Switching valve for vacuum system of ion implanter

Abstract

The utility model provides a switching valve for a vacuum system of an ion implanter, which comprises a supporting communication component, a thin-mouth switching component, an expanding connection component, a wide-mouth switching component, a vacuum switching component and an on-off switching component. The whole valve is compact in structure and convenient to operate and maintain, vacuum leakage can be effectively reduced through the design of the sealing ring body at the outer end of the wide-mouth seat plate, the stability and reliability of a vacuum system are improved, the second cavity can be vacuumized quickly through the design of the rough extraction pipeline and the high extraction pipeline, the ion implantation efficiency is improved, and the service life of the ion implantation device is prolonged. The method can adapt to different ion implanter vacuum systems to create a suitable implantation environment, ensure efficient and stable operation of the ion implanter, and improve reliability.

Description

Technical Field

[0001] The utility model relates to integrated circuit production equipment, in particular to a switching valve used in a vacuum system of an ion implanter. Background Art

[0002] In the operation of the ion implanter, the ion implantation process needs to be carried out under a vacuum environment. Since the gas molecules in the air will interfere with the transmission and implantation process of the ion beam, the vacuum system discharges the air and other gases, reduces the ambient air pressure by extraction or adsorption, creates a suitable vacuum environment, ensures the stability and long life of the ion source, reduces the formation and propagation of plasma, and maintains the accuracy and consistency of ion implantation. For example, patent document CN200953337Y discloses a vacuum pipeline structure of an ion implanter, which includes a source cavity, a mechanical pump and a valve arranged between the source cavity and the mechanical pump. A secondary valve is added between the valve and the mechanical pump. When the valve is removed for cleaning, the secondary valve can be closed first to maintain the normal operation of the vacuum pipeline system. The mechanical pump does not need to be stopped, and the valve can be cleaned without affecting the system pressure. However, the structure of this valve is relatively complex, so that it occupies a large space in the ion implanter and affects the operation of other components. Therefore, it is necessary to optimize its structure to overcome the above-mentioned defects. Utility Model Content

[0003] The utility model aims to provide a switching valve for a vacuum system of an ion implanter.

[0004] The technical solution adopted by the utility model to solve its technical problems is:

[0005] A switching valve for a vacuum system of an ion implanter, comprising:

[0006] A supporting communication component having an installation space therein;

[0007] A narrow-mouth transition component, which is in communication with the supporting communication component and has a transition structure therein that matches the first cavity;

[0008] The diameter-expanding connection component is connected with the supporting and communicating component, and is arranged on both sides of the supporting and communicating component together with the narrow-mouth transition component;

[0009] A wide-mouth transition component, which is connected to the diameter-expanding connection component, has a transition structure inside that matches the second cavity, and is larger in size than the narrow-mouth transition component. The second cavity is connected to the first cavity through the wide-mouth transition component, the diameter-expanding connection component, the supporting communication component and the narrow-mouth transition component;

[0010] A vacuum transfer component, which is installed in the diameter-expanding connection component and the wide-mouth transfer component and is connected to a vacuum pumping device, and the vacuum pumping device performs a vacuum treatment on the second cavity;

[0011] The on-off switching component is installed in the supporting communication component and can switch the on-off state of the supporting communication component.

[0012] Specifically, the supporting communication component includes:

[0013] The supporting valve body has two ends that are connected, a narrow-mouth transition component and a diameter-expanding connection component are respectively installed at the two ends of the supporting valve body, and an on-off switching component is installed on the side of the supporting valve body.

[0014] The narrow mouth adapter component includes:

[0015] A narrow-mouth end tube, the inner end of which is mounted on the first end of the supporting valve body through a connector, and the inner diameter of which is consistent with the inner diameter of the supporting valve body;

[0016] The adapter end plate is formed at the outer end of the narrow-mouth end tube and protrudes radially toward the outside of the supporting valve body. The adapter end plate can be connected to the first cavity through a connecting piece.

