Laser optical path device

Abstract

The utility model relates to a laser light path device, which comprises a first laser; the spectroscope is positioned on a propagation path of the first emission light emitted by the first laser and is used for dividing the first emission light into transmission light and reflected light; the first reflecting mirror is used for reflecting one of the transmission light and the reflection light, so that the transmission light and the reflection light can be emitted in the first direction; the first beam shaper is located on the emergent path of the reflected light, and the second beam shaper is located on the emergent path of the transmitted light; the first beam shaper and the second beam shaper are respectively used for adjusting the light spot shapes of the reflected light and the transmitted light, so that the reflected light and the transmitted light respectively form first emergent light and second emergent light with different light spot sizes. Compared with the prior art that different lasers need to be arranged for obtaining two different line widths, the device cost is reduced, meanwhile, switching between devices is avoided, time is saved, and production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of laser cutting, in particular to a laser light path device. Background Art

[0002] Laser cutting is an important way to process products and is widely used in various fields. For example, in the preparation process of perovskite solar cells, it is necessary to cut the perovskite solar cells multiple times, such as P1 process scribing, P2 process scribing, P3 process scribing and P4 process scribing (P4 process scribing is a process for cleaning the edges of perovskite solar cells). All of the above scribing processes are completed by laser beams.

[0003] Since the laser spot size used in each scribing process is different, each scribing process is usually completed using a different laser optical path device. When scribing, the laser emits a laser, which passes through the corresponding optical device and then shoots toward the product to scribble or cut on the product. In this way, when scribing or cutting products in different processes, it is necessary to select the corresponding laser optical path device, which not only leads to high equipment costs, but also time-consuming switching of each device, and low production efficiency. Utility Model Content

[0004] Based on this, it is necessary to provide a laser optical path device that can save costs and improve production efficiency in order to address the problem that the setting method of traditional scribing equipment leads to high costs and low production efficiency.

[0005] A laser optical path device, comprising:

[0006] First laser;

[0007] A beam splitter, located on a propagation path of the first emission light emitted by the first laser, and used for splitting the first emission light into transmitted light and reflected light;

[0008] A first reflector, used for reflecting one of the transmitted light and the reflected light so that both the transmitted light and the reflected light can be emitted along a first direction; and

[0009] A first beam shaper and a second beam shaper, wherein the first beam shaper is located on the exit path of the reflected light, and the second beam shaper is located on the exit path of the transmitted light; the first beam shaper and the second beam shaper are respectively used to adjust the spot shapes of the reflected light and the transmitted light, so that the reflected light and the transmitted light respectively form a first exit light and a second exit light with different spot sizes.

[0010] In the above-mentioned laser optical path device, the first emission light emitted by the first laser can be separated into transmitted light and reflected light by a beam splitter, and under the action of the first reflector, both the transmitted light and the reflected light can be emitted along the first direction. When the reflected light and the transmitted light are emitted along the first direction, they are shaped by the first beam shaper and the second beam shaper respectively to form the first emitted light and the second emitted light with different spot sizes and are emitted along the first direction. In this way, by setting up one laser, two spots of different sizes can be obtained after beam splitting and shaping, so as to meet two different line width processing requirements. Compared with the prior art where different lasers need to be set to obtain two different line widths, it not only reduces the equipment cost, but also avoids switching between devices, saves time, and improves production efficiency.

[0011] In one embodiment, the spot size of the first emitted light is: 48 μm-52 μm or 98 μm-102 μm; and / or

[0012] The spot size of the second emitted light is 8 μm-12 μm.

[0013] In one embodiment, the laser optical path device further includes a light blocker, which is used to block one of the first emergent light and the second emergent light, so that the other of the first emergent light and the second emergent light is emitted; and / or

[0014] The laser optical path device also includes a second reflector, which is arranged on the propagation path of the first emission light. The first emission light emitted by the first laser enters the beam splitter after being reflected by the second reflector.

[0015] In one embodiment, the laser optical path device further includes a first focusing mirror, and the first emitted light can be emitted after being focused by the first focusing mirror; and / or

[0016] The laser optical path device also includes a second focusing mirror, and the second output light can be focused by the second focusing mirror and then emitted.

[0017] In one embodiment, the laser optical path device further comprises a first beam expander, which is disposed between the first laser and the beam splitter, and is used to expand the beam diameter of the first emission light emitted by the first laser and transmit it to the beam splitter for splitting; and / or

[0018] The laser optical path device further comprises a polarizing cube beam splitter, which is arranged between the first laser and the beam splitter to split the first emission light emitted by the first laser and then emit it to the beam splitter.

