Anti-sticking silicon wafer basket

By adopting the design of widened insertion and connection adjustment parts in the silicon wafer basket, the problem of bumping and damage of the silicon wafer during cleaning is solved, and the phenomenon of sticking is reduced, which improves the yield and daily production capacity of the silicon wafer.

CN222440546UActive Publication Date: 2025-02-07JIANGSU GUOHUIHERUI SEMICON MATERIAL CO LTD
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Patent Information

Application Number
CN202420324425.7
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-02-22
Publication Date
2025-02-07
Estimated Expiration
2034-02-22

AI Technical Summary

Technical Problem

Existing silicon wafer baskets are prone to cause silicon wafers to hit and break when cleaning, and the sticking problems are serious, affecting daily production capacity and yield.

Method used

A anti-stick silicon wafer flower basket is designed, using a widened insertion row composed of mounting rods, inserts and triangular rhombus teeth. The insertion distance is adjusted by connecting the adjusting parts, and a buffer rubber band is installed on the bearing rod to reduce the silicon wafer. adhesion between the two.

Benefits of technology

It effectively reduces the impact and damage rate of silicon wafers, improves the yield and daily production capacity of silicon wafers, and reduces the phenomenon of sticking and the number of sticking.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model belongs to the technical field of silicon wafer flower baskets, and discloses an anti-sticking silicon wafer flower basket, which comprises two end plates, pull rods connected with the two end plates are arranged at four corners between the two end plates, and at least one group of widened power strips are arranged between the two end plates. The number of each group of widened power strips is two, the two widened power strips are symmetrically arranged on the two sides of the position between the two end plates, and the two ends, corresponding to the widened power strips, of the two end plates are each provided with a connecting adjusting piece capable of adjusting the distance between the two widened power strips in each group. According to the scheme, through the widened power strip composed of the mounting rods, the insertion pieces and the triangular rhombic pools, the silicon wafer collision and damage can be reduced, the silicon wafer yield is improved, the productivity is improved, the distance between the silicon wafers is increased by changing the tooth opening shape and tooth pitch of the wafer feeding position of the basket, the distance between the two silicon wafers is increased, the adhesion phenomenon between the silicon wafers is avoided, and the service life of the silicon wafers is prolonged. Therefore, the chip bonding phenomenon is reduced, the chip bonding number is reduced, and the productivity and the yield are improved.
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Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer flower baskets, in particular to an anti-adhesive silicon wafer flower basket. Background Art

[0002] Solar energy is one of the cleanest energy sources today. It is inexhaustible and its working principle is the conversion of light energy into heat energy, light energy into electrical energy and light energy into chemical energy. Solar cells are a typical example of light energy into electrical energy conversion. They are made using the photovoltaic principle of semiconductor materials. At present, solar cells are mainly silicon-based cells. In silicon-based solar cells, single crystal silicon and polycrystalline silicon are used as materials for photoelectric conversion. At present, improving the optical conversion efficiency of solar cells and reducing costs are the main directions of solar cell research.

[0003] The current market trend for silicon wafers is to be thinner. The advantage of thinning is that the same length of silicon rod can produce more silicon wafers, thereby increasing the company's profits. Most of the current silicon wafer baskets use gear rods to lock the position of the silicon wafer to prevent it from moving during cleaning.

[0004] However, for the current thin silicon wafers, the gear rod structure has a limited limiting area, which makes it easy for the wafers to collide and be damaged during cleaning. In addition, the tooth pitch and entrance position shape of the gear rod are not suitable for the current silicon wafer operation, resulting in more sticky wafers, thereby increasing the daily rework volume of silicon wafers, greatly affecting the daily production capacity and various indicators. In order to reduce the number of sticky wafers every day, an anti-sticking silicon wafer basket is proposed. Utility Model Content

[0005] The utility model aims to solve the shortcomings in the prior art and provides a silicon wafer flower basket with an anti-adhesive sheet.

[0006] In order to solve the above-mentioned background technical problems, the utility model adopts the following technical solutions.

[0007] A release sheet silicon wafer basket, comprising two end plates, four corners between the two end plates are provided with pull rods connecting the two end plates, at least one group of widened plug-in rows between the two end plates, each group of widened plug-in rows is two in number and symmetrically arranged on both sides between the two end plates, both ends of the corresponding widened plug-in rows on the two end plates are provided with connection adjustment parts capable of adjusting the spacing between the two widened plug-in rows in each group, and a bearing rod is provided between the two end plates and below the widened plug-in rows;

[0008] The widened power strip includes two mounting rods arranged vertically, and the two ends of each mounting rod are respectively arranged on the end plate through a connecting adjustment piece, and plug-ins are fixedly connected to the inner sides of the two mounting rods at equal distances, and triangular diamond-shaped teeth are arranged on both sides of the middle part of each plug-in, and the distance between two adjacent plug-ins on the left and right is greater than the distance between two adjacent triangular diamond-shaped teeth.