[0017] The expansion and connection components include:

[0018] A connecting end pipe, the inner end of which is connected to the second end of the supporting valve body, and the inner diameter of which is consistent with the inner diameter of the supporting valve body;

[0019] The expanded diameter end plate is formed at the outer end of the connecting end pipe, protrudes radially toward the outside of the connecting end pipe, and its outer diameter is greater than the outer diameter of the supporting valve body.

[0020] The wide-mouth adapter component includes:

[0021] A wide-mouth seat plate is connected to the outer end of the expanded-diameter end plate, and its inner diameter is larger than the inner diameter of the connecting end tube, so that the wide-mouth seat plate can be connected to the second cavity.

[0022] The vacuum adapter includes:

[0023] A roughing pipeline is connected to the expanded end plate, is communicated with the inside of the wide-mouth seat plate, and is communicated with a roughing pump, and the roughing pump performs a rough vacuuming process on the second cavity;

[0024] The high-vacuum pipeline is connected to the wide-mouth seat plate, communicated with the inside of the wide-mouth seat plate and with a high-vacuum pump, and the high-vacuum pump performs high-vacuum treatment on the second cavity.

[0025] The on-off switching component includes:

[0026] A switching valve plate, which is mounted on the side wall of the supporting valve body through a sliding structure and can switch the on and off states of both ends of the supporting valve body;

[0027] A driving cylinder is installed outside the supporting valve body, and a piston rod of the driving cylinder is engaged with the switching valve plate. The switching valve plate is driven to move by the driving cylinder.

[0028] In one embodiment of the utility model, a group of sealing ring bodies are provided at the outer end of the wide-mouth seat plate, each sealing ring body extends along the circumference of the wide-mouth seat plate and is arranged in sequence along the radial direction of the wide-mouth seat plate, with gaps left between adjacent sealing ring bodies.

[0029] In one embodiment of the utility model, the sealing ring body located in the inner ring is made of polytetrafluoroethylene, and the sealing ring body located in the outer ring is made of rubber.

[0030] The advantages of the utility model are:

[0031] The installation positions of the on-off switching component and the vacuum adapter component of the switching valve are reasonable, making the entire valve structure compact and convenient for operation and maintenance. The sealing ring design at the outer end of the wide-mouth seat plate can effectively reduce vacuum leakage and improve the stability and reliability of the vacuum system. The design of the rough extraction pipeline and the high extraction pipeline enables the second cavity to be quickly evacuated, thereby improving the efficiency of ion implantation. It can adapt to different ion implantation machine vacuum systems to create a suitable implantation environment, ensure the efficient and stable operation of the ion implantation machine, and improve reliability. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a structural schematic diagram of a switching valve for a vacuum system of an ion implanter proposed by the utility model;

[0033] Figure 2 is a schematic diagram of the cross-sectional structure of the switching valve;

[0034] Figure 3 It is a schematic diagram of the end structure of the switching valve. DETAILED DESCRIPTION

[0035] In order to make the purpose, technical scheme and advantages of the embodiment of the utility model clearer, the technical scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. The components of the embodiment of the utility model generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiment of the utility model provided in the drawings is not intended to limit the scope of the utility model for protection, but merely represents the selected embodiment of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the utility model.