[0019] In one embodiment, the first laser is an ultraviolet laser.

[0020] In one embodiment, the laser light path device further comprises:

[0021] A second laser is used to emit a second emission light, wherein the second emission light can form a third emission light emitted along the first direction, and the spot size of the third emission light is different from those of the first emission light and the second emission light;

[0022] The third laser and the galvanometer are used to emit a third emission light, and the third emission light can pass through the galvanometer and form a fourth emission light emitted along the first direction.

[0023] In one embodiment, the second laser and the third laser are both infrared lasers.

[0024] In one of the embodiments, the laser optical path device further includes a second beam expander, which is disposed on a propagation path of the second emitted light to expand a beam diameter of the second emitted light emitted by the second laser.

[0025] In one of the embodiments, the spot size of the third output light is 28 μm-32 μm. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 This is a light path diagram of a laser light path device provided in one embodiment of the present application.

[0027] Description of reference numerals:

[0028] 100, laser optical path device; 10, first laser; 20, beam splitter; 30, first reflector; 40, first beam shaper; 50, second beam shaper; 60, first focusing mirror; 70, second focusing mirror; 80, second reflector; 90, first beam expander; 110, polarizing cube beam splitter; 120, second laser; 130, third laser; 140, galvanometer; 150, third reflector; 160, second beam expander; 170, fourth reflector; 200, first output light; 300, second output light; 400, third output light; 500, fourth output light. DETAILED DESCRIPTION

[0029] In order to make the above-mentioned purposes, features and advantages of the utility model more obvious and easy to understand, the specific implementation methods of the utility model are described in detail below in conjunction with the accompanying drawings. In the following description, many specific details are set forth to facilitate a full understanding of the utility model. However, the utility model can be implemented in many other ways different from those described herein, and those skilled in the art can make similar improvements without violating the connotation of the utility model, so the utility model is not limited by the specific embodiments disclosed below.

[0030] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as a limitation on the present invention.

[0031] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include at least one of the features. In the description of the present utility model, the meaning of "plurality" is at least two, such as two, three, etc., unless otherwise clearly and specifically defined.

[0032] In the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected", "fixed" and the like should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, it can be the internal connection of two elements or the interaction relationship between two elements, unless otherwise clearly defined. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0033] In the present utility model, unless otherwise clearly specified and limited, a first feature being "above" or "below" a second feature may mean that the first and second features are in direct contact, or the first and second features are in indirect contact through an intermediate medium. Moreover, a first feature being "above", "above" or "above" a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being "below", "below" or "below" a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0034] It should be noted that when an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be a central element. When an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be a central element at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used herein are for illustrative purposes only and are not intended to be the only implementation method.

[0035] See also Figure 1 In one embodiment of the present application, a laser optical path device 100 is provided for cutting or marking a product, thereby processing the product. Specifically, the laser optical path device 100 is used to mark a solar cell substrate to prepare a solar cell. In other embodiments, the type of product cut or marked by the laser optical path device 100 is not limited.

[0036] In a specific embodiment, the solar cell is a perovskite solar cell. There are three processes in the production process of the perovskite solar cell that require scribing, namely the P1 process, the P2 process and the P3 process. The laser optical path device 100 can scribing on the product in the P1 process and the P2 process, or scribing on the product in the P1 process, the P2 process and the P3 process. In some other embodiments, the laser optical path device 100 can also be used to clean the edges of the solar cell, which is not limited here.

[0037] Continue reading Figure 1 The laser optical path device 100 includes a first laser 10, a beam splitter 20 and a first reflector 30. The first laser 10 is used to emit a first emission light, and the beam splitter 20 is located on the propagation path of the first emission light to split the first emission light into a transmitted light and a reflected light. The first reflector 30 is used to reflect one of the transmitted light and the reflected light so that both the transmitted light and the reflected light can be emitted along a first direction to process the product.

[0038] It should be noted that the beam splitter 20 is an optical device for splitting incident light into two beams of transmission and reflection having a certain light intensity ratio. The beam splitter 20 is generally used at an angle, and it can conveniently separate the incident light into two parts, namely, reflected light and transmitted light. Since the beam splitter 20 is located on the propagation path of the first emitted light, that is, the first emitted light forms the incident light incident on the beam splitter 20. Specifically, the beam splitter 20 can split the incident light into transmitted light and reflected light of equal light intensity. For example, in some specific embodiments, the light intensity incident on the beam splitter 20 is 2, and the transmitted light and reflected light separated by the beam splitter 20 are both 1. Of course, in some other specific embodiments, the light intensity incident on the beam splitter 20 is not limited, and at the same time, the light intensity of the transmitted light and reflected light formed by the beam splitter 20 is also not limited.

