Multi-wafer horizontal tank type wafer box

Abstract

The utility model relates to the technical field of wafer boxes, in particular to a multi-wafer horizontal tank type wafer box, which comprises a wafer box, a protective ring is fixedly connected with the inner wall of the wafer box, a plurality of wafers and a plurality of isolation pads are arranged