Ceramic disc quick washing device for wafer production

Abstract

The utility model discloses a ceramic plate quick-washing device for wafer production, and relates to the technical field of ceramic plate washing, the ceramic plate quick-washing device for wafer production comprises a base and a washing pool, the washing pool is arranged in the base, and a loading piece is movably installed in the washing pool; the loading part comprises side plates symmetrically installed on the inner side of the cleaning pool, arc-shaped frames are fixed to the lower ends of the side plates, the lower ends of the two arc-shaped frames are hinged to each other, inner lining plates are fixed to the inner sides of the arc-shaped frames, and grooves are formed in the inner lining plates at equal intervals. The first bevel gear and the second bevel gear are meshed to enable the two-way lead screw to rotate, the two sliding blocks are driven by the two-way lead screw to move oppositely, so that the distance between the two opposite electric telescopic cylinders is adjusted, meanwhile, the side plates are driven by the electric telescopic cylinders to ascend and descend, and the distance between the upper ends of the two arc-shaped frames can be adjusted; the ceramic plates are further conveniently assembled and disassembled, and the practicability of equipment is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of ceramic disc cleaning, in particular to a ceramic disc quick-cleaning device for wafer production. Background Art

[0002] At present, with the rapid development of the electronics industry, the processing accuracy of chip products needs to be gradually improved, and the processing process is becoming more and more refined, and the quality requirements are becoming higher and higher.

[0003] In order to improve the flatness of the surface of the ceramic disk, it is usually necessary to clean the ceramic disk. The traditional cleaning method is manual cleaning, that is, the operator fixes the ceramic disk and then brushes the ceramic disk. This cleaning method requires a lot of manpower, has a poor cleaning effect, and is easy to damage the ceramic disk. It is easy to cause secondary pollution during manual handling, and the manual cleaning method is inefficient and difficult to meet the needs of modern high-speed production. Utility Model Content

[0004] The utility model provides a ceramic plate quick-washing device for wafer production to solve the problems raised in the background technology.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a ceramic disc quick-washing device for chip production, comprising a base and a cleaning pool, wherein the cleaning pool is opened in the base, and a loading part is movably installed in the cleaning pool; the loading part comprises a side panel symmetrically installed on the inner side of the cleaning pool, an arc frame is fixed to the lower end of the side panel, the lower ends of the two arc frames are hinged to each other, and an inner lining plate is fixed to the inner side of the arc frame, and grooves are evenly spaced on the inner lining plate; a connecting pipe, wherein the connecting pipe is fixed to the outer side of the arc frame, and a cleaning water pipe is installed on the inner side of the inner lining plate between two adjacent grooves, the cleaning water pipe is connected to the connecting pipe on the same side, and nozzles are evenly installed on the outer side of the cleaning water pipe.

[0006] As a preferred technical solution of the utility model, movable bins are symmetrically opened on both sides of the cleaning pool in the base, and sliders are symmetrically slidably installed in the movable bins. Electric telescopic cylinders are fixed at the upper ends of the two sliders, and a support shaft is movably installed at the telescopic end of the electric telescopic cylinder, and the support shaft is fixedly connected to one end of the side panel.

[0007] As an optimal technical solution of the utility model, a transmission compartment is opened inside the base, a motor is fixed on the outside of the transmission compartment, and a rotating shaft is installed on the output end of the motor; a bidirectional screw rod is rotatably installed in the movable compartment, and the bidirectional screw rod is threadedly connected to the slider; one end of the bidirectional screw rod extends to the interior of the transmission compartment and is installed with a second bevel gear, and a first bevel gear meshing with the second bevel gear is installed on the rotating shaft.

[0008] As a preferred technical solution of the utility model, a drain pipe is installed on the outside of the base, the drain pipe is connected to the cleaning pool, and a stop valve is installed on the drain pipe.

[0009] As a preferred technical solution of the utility model, the arc frame is a workpiece made of stainless steel, the inner lining plate is a workpiece made of rubber, and the inner lining plate and the arc frame are glued together.

[0010] As a preferred technical solution of the utility model, an infusion tube is installed on the base, and the infusion tube is connected to the input end of the connecting tube.

[0011] Compared with the prior art, the utility model provides a ceramic disc quick washing device for wafer production, which has the following beneficial effects:

[0012] 1. The ceramic disc quick-washing device for wafer production rotates the bidirectional lead screw by meshing the first bevel gear and the second bevel gear, and drives the two sliders to move toward each other through the bidirectional lead screw, so as to adjust the distance between the two electric telescopic cylinders. At the same time, the electric telescopic cylinder drives the side plate to rise and fall, so as to adjust the distance between the upper ends of the two arc frames, further facilitate the loading and unloading of the ceramic disc, and improve the practicability of the equipment.

