Ceramic deposition ring part meltallizing protection device

Abstract

The utility model belongs to a ceramic deposition ring part meltallizing protection device in the technical field of semiconductor manufacture procedures. Comprising a device tray (1), an inner ring protection component (2) and an outer ring protection component (3), the inner ring protection component (2) is of a cover-shaped structure, the outer ring protection component (3) is of an annular structure, a ceramic deposition ring component (4) is of an annular structure, and the upper surface of the ceramic deposition ring component (4) is provided with a to-be-meltallized part (5) protruding along the circumference of the upper surface. The meltallizing protection device for the ceramic deposition ring component is simple in structure, during meltallizing operation of the ceramic deposition ring component, a non-meltallizing part is conveniently and reliably shielded and protected, a part to be meltallizing is ensured to be exposed outside, meltallizing is completed with high quality and high efficiency, the operation convenience is improved, and the product quality is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor process, and more specifically relates to a ceramic deposition ring component spraying protection device. Background Art

[0002] ARC spraying is a widely used surface thermal spraying technology. It uses two aluminum wires with positive and negative charges respectively. They come into contact with each other to generate an arc. The wires are then instantly melted into mist by the high-temperature arc and sprayed onto the surface of the substrate by compressed air to form a film layer with a certain roughness and thickness. In the semiconductor physical vapor deposition process, a certain thickness of metals, oxides, organic matter and other materials need to be adsorbed at specific locations on the surface of the component to form a film layer. In order to increase the component's ability to adsorb these attachments and reduce the abnormal film shedding caused by weak adhesion during the production process, ARC spraying treatment is used during the component regeneration and cleaning process. In order to avoid contamination of smooth surfaces of components and other surfaces that do not require spraying treatment during the ARC spraying process, specific locations need to be shielded and protected before spraying and roughening.

[0003] In the prior art, there is a technology named "Spraying protection tooling for gas distribution disks of semiconductor equipment parts" and publication number "CN219449836U", which provides a spraying protection tooling for gas distribution disks of semiconductor equipment parts related to the technical field of gas distribution disks, including a protrusion, an inner ring and a positioning ring, the protrusion is connected to the positioning ring, the positioning ring is connected to the inner ring, and the inner ring and the positioning ring cover the gas distribution disk. The utility model will not leave residual glue or dirt on the surface of the protected component, the edge of the spraying layer has a smooth transition without steps, the spraying area is precisely controllable, and it is used to replace the manual use of high-temperature resistant tape to shield and protect non-spraying areas. It has the advantages of easy use, stable and controllable, high precision, reusable, and reduced labor time and material costs. However, this technology does not involve the technical problems and technical solutions of the present application. Utility Model Content

[0004] The technical problem to be solved by the utility model is: in view of the deficiencies in the prior art, a ceramic deposition ring component spraying protection device is provided which has a simple structure and can conveniently and reliably shield and protect non-spraying parts during the spraying operation of the ceramic deposition ring component, ensure that the spraying parts to be sprayed are exposed to the outside, complete the spraying with high quality and efficiency, improve the convenience of operation, and improve product quality.

[0005] To solve the above-mentioned technical problems, the technical solution adopted by the utility model is:

[0006] The utility model is a ceramic deposition ring component spraying protection device, comprising a device tray, an inner ring protection component, and an outer ring protection component. The inner ring protection component is a cover-shaped structure, the outer ring protection component is an annular structure, the ceramic deposition ring component is an annular structure, and the upper surface of the ceramic deposition ring component is provided with a protruding spraying portion along the upper surface.

[0007] The device tray comprises a main body and a bearing part. The bearing part is located in the middle of the upper surface of the main body, and the diameter of the bearing part is equal to the outer ring diameter of the ceramic deposition ring component.

[0008] The outer diameter of the inner ring protection component is equal to the inner diameter of the part to be sprayed.

[0009] The outer ring protection component comprises a connecting ring portion and a protection ring portion, and the inner ring diameter of the connecting ring portion is greater than or equal to the diameter of the bearing portion.

[0010] The inner diameter of the protective ring portion is greater than or equal to the outer diameter of the portion to be sprayed.

[0011] The main body and the bearing part of the device tray are respectively provided with threaded holes, the inner ring protection component is provided with a plurality of threaded holes, and the outer ring protection component is provided with a plurality of threaded holes.