[0009] The connecting adjustment member includes a connecting rod fixedly connected to the mounting rod, a groove is provided on the inner side of the end plate corresponding to the connecting rod, a limit block adapted to the groove is provided in the groove, a strip opening is provided on the end plate and located in the groove, a pad is provided on the outer side of the end plate corresponding to the limit block, a bolt is inserted on the pad, and the bolt passes through the strip opening and the limit block and is threadedly connected to the connecting rod.

[0010] A buffer rubber band is arranged on the surface of the bearing rod.

[0011] As a further description of the above technical solution: the adjustable distance between the two widened socket strips in each group ranges from 182 to 210 mm.

[0012] As a further description of the above technical solution: it also includes a lug shaft, the lug shafts are respectively arranged on the outside of the two end plates, and the lug shafts are threadedly connected to the end plates.

[0013] As a further description of the above technical solution: recesses are provided on both end plates.

[0014] As a further description of the above technical solution: the distance between the two installation rods is greater than 56 mm, and the corners of each of the inserts are arc-shaped.

[0015] Compared with the prior art, the advantages of the present invention are:

[0016] 1. This solution can reduce silicon wafer collision and breakage, improve silicon wafer yield, and thus improve production capacity by widening the socket row composed of mounting rods, plug-ins, and triangular rhombus pools. The distance between silicon wafers is increased by changing the tooth shape and tooth pitch of the flower basket entry position, and the distance between two silicon wafers is increased to ensure that there is no adhesion between silicon wafers, thereby reducing the phenomenon of sticking and the number of sticking wafers, and improving production capacity and yield.

[0017] Second, this solution adjusts the distance between the two widened socket strips by connecting the adjusting parts to improve the adaptability of the silicon wafer basket. When the distance needs to be adjusted, it is only necessary to slightly loosen the bolts to drive the limit block to move in the groove to achieve the free switching of the various sizes of the basket. The limitation of the limit block and the groove can not only increase the stability of the widened socket strip, but also prevent problems such as silicon wafer fragmentation or deformation caused by rotation. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the structure of the utility model;

[0019] Figure 2 This is one of the structural schematic diagrams of the widened socket strip of the utility model;

[0020] Figure 3This is the second structural diagram of the widened socket strip of the utility model;

[0021] Figure 4 For this utility model Figure 1 Enlarged view of point A in the middle;

[0022] Figure 5 It is a structural schematic diagram of the connecting and adjusting member of the utility model.

[0023] Description of the numbers in the figure:

[0024] 1. End plate; 2. Pull rod; 3. Widened socket strip; 31. Mounting rod; 32. Insert; 33. Triangular diamond teeth; 4. Connecting adjustment piece; 41. Connecting rod; 42. Groove; 43. Limit block; 44. Spacer; 45. Bolt; 5. Load-bearing rod; 6. Buffer rubber band; 7. Ear shaft; 8. Notch. DETAILED DESCRIPTION

[0025] The following will clearly and completely describe the technical solutions in the embodiments of the utility model in conjunction with the drawings in the embodiments of the utility model; it is obvious that the described embodiments are only part of the embodiments of the utility model, rather than all the embodiments, and all other embodiments obtained by ordinary technicians in this field based on the embodiments of the utility model without making creative work are within the scope of protection of the utility model.

[0026] See also Figure 1-3 A release sheet silicon wafer flower basket comprises two end plates 1, and pull rods 2 connecting the two end plates 1 are arranged at the four corners between the two end plates 1, at least one group of widened plug-in bars 3 is arranged between the two end plates 1, and the number of each group of widened plug-in bars 3 is two and they are symmetrically arranged on both sides between the two end plates 1, and a bearing rod 5 is arranged between the two end plates 1 and below the widened plug-in bars 3.

[0027] The widened extension strip 3 includes two mounting rods 31 arranged vertically, and the two ends of each mounting rod 31 are respectively arranged on the end plate 1 through the connecting adjustment member 4, and the inner sides of the two mounting rods 31 are fixedly connected with plug-ins 32 at equal distances, and triangular rhombus teeth 33 are arranged on both sides of the middle part of each plug-in piece 32, and the distance between two adjacent plug-ins 32 on the left and right is greater than the distance between two adjacent triangular rhombus teeth 33.

[0028] The above structure can reduce the collision and breakage of silicon wafers and improve the yield of silicon wafers by widening the insertion row 3 composed of the mounting rod 31, the insertion piece 32 and the triangular rhombus teeth 33, thereby improving the production capacity. The distance between silicon wafers is increased by changing the tooth shape and tooth pitch of the flower basket entry position, and the distance between two silicon wafers is increased to ensure that there is no adhesion between silicon wafers, thereby reducing the sticking phenomenon and the number of sticking wafers, and improving the production capacity and yield.