[0013] 2. The ceramic disc quick-washing device for wafer production inputs cleaning liquid into the cleaning water pipe through the infusion tube and the connecting tube, so that the cleaning liquid further impacts the surface of the ceramic disc, thereby achieving cleaning of the ceramic disc surface, improving cleaning efficiency and reducing manpower output. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a schematic diagram of the structure of the utility model;

[0015] Figure 2 This is a schematic diagram of the installation structure of the arc frame in the utility model;

[0016] Figure 3 This is a schematic diagram of the installation structure of the inner lining plate in the utility model;

[0017] Figure 4 It is a schematic diagram of the internal structure of the base in the utility model.

[0018] In the figure: 1. base; 2. cleaning tank; 3. movable bin; 4. electric telescopic cylinder; 5. side panel; 6. supporting shaft; 7. arc frame; 8. infusion tube; 9. connecting tube; 10. lining plate; 11. groove; 12. slider; 13. bidirectional screw rod; 14. cleaning water pipe; 15. transmission bin; 16. motor; 17. rotating shaft; 18. first bevel gear; 19. second bevel gear. DETAILED DESCRIPTION

[0019] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0020] See also Figure 1-Figure 4 The utility model discloses a ceramic disc quick-washing device for wafer production, comprising a base 1 and a cleaning pool 2, the cleaning pool 2 is opened in the base 1, and a loading part is movably installed in the cleaning pool 2; the loading part comprises a side plate 5 symmetrically installed on the inner side of the cleaning pool 2, an arc frame 7 is fixed at the lower end of the side plate 5, the lower ends of the two arc frames 7 are hinged to each other, and an inner lining plate 10 is fixed on the inner side of the arc frame 7, and grooves 11 are evenly spaced on the inner lining plate 10; a connecting pipe 9, the connecting pipe 9 is fixed to the outer side of the arc frame 7, a cleaning water pipe 14 is installed on the inner side of the inner lining plate 10 between two adjacent grooves 11, the cleaning water pipe 14 is connected to the connecting pipe 9 on the same side, and nozzles are evenly installed on the outer side of the cleaning water pipe 14.

[0021] like Figure 1 and Figure 2 As shown, in order to facilitate the driving of the arc frame 7, movable bins 3 are symmetrically opened on both sides of the cleaning tank 2 in the base 1, and sliders 12 are symmetrically slidably installed in the movable bins 3. Electric telescopic cylinders 4 are fixed on the upper ends of the two sliders 12. Support shafts 6 are movably installed at the telescopic ends of the electric telescopic cylinders 4. The support shaft 6 is fixedly connected to one end of the side plate 5. The relative distance between the sliders 12 is adjusted to adjust the distance between the two relative electric telescopic cylinders 4. At the same time, the electric telescopic cylinders 4 are started, and the support shafts 6 are raised and lowered by the electric telescopic cylinders 4, which further drives the side plates 5 to move, thereby controlling the distance between the two relative side plates 5, so that the arc frame 7 can be moved, and the inner lining plate 10 can further clamp the ceramic disk to fix the ceramic disk.

[0022] like Figure 2 and Figure 4As shown, in order to facilitate the driving of the slider 12, a transmission compartment 15 is opened inside the base 1, and a motor 16 is fixed on the outside of the transmission compartment 15, and a rotating shaft 17 is installed on the output end of the motor 16; a bidirectional screw rod 13 is rotatably installed in the movable compartment 3, and the bidirectional screw rod 13 is threadedly connected with the slider 12; one end of the bidirectional screw rod 13 extends to the inside of the transmission compartment 15 and is installed with a second bevel gear 19, and a first bevel gear 18 meshing with the second bevel gear 19 is installed on the rotating shaft 17. Starting the motor 16 rotates the rotating shaft 17, and the first bevel gear 18 is driven to rotate by the rotating shaft 17. The two bidirectional screw rods 13 are rotated by the meshing between the first bevel gear 18 and the second bevel gear 19, and the thread force generated by the threaded connection between the bidirectional screw rod 13 and the slider 12 causes the slider 12 to slide inside the movable compartment 3, and further causes the slider 12 to drive the electric telescopic cylinder 4 to move, so as to adjust the relative distance between the two electric telescopic cylinders 4.

[0023] like Figure 1 As shown, in order to facilitate the recovery of the cleaning liquid, a drain pipe is installed on the outside of the base 1, the drain pipe is connected to the cleaning tank 2, and a stop valve is installed on the drain pipe.

[0024] like Figure 2 and Figure 3 As shown, in order to improve the anti-corrosion performance of the arc frame 7, the arc frame 7 is a workpiece made of stainless steel, the inner lining plate 10 is a workpiece made of rubber, and the inner lining plate 10 and the arc frame 7 are glued together.

