Liquid supply device

Abstract

The utility model belongs to the technical field of wafer cleaning, and particularly relates to a liquid supply device, which comprises a liquid medicine intermediate container, at least one air pipe and at least one liquid inlet pipe are communicated from the upper part to the inner cavity of the liquid medicine intermediate container, and a liquid discharge pipe is arranged from the inner cavity to the lower part of the liquid medicine intermediate container; the valve assembly comprises an air valve arranged at the air pipe; when the air valve is opened, air is introduced into the inner cavity through the air pipe, so that the cavity is in positive pressure, and liquid medicine is discharged through the liquid discharging pipe; or air is pumped out of the inner cavity through the air pipe to enable the cavity to be in negative pressure, and liquid medicine is sucked through the liquid inlet pipe; when liquid is supplied, air in the inner cavity can be exhausted through the air pipe, low pressure is formed in the inner cavity, the liquid inlet pipe is opened, and the low pressure of the inner cavity continuously and quickly sucks liquid medicine; after the liquid medicine is in place, the liquid inlet pipe and the air pipe are closed, the air pipe pumps air into the inner cavity to form high pressure in the liquid medicine intermediate container, the liquid discharge pipe is opened, the liquid medicine is discharged through the high pressure of the inner cavity, power is provided for the liquid medicine, an existing special pump machine is replaced, the manufacturing cost of the device is reduced, and the working efficiency is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer cleaning, and in particular relates to a liquid supply device. Background Art

[0002] In the process of wafer cleaning, the liquid supply device is an indispensable component. Inside the wafer cleaning device, the liquid supply method is usually to use a special pump to supply the liquid, so that the pump can bear the power source required for the liquid flow. In the related art, since the existing pump is usually made of steel, when the pump is working, the liquid reacts with the steel, which will damage the pump structure and cause the liquid to fail. Moreover, more than one liquid is needed to clean the wafer, but a separate pump needs to be configured to operate during the liquid supply process, resulting in a sharp increase in costs.

[0003] Therefore, in order to solve the problem of increased cost caused by the need to configure a separate pump machine when supplying liquid to clean wafers and the problem of liquid failure caused by contact between the liquid and the inside of the pump machine, a liquid supply device is urgently needed. Utility Model Content

[0004] The utility model aims to provide a liquid supply device.

[0005] In order to solve the above technical problems, the utility model provides a liquid supply device, including: an intermediate container for liquid medicine, with at least one air pipe and at least one liquid inlet pipe connected from the upper part to the inner cavity, and a discharge pipe is arranged at the lower part of the inner cavity; a valve assembly, including an air valve arranged at the air pipe; when the air valve is opened, gas is introduced into the inner cavity through the air pipe to make the cavity under positive pressure and the liquid medicine is discharged through the discharge pipe; or gas is extracted into the inner cavity through the air pipe to make the cavity under negative pressure and the liquid medicine is absorbed through the liquid inlet pipe.

[0006] Further, the air pipe includes an air intake pipe, the air valve includes an air intake valve, and the air intake valve is arranged on the air intake pipe.

[0007] Furthermore, the air pipe includes an air outlet pipe, the air valve includes an air outlet valve, and the air outlet valve is arranged on the air outlet pipe.

[0008] Furthermore, the valve assembly also includes a liquid inlet valve, and the liquid inlet valve is arranged on the liquid inlet pipe.

[0009] Furthermore, a top plate is disposed on the upper portion of the intermediate container for the liquid medicine, and a bottom plate is disposed on the lower portion of the intermediate container for the liquid medicine; and a plurality of reinforcing columns are disposed between the top plate and the bottom plate.

[0010] Furthermore, a fixing seat is arranged on the upper part of the top plate, and the air inlet valve and the air outlet valve are arranged on the side wall of the fixing seat.

[0011] Furthermore, the drain pipe is provided with a first drain valve, a filter and a second drain valve in sequence, wherein the liquid outlet of the drain pipe is connected with a three-way joint.

[0012] Furthermore, a main pipe is provided at the lower part of the intermediate container of the liquid medicine, one end of which is connected to the liquid inlet of the discharge pipe, and the other end of which is connected to a display tube, wherein the other end of the display tube is connected to the upper part of the intermediate container of the liquid medicine, and the display tube is transparent.

[0013] Furthermore, the lower part of the display tube is connected with a drainage branch pipe, and the drainage branch pipe is provided with a third drainage valve, wherein the liquid outlet of the drainage branch pipe is connected with the three-way joint.