[0012] The number and positions of the threaded holes on the inner ring protection component correspond to the threaded holes on the bearing portion; the number and positions of the threaded holes on the outer ring protection component correspond to the threaded holes on the main body portion.

[0013] The threaded holes on the inner ring protection component are configured to be connected to the threaded holes on the bearing part by bolts; the threaded holes on the outer ring protection component are configured to be connected to the threaded holes on the main body.

[0014] The device tray, inner ring protection component and outer ring protection component are all structures made of metal materials.

[0015] The Depo Ring in the utility model is a Deposition Ring, which is called a deposition ring in Chinese.

[0016] The technical solution of the utility model is adopted, and the working principle and beneficial effects are as follows:

[0017] The ceramic deposition ring component spraying protection device described in the utility model, when the ceramic deposition ring component is sprayed, the non-spraying part of the ceramic deposition ring component is shielded and protected by the device tray, the inner ring protection part, and the outer ring protection part, without affecting the part to be sprayed. When the deposition ring component is sprayed, the ceramic deposition ring component is placed on the device tray, and the outer ring protection part is connected to the outer ring position of the device tray. At the same time, the inner side of the outer ring protection part extends to the edge position of the upper surface of the ceramic deposition ring component, that is, extends to the outer ring position close to the part to be sprayed. At the same time, the inner ring protection part is placed on the upper surface of the ceramic deposition ring component, that is, located at the inner ring position of the part to be sprayed. In this way, the lower surface of the ceramic deposition ring component, the inner ring of the part to be sprayed, and the outer ring of the part to be sprayed can be reliably shielded, and only the part to be sprayed and the part to be sprayed and the ceramic deposition ring component are exposed to the outside, so that the spraying operation can be conveniently performed. After the spraying operation, the part to be sprayed absorbs a certain thickness of sputtering substances such as metals, oxides, and organic matter to form a coating. The protective device of the utility model has a simple structure, low cost, and is convenient to use, and a set of the device can be repeatedly used. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The following is a brief description of the contents and symbols in the drawings of this specification:

[0019] Figure 1 It is a schematic diagram of the top view of the structure of the ceramic deposition ring component of the utility model;

[0020] Figure 2 It is a side structural schematic diagram of a device tray of the ceramic deposition ring component spraying protection device according to the utility model;

[0021] Figure 3 It is a schematic diagram of the top view of the structure of the device tray of the ceramic deposition ring component spraying protection device according to the utility model;

[0022] Figure 4 It is a side view structural schematic diagram of the inner ring protection component of the ceramic deposition ring component spraying protection device of the utility model;

[0023] Figure 5 It is a schematic diagram of the top view of the outer ring protection component of the ceramic deposition ring component spraying protection device of the utility model;

[0024] Figure 6 It is a schematic diagram of the local structure of the ceramic deposition ring component spraying protection device of the utility model when performing the ceramic deposition ring component spraying protection;

[0025] The marks in the attached drawings are: 1. Device tray; 2. Inner ring protection component; 3. Outer ring protection component; 4. Ceramic deposition ring component (ceramic Depo Ring component); 5. Part to be sprayed; 6. Main body; 7. Bearing part; 8. Connecting ring part; 9. Protection ring part; 10. Threaded hole. DETAILED DESCRIPTION

[0026] The following is a detailed description of the embodiments of the present invention, such as the shapes, structures, positions and connection relationships of the components involved, the functions and working principles of the components, etc., by referring to the accompanying drawings:

