Grooved wheel mechanism of multi-wire cutting machine

Abstract

The utility model discloses a multi-wire cutting machine geneva wheel mechanism which comprises two geneva wheel devices and a supporting assembly, the two geneva wheel devices are arranged in parallel, each geneva wheel mechanism comprises a geneva wheel assembly, a driving device and a pull rod, and each geneva wheel assembly comprises a geneva wheel and conical block assemblies detachably fixed to the two ends of the geneva wheel. The grooved wheel is provided with a first axial center through hole in the axial direction, the two ends of the first axial center through hole are conical and matched with the conical block assembly, the driving device comprises a bearing assembly and a motor assembly, the bearing assembly comprises a first bearing box and a second bearing box, and the first bearing box and the second bearing box are arranged at the two ends of the grooved wheel assembly respectively. A second axial center through hole is formed in the second bearing box in the axial direction, the pull rod penetrates through the second bearing box and the first axial center through hole and is connected with the first bearing box, and the motor assembly is connected with the first bearing box; the device is simple in structure and convenient to disassemble and assemble, the working efficiency is improved, and the equipment replacement and labor cost is saved.

Description

Technical Field

[0001] The utility model relates to the technical field of processing semiconductor substrate sheets, in particular to a groove wheel mechanism of a multi-wire cutting machine. Background Art

[0002] Currently, chip substrate materials are mainly silicon carbide and sapphire substrates. Because silicon carbide and sapphire materials have extremely high hardness, the industry generally uses diamond wire multi-wire cutting method.

[0003] Diamond powder of a certain particle size is evenly electroplated on the surface of the bare steel wire to make the diamond wire form sufficient cutting force. On the circumferential surface of the two groove wheels, a CNC lathe is used to turn equidistant V-shaped grooves. The diamond wire is distributed and wound in the V-shaped grooves. The two groove wheels are driven to rotate by a high-speed servo motor. The cutting diamond wire is synchronously released through the pay-off wheel. After being guided by the guide wheel, it is wound on the circumference of the two groove wheels to form a cutting wire net with a certain tension. The diamond wire is then synchronously retracted by the take-up wheel. The diamond wire goes back and forth on the pay-off and take-up wheels. The silicon carbide and sapphire crystal rods to be processed are first bonded to the sticking plate, and then the crystal rods with the pads are bonded to the material according to the requirements of the crystal angle direction. On the plate, clamp the material plate on the workbench with a swing mechanism of the online cutting machine, and then feed the crystal rod through the movement of the lifting mechanism from top to bottom. The high-speed pulling of the cutting diamond wire (the speed generally reaches 1400-2400RPM) forms a saw-like cutting force, so that the cutting diamond powder blade material attached to the cutting diamond wire acts on the surface of the crystal rod with a continuous and stable cutting force field. The crystal rod moves from top to bottom at a certain speed to produce continuous pressure on the cutting diamond wire. Under the action of pressure, diamond and other cutting blade materials are pressed into the surface of the crystal rod, and sufficient cutting coolant is provided to cool the cutting part, so that the crystal rod is cut into sapphire substrate sheets with uniform thickness. Generally, after the groove wheel is used for 120 to 260 hours, the V-groove part is worn, and it needs to be manually disassembled and replaced with two new grooved groove wheels.

[0004] As the first process of substrate cutting and grinding and polishing, the WARP, TTV, BOW and other parameters of wire cutting directly affect the quality of subsequent grinding and polishing. The traditional wire cutting mechanism has a large weight of the groove wheel itself, a complex mechanical structure, a cumbersome installation process, a low load-bearing capacity at high-speed operation, a high bearing temperature under high-speed operation conditions, and the bearing is easily damaged by high temperature, with a high failure rate and the cutting accuracy cannot be guaranteed. In addition, the matching surface between the groove wheel and the bearing end wears quickly, and the entire groove wheel and the bearing spindle often need to be replaced, resulting in high equipment use costs. Utility Model Content

[0005] In view of the above situation, it is necessary to provide a multi-wire sawing machine groove wheel mechanism to address the problems of high failure rate and high equipment use cost of the groove wheel mechanism in the prior art.