[0025] like Figure 1 As shown, in order to facilitate the input of cleaning liquid, an infusion tube 8 is installed on the base 1, and the infusion tube 8 is connected to the input end of the connecting tube 9. Preferably, the infusion tube 8 is a corrugated tube.

[0026] The working principle and use process of the utility model are as follows: when in use, the ceramic disc is placed between the two arc frames 7 through the gap between the two side plates 5, and the side edge of the ceramic disc is further embedded in the groove 11, and the motor 16 is started to rotate the shaft 17, and the first bevel gear 18 is driven to rotate by the shaft 17, and the two bidirectional screw rods 13 are rotated by the meshing between the first bevel gear 18 and the second bevel gear 19, and the thread force generated by the threaded connection between the bidirectional screw rod 13 and the slider 12 makes the slider 12 slide inside the movable bin 3, and further makes the slider 12 drive the electric telescopic cylinder 4 to move, so as to adjust the relative The distance between the two electric telescopic cylinders 4, at the same time, start the electric telescopic cylinder 4, and the support shaft 6 is raised and lowered by the electric telescopic cylinder 4, which further drives the side plate 5 to move, thereby controlling the distance relative to the two side plates 5, so that the arc frame 7 can move, and further the inner lining plate 10 clamps the ceramic disk to fix the ceramic disk, and the cleaning liquid is injected into the cleaning water pipe 14 through the infusion tube 8 and the connecting tube 9, and the cleaning liquid impacts the surface of the ceramic disk through the nozzle, thereby realizing the cleaning of impurities on the surface of the ceramic disk, and through the setting of the cleaning pool 2, the cleaning liquid is recovered to avoid the waste of cleaning liquid and improve the practicality of the equipment.

[0027] It should be noted that, in this article, terms such as "comprises", "includes" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also includes other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of more restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0028] Although the embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A ceramic disc quick washing device for wafer production, comprising a base (1), characterized in that: Also includes: A cleaning tank (2), wherein the cleaning tank (2) is disposed in the base (1), and a loading member is movably installed in the cleaning tank (2); The loading member comprises a side plate (5) symmetrically mounted on the inner side of the cleaning tank (2), an arc frame (7) is fixed at the lower end of the side plate (5), the lower ends of the two arc frames (7) are hinged to each other, and an inner lining plate (10) is fixed on the inner side of the arc frame (7), and grooves (11) are formed on the inner lining plate (10) at equal intervals; A connecting pipe (9) is fixed to the outside of the arc frame (7); a cleaning water pipe (14) is installed on the inside of the inner lining plate (10) between two adjacent grooves (11); the cleaning water pipe (14) is connected to the connecting pipe (9) on the same side, and nozzles are evenly installed on the outside of the cleaning water pipe (14).

2. A ceramic disk quick washing device for wafer production according to claim 1, characterized in that: The base (1) is provided with movable bins (3) symmetrically located on both sides of the cleaning pool (2), and sliders (12) are symmetrically slidably installed in the movable bins (3). An electric telescopic cylinder (4) is fixed to the upper ends of the two sliders (12), and a support shaft (6) is movably installed at the telescopic end of the electric telescopic cylinder (4), and the support shaft (6) is fixedly connected to one end of the side plate (5).

3. A ceramic disk quick washing device for wafer production according to claim 2, characterized in that: A transmission compartment (15) is provided inside the base (1), a motor (16) is fixed outside the transmission compartment (15), and a rotating shaft (17) is installed at the output end of the motor (16); A bidirectional screw rod (13) is rotatably installed in the movable bin (3), and the bidirectional screw rod (13) is threadedly connected to the slider (12); One end of the bidirectional screw rod (13) extends into the interior of the transmission bin (15) and is provided with a second bevel gear (19); a first bevel gear (18) meshing with the second bevel gear (19) is provided on the rotating shaft (17).

4. A ceramic disk quick washing device for wafer production according to claim 3, characterized in that: A drain pipe is installed on the outside of the base (1), the drain pipe is connected to the cleaning pool (2), and a stop valve is installed on the drain pipe.

5. A ceramic disk quick washing device for wafer production according to any one of claims 1 to 4, characterized in that: The arc frame (7) is a workpiece made of stainless steel, the inner lining plate (10) is a workpiece made of rubber, and the inner lining plate (10) and the arc frame (7) are glued together.

6. A ceramic disk quick washing device for wafer production according to claim 5, characterized in that: A liquid infusion tube (8) is installed on the base (1), and the liquid infusion tube (8) is connected to the input end of the connecting tube (9).

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