Silicon substrate feeding machine

Abstract

The utility model relates to the field of silicon-based OLED (Organic Light Emitting Diode) micro-display devices, and discloses a silicon substrate feeding machine, which comprises a stock bin; the feeding mechanism comprises a first sliding rail erected above the stock bin; a second slide rail; a base; a gripping part; the grabbing part comprises a driving assembly and a first suction cup connected with the driving assembly. The shooting part is in signal connection with the driving assembly, the shooting part shoots the silicon substrate, generates a signal and transmits the signal to the grabbing part, then the grabbing part grabs the silicon substrate, and after grabbing is completed, the shooting part is started to shoot the silicon substrate; the driving assembly can drive the first suction cup to rotate according to a received signal so as to adjust the placing angle of the silicon substrate, the shooting part is matched with the grabbing part to grab the silicon substrate, the shooting part plays a role in detection and positioning, the grabbing part can adjust the placing angle of the silicon substrate according to data obtained by the shooting part, and therefore the silicon substrate can be placed more accurately. Therefore, the follow-up processing technology can be ensured to be carried out smoothly, and the yield is improved.

Description

Technical Field

[0001] The utility model relates to the field of silicon-based OLED micro-display devices, in particular to a silicon-based wafer loading machine. Background Art

[0002] Silicon-based OLED displays have many advantages such as high resolution, high integration, low power consumption, small size and light weight. They are the core components of near-eye display systems and are widely used in AR glasses, VR helmets, infrared detectors, and 3D medical equipment, with an increasing market share.

[0003] The production process of silicon-based OLED microdisplay devices on the market is complicated. When encapsulating the glass cover, it is necessary to use dispensing equipment to dispense glue on the surface of the silicon substrate, and use auxiliary production jigs, and then install multiple glass cover panels. The existing feeder uses a gripping mechanism, such as a suction cup, a robotic arm, etc., to directly send the silicon substrate to the dispensing process. However, since the silicon substrate is relatively thin, it is easy to shift due to vibration or other external factors during transportation, which in turn affects the subsequent dispensing process and causes inaccurate dispensing position. Utility Model Content

[0004] The purpose of the embodiment of the present application is to provide a silicon substrate loading machine to solve the problem that the silicon substrate is relatively thin and easy to be offset due to vibration or other external factors during transportation, and the traditional loading machine lacks corresponding detection and adjustment mechanism, which leads to the problem of inaccurate dispensing. The specific technical solution is as follows:

[0005] In a first aspect of an embodiment of the present application, a silicon substrate loader comprises: a silo for storing silicon substrates; a loading mechanism comprising: a first slide rail mounted above the silo; a second slide rail slidably connected to the first slide rail; a base slidably connected to the second slide rail; a gripping portion connected to the base and capable of sliding up and down relative to the base; the gripping portion comprises a driving component and a first suction cup connected thereto; a photographing portion connected to the base and capable of sliding up and down relative to the base, the photographing portion being signal-connected to the driving component, the photographing portion first photographs the silicon substrate and generates a signal to transmit to the gripping portion, and then the gripping portion grips the silicon substrate, and when the gripping is completed, the driving component can drive the first suction cup to rotate according to the received signal to adjust the placement angle of the silicon substrate.

[0006] In some embodiments, the base is provided with a first guide rail and a second guide rail arranged side by side and in parallel, the driving assembly is slidably connected to the first guide rail, and the shooting part is slidably connected to the second guide rail.

[0007] In some embodiments, a first drive motor is fixedly provided on the base, and a screw transmission mechanism is provided between the first drive motor and the drive assembly, and the drive assembly is driven by the first drive motor to slide along the first guide rail. A rotatable wheel is also connected to the base, and the wheel is arranged between the first guide rail and the second guide rail and the wheel is placed on the top of the base. A connecting belt is hung on the wheel, and the two ends of the connecting belt are respectively connected to the drive assembly and the shooting part.

[0008] In some embodiments, the driving assembly includes a second driving motor, a base plate and a control panel, the base plate is slidably connected to the first guide rail, the second driving motor and the control panel are both installed on the base plate, and the second driving motor, the shooting part, and the first slide rail are respectively connected to the control panel signal, and the first suction cup is connected to the second driving motor.

[0009] In some embodiments, the silo includes a shell and a loading station and an unloading station arranged in the shell, wherein the first slide rail is installed above the loading station, wherein the unloading station is provided with a material tray for storing the silicon substrates, and the shell is also provided with a transportation mechanism, and the material tray storing the silicon substrates is transported to the loading station via the transportation mechanism.

[0010] In some embodiments, an auxiliary light source is provided on the shell and is arranged above the loading station. The auxiliary light source includes a bracket with an opening in the middle and a lamp installed on the bracket.

[0011] In some embodiments, the transport mechanism includes a third slide rail, a connecting seat, a fourth slide rail, a grabbing frame and a second suction cup, the third slide rail is arranged on the shell and is located on the side of the loading station and the unloading station, the connecting seat is slidably connected to the third slide rail, the fourth slide rail is arranged on the connecting seat and the fourth slide rail is arranged perpendicular to the third slide rail, the grabbing frame is slidably connected to the fourth slide rail, and the second suction cup is connected to the grabbing frame.