[0006] A multi-wire cutting machine groove wheel mechanism, including a groove wheel device and a support assembly, the groove wheel device is fixed on the support assembly, the groove wheel device is two parallel groove wheel mechanisms, the groove wheel mechanism includes a groove wheel assembly, a driving device and a pull rod, the driving device is arranged at both ends of the groove wheel assembly, the groove wheel assembly includes a groove wheel, and a conical block assembly detachably fixed at both ends of the groove wheel, the groove wheel is axially provided with a first axial center through hole, the two ends of the first axial center through hole are cones adapted to the conical block assembly, the driving device includes a bearing assembly and a motor assembly, the bearing assembly includes a first bearing box and a second bearing box, the first bearing box and the second bearing box are respectively arranged at both ends of the groove wheel assembly, the pull rod passes through the second bearing box and the first axial center through hole, and is connected to the first bearing box, the motor assembly is arranged on one side of the first bearing box away from the groove wheel assembly, and the motor assembly is connected to the first bearing box.

[0007] In the utility model, the groove wheel provides sufficient supporting force through the first bearing box and the second bearing box, and the two ends of the groove wheel are respectively connected to the first bearing box and the second bearing box through the tapered block assembly. When the tapered block assembly is worn, the tapered sub-block and the tapered mother block can be replaced, thereby reducing the equipment use cost of replacing the overall groove wheel, the first main shaft and the second main shaft. The groove wheel assembly and the bearing assembly are connected by a pull rod to ensure the coaxial rotation accuracy and extend the service life of the components. The entire groove wheel mechanism has a simple structure, and it is easy to disassemble and install when replacing the groove wheel, thereby improving work efficiency and saving labor costs.

[0008] Furthermore, the multi-wire saw groove wheel mechanism includes the groove wheel having a plurality of V-groove coating layers axially arranged along the outer circumference, the V-groove coating layers are evenly distributed, and the V-groove coating layers are made of polyurethane or nylon material.

[0009] In the utility model, the groove wheel is an integral steel structure with good rigidity and strong bearing capacity. The coating thickness generally reaches 10 to 25 mm. After the V-groove coating is worn, the worn surface layer can be machined off, regrooved, and a new coating layer can be applied, thereby reducing the equipment use cost of directly replacing the integral groove wheel.

[0010] Further, in the multi-wire cutting machine groove wheel mechanism, the conical block assembly includes a conical sub-block and a conical mother block, the conical sub-block and the conical mother block are adapted to each other, the outer sides of the conical sub-block and the conical mother block are respectively provided with a first positioning hole and a second positioning hole, the conical mother block is respectively fixed to the two ends of the groove wheel, the conical sub-block is respectively fixed to the first bearing box and the second bearing box, the conical sub-block is axially provided with a fourth axial through hole, and the fourth axial through hole is adapted to the pull rod.

[0011] In the utility model, after the conical sub-block is embedded in the conical mother block, the conical block assembly can cooperate with the conical surface of the first axial center through hole, the conical mother block and the groove wheel are fixed through the first positioning hole, the conical mother block is provided with two cylindrical pin positioning holes, and is precisely positioned with the groove wheel through the cylindrical pins, and the conical sub-block is respectively fixed to the first threaded hole and the second threaded hole through the second positioning hole.

[0012] Furthermore, in the multi-wire cutting machine groove wheel mechanism, the first bearing box includes a first main shaft arranged along the axial direction, and a plurality of first plane bearings that are interference fit with the outer diameter surface of the first main shaft, the outer circumference of the first plane bearing is interference fit with the circumference of the inner hole of the first bearing box, a threaded hole is provided on the right side of the first main shaft to fix the pull rod, a first protective cover is provided on the first bearing box, and a first threaded hole is provided on the side of the first bearing box close to the conical sub-block.

[0013] In the utility model, the first bearing box is fixed on the second end face, the first main shaft rotates under the support of the first plane bearing, and a plurality of first sealing strips are provided on the inner side of the first protective cover to prevent aqueous solvents from entering the interior of the bearing box and causing damage to the bearing, thereby reducing equipment maintenance costs.

[0014] Furthermore, in the multi-wire cutting machine groove wheel mechanism, a fixed end front cover is provided on the right side of the first bearing box, and the fixed end front cover includes a third axial center through hole axially arranged, and a fixing screw is provided on the outer side of the circumference of the third axial center through hole, and the third axial center through hole is adapted to the pull rod, and the fixed end front cover is fixed to the support assembly by a fixing screw.

[0015] In the utility model, the fixed end front cover is fixed to the second end surface by a fixing screw rod, and can effectively resist the first bearing box from moving toward the groove wheel direction.