[0039] Specifically, the beam splitter 20 is a polarization beam splitter (PBS), which can split the incident non-polarized light into two perpendicular linear polarized light beams, wherein the P polarized light completely passes through to form transmitted light, and the S polarized light is reflected at an angle of 45° to form reflected light, and the outgoing direction forms an angle of 90° with the P light.

[0040] The first reflector 30 is a total reflector. When the transmitted light or reflected light formed by the beam splitter 20 is directed toward the first reflector 30 , the first reflector 30 can completely reflect the light beam without any light beam penetrating.

[0041] Continue reading Figure 1 The laser optical path device 100 further includes a first beam shaper 40 and a second beam shaper 50. The first beam shaper 40 is located on the outgoing path of the reflected light separated by the beam splitter 20, and the second beam shaper 50 is located on the outgoing path of the transmitted light separated by the beam splitter 20. The first beam shaper 40 is used to adjust the spot shape of the reflected light, and the second beam shaper 50 is used to adjust the spot shape of the transmitted light, so that the reflected light and the transmitted light respectively form the first outgoing light 200 and the second outgoing light 300 with different spot sizes.

[0042] It should be noted that the beam shaper (DOE) can change the shape of the beam so that the spot size meets the processing requirements. Specifically, the beam shaper is a high-power laser diffraction beam shaper. After the laser beam is beam shaped, the spot can be changed into any beam shape. Such as square flat top, rectangular flat top, circular flat top, elliptical flat top, linear and annular spots. It should also be noted that the above-mentioned spot size means: the size of the first outgoing light 200 and the second outgoing light 300 formed after the reflected light and the transmitted light are shaped by the beam shaper, which is the size of the spot when the spot is projected onto the product. In some specific embodiments, when the spot is hit on the product along the first direction and a line is drawn on the product, the spot size is equal to the width of the line formed by the line drawn on the product.

[0043] In the laser optical path device 100 provided in the embodiment of the present application, the first emission light emitted by the first laser 10 can be separated into the transmitted light and the reflected light by the beam splitter 20, and under the action of the first reflector 30, the transmitted light and the reflected light can be emitted along the first direction. When the reflected light and the transmitted light are emitted along the first direction, they are shaped by the first beam shaper 40 and the second beam shaper 50 respectively to form the first emitted light 200 and the second emitted light 300 with different spot sizes and emitted along the first direction. In this way, by setting up a laser, two different sizes of spots can be obtained after beam splitting and shaping, so as to meet two different line width processing requirements. Compared with the prior art where different lasers need to be set to obtain two different line widths, it not only reduces the equipment cost, but also avoids switching between devices, saves time, and improves production efficiency.

[0044] In some embodiments, the spot size of the first output light 200 is 48 μm-52 μm or 98 μm-102 μm. The spot size of the second output light 300 is 8 μm-12 μm. In this way, the first output light 200 can be applied to the P2 scribing process of the perovskite solar cell, and the second output light 300 can be applied to the P3 scribing process of the perovskite solar cell.

[0045] Of course, in some other embodiments, the specific values ​​of the spot sizes of the first emergent light 200 and the second emergent light 300 are not limited and can be adjusted according to the working conditions. At the same time, when the spot sizes of the first emergent light 200 and the second emergent light 300 are the sizes defined above, they are not only applicable to the processing requirements of perovskite solar cells, but also applicable to the processing requirements of other products.

[0046] In some embodiments, the laser optical path device 100 further includes a light blocker (not shown in the figure), which is used to block one of the first emitted light 200 and the second emitted light 300, so that the other of the first emitted light 200 and the second emitted light 300 is emitted. In this way, it is possible to ensure that the corresponding emitted light is selected in the corresponding processing technology, and the interference of the other emitted light on the processing technology can be avoided.

[0047] Continue reading Figure 1 The laser optical path device 100 further includes a first focusing lens 60, and the first output light 200 can be emitted after being focused by the first focusing lens 60. The laser optical path device 100 further includes a second focusing lens 70, and the second output light 300 can be emitted after being focused by the second focusing lens 70. The focusing lens can focus the laser on the processed surface of the product to ensure the processing effect.