[0012] In some embodiments, the photographing unit includes a panoramic camera and a main light source connected to a side of the panoramic camera.

[0013] Beneficial effects of the embodiments of the present application: The present invention utilizes a photographing part in cooperation with a grasping part to grasp a silicon substrate, wherein the photographing part plays a role in detection and positioning, and the grasping part can adjust the placement angle of the silicon substrate according to the data obtained by the photographing part, thereby playing a role in correcting deviation, thereby ensuring that subsequent processing techniques can proceed smoothly and improving the yield rate.

[0014] Additional aspects and advantages of the present invention will be partially given in the following description, and partially will become apparent from the following description, or will be understood through the practice of the present invention. Of course, it is not necessary to achieve all of the advantages described above at the same time for any product or method to be implemented in this application. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative labor.

[0016] Figure 1 It is a structural schematic diagram of the utility model.

[0017] Figure 2 It is another structural schematic diagram of the utility model.

[0018] Figure 3 It is a structural schematic diagram of the grabbing part of the utility model.

[0019] Figure 4 It is another structural schematic diagram of the grabbing part of the utility model.

[0020] Figure 5 It is a structural schematic diagram of the auxiliary light source of the utility model.

[0021] Figure 6 It is a structural schematic diagram of the transportation mechanism of the utility model.

[0022] In the figure: silo 1, loading station 11, unloading station 12, material tray 121, loading mechanism 2, first slide rail 21, second slide rail 22, base 23, first drive motor 2311, grabbing part 24, second drive motor 241, first suction cup 242, control panel 243, shooting part 25, panoramic camera 251, main light source 252, rotating wheel 26, connecting belt 27, bracket 31, lamp 32, third slide rail 41, connecting seat 42, fourth slide rail 43, grabbing frame 44, second suction cup 45. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present invention are described clearly and completely below. Obviously, the described embodiments are only a part of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0024] Reference to "embodiments" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiments may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0025] See also Figure 1-6 In an embodiment of the utility model, a silicon substrate loading machine includes: a silo 1 for storing silicon substrates; a loading mechanism 2, including: a first slide rail 21 mounted above the silo 1; a second slide rail 22, slidably connected to the first slide rail 21; a base 23, slidably connected to the second slide rail 22; a gripping portion 24, connected to the base 23 and capable of sliding up and down relative to the base 23; the gripping portion 24 includes a driving component and a first suction cup 242 connected thereto; a photographing portion 25, connected to the base 23 and capable of sliding up and down relative to the base 23, and the photographing portion 25 is signal-connected to the driving component;

[0026] During operation, the photographing unit 25 first photographs the silicon substrate and generates a signal to transmit to the grasping unit 24, and then the grasping unit 24 grasps the silicon substrate. After the grasping is completed, the driving component can drive the first suction cup 242 to rotate according to the received signal to adjust the placement angle of the silicon substrate. After the driving component adjusts the placement angle of the silicon substrate, it will be transported away to complete the loading.

[0027] It should be noted that the terms "first", "second", etc. in this document are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include one or more of the features.

[0028] See also Figure 2-4 In some embodiments, the base 23 is provided with a first guide rail 231 and a second guide rail 232 arranged side by side and in parallel, the driving assembly is slidably connected to the first guide rail 231, and the shooting unit 25 is slidably connected to the second guide rail 232;

[0029] Specifically, a first driving motor 2311 is fixedly provided on the base 23, and a screw transmission mechanism is provided between the first driving motor 2311 and the driving assembly, and the driving assembly is driven to slide along the first guide rail 231 by the first driving motor 2311. A rotatable wheel 26 is also connected to the base 23, and the wheel 26 is arranged between the first guide rail 231 and the second guide rail 232 and is placed on the top of the base 23. A connecting belt 27 is hung on the wheel 26, and two ends of the connecting belt 27 are respectively connected to the driving assembly and the shooting unit 25;

[0030] It can be understood that when the driving component slides downward along the first guide rail 231, the driving component will pull the shooting part 25 through the connecting belt 27 to make it slide upward. When the driving component slides upward along the first guide rail 231, the shooting part 25 slides downward, which not only improves work efficiency but also simplifies the relevant driving structure.

[0031] In some embodiments, the driving assembly includes a second driving motor 241, a base plate and a control panel 243, the base plate is slidably connected to the first guide rail 231, the second driving motor 241 and the control panel 243 are both installed on the base plate, and the second driving motor 241, the shooting unit 25, and the first slide rail 21 are respectively connected to the control panel 243 by signal, and the first suction cup 242 is connected to the second driving motor 241.