[0036] like Figure 1 to Figure 3 As shown, the switching valve for the vacuum system of an ion implanter proposed by the utility model comprises a supporting communication component, a narrow-mouthed transfer component, an expanding-diameter connecting component, a wide-mouthed transfer component, a vacuum transfer component and an on-off switching component, wherein the supporting communication component has an installation space, the narrow-mouthed transfer component is connected with the supporting communication component, and has a transfer structure matched with the first cavity inside, the expanding-diameter connecting component is connected with the supporting communication component, and is arranged with the narrow-mouthed transfer component on both sides of the supporting communication component, the wide-mouthed transfer component is connected with the expanding-diameter connecting component, and has a transfer structure matched with the second cavity inside, and its size is larger than the narrow-mouthed transfer component, the second cavity is connected with the first cavity through the wide-mouthed transfer component, the expanding-diameter connecting component, the supporting communication component and the narrow-mouthed transfer component, the vacuum transfer component is installed in the expanding-diameter connecting component and the wide-mouthed transfer component, and is connected with a vacuum pumping device, and the vacuum pumping device performs a vacuum pumping process on the second cavity, and the on-off switching component is installed in the supporting communication component, and can switch the on-off state of the supporting communication component.

[0037] In this embodiment, the supporting communication component includes a supporting valve body 100, both ends of the supporting valve body are connected, the narrow-mouth transition component and the diameter expansion connection component are respectively installed at both ends of the supporting valve body, and the on-off switching component is installed on the side of the supporting valve body.

[0038] The narrow-mouth transition component includes a narrow-mouth end tube 210 and a transition end plate 220. The inner end of the narrow-mouth end tube is installed on the first end of the supporting valve body through a connecting piece, and its inner diameter is consistent with the inner diameter of the supporting valve body. The transition end plate is formed at the outer end of the narrow-mouth end tube, and it protrudes radially toward the outside of the supporting valve body. The transition end plate can be connected to the first cavity through a connecting piece.

[0039] The expanded diameter connecting component includes a connecting end tube 310 and an expanded diameter end plate 320. The inner end of the connecting end tube is connected to the second end of the supporting valve body, and its inner diameter is consistent with the inner diameter of the supporting valve body. The expanded diameter end plate is formed at the outer end of the connecting end tube, and protrudes radially toward the outside of the connecting end tube. Its outer diameter is larger than the outer diameter of the supporting valve body.

[0040] The wide-mouth transition component includes a wide-mouth seat plate 400, which is connected to the outer end of the expanded diameter end plate. The inner diameter of the wide-mouth seat plate is larger than the inner diameter of the connecting end tube, and the wide-mouth seat plate can be connected to the second cavity.

[0041] The vacuum transfer component includes a rough vacuum pipe 510 and a high vacuum pipe 520. The rough vacuum pipe is connected to the expanded diameter end plate, which is connected to the inside of the wide-mouth seat plate and to the rough vacuum pump. The rough vacuum pump performs rough vacuum treatment on the second cavity. The high vacuum pipe is connected to the wide-mouth seat plate, which is connected to the inside of the wide-mouth seat plate and to the high vacuum pump. The high vacuum pump performs high vacuum treatment on the second cavity.

[0042] The on-off switching component includes a switching valve plate 610 and a driving cylinder 620. The switching valve plate is installed on the side wall of the supporting valve body through a sliding structure, and can switch the on-off state of the two ends of the supporting valve body. The driving cylinder is installed on the outside of the supporting valve body, and its piston rod is engaged with the switching valve plate, and the switching valve plate is driven by the driving cylinder to move.

[0043] In this embodiment, a group of sealing ring bodies 410 are provided at the outer end of the wide-mouth seat plate. Each sealing ring body extends along the circumference of the wide-mouth seat plate and is arranged in sequence along the radial direction of the wide-mouth seat plate, with gaps left between adjacent sealing ring bodies.

[0044] In this embodiment, the sealing ring body located in the inner ring is made of polytetrafluoroethylene, and the sealing ring body located in the outer ring is made of rubber.