[0027] As attached Figure 1 -Attached Figure 6 As shown, the utility model is a ceramic deposition ring component spraying protection device, including a device tray 1, an inner ring protection component 2, and an outer ring protection component 3. The inner ring protection component 2 is a cover-like structure, the outer ring protection component 3 is an annular structure, and the ceramic deposition ring component 4 is an annular structure. The upper surface of the ceramic deposition ring component 4 is provided with a protruding spraying area 5 along the upper surface. The above structure proposes an improved technical solution to the deficiencies in the prior art. When the structure is set, the device tray 1, the inner ring protection component 2, and the outer ring protection component 3 are processed and manufactured separately. When the ceramic deposition ring component is sprayed, the device tray 1, the inner ring protection component 2, and the outer ring protection component 3 need to be combined to complete the shielding of the non-spraying area of ​​the ceramic deposition ring component. During the specific spraying operation of the ceramic deposition ring component 4, the ceramic deposition ring component 4 is placed on the device tray 1, and the outer ring protection component 3 is connected to the outer ring position of the device tray 1. At the same time, the inner side of the outer ring protection component 3 extends to the edge of the upper surface of the ceramic deposition ring component, that is, extends to the outer ring position close to the part to be sprayed 5. At the same time, the inner ring protection component 2 is placed on the upper surface of the ceramic deposition ring component 4, that is, located at the inner ring position of the part to be sprayed 5. In this way, the lower surface of the ceramic deposition ring component 4, the inner ring of the part to be sprayed 5, and the outer ring of the part to be sprayed 5 can be reliably shielded, and only the part to be sprayed 5 and the part to be sprayed 5 combined with the ceramic deposition ring component 4 are exposed to the outside, which can facilitate the spraying operation. After the spraying operation, the part to be sprayed 5 absorbs a certain thickness of metal, oxide, organic matter and other sputtering substances to form a coating. The protective device described in the utility model has a simple structure, low cost, convenient use, and a set of devices can be reused. The ceramic deposition ring component spraying protection device described in the utility model has a simple structure. When the ceramic deposition ring component is sprayed, it is convenient and reliable to shield and protect the non-spraying parts, ensuring that the parts to be sprayed are exposed to the outside, completing the spraying with high quality and efficiency, improving the convenience of operation and improving product quality.

[0028] The device tray 1 includes a main body 6 and a bearing part 7, wherein the bearing part 7 is located in the middle of the upper surface of the main body 6, and the diameter of the bearing part 7 is equal to the outer diameter of the ceramic deposition ring component 4. The above structure defines the structure of the device tray 1. On the one hand, the main body 6 of the device tray 1 can be connected to the inner ring protection component 2, and the bearing part 7 carries the ceramic deposition ring component 4, so that the device tray 1 and the inner ring protection component 2 can be reliably connected.

[0029] The outer diameter of the inner ring protection component 2 is equal to the inner diameter of the part to be sprayed 5. The above structure defines the structure of the inner ring protection component 2. The inner ring protection component 2 is placed on the upper surface of the ceramic deposition ring component 4, that is, located at the inner ring position of the part to be sprayed 5, and can reliably block the inner ring position of the part to be sprayed 5, and ensure that the part to be sprayed 5 is exposed to the outside.

[0030] The outer ring protection component 3 includes a connecting ring portion 8 and a protection ring portion 9, and the inner ring diameter of the connecting ring portion 8 is greater than or equal to the diameter of the bearing portion 7. The above structure defines the structure of the outer ring protection component 3, the outer ring protection component 3 is connected to the outer ring position of the device tray 1, and the inner side of the outer ring protection component 3 extends to the edge position of the upper surface of the ceramic deposition ring component, that is, extends to the outer ring position close to the part to be melt-sprayed 5, which can reliably block the outer ring position of the part to be melt-sprayed 5, and ensure that the part to be melt-sprayed 5 is exposed to the outside, so as to facilitate the melt-spraying of the part to be melt-sprayed 5.

[0031] The inner diameter of the protective ring portion 9 is greater than or equal to the outer diameter of the part to be sprayed 5. In the above structure, the protective ring portion 9 on the inner side of the outer ring protective component 3 extends to the edge of the upper surface of the ceramic deposition ring component, that is, extends to the outer ring position close to the part to be sprayed 5, shielding the outer ring position of the part to be sprayed 5, ensuring that the part to be sprayed 5 is exposed to the outside, meeting the protection requirements.

[0032] The main body 6 and the bearing part 7 of the device tray 1 are provided with threaded holes 10 respectively, the inner ring protection component 2 is provided with a plurality of threaded holes 10, and the outer ring protection component 3 is provided with a plurality of threaded holes 10. The number and position of the threaded holes 10 on the inner ring protection component 2 correspond to the threaded holes 10 on the bearing part 7; the number and position of the threaded holes 10 on the outer ring protection component 3 correspond to the threaded holes 10 on the main body 6. The threaded holes on the inner ring protection component 2 are provided with a structure that can be connected to the threaded holes 10 on the bearing part 7 by bolts; the threaded holes on the outer ring protection component 3 are provided with a structure that can be connected to the threaded holes 10 on the main body 6. In the above structure, the bolts pass through the corresponding threaded holes to achieve the fastening connection of the corresponding components.

[0033] The device tray 1, the inner ring protection component 2, and the outer ring protection component 3 are all made of metal materials. The above structure has good device strength, can be reused, and reduces costs.