[0014] Beneficial effects of the utility model:

[0015] When supplying liquid, the air pipe can be opened through the air valve to evacuate the medicine liquid intermediate container, so that low pressure is formed in the medicine liquid intermediate container. At this time, the liquid inlet pipe is opened, and the low pressure in the medicine liquid intermediate container continues to quickly absorb the medicine liquid; after the medicine liquid is in place, the liquid inlet pipe and the air pipe are closed, and the air valve continues to open the air pipe, and the air pipe pumps air into the medicine liquid intermediate container to form high pressure in the medicine liquid intermediate container, and the liquid discharge pipe is opened to discharge the high-pressure medicine liquid in the medicine liquid intermediate container, thereby providing power for the medicine liquid. The utility model replaces the existing special pump machine, reduces the manufacturing cost of the device, and improves the working efficiency; the medicine liquid does not contact the pump machine, thereby avoiding the problem of the medicine liquid failing and the pump machine being damaged due to the reaction between the medicine liquid and the inside of the pump machine, thereby reducing the maintenance cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0017] Figure 1 It is a schematic diagram of the structure of the liquid supply device of the utility model from a top view;

[0018] Figure 2 It is a structural schematic diagram of the liquid supply device of the utility model from a side perspective;

[0019] Figure 3 It is a structural schematic diagram of the liquid supply device of the utility model from the front perspective.

[0020] In the figure:

[0021] 100. intermediate container for liquid medicine, 110. air inlet pipe, 111. air inlet valve, 120. air outlet pipe, 121. air outlet valve, 130. liquid inlet pipe, 131. liquid inlet valve, 140. liquid discharge pipe, 141. first liquid discharge valve, 142. filter, 143. second liquid discharge valve, 144. three-way connector, 150. top plate, 151. fixing seat, 160. bottom plate, 170. reinforcing column, 180. main pipe, 190. display tube, 191. liquid discharge branch pipe, 192. third liquid discharge valve. DETAILED DESCRIPTION

[0022] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution of the utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0023] In some embodiments, Figures 1 to 3 As shown, the utility model provides a liquid supply device, comprising: a liquid medicine intermediate container 100, at least one air pipe and at least one liquid inlet pipe 130 are connected from the upper part to the inner cavity, and a liquid discharge pipe 140 is arranged at the lower part of the inner cavity; a valve assembly, comprising an air valve arranged at the air pipe; when the air valve is opened, gas is introduced into the inner cavity through the air pipe to make the cavity in a positive pressure and discharge the liquid medicine through the liquid discharge pipe 140; or gas is pumped out into the inner cavity through the air pipe to make the cavity in a negative pressure and absorb the liquid medicine through the liquid inlet pipe 130; when supplying liquid, the air pipe can be opened by the air valve to pump air into the liquid medicine intermediate container 100, so that a low pressure is formed in the liquid medicine intermediate container 100, and at this time, the opening Open the liquid inlet pipe 130, and the low pressure in the medicine intermediate container 100 continuously and rapidly inhales the medicine; after the medicine is in place, close the liquid inlet pipe 130 and the air pipe, and the air valve continues to open the air pipe, and the air pipe pumps air into the medicine intermediate container 100 to form a high pressure in the medicine intermediate container 100, and open the liquid discharge pipe 140 to discharge the high-pressure medicine in the medicine intermediate container 100, thereby providing power for the medicine. The liquid supply device of the utility model replaces the existing special pump, reduces the manufacturing cost of the device, and improves the working efficiency; the medicine does not contact the pump, avoiding the problem of the reaction between the medicine and the inside of the pump causing the medicine to fail and the pump to be damaged, thereby reducing the maintenance cost.

[0024] See also Figure 1 The air pipe includes an air intake pipe 110, and the air valve includes an air intake valve 111. The air intake valve 111 is arranged on the air intake pipe 110; the air intake valve 111 is an electronic valve, which can quickly open and close the air intake pipe 110, thereby improving the air intake efficiency.

[0025] See also Figure 1The air pipe includes an air outlet pipe 120, and the air valve includes an air outlet valve 121, and the air outlet valve 121 is arranged on the air outlet pipe 120; the air outlet valve 121 is an electronic valve, which can quickly open and close the air outlet pipe 120, thereby improving the air extraction efficiency.

[0026] See also Figure 1 The valve assembly also includes a liquid inlet valve 131, which is arranged on the liquid inlet pipe 130; the liquid inlet valve 131 is an electronic valve, which can quickly open and close the liquid inlet pipe 130, thereby improving the liquid inlet efficiency.

[0027] See also Figures 1 to 3 A top plate 150 is disposed on the upper portion of the intermediate container 100 for the medicinal liquid, and a bottom plate 160 is disposed on the lower portion of the intermediate container 100 for the medicinal liquid; a plurality of reinforcing columns 170 are disposed between the top plate 150 and the bottom plate 160; the top plate 150 and the bottom plate 160 are connected by a plurality of reinforcing columns 170, which can reinforce the intermediate container 100 for the medicinal liquid, ensure the structural stability of the intermediate container 100 for the medicinal liquid, and improve the service life of the intermediate container 100 for the medicinal liquid.

[0028] See also Figure 1 A fixing seat 151 is provided on the upper part of the top plate 150, and the air inlet valve 111 and the air outlet valve 121 are arranged on the side walls of the fixing seat 151; the fixing seat 151 can stably support the air inlet valve 111 and the air outlet valve 121, and provide a good working environment for the air inlet valve 111 and the air outlet valve 121.