[0045] In the description of the present utility model, it should be noted that when terms such as "upper", "lower", "inner", "outer", "left", "right" and the like indicating orientation or positional relationship appear, it should be understood that the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the utility model product is usually placed when in use, or the orientation or positional relationship commonly understood by those skilled in the art, is only for the convenience of describing the present utility model and simplifying the description, and does not indicate or imply that the equipment or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present utility model. In addition, when terms such as "first" and "second" appear, they are only used to distinguish the description, and cannot be understood as indicating or implying relative importance. In the description of the present utility model, it should also be noted that, unless otherwise clearly specified and limited, terms such as "installation", "setting", and "connection" should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be the internal connection of two elements. For those skilled in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

Claims

1. A switching valve for a vacuum system of an ion implanter, characterized in that: include: A supporting communication component having an installation space therein; A narrow-mouth transition component, which is in communication with the supporting communication component and has a transition structure therein that matches the first cavity; The diameter-expanding connection component is connected with the supporting and communicating component, and is arranged on both sides of the supporting and communicating component together with the narrow-mouth transition component; A wide-mouth transition component, which is connected to the diameter-expanding connection component, has a transition structure inside that matches the second cavity, and is larger in size than the narrow-mouth transition component. The second cavity is connected to the first cavity through the wide-mouth transition component, the diameter-expanding connection component, the supporting communication component and the narrow-mouth transition component; A vacuum transfer component, which is installed in the diameter-expanding connection component and the wide-mouth transfer component and is connected to a vacuum pumping device, and the vacuum pumping device performs a vacuum treatment on the second cavity; The on-off switching component is installed in the supporting communication component and can switch the on-off state of the supporting communication component.

2. A switching valve for a vacuum system of an ion implanter according to claim 1, characterized in that: The supporting communication components include: The supporting valve body has two ends that are connected, a narrow-mouth transition component and a diameter-expanding connection component are respectively installed at the two ends of the supporting valve body, and an on-off switching component is installed on the side of the supporting valve body.

3. A switching valve for a vacuum system of an ion implanter according to claim 2, characterized in that: The narrow mouth adapter component includes: A narrow-mouth end tube, the inner end of which is mounted on the first end of the supporting valve body through a connector, and the inner diameter of which is consistent with the inner diameter of the supporting valve body; The adapter end plate is formed at the outer end of the narrow-mouth end tube and protrudes radially toward the outer side of the supporting valve body.

4. The switching valve for the vacuum system of an ion implanter according to claim 3, characterized in that: The expansion and connection components include: A connecting end pipe, the inner end of which is connected to the second end of the supporting valve body, and the inner diameter of which is consistent with the inner diameter of the supporting valve body; The expanded diameter end plate is formed at the outer end of the connecting end pipe, protrudes radially toward the outside of the connecting end pipe, and its outer diameter is greater than the outer diameter of the supporting valve body.

5. A switching valve for a vacuum system of an ion implanter according to claim 4, characterized in that: The wide-mouth adapter component includes: A wide-mouth seat plate is connected to the outer end of the expanded-diameter end plate, and its inner diameter is larger than the inner diameter of the connecting end tube.

6. The switching valve for the vacuum system of an ion implanter according to claim 5, characterized in that: The vacuum adapter includes: A roughing pipeline is connected to the expanded end plate, is communicated with the inside of the wide-mouth seat plate, and is communicated with a roughing pump, and the roughing pump performs a rough vacuuming process on the second cavity; The high-suction pipeline is connected to the wide-mouth seat plate, communicated with the inside of the wide-mouth seat plate, and communicated with the high-suction pump.

7. The switching valve for a vacuum system of an ion implanter according to claim 2, characterized in that: The on-off switching components include: A switching valve plate, which is mounted on the side wall of the supporting valve body through a sliding structure and can switch the on and off states of both ends of the supporting valve body; A driving cylinder is installed outside the supporting valve body, and a piston rod of the driving cylinder is engaged with the switching valve plate.

8. The switching valve for a vacuum system of an ion implanter according to claim 5, characterized in that: A group of sealing ring bodies are arranged at the outer end of the wide-mouth seat plate, and each sealing ring body extends along the circumference of the wide-mouth seat plate and is arranged in sequence along the radial direction of the wide-mouth seat plate.

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