[0016] Furthermore, in the multi-wire cutting machine groove wheel mechanism, the second bearing box includes a second main shaft arranged along the axial direction, and a plurality of second plane bearings interference fit with the outer diameter surface of the second main shaft, the second main shaft is axially provided with a second axial center through hole, the second axial through hole is adapted to the pull rod, the outer circumference of the second plane bearing is interference fit with the circumference of the inner hole of the second bearing box, the second bearing box is provided with a second protective cover, and the second bearing box is provided with a second threaded hole on the side close to the conical sub-block.

[0017] In the utility model, the second bearing box is fixed on the third end face, the second main shaft rotates under the support of the second plane bearing, and a plurality of second sealing strips are provided on the inner side of the second protective cover to prevent aqueous solvents from entering the interior of the bearing box and causing damage to the bearing, thereby reducing equipment maintenance costs.

[0018] Furthermore, in the multi-wire cutting machine groove wheel mechanism, the motor assembly includes a motor and a coupling connected to the output shaft of the motor, the coupling is connected to the first main shaft, and the motor is fixed on the first end face of the support assembly.

[0019] Furthermore, in the multi-wire cutting machine groove wheel mechanism, the support assembly includes a fixed end main support and a movable end main support arranged in parallel, the fixed end main support and the movable end main support are arranged along the vertical direction of the groove wheel, the first bearing box and the second bearing box are respectively fixed on the fixed end main support and the movable end main support, and a plurality of cooling water channels are respectively provided on the fixed end main support and the movable end main support, and the cooling water channels are close to the outer circumference of the first bearing box and the second bearing box.

[0020] In the utility model, a cooling water channel is provided, and a temperature sensor is fixed inside the cooling water channel. When the standard temperature is exceeded (generally the bearing box does not exceed 27-28°C), the equipment program controls the circulating cooling water to automatically open, and the heat generated by the high-speed rotation of the first bearing box and the second bearing box is taken away, and the temperature of the bearing box is controlled between 24-28°C, so as to extend the service life of the parts and reduce the equipment maintenance cost.

[0021] Furthermore, in the multi-wire saw sheave mechanism, the cooling water channel is filled with aqueous solvent.

[0022] In the utility model, the aqueous solvent is used to cool, clean and lubricate the first plane bearing and the second plane bearing. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 It is a structural schematic diagram of the multi-wire cutting machine groove wheel mechanism in the first embodiment of the utility model.

[0024] Figure 2 It is a schematic structural diagram of the sheave device in the first embodiment of the utility model.

[0025] Figure 3 It is a schematic structural diagram of the conical mother block in the first embodiment of the utility model.

[0026] Figure 4 It is a side view of the conical block assembly in the first embodiment of the utility model.

[0027] Figure 5 It is a structural schematic diagram of the multi-wire cutting machine groove wheel mechanism and the upper end device in the first embodiment of the utility model.

[0028] Figure numerals: 1, lifting device; 2, material plate; 3, crystal rod; 4, wire mesh; 5, groove wheel device; 51, left groove wheel mechanism; 52, right groove wheel mechanism; 53, groove wheel assembly; 531, groove wheel; 532, V-groove coating layer; 533, first axial center through hole; 534, groove wheel positioning hole; 54, driving device; 55, bearing assembly; 56, first bearing box; 561, first main shaft; 562, first plane bearing; 563, first protective cover; 564, first threaded hole; 565, fixed end front cover; 5651, fixed screw; 5652, third axial center through hole; 566, first sealing strip; 57, second bearing box; 571, second main shaft; 572, second plane bearing; 5 73. Second protective cover; 574. Second threaded hole; 575. Second axial center through hole; 576. Second sealing strip; 58. Motor assembly; 581. Motor; 582. Fixed seat; 583. Motor output shaft; 584. Coupling; 59. Conical block assembly; 591. Conical sub-block; 5911. Conical block; 5912. First positioning hole; 5913. Fourth axial center through hole; 592. Conical mother block; 5921. Conical hole; 5922. Second positioning hole; 5923. Cylindrical pin positioning hole; 6. Support assembly; 61. Fixed end main support; 62. Movable end main support; 63. First end face; 64. Second end face; 65. Third end face; 66. Cooling water channel; 7. Pull rod. DETAILED DESCRIPTION

[0029] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the relevant drawings. The drawings provide embodiments of the present invention. However, the present invention can be implemented in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing this embodiment is to make the disclosure of the present invention more thorough and comprehensive.

[0030] It should be noted that when an element is referred to as being "fixed to" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0031] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as those generally understood by technicians in the technical field of the present invention. The terms used herein in the specification of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The term "and / or" used herein includes any and all combinations of one or more related listed items. In addition, the various embodiments of the present invention, the features in the embodiments, and the features of the embodiments can be freely combined without obvious conflicts or contradictions.