[0048] Furthermore, the laser optical path device 100 further includes a second reflector 80, which is disposed on the propagation path of the first emitted light. The first emitted light emitted by the first laser 10 enters the spectroscope 20 after being reflected by the second reflector 80. The propagation direction of the first emitted light can be changed by arranging the second reflector 80, so as to facilitate the first emitted light to be transmitted to the spectroscope 20.

[0049] Optionally, the first laser 10 is used to emit the first emission light along the second direction, and the number of the second reflectors 80 is two. The first emission light emitted by the first laser 10 is emitted toward the first second reflector 80 along the second direction, and the second reflector 80 causes the first emission light to change direction and emit toward the second second reflector 80 along the third direction. The second second reflector 80 causes the first emission light to change direction again and emit toward the beam splitter 20 along the second direction. The first direction, the second direction, and the third direction intersect each other. Specifically, the first direction, the second direction, and the third direction are perpendicular to each other.

[0050] It should be understood that in some other embodiments, the laser optical path device 100 may also omit the second reflector 80 , and in this case, the first laser 10 emits the first emission light along the second direction directly toward the beam splitter 20 .

[0051] The laser optical path device 100 further includes a first beam expander 90 , which is disposed between the first laser 10 and the beam splitter 20 , and is used to expand the beam diameter of the first emitted light emitted by the first laser 10 and transmit the beam to the beam splitter 20 for splitting.

[0052] Optionally, the laser optical path device 100 further includes a polarizing cube beam splitter 110, which is disposed between the first laser 10 and the beam splitter 20, and is used to split the first emission light emitted by the first laser 10 and then emit it to the beam splitter 20. The polarizing cube beam splitter 110 plays a role in weakening light, and the laser light can obtain the required wavelength and power after passing through the polarizing cube beam splitter 110.

[0053] In some specific implementations, the first beam expander 90 and the polarizing cube beam splitter 110 are disposed between the two second reflectors 80. Of course, in some other embodiments, the disposition positions of the first beam expander 90 and the polarizing cube beam splitter 110 are not limited.

[0054] Continue reading Figure 1, the laser optical path device 100 also includes a second laser 120, which is used to emit a second emission light, and the second emission light can form a third emission light 400 emitted along the first direction, and the spot sizes of the third emission light 400, the first emission light 200 and the second emission light 300 are all different. Further, the laser optical path device 100 also includes a third laser 130 and a galvanometer 140, and the third laser 130 is used to emit a third emission light, and the third emission light can pass through the galvanometer 140 and form a fourth emission light 500 emitted along the first direction. In this way, the laser optical path device 100 can form four types of emission lights. Optionally, the spot size of the first emission light 200 is 48μm-52μm or 98μm-102μm, the spot size of the second emission light 300 is: 8μm-12μm, and the spot size of the third emission light 400 is: 28μm-32μm. At this time, the third output light 400 can be applied to the P1 scribing process of the perovskite solar cell, the first output light 200 can be applied to the P2 scribing process of the perovskite solar cell, the second output light 300 can be applied to the P3 scribing process of the perovskite solar cell, and the fourth output light 500 can be applied to the edge cleaning process of the perovskite solar cell. In this way, the equipment for the P1-P4 process of the perovskite solar cell is integrated into one, avoiding the use of different equipment to process and prepare the perovskite solar cell.

[0055] It should be understood that in other embodiments, the output light may also select other spot sizes to process products (such as perovskite solar cells), which is not limited here.

[0056] Further, the laser optical path device 100 further includes a third reflector 150, and the second emitted light is reflected by the third reflector 150 to form a third emitted light 400. Specifically, the number of the third reflectors 150 is two, the second laser 120 emits the second emitted light along the third direction, the second emitted light is reflected by the first third reflector 150 and emitted along the second direction to the second third reflector 150, and the second third reflector 150 causes the second emitted light to be emitted along the first direction to form the third emitted light 400. In other embodiments, the number of the third reflectors 150 is not limited, and may be one or more than two.

[0057] Continue reading Figure 1 The laser optical path device 100 also includes a second beam expander 160, which is arranged on the propagation path of the second emitted light to expand the beam diameter of the second emitted light.

[0058] Furthermore, the laser optical path device 100 further includes a fourth reflector 170, which is disposed on the propagation path of the third emitted light and is used to reflect the third emitted light into the galvanometer 140. Specifically, the third laser 130 emits the third emitted light along the third direction, and the third emitted light is emitted toward the fourth reflector 170 along the third direction. The fourth reflector 170 causes the third emitted light to change direction and emit toward the galvanometer 140 along the second direction. The galvanometer 140 causes the third emitted light to finally form a fourth emitted light 500 emitted along the first direction. The galvanometer 140 can cause the laser to travel along a preset trajectory, thereby improving processing efficiency.