[0034] The ceramic deposition ring component spraying protection device described in the utility model is respectively manufactured with a device tray 1, an inner ring protection component 2, and an outer ring protection component 3. When the ceramic deposition ring component is sprayed, the device tray 1, the inner ring protection component 2, and the outer ring protection component 3 are required to be combined to complete the shielding of the non-spraying part of the ceramic deposition ring component. When the ceramic deposition ring component 4 is specifically sprayed, the ceramic deposition ring component 4 is placed on the device tray 1, and the outer ring protection component 3 is connected to the outer ring position of the device tray 1. At the same time, the inner side of the outer ring protection component 3 extends to the edge position of the upper surface of the ceramic deposition ring component, that is, extends to the outer ring position close to the part to be sprayed 5. At the same time, the inner ring protection component 2 is placed on the upper surface of the ceramic deposition ring component 4, that is, located at the inner ring position of the part to be sprayed 5. In this way, the lower surface of the ceramic deposition ring component 4, the inner ring of the part to be sprayed 5, and the outer ring of the part to be sprayed 5 can be reliably shielded, and only the part to be sprayed 5 and the joint part of the part to be sprayed 5 and the ceramic deposition ring component 4 are exposed to the outside, which can facilitate the spraying operation. After the spraying operation, the spraying part 5 absorbs a certain thickness of metal, oxide, organic matter and other sputtering substances to form a coating. The protective device of the utility model has a simple structure, low cost, convenient use, and a set of devices can be repeatedly used.

[0035] The above is an exemplary description of the utility model in conjunction with the accompanying drawings. It is obvious that the specific implementation of the utility model is not limited to the above-mentioned method. As long as various improvements are made using the method concept and technical solution of the utility model, or the concept and technical solution of the utility model are directly applied to other occasions without improvement, they are all within the protection scope of the utility model.

Claims

1. A ceramic deposition ring component spraying protection device, characterized in that: The device comprises a device tray (1), an inner ring protection component (2), and an outer ring protection component (3); the inner ring protection component (2) is a cover-shaped structure, the outer ring protection component (3) is an annular structure, the ceramic deposition ring component (4) is an annular structure, and the upper surface of the ceramic deposition ring component (4) is provided with a protruding portion to be sprayed (5) along the upper surface.

2. The ceramic deposition ring component spraying protection device according to claim 1, characterized in that: The device tray (1) comprises a main body (6) and a bearing portion (7), wherein the bearing portion (7) is located in the middle of the upper surface of the main body (6), and the diameter of the bearing portion (7) is equal to the outer ring diameter of the ceramic deposition ring component (4).

3. The ceramic deposition ring component spraying protection device according to claim 1 or 2, characterized in that: The outer diameter of the inner ring protection component (2) is equal to the inner diameter of the part to be sprayed (5).

4. The ceramic deposition ring component spraying protection device according to claim 3 is characterized in that: The outer ring protection component (3) comprises a connecting ring portion (8) and a protection ring portion (9), and the inner ring diameter of the connecting ring portion (8) is greater than or equal to the diameter of the bearing portion (7).

5. The ceramic deposition ring component spraying protection device according to claim 4, characterized in that: The inner diameter of the protective ring portion (9) is greater than or equal to the outer diameter of the portion to be sprayed (5).

6. The ceramic deposition ring component spraying protection device according to claim 1 or 2, characterized in that: The main body (6) and the bearing part (7) of the device tray (1) are respectively provided with threaded holes (10), the inner ring protection component (2) is provided with a plurality of threaded holes (10), and the outer ring protection component (3) is provided with a plurality of threaded holes (10).

7. The ceramic deposition ring component spraying protection device according to claim 6, characterized in that: The number and positions of the threaded holes (10) on the inner ring protection component (2) correspond to the threaded holes (10) on the bearing portion (7); the number and positions of the threaded holes (10) on the outer ring protection component (3) correspond to the threaded holes (10) on the main body portion (6).

8. The ceramic deposition ring component spraying protection device according to claim 7, characterized in that: The threaded hole on the inner ring protection component (2) is configured to be connectable to the threaded hole (10) on the bearing portion (7) via a bolt; and the threaded hole on the outer ring protection component (3) is configured to be connectable to the threaded hole (10) on the main body portion (6).

9. The ceramic deposition ring component spraying protection device according to claim 1 or 2, characterized in that: The device tray (1), the inner ring protection component (2), and the outer ring protection component (3) are all structures made of metal materials.

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