[0032] like Figure 1-Figure 4 As shown, the multi-wire cutting machine sheave mechanism includes a sheave device 5, a support assembly 6 and a pull rod 7. The sheave device 5 is fixed on the support assembly 6. The sheave device 5 includes a left sheave mechanism 51 and a right sheave mechanism 52 arranged in parallel. The left sheave mechanism 51 and the right sheave mechanism 52 have exactly the same structural composition. The left sheave mechanism 51 is taken as an example to describe the structural composition.

[0033] The left sheave mechanism 51 includes a sheave assembly 53 and a driving device 54. The driving device 54 includes a bearing assembly 55 and a motor assembly 58. The bearing assembly 55 includes a first bearing box 56 and a second bearing box 57. The first bearing box 56 and the second bearing box 57 are respectively arranged at both ends of the sheave assembly 55. The motor assembly 58 is connected to the first bearing box 56 and is arranged on a side away from the sheave assembly 53.

[0034] The motor assembly 58 includes a motor 581 and a coupling 584 connected to a motor output shaft 583. The other end of the coupling 584 is connected to the first main shaft 561. The motor 581 drives the first main shaft 561 to rotate via the coupling 584. Meanwhile, the coupling 584 serves as an overload protection. The motor is fixed to the first end face 63 of the support assembly 6 via a fixing seat 582.

[0035] The first bearing box 56 includes a first main shaft 561 and a first plane bearing 562. The first main shaft 561 is axially fixed at the center position of the first bearing box 56. Two groups of high-precision first plane bearings 562 are evenly distributed on the outer diameter surface of the first main shaft 561. The first main shaft 561 and the first plane bearing 562 are interference fit. The outer circumference of the first plane bearing 562 is interference fit with the circumference of the inner hole of the first bearing box 56. A threaded hole is provided on the right side of the first main shaft 561 to fix the pull rod 7. A first protective cover 563 is provided on the first bearing box 56. A first threaded hole 564 is provided on the side of the first bearing box 56 close to the groove wheel. The first bearing box 56 is fixed on the fixed end main support 61. The first main shaft 561 rotates under the support of the first plane bearing 562. A plurality of first sealing strips 566 are provided on the inner side of the first protective cover 563 to prevent aqueous solvents from entering the first bearing box 56 and causing damage to the first plane bearing 562, thereby reducing the equipment maintenance cost.

[0036] A fixed end front cover 565 is provided on the right side of the first bearing box 56. The fixed end front cover 565 includes a third axial center through hole 5652 axially arranged, and a fixing screw 5651 is provided on the outer side of the circumference of the third axial center through hole 5652. The third axial center through hole 5652 is adapted to the pull rod 7. The fixed end front cover 565 is fixed to the second end face 64 by the fixing screw 5651, which can effectively resist the first bearing box 56 from moving toward the groove wheel 531.

[0037] The groove wheel assembly 53 includes a groove wheel 531, which is axially provided with a plurality of V-groove coating layers 532 along the outer circumference. The V-groove coating layers 532 are evenly distributed. The V-groove coating layers 532 are made of polyurethane or nylon material. The groove wheel 531 is axially provided with a first axial center through hole 533. The first axial center through hole 533 is adapted to the pull rod 7. Both ends of the first axial center through hole 533 are tapered, and the tapered shape is adapted to the tapered block assembly 59.

[0038] The conical block assembly 59 is arranged at both ends of the first axial center through hole 533. The conical block assembly 59 includes a conical sub-block 591 and a conical mother block 592. The conical sub-block 591 and the conical mother block 592 are adapted to each other. The outer sides of the conical sub-block 591 and the conical mother block 592 are respectively provided with a first positioning hole 5912 and a second positioning hole 5922. After the conical sub-block 591 is embedded in the conical mother block 592, the conical block assembly 59 can be matched with the conical surface of the first axial center through hole 533. The conical mother block 592 The conical mother block 592 is fixed to the groove wheel 531 through the first positioning hole 5912 and the groove wheel positioning hole 534. The conical mother block 592 is provided with two cylindrical pin positioning holes 5923, and a precise positioning hole is also provided in the circumferential direction near the groove wheel positioning hole 534. The cylindrical pin is passed through the cylindrical pin positioning hole 5923 and the precise positioning hole to achieve precise positioning of the conical mother block 592 and the groove wheel 531. The conical sub-block 591 is fixed to the first threaded hole 564 and the second threaded hole 574 respectively through the second positioning hole 5922.