[0059] Optionally, the second reflector 80, the third reflector 150 and the fourth reflector 170 are all total reflectors. The first laser 10 is an ultraviolet laser, and the second laser 120 and the third laser 130 are both infrared lasers. An ultraviolet laser is a laser that generates an ultraviolet beam, and an infrared laser is a laser that generates an infrared beam. Both infrared lasers and ultraviolet lasers have the advantages of high efficiency, high precision and high energy density.

[0060] It is conceivable that in some other embodiments, the types of the first laser 10 , the second laser 120 , and the third laser 130 are not limited and can be selected as needed.

[0061] The technical features of the above-described embodiments may be arbitrarily combined. To make the description concise, not all possible combinations of the technical features in the above-described embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0062] The above-mentioned embodiments only express several implementation methods of the utility model, and the description is relatively specific and detailed, but it cannot be understood as limiting the scope of the utility model patent. It should be pointed out that for ordinary technicians in this field, several modifications and improvements can be made without departing from the concept of the utility model, which all belong to the protection scope of the utility model. Therefore, the protection scope of the utility model patent shall be based on the attached claims.

Claims

1. A laser optical path device, characterized in that: include: A first laser (10); A beam splitter (20), located on a propagation path of the first emission light emitted by the first laser (10), and used for splitting the first emission light into transmitted light and reflected light; A first reflector (30) is used to reflect one of the transmitted light and the reflected light so that both the transmitted light and the reflected light can be emitted along a first direction; as well as A first beam shaper (40) and a second beam shaper (50), wherein the first beam shaper (40) is located on an exit path of the reflected light, and the second beam shaper (50) is located on an exit path of the transmitted light; the first beam shaper (40) and the second beam shaper (50) are used to adjust the spot shapes of the reflected light and the transmitted light, respectively, so that the reflected light and the transmitted light form a first exit light (200) and a second exit light (300) with different spot sizes.

2. The laser optical path device according to claim 1, characterized in that: The spot size of the first output light (200) is: 48 μm-52 μm or 98 μm-102 μm; and / or The spot size of the second emitted light (300) is 8 μm-12 μm.

3. The laser optical path device according to claim 1, characterized in that: The laser optical path device further comprises a light blocker, the light blocker being used to block one of the first emergent light (200) and the second emergent light (300), so that the other of the first emergent light (200) and the second emergent light (300) is emitted; and / or The laser optical path device also includes a second reflector (80), which is arranged on the propagation path of the first emission light. The first emission light emitted by the first laser (10) enters the beam splitter (20) after being reflected by the second reflector (80).

4. The laser optical path device according to claim 1, characterized in that: The laser optical path device further comprises a first focusing mirror (60), and the first output light (200) can be focused by the first focusing mirror (60) and then emitted; and / or The laser optical path device also includes a second focusing mirror (70), and the second output light (300) can be focused by the second focusing mirror (70) and then emitted.

5. The laser optical path device according to claim 1, characterized in that: The laser optical path device further comprises a first beam expander (90), which is arranged between the first laser (10) and the beam splitter (20) and is used to expand the beam diameter of the first emission light emitted by the first laser (10) and transmit the beam to the beam splitter (20) for splitting; and / or The laser optical path device also includes a polarizing cube beam splitter (110), which is arranged between the first laser (10) and the beam splitter (20) and is used to split the first emission light emitted by the first laser (10) and then emit it to the beam splitter (20).

6. The laser optical path device according to claim 1, characterized in that: The first laser (10) is an ultraviolet laser.

7. The laser optical path device according to any one of claims 1 to 6, characterized in that: The laser optical path device also includes: a second laser (120) for emitting a second emission light, wherein the second emission light can form a third emission light (400) emitted along the first direction, and the spot size of the third emission light (400) is different from that of the first emission light (200) and the second emission light (300); The third laser (130) and the galvanometer (140) are used to emit a third emission light, and the third emission light can pass through the galvanometer (140) and form a fourth emission light (500) emitted along the first direction.

8. The laser optical path device according to claim 7, characterized in that: The second laser (120) and the third laser (130) are both infrared lasers.

9. The laser optical path device according to claim 7, characterized in that: The laser optical path device also includes a second beam expander (160), which is arranged on the propagation path of the second emitted light and is used to expand the beam diameter of the second emitted light emitted by the second laser (120).

10. The laser optical path device according to claim 7, characterized in that: The spot size of the third output light (400) is 28 μm-32 μm.

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