[0032] See also Figure 5 In some embodiments, the silo 1 includes a shell and a loading station 11 and an unloading station 12 arranged in the shell, and the first slide rail 21 is erected above the loading station 11, wherein the unloading station 12 is provided with a material tray 121 for storing the silicon substrates, and the shell is also provided with a transportation mechanism, and the material tray 121 storing the silicon substrates is transported to the loading station 11 via the transportation mechanism.

[0033] See also Figure 5 In some embodiments, an auxiliary light source is provided on the shell and is arranged above the loading station 11. The auxiliary light source includes a bracket 31 with an opening in the middle and a lamp 32 installed on the bracket 31. The opening is provided to facilitate the grasping portion 24 to grasp the silicon substrate.

[0034] See also Figure 6In some embodiments, the transport mechanism includes a third slide rail 41, a connecting seat 42, a fourth slide rail 43, a grabbing frame 44 and a second suction cup 45. The third slide rail 41 is arranged on the shell and is located on the side of the loading station 11 and the unloading station 12. The connecting seat 42 is slidably connected to the third slide rail 41. The fourth slide rail 43 is arranged on the connecting seat 42 and the fourth slide rail 43 is arranged perpendicular to the third slide rail 41. The grabbing frame 44 is slidably connected to the fourth slide rail 43. The second suction cup 45 is connected to the grabbing frame 44.

[0035] In some embodiments, the photographing unit 25 includes a panoramic camera 251 and a main light source 252 connected to a side of the panoramic camera 251 .

[0036] The terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc. in this document indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they should not be understood as limitations on the present application.

[0037] It is obvious to those skilled in the art that the present invention is not limited to the details of the exemplary embodiments described above, and that the present invention can be implemented in other specific forms without departing from the spirit or basic features of the present invention. Therefore, no matter from which point of view, the embodiments should be regarded as exemplary and non-restrictive, and the scope of the present invention is defined by the appended claims rather than the above description, and it is intended that all changes falling within the meaning and scope of the equivalent elements of the claims are included in the present invention.

Claims

1. A silicon substrate loading machine, characterized in that: include: Silo, used to store silicon substrates; Feeding mechanism, including: A first slide rail mounted above the silo; A second slide rail, slidably connected to the first slide rail; A base, slidably connected to the second slide rail; A gripping portion connected to the base and capable of sliding up and down relative to the base; the gripping portion includes a driving assembly and a first suction cup connected thereto; The photographing part is connected to the base and can slide up and down relative to the base. The photographing part is connected to the driving component signal. The photographing part first photographs the silicon substrate and generates a signal to transmit to the grasping part, and then the grasping part grasps the silicon substrate. When the grasping is completed, the driving component can drive the first suction cup to rotate according to the received signal to adjust the placement angle of the silicon substrate.

2. A silicon substrate loading machine according to claim 1, characterized in that: The base is provided with a first guide rail and a second guide rail arranged side by side and in parallel, the driving assembly is slidably connected to the first guide rail, and the shooting part is slidably connected to the second guide rail.

3. A silicon substrate loading machine according to claim 2, characterized in that: A first driving motor is fixedly provided on the base, and a screw transmission mechanism is provided between the first driving motor and the driving assembly, and the driving assembly is driven by the first driving motor to slide along the first guide rail. A rotatable wheel is also connected to the base, and the wheel is arranged between the first guide rail and the second guide rail and the wheel is placed on the top of the base. A connecting belt is hung on the wheel, and two ends of the connecting belt are respectively connected to the driving assembly and the shooting part.

4. A silicon substrate loading machine according to claim 3, characterized in that: The driving assembly includes a second driving motor, a base plate and a control panel, the base plate is slidably connected to the first guide rail, the second driving motor and the control panel are both installed on the base plate, and the second driving motor, the shooting part, and the first slide rail are respectively connected to the control panel signal, and the first suction cup is connected to the second driving motor.

5. The silicon substrate loading machine according to claim 1, characterized in that: The silo includes a shell and a loading station and an unloading station arranged in the shell, wherein the first slide rail is arranged above the loading station, wherein the unloading station is provided with a material tray for storing the silicon substrates, and the shell is also provided with a transportation mechanism, and the material tray storing the silicon substrates is transported to the loading station via the transportation mechanism.

6. A silicon substrate loading machine according to claim 5, characterized in that: An auxiliary light source is provided on the shell and is arranged above the loading station. The auxiliary light source comprises a bracket with an opening in the middle and a lamp installed on the bracket.

7. The silicon substrate loading machine according to claim 5, characterized in that: The transport mechanism includes a third slide rail, a connecting seat, a fourth slide rail, a grabbing frame and a second suction cup. The third slide rail is arranged on the shell and is located on the side of the loading station and the unloading station. The connecting seat is slidably connected to the third slide rail. The fourth slide rail is arranged on the connecting seat and the fourth slide rail is arranged perpendicular to the third slide rail. The grabbing frame is slidably connected to the fourth slide rail, and the second suction cup is connected to the grabbing frame.

8. The silicon substrate loading machine according to claim 1, characterized in that: The shooting unit includes a panoramic camera and a main light source connected to a side of the panoramic camera.

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