[0039] The second bearing box 57 includes a second main shaft 571 and a second plane bearing 572. The second main shaft 571 is axially fixed at the center position of the second bearing box 57. Two groups of high-precision second plane bearings 572 are evenly distributed on the outer diameter surface of the second main shaft 571. The second main shaft 571 and the second plane bearing 572 are interference fit. The outer circumference of the second plane bearing 572 is interference fit with the circumference of the inner hole of the second bearing box 57. A second protective cover 573 is provided on the second bearing box 57. A second threaded hole 574 is provided on the side of the second bearing box 57 close to the groove wheel 531. The second main shaft 571 is axially provided with a second axial center through hole 575. The pull rod 7 passes through the second axial center through hole 575, The third axial center through hole 5913, the first axial center through hole 533 and the third axial center through hole 5652, one end of the pull rod 7 is connected to the first main shaft 561, so that the pull rod passes through the connecting groove wheel assembly 53, the conical block assembly 59, the movable end front cover 565 and the second bearing box 57, one end of the pull rod 7 is connected to the first main shaft 561, the second bearing box 57 is fixed on the movable end main support 61, the second main shaft 571 rotates under the support of the second plane bearing 572, and a plurality of second sealing strips 576 are provided on the inner side 573 of the second protective cover to prevent aqueous solvents from entering the second bearing box 57 and causing damage to the second plane bearing 572, thereby reducing the equipment maintenance cost.

[0040] The support assembly includes a fixed end main support 61 and a movable end main support 62 which are arranged in parallel. The fixed end main support 61 and the movable end main support 62 are arranged in a direction perpendicular to the groove wheel. A second end face 64 and a third end face 65 are formed on the fixed end main support 61 and the movable end main support 62. The fixed end main support 61 forms a first end face 63 in the direction in which the motor is extended. A plurality of cooling water channels 66 are respectively provided on the fixed end main support 61 and the movable end main support 62. The cooling water channels 66 are respectively close to the outer circumference of the first bearing box 56 and the second bearing box 57. Aqueous solvent is added to the cooling water channels 66.

[0041] like Figure 1 and Figure 5 As shown, the crystal rod 3 to be processed is bonded to the material plate 2 as required, and the material plate 2 is clamped on the lifting device 1. The feeding of the crystal rod 3 is achieved by the movement of the lifting device 1 from top to bottom. The wire mesh 4 is pulled at high speed by the groove wheel device 5 to form a sawing cutting force. The crystal rod 3 moves from top to bottom at a certain speed to generate continuous pressure on the wire mesh 4. The pressure acts on the surface of the crystal rod 3, and the crystal rod 3 is cut into silicon carbide and sapphire substrate sheets with uniform thickness.

[0042] In the utility model, the groove wheel 531 is an integral steel structure with good rigidity and strong bearing capacity. The thickness of the V-groove coating layer 532 is generally 10 to 25 mm. After the V-groove coating layer 532 is worn, the worn surface layer can be removed by machining, regrooving, and a new coating layer can be applied, thereby reducing the equipment use cost of directly replacing the integral groove wheel 531. The groove wheel 531 provides sufficient supporting force through the first bearing box 56 and the second bearing box 57. The two ends of the groove wheel 531 are respectively connected to the first bearing box 56 and the second bearing box 57 through the conical block assembly 59. When the conical block assembly 59 is worn, the conical sub-block 591 and the conical mother block 592 can be replaced separately, thereby reducing the equipment use cost of replacing the integral groove wheel 531, the first main shaft 561 and the second main shaft 571. Rod 7 connects the sheave assembly 53 and the bearing assembly 55 to ensure the coaxial rotation accuracy and extend the service life of the components. By setting a cooling water channel 66 and fixing a temperature sensor inside the cooling water channel, when the standard temperature is exceeded (generally the bearing box does not exceed 27-28°C), the equipment program controls the circulating cooling water to automatically open, and takes away the heat generated by the high-speed rotation of the first bearing box 56 and the second bearing box 57, and controls the temperature of the bearing box between 24 and 28°C to extend the service life of the parts and reduce the equipment maintenance cost. The use of aqueous solvents can cool, clean and lubricate the first plane bearing 562 and the second plane bearing 572. The entire sheave mechanism has a simple structure. When replacing the sheave 531, it is easy to disassemble and install, which improves work efficiency and saves labor costs.