[0029] See also Figure 1 , 4 5. Both ends of the two end plates 1 corresponding to the widened socket strips 3 are provided with connection adjustment members 4 that can adjust the spacing between each group of two widened socket strips 3. The connection adjustment member 4 includes a connection rod 41 fixedly connected to the mounting rod 31, a groove 42 is provided on the inner side of the end plate 1 corresponding to the connection rod 41, a stopper 43 adapted thereto is provided in the groove 42, a strip opening is provided on the end plate 1 and located in the groove 42, a cushion block 44 is provided on the outer side of the end plate 1 corresponding to the stopper block 43, a bolt 45 is inserted on the cushion block 44, and the bolt 45 passes through the strip opening and the stopper block 43 and is threadedly connected to the connection rod 41.

[0030] The above structure adjusts the distance between the two widened sockets 3 by connecting the adjusting piece 4 to improve the adaptability of the silicon wafer basket. When the distance needs to be adjusted, it is only necessary to slightly loosen the bolt 45 to drive the limit block 43 to move in the groove 42, so that the sizes of the basket can be switched at will. Moreover, through the restrictions of the limit block 43 and the groove 42, the stability of the widened socket 3 can be increased, and problems such as silicon wafer fragmentation or deformation caused by rotation can be prevented.

[0031] Among them, Figure 1 As shown, a buffer rubber band 6 is arranged on the surface of the bearing rod 5 to buffer the silicon wafer and reduce the rod mark at the bottom of the silicon wafer. The buffer rubber band 6 can be fixed by a rubber band buckle to prevent the rubber band from expanding and displacing after long-term use.

[0032] Furthermore, the adjustable distance between each group of two widened plug strips 3 ranges from 182 to 210 mm, and the flower basket can quickly switch between 182 and 210 gears by connecting the adjustment piece. The distance between the two mounting rods 31 is greater than 56 mm, and the corners of each plug piece 32 are arc-shaped.

[0033] In addition, if Figure 1 As shown, the silicon wafer basket also includes a lug shaft 7, which is respectively arranged on the outer sides of the two end plates 1, and the lug shaft 7 is threadedly connected to the end plates 1. The specific installation position of the lug shaft 7 is not limited. In order to reduce the weight of the silicon wafer basket and improve the cleaning and drying efficiency, the two end plates 1 are provided with notches 8.

[0034] The above is a preferred specific implementation of the utility model; however, the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the utility model according to the technical solution and its improved conception of the utility model, which should be included in the protection scope of the utility model.

Claims

1. A release sheet silicon wafer basket, comprising two end plates (1), wherein the four corners between the two end plates (1) are provided with tie rods (2) connecting the two end plates (1), characterized in that: At least one group of widened plug-in strips (3) is provided between the two end plates (1), the number of each group of widened plug-in strips (3) is two and they are symmetrically arranged on both sides between the two end plates (1), both ends of the corresponding widened plug-in strips (3) on the two end plates (1) are provided with connection adjustment members (4) capable of adjusting the spacing between the two widened plug-in strips (3) in each group, and a bearing rod (5) is provided between the two end plates (1) and below the widened plug-in strips (3); The widened plug strip (3) comprises two mounting rods (31) arranged vertically, the two ends of each mounting rod (31) being respectively arranged on the end plate (1) via a connecting adjustment member (4), plug pieces (32) being fixedly connected to the inner sides of the two mounting rods (31) at equal distances, triangular rhombus-shaped teeth (33) being arranged on both sides of the middle of each plug piece (32), and the distance between two adjacent left and right plug pieces (32) being greater than the distance between two adjacent triangular rhombus-shaped teeth (33).

2. The anti-adhesive silicon wafer flower basket according to claim 1, characterized in that: The connecting adjustment member (4) comprises a connecting rod (41) fixedly connected to the mounting rod (31); a groove (42) is provided on the inner side of the end plate (1) corresponding to the connecting rod (41); a limit block (43) adapted to the groove (42) is provided in the groove; a strip opening is provided on the end plate (1) and located in the groove (42); a cushion block (44) is provided on the outer side of the end plate (1) corresponding to the limit block (43); a bolt (45) is inserted into the cushion block (44); the bolt (45) passes through the strip opening and the limit block (43) and is threadedly connected to the connecting rod (41).

3. The anti-adhesive silicon wafer flower basket according to claim 1, characterized in that: A buffer rubber band (6) is provided on the surface of the bearing rod (5).

4. The anti-adhesive silicon wafer flower basket according to claim 1, characterized in that: The adjustable distance between the two widened insertion rows (3) in each group ranges from 182 to 210 mm.

5. The anti-adhesive silicon wafer flower basket according to claim 1, characterized in that: It also comprises a hanging ear shaft (7), wherein the hanging ear shaft (7) is respectively arranged on the outside of the two end plates (1), and the hanging ear shaft (7) is threadedly connected to the end plate (1).

6. The anti-adhesive silicon wafer flower basket according to claim 1, characterized in that: The two end plates (1) are both provided with a notch (8).

7. The anti-adhesive silicon wafer flower basket according to claim 1, characterized in that: The distance between the two installation rods (31) is greater than 56 mm, and the corners of each of the inserts (32) are arc-shaped.