and a wire wheel of the wire unit to form a cutting wire net between the cutting rollers. The wire storage drum is provided with a wire storage drum driving member, the cutting roller is provided with a cutting roller driving member, and the wire wheel is provided with a wire wheel driving member. The wire wheel driving member operates synchronously with the wire storage drum driving member and the cutting wheel driving member. In this way, during the cutting operation, the synchronization of the cutting roller, the wire wheel and the cutting wire can be ensured without problems such as pulling and tension difference on both sides. The tension balance of the cutting wire is achieved, the loss of the cutting wire is reduced, the risk of wire breakage of the cutting wire is greatly reduced, and the thinning of the cutting wire becomes possible. At the same time, more tension can be applied to the cutting wire for slicing operations, thereby improving the cutting efficiency and achieving the purpose of reducing costs and increasing efficiency.

[0072] The above embodiments are merely illustrative of the principles and effects of the present application and are not intended to limit the present application. Anyone familiar with the technology may modify or change the above embodiments without violating the spirit and scope of the present application. Therefore, all equivalent modifications or changes made by a person of ordinary skill in the art without departing from the spirit and technical ideas disclosed in the present application shall still be covered by the claims of the present application.

Claims

1. A slicer, characterized in that: include: frame; The wire-reeling and reeling unit comprises a first wire storage drum, a second wire storage drum, and a wire storage drum driving member arranged on the frame; A cutting unit, comprising at least two cutting rollers arranged on the frame, wherein each cutting roller is provided with a cutting roller driving member; A wire unit, comprising a wire wheel and a wire wheel driving member for driving the wire wheel; a cutting wire, one end of which is connected to the first wire storage drum, and the other end of which is connected to the second wire storage drum, and the cutting wire is sequentially wound around the first wire storage drum, at least two cutting rollers, a guide wheel, and the second wire storage drum to form a cutting wire net between the at least two cutting rollers; and The workpiece conveying jig is arranged on the frame and is used for conveying the workpiece to be cut to the cutting wire net between the at least two cutting rollers for cutting.

2. The slicer according to claim 1, characterized in that: The first wire storage drum is configured with a first wire storage drum driving member and the second wire storage drum is configured with a second wire storage drum driving member; or, the first wire storage drum and the second wire storage drum are configured with a common wire storage drum driving member.

3. The slicer according to claim 1, characterized in that: The cutting unit comprises a first cutting roller and a second cutting roller, and a wound cutting wire forms a cutting wire net for cutting a workpiece between the first cutting roller and the second cutting roller.

4. The slicer according to claim 1, characterized in that: The cutting unit includes a first cutting roller, a second cutting roller, and a third cutting roller. The first cutting roller, the second cutting roller, and the third cutting roller form a triangle. The wound cutting wire forms a cutting wire net for cutting the workpiece between the first cutting roller and the second cutting roller, or the wound cutting wire forms a first cutting wire net and a second cutting wire net for cutting the workpiece between the first cutting roller and the second cutting roller and between the first cutting roller and the third cutting roller, respectively.

5. The slicer according to claim 1, characterized in that: The cutting unit comprises a first cutting roller, a second cutting roller, a third cutting roller, and a fourth cutting roller, wherein the first cutting roller, the second cutting roller, the third cutting roller, and the fourth cutting roller form a quadrilateral; the wound cutting wire forms a cutting wire net for cutting the workpiece between the first cutting roller and the second cutting roller, and the wound cutting wire forms a first cutting wire net and a second cutting wire net for cutting the workpiece between the first cutting roller and the fourth cutting roller and between the second cutting roller and the third cutting roller respectively; Alternatively, the wound cutting wires respectively form a first cutting wire web, a second cutting wire web and a third cutting wire web for cutting the workpiece between the first cutting roller and the second cutting roller, between the second cutting roller and the third cutting roller and between the fourth cutting roller and the first cutting roller.

6. The slicer according to claim 1, characterized in that: At least one cutting roller in the cutting unit is provided with a traction mechanism for traction of the at least one cutting roller to move so as to adjust the cutting line length or cutting angle of the cutting wire web.

7. The slicer according to claim 1, characterized in that: The wire wheel driving member includes a wire wheel motor.

8. The slicer according to claim 1, characterized in that: The cutting wire is a steel diamond wire or a tungsten diamond wire.

9. The slicer according to claim 1, characterized in that: The invention also comprises a tension control unit, which comprises a tension sensor, a tension wheel, and a tension adjustment mechanism associated with the tension wheel.

10. The slicer according to claim 1, characterized in that: The running speed of the cutting line is 2000 m / min to 3500 m / min.

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