[0043] In the description of this specification, the description with reference to the terms "one embodiment", "some embodiments", "examples", "specific examples", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representation of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples in a suitable manner.

[0044] The above-mentioned embodiments only express the implementation methods of the utility model, and the descriptions thereof are relatively specific and detailed, but they cannot be understood as limiting the scope of the patent of the utility model. It should be pointed out that, for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, and these all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A grooved wheel mechanism of a multi-wire saw, characterized in that: It includes a groove wheel device and a supporting assembly, the groove wheel device is fixed on the supporting assembly, the groove wheel device includes two parallel groove wheel mechanisms, the groove wheel mechanism includes a groove wheel assembly, a driving device and a pull rod, the driving device is arranged at both ends of the groove wheel assembly, the groove wheel assembly includes a groove wheel, and a conical block assembly detachably fixed at both ends of the groove wheel, the groove wheel is axially provided with a first axial center through hole, both ends of the first axial center through hole are cones adapted to the conical block assembly, the driving device includes a bearing assembly and a motor assembly, the bearing assembly includes a first bearing box and a second bearing box, the first bearing box and the second bearing box are respectively arranged at both ends of the groove wheel assembly, the pull rod passes through the second bearing box and the first axial center through hole, and is connected to the first bearing box, the motor assembly is arranged on one side of the first bearing box away from the groove wheel assembly, and the motor assembly is connected to the first bearing box.

2. The multi-wire saw groove mechanism according to claim 1, characterized in that: The groove wheel comprises a plurality of V-groove coating layers axially arranged along the outer circumference, the V-groove coating layers are evenly distributed, and the V-groove coating layers are made of polyurethane or nylon material.

3. The multi-wire saw groove mechanism according to claim 1, characterized in that: The conical block assembly includes a conical sub-block and a conical mother block, the conical sub-block and the conical mother block are adapted to each other, the outer sides of the conical sub-block and the conical mother block are respectively provided with a first positioning hole and a second positioning hole, the conical mother block is respectively fixed to the two ends of the groove wheel, the conical sub-block is respectively fixed to the first bearing box and the second bearing box, the conical sub-block is axially provided with a fourth axial through hole, and the fourth axial through hole is adapted to the pull rod.

4. The multi-wire saw groove mechanism according to claim 3, characterized in that: The first bearing box includes a first main shaft arranged along the axial direction and a plurality of first plane bearings that are interference fit with the outer diameter surface of the first main shaft, the outer circumference of the first plane bearing is interference fit with the circumference of the inner hole of the first bearing box, a threaded hole is provided on the right side of the first main shaft to fix the pull rod, a first protective cover is provided on the first bearing box, and a first threaded hole is provided on the side of the first bearing box close to the conical sub-block.

5. The multi-wire saw groove mechanism according to claim 1, characterized in that: A fixed end front cover is provided on the right side of the first bearing box, and a third axial center through hole is axially provided on the fixed end front cover, a fixing screw is provided on the circumferential outer side of the third axial center through hole, the third axial center through hole is adapted to the pull rod, and the fixed end front cover is fixed to the support assembly through a fixing threaded hole.

6. The multi-wire saw groove mechanism according to claim 4, characterized in that: The second bearing box includes a second main shaft arranged along the axial direction and a plurality of second plane bearings which are interference fit with the outer diameter surface of the second main shaft. The second main shaft is axially provided with a second axial center through hole, the second axial center through hole is adapted to the pull rod, the outer circumference of the second plane bearing is interference fit with the circumference of the inner hole of the second bearing box, a second protective cover is provided on the second bearing box, and a second threaded hole is provided on the side of the second bearing box close to the conical sub-block.

7. The multi-wire saw groove mechanism according to claim 4, characterized in that: The motor assembly includes a motor and a coupling connected to an output shaft of the motor, the coupling is connected to the first main shaft, and the motor is fixed on the support assembly.

8. The multi-wire saw groove mechanism according to claim 1, characterized in that: The support assembly includes a fixed end main support and a movable end main support arranged in parallel, the fixed end main support and the movable end main support are arranged in a vertical direction of the groove wheel, the first bearing box and the second bearing box are respectively fixed on the fixed end main support and the movable end main support, and a plurality of cooling water channels are respectively provided on the fixed end main support and the movable end main support, and the cooling water channels are close to the outer circumference of the first bearing box and the second bearing box.

9. The multi-wire saw groove mechanism according to claim 8, characterized in that: Aqueous solvent is added into the cooling water channel.

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