[0029] See also Figure 2 The valve assembly also includes a first drain valve 141 and a second drain valve 143. A filter 142 is provided on the drain pipe 140, and the filter 142 is provided between the first drain valve 141 and the second drain valve 143, wherein the liquid outlet of the drain pipe 140 is connected with a three-way joint 144; when the liquid intermediate container 100 is in a high-pressure state and the liquid needs to be sprayed out, the first drain valve 141 and the second drain valve 143 are opened at this time, and the liquid passes through the filter 142, and the filter 142 can filter the impurities in the liquid to improve the cleansing effect of the liquid, and then the liquid is transported to the three-way joint 144, and the three-way joint 144 discharges the liquid.

[0030] See also Figure 2A main pipe 180 is provided at the lower part of the intermediate container 100 of the liquid medicine, one end of the main pipe 180 is connected to the liquid inlet of the discharge pipe 140, and the other end of the main pipe 180 is connected to a display tube 190, wherein the other end of the display tube 190 is connected to the upper part of the intermediate container 100 of the liquid medicine, and the display tube 190 is transparently arranged; by setting the display tube 190, the display tube 190 is transparently arranged, and a part of the liquid medicine in the cylinder will flow to the display tube 190 through the main pipe 180, and the liquid level of the display tube 190 is consistent with the liquid level in the intermediate container 100 of the liquid medicine, so that the liquid level in the intermediate container 100 of the liquid medicine can be known through the display tube 190, thereby knowing the remaining amount of the liquid medicine in the intermediate container 100 of the liquid medicine.

[0031] See also Figure 2 The lower part of the display tube 190 is connected with a drainage branch pipe 191, and the drainage branch pipe 191 is provided with a third drainage valve 192, wherein the liquid outlet of the drainage branch pipe 191 is connected with the three-way joint 144; when the liquid medicine in the display tube 190 needs to be discharged, the third drainage valve 192 is opened, and the liquid medicine in the display tube 190 will be transported to the liquid outlet of the drainage branch pipe 191 through the third drainage valve 192 and finally discharged from the three-way joint 144.

[0032] Based on the above ideal embodiments of the utility model, the relevant staff can make various changes and modifications without deviating from the technical concept of the utility model through the above description. The technical scope of the utility model is not limited to the content of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A liquid supply device, characterized in that: include: The intermediate container (100) for liquid medicine has at least one air pipe and at least one liquid inlet pipe (130) connected from the upper part to the inner cavity, and a liquid discharge pipe (140) is arranged at the lower part of the inner cavity; The valve assembly comprises an air valve arranged at the air pipe; When the air valve is opened, gas is introduced into the inner cavity through the air pipe to make the cavity under positive pressure and discharge the liquid medicine through the liquid discharge pipe; or gas is drawn out into the inner cavity through the air pipe to make the cavity under negative pressure and absorb the liquid medicine through the liquid inlet pipe; The air pipe comprises an air intake pipe (110), the air valve comprises an air intake valve (111), and the air intake valve (111) is arranged on the air intake pipe (110); The air pipe comprises an air outlet pipe (120), the air valve comprises an air outlet valve (121), and the air outlet valve (121) is arranged on the air outlet pipe (120); The valve assembly further comprises a liquid inlet valve (131), wherein the liquid inlet valve (131) is arranged on the liquid inlet pipe (130); A main pipe (180) is provided at the lower part of the intermediate liquid container (100), one end of the main pipe (180) is connected to the liquid inlet of the liquid discharge pipe (140), and the other end of the main pipe (180) is connected to a display tube (190), wherein The other end of the display tube (190) is in communication with the upper portion of the intermediate container (100) for the liquid medicine, and the display tube (190) is transparent; The lower part of the display tube (190) is connected to a drainage branch pipe (191), and the drainage branch pipe (191) is provided with a third drainage valve (192), wherein The liquid outlet of the liquid discharge branch pipe (191) is in communication with the three-way connector (144).

2. The liquid supply device according to claim 1, characterized in that: A top plate (150) is disposed on the upper portion of the intermediate liquid medicine container (100), and a bottom plate (160) is disposed on the lower portion of the intermediate liquid medicine container (100); A plurality of reinforcement columns (170) are arranged between the top plate (150) and the bottom plate (160).

3. The liquid supply device according to claim 2, characterized in that: A fixing seat (151) is provided on the upper portion of the top plate (150), and the air inlet valve (111) and the air outlet valve (121) are provided on the side wall of the fixing seat (151).

4. The liquid supply device according to claim 1, characterized in that: The valve assembly further comprises a first liquid discharge valve (141) and a second liquid discharge valve (143); a filter (142) is arranged on the liquid discharge pipe (140); the filter (142) is arranged between the first liquid discharge valve (141) and the second liquid discharge valve (143); The liquid outlet of the liquid discharge pipe (140) is connected to a three-way connector (144).

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