Coating equipment
By setting limiting parts on both sides of the bearing block and using insulating materials, the displacement of the bearing block caused by heating of the vacuum coating equipment is solved, the problems of particle pollution and electrical connection instability are reduced, and the stability of the coating equipment is improved. and efficiency.
Patent Information
- Application Number
- CN202323553354.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2023-12-25
- Publication Date
- 2025-01-17
- Estimated Expiration
- 2033-12-25
AI Technical Summary
In vacuum coating technology, the internal components of the coating equipment are displaced due to heating expansion, resulting in particle contamination and unstable electrical connections.
Limiting parts are provided on both sides of the carrier block to limit their movement in the length of the paddle, reduce displacement, and prevent current interference through insulating materials and multi-layer structural design.
It effectively reduces the friction and electrical connection instability between the carrier block and the carrier, reduces the risk of particle pollution and weakened current feeding, and improves the stability and efficiency of the coating equipment.
Smart Images
Figure CN222362155U_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of vacuum coating, and in particular to coating equipment. Background Art
[0002] In the field of vacuum coating technology, it is usually necessary to heat the substrate to provide the coating process conditions. In the related art, when the coating equipment is heated, the components inside the coating equipment will expand due to heat and thus move, and the boat block used to carry the carrier will move in the axial direction of the propeller, resulting in changes in the contact surface between the boat block and the carrier, which will cause particle contamination on the one hand and affect the electrical connection between the boat block and the carrier on the other hand. Utility Model Content
[0003] The embodiments of the present application provide a coating device capable of reducing the displacement of a boat block.
[0004] The embodiment of the present application provides a coating device. The coating device includes a paddle rod, a boat support block, a carrier and a limiter. The boat support block is arranged on the paddle rod. The carrier is arranged on the boat support block. The limiter is made of insulating material and is sleeved on the paddle rod, wherein limiters are respectively arranged on both sides of each boat support block to limit the movement of the boat support block in the extension direction of the paddle rod.
[0005] Optionally, the limiting member is arranged in a ring shape, and a clamping portion is protruded inside the limiting member, and a receiving groove is formed on at least one side of the clamping portion. The receiving groove is used to sleeve the paddle rod, and the paddle rod is also provided with a clamping groove that cooperates with the clamping portion, and the clamping portion extends into the clamping groove.
[0006] Optionally, the paddle rod includes an outer rod and an inner rod, the outer rod is hollow, the outer rod is sleeved on the inner rod, the outer rod is made of insulating material, and the elastic modulus of the inner rod is greater than the elastic modulus of the outer rod.
[0007] Optionally, the thickness of the outer rod in the radial direction is 7-8 mm; and the elastic modulus of the inner rod is greater than 450 GPa.
[0008] Optionally, the material of the outer rod is insulating ceramic, and the material of the inner rod is silicon carbide.
[0009] Optionally, the engaging groove is formed on the outer rod, or the engaging groove passes through the outer rod.
[0010] Optionally, the coating device comprises at least two paddle rods, each paddle rod is provided with a plurality of boat support blocks at intervals, and the boat support blocks are provided at positions close to the edges of the bottom of the carrier.
[0011] Optionally, the distance between any two adjacent boat blocks is alternately arranged as a first distance and a second distance, the first distance is greater than the second distance, the two boat blocks arranged at the first distance correspond to the same carrier, and the two boat blocks arranged at the second distance are arranged in the interval between three adjacent limit members.
[0012] Optionally, the coating device further comprises an electrode rod, and the electrode rod is electrically connected to the boat block.
[0013] Optionally, an insulating protrusion is provided on the outer periphery of the limiting member.
[0014] The beneficial effects of the present application are as follows: different from the prior art, by arranging limit members on both sides of each boat block, the movement of the boat block in the length direction of the paddle rod can be limited, thereby reducing the displacement under the influence of temperature and alternating stress, thereby reducing the particle contamination caused by the friction between the boat block displacement and the carrier, and reducing the weakening of the current feed caused by the reduction of the contact area between the boat block displacement and the carrier. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 It is a schematic diagram of the structure of the coating equipment of the present application;
[0016] Figure 2 yes Figure 1 A schematic cross-sectional structure diagram of a partial structure of a coating device shown;
[0017] Figure 3 yes Figure 1 A schematic cross-sectional structure diagram of an embodiment of a stopper for a coating device shown;
[0018] Figure 4 yes Figure 1 A schematic cross-sectional structure diagram of another embodiment of a limiting component of a coating device is shown. DETAILED DESCRIPTION
[0019] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.
[0020] Combination Figure 1 and Figure 2 The embodiment of the present application provides a coating device 1. The coating device 1 includes a paddle 10, a boat block 20 and a carrier 30.
[0021] The boat block 20 is arranged at intervals on the paddle rod 10. The carrier 30 is arranged on the boat block 20. The boat block 20 can be used to stably support the carrier 30, and a storage space for accommodating a substrate is provided in the carrier 30. In some embodiments, the boat block 20 can feed current into the carrier 30. After the current is passed into the carrier 30, the process gas can be ionized, thereby coating the substrate. Optionally, the coating device 1 also includes an electrode rod, which is connected to the boat block 20, so as to feed current into the boat block 20. Optionally, the carrier 30 is a graphite boat.
[0022] In some cases, the placement and removal of the carrier 30 will apply alternating stress to the paddle shaft 10, causing fatigue deformation of the paddle shaft 10, and the paddle shaft 10 and the boat block 20 will also expand during the heating process of the coating process. The above reasons will cause the boat block 20 to be displaced to varying degrees, and then cause the boat block 20 and the carrier 30 to move relative to each other, which will cause particle contamination on the one hand and unstable connection between the boat block 20 and the carrier 30 on the other hand. In order to improve the above technical problems, limiters 40 are respectively provided on both sides of each boat block 20 to limit the movement of the boat block 20 in the extension direction of the paddle shaft 10, thereby reducing the displacement of the boat block 20.
[0023] Combination Figure 3 Specifically, the stopper 40 is annularly arranged, and a clamping portion 41 is convexly arranged inside the stopper 40. A receiving groove 42 is formed on at least one side of the clamping portion 41. The receiving groove 42 is used to sleeve the paddle rod 10. The paddle rod 10 is also provided with a clamping groove 111 (combined with the clamping portion 41) that cooperates with the clamping portion 41. Figure 2 ), the engaging portion 41 extends into the engaging groove 111. The engaging portion 41 may be protruding from at least a portion of the inner circumference of the limiting member 40, or a plurality of engaging portions may be arranged at intervals on the inner circumference of the limiting member 40. In some embodiments, the interior of the limiting member 40 has a portion with a smaller inner diameter and a portion with a larger inner diameter, and the portion with a smaller inner diameter is formed with the engaging portion 41 compared to the portion with a larger inner diameter, and the portion with a larger inner diameter is formed with the engaging groove 111 compared to the portion with a smaller inner diameter. After the engaging portion 41 extends into the engaging groove 111, the cooperation of the two can limit the movement of the limiting member 40 in the axial direction of the paddle rod 10, thereby limiting the position of the limiting member 40. Furthermore, after the limiting member 40 is stably limited, it can abut against the boat block 20 to limit the movement of the boat block 20. The limiting member 40 is made of insulating material, so that the limiting member 40 can be prevented from affecting the current fed into the boat block 20, and the limiting member 40 can be prevented from conducting different boat blocks 20, thereby causing the coating device 1 to fail.
[0024] In some embodiments, the end face of the limiting member 40 abuts against the boat block 20 to limit the movement of the boat block 20 in one direction, and a limiting groove can be formed between the end faces of the two spaced-apart limiting members 40, and the boat block 20 is located in the limiting groove, so that the movement of the boat block 20 in two directions can be limited.
[0025] In some embodiments, a limiting groove is provided on one side of the engaging portion 41, and the limiting member 40 may be provided with an end surface on one side of the limiting groove abutting against the boat support block 20, or may be provided with an end surface on one side of the engaging portion 41 abutting against the boat support block 20, which is not specifically limited here. In other embodiments, both sides of the engaging portion 41 have limiting grooves, so that the sleeve of the limiting member 40 and the paddle rod 10 can be more stable.
[0026] In some embodiments, the distance between two adjacent boat blocks 20 is alternately set as a first distance and a second distance, the first distance is greater than the second distance, the two boat blocks 20 set at the first distance correspond to the same carrier 30, and the two boat blocks 20 set at the second distance are set in the interval between three adjacent limit members 40.
[0027] Specifically, it can be combined with Figure 1 , a plurality of boat blocks 20 are arranged on one of the paddle rods 10, wherein the first boat block 20 and the second boat block 20 adjacent to each other from left to right are arranged at a larger first distance, while the second boat block 20 and the third boat block 20 are arranged at a smaller second distance, and the third boat block 20 and the fourth boat block 20 are arranged at a larger second distance. The first and second boat blocks 20 spaced at the first distance correspond to the same carrier 30, and the third and fourth boat blocks 20 spaced at the first distance correspond to the same carrier 30. The second and third boat blocks 20 spaced at the second distance are arranged in the interval between three adjacent stoppers 40, so that the number of stoppers 40 can be reduced.
[0028] In some embodiments, the coating device 1 includes two oars 10 arranged at intervals, and each oar 10 is provided with a boat block 20. By providing two oars 10, and providing the boat blocks 20 on the oars 10, the two ends of the bottom of the carrier 30 can be supported, thereby improving the stability of the placement of the carrier 30. And the boat blocks 20 respectively provided on the two oars 10 can be used to connect with power ends of different polarities, so as to feed the two poles of the power supply into the carrier 30. Among them, the boat block 20 is arranged at a position close to the edge of the bottom of the carrier 30. Specifically, the edge of the bottom of the carrier 30 can be an edge in the length direction of the oar 10, or an edge in the spacing direction of the two oars 10, or an edge in both the length direction of the oar 10 and the spacing direction of the two oars 10.
[0029] For example, the boat blocks 20 provided on the two paddle rods 10 can respectively connect the carrier 30 to the positive electrode and the negative electrode, thereby feeding current into the carrier 30. Optionally, the carrier 30 is provided in a rectangular parallelepiped, and the four boat blocks 20 provided on the two paddle rods 10 are correspondingly provided at the four corners of the bottom of the carrier 30, so that the boat blocks 20 can feed current into the carrier 30 from the edge of the carrier 30, increase the portion of the carrier 30 that can ionize the process gas, and improve the coating efficiency.
[0030] Combination Figure 4 In some embodiments, an insulating protrusion 43 is provided on the periphery of the limiter 40. Specifically, during the coating process of the coating device 1, in addition to the substrate being coated, the paddle rod 10 and the limiter 40 will also be coated to varying degrees. In the field of coating technology, the film layer may be a conductive film layer. Therefore, during the coating process, the surface of the limiter 40 may be coated with a conductive film, causing the adjacent boat blocks 20 to be conductive due to the film layer on the surface of the limiter 40. In order to improve the above technical problems, the periphery of the limiter 40 of the present application may be provided with an insulating protrusion 43, wherein the cross-section of the insulating protrusion 43 is a polygon, such as a rectangle or a square. In this way, the periphery of the limiter 40 can form a discontinuous surface, so that the film layer formed on the limiter 40 can also be discontinuous. The discontinuous film layer has poor conductivity. With such a configuration, if a film layer sufficient to conduct electricity is to be formed on the periphery of the stopper 40 , it will take a longer time, so the number of times the coating equipment 1 is cleaned can be reduced, thereby increasing the effective use time of the stopper 40 .
[0031] In some embodiments, the paddle rod 10 includes an outer rod 11 and an inner rod 12 . The outer rod 11 is hollow and sleeved on the inner rod 12 . The outer rod 11 is made of insulating material, and the elastic modulus of the inner rod 12 is greater than that of the outer rod 11 .
[0032] The paddle rod 10 is used to carry or transfer the carrier 30, and the paddle rod 10 includes an outer rod 11 and an inner rod 12. The outer rod 11 is hollow, and the inner rod 12 is sleeved on the outer rod 11. Among them, the outer rod 11 is an insulating material, and the elastic modulus of the inner rod 12 is greater than the elastic modulus of the outer rod 11. The paddle rod 10 for carrying the carrier 30 can be formed by sleeved the inner rod 12 on the outer rod 11. Among them, in some coating processes, it is necessary to load current to the carrier 30, and the paddle rod 10 is required to be insulated to avoid affecting the coating process, so the outer rod 11 needs to be insulated. The elastic modulus of the inner rod 12 is greater than the elastic modulus of the outer rod 11, so that the inner rod 12 can make up for the problem of insufficient strength of the outer rod 11, so as to enhance the overall fatigue resistance and bending resistance of the paddle rod 10, and improve the structural strength of the paddle rod 10. At the same time, the outer rod 11 can also isolate the inner rod 12 from the outside world, thereby preventing the inner rod 12 from being corroded. In some embodiments, the elastic modulus of the inner rod 12 is greater than 450 GPa, such as 500 GPa or 550 GPa. A sufficient elastic modulus can enable the paddle shaft 10 to have sufficient bending strength, thereby helping to enhance the structural strength of the paddle shaft 10.
[0033] In some embodiments, the inner diameter of the outer rod 11 is the same as the outer diameter of the inner rod 12. The inner diameter of the outer rod 11 and the outer diameter of the inner rod 12 need to cooperate to form the paddle rod 10. The paddle rod 10 can be made in a variety of ways. When the paddle rod 10 is mechanically assembled, the inner diameter of the outer rod 11 and the outer diameter of the inner rod 12 need to follow mechanical tolerances. For details, please refer to the relevant national standards, which will not be repeated here. In some embodiments, when the outer rod 11 is, for example, ceramic, it can be made by sintering the outer layer of the inner rod 12. In this case, the inner diameter of the outer rod 11 and the outer diameter of the inner rod 12 are naturally consistent.
[0034] In some embodiments, the inner diameter of the outer rod 11 is greater than the outer diameter of the inner rod 12 , so as to facilitate sleeve installation of the outer rod 11 on the inner rod 12 .
[0035] In some embodiments, the diameter of the inner rod 12 is 7-8 mm, such as 7.2 mm, 7.5 mm or 7.9 mm. The thickness of the outer rod in the radial direction is 7-8 mm, and the inner diameter of the outer rod 11 is 7-8 mm, such as 7.2 mm, 7.5 mm or 7.9 mm. The outer diameter of the outer rod 11 is 21-24 mm, such as 21.5 mm, 22.5 mm or 23.5 mm.
[0036] In some embodiments, the material of the inner rod 12 is silicon carbide, and the material of the outer rod 11 is insulating ceramic. The elastic modulus and bending strength of the silicon carbide paddle 10 are superior, and silicon carbide is used as the inner rod 12 of the paddle 10 is better than materials such as stainless steel. However, since silicon carbide material can conduct electricity, in processes such as plasma enhanced chemical vapor deposition (PECVD), the paddle 10 is required to be insulated, so insulating ceramic is provided outside the silicon carbide inner rod 12 to insulate the outer layer of the paddle 10 and avoid affecting the coating process.
[0037] In some embodiments, in combination Figure 2 , the engagement groove 111 of the paddle rod 10 is opened on the outer rod 11. In other embodiments, the engagement groove 111 passes through the outer rod 11. Among them, the engagement groove 111 can be an annular groove around the paddle rod 10, so that the outer rod 11 is divided into multiple sections by the engagement groove 111, and the inner rod 12 is a complete section. During the assembly of the paddle rod 10, the multi-section outer rod 11 and the limiting member 40 between the multi-section outer rod 11 can be sequentially sleeved on the inner rod 12, which is convenient for the assembly of the paddle rod 10.
[0038] The above are merely embodiments of the present application and are not intended to limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the present application specification and drawings, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present application.
Claims
1. A coating device, characterized in that: include: Paddle pole; A boat support block, the boat support block is sleeved on the paddle rod; A carrier, arranged on the boat support block; A limit piece, which is made of insulating material and is sleeved on the paddle rod, wherein the limit pieces are respectively arranged on both sides of each of the boat support blocks to limit the movement of the boat support blocks in the extension direction of the paddle rod.
2. The coating device according to claim 1, characterized in that: The limiting member is arranged in a ring shape, and a clamping portion is protruded inside the limiting member. A receiving groove is formed on at least one side of the clamping portion, and the receiving groove is used to sleeve the paddle rod. The paddle rod is also provided with a clamping groove that cooperates with the clamping portion, and the clamping portion extends into the clamping groove.
3. The coating device according to claim 2, characterized in that: The paddle rod comprises an outer rod and an inner rod, the outer rod is hollow, the outer rod is sleeved on the inner rod, the outer rod is made of insulating material, and the elastic modulus of the inner rod is greater than that of the outer rod.
4. The coating device according to claim 3, characterized in that: The thickness of the outer rod in the radial direction is 7-8 mm; the elastic modulus of the inner rod is greater than 450 GPa.
5. The coating device according to claim 3, characterized in that: The material of the outer rod is insulating ceramic, and the material of the inner rod is silicon carbide.
6. The coating device according to claim 3, characterized in that: The engaging groove is formed on the outer rod, or the engaging groove passes through the outer rod.
7. The coating device according to claim 1, characterized in that: The coating equipment comprises at least two paddle rods, each of which is provided with a plurality of boat support blocks at intervals, and the boat support blocks are provided at positions corresponding to the bottom of the carrier and close to the edge.
8. The coating device according to claim 7, characterized in that: The distances between two adjacent boat blocks are alternately arranged as a first distance and a second distance, wherein the first distance is greater than the second distance, and the two boat blocks arranged at the first distance correspond to the same carrier, and the two boat blocks arranged at the second distance are arranged in the intervals between three adjacent limiting members.
9. The coating device according to claim 1, characterized in that: The coating equipment further comprises an electrode rod, and the electrode rod is electrically connected to the boat block.
10. The coating device according to claim 1 or 2, characterized in that: An insulating protrusion is arranged on the outer periphery of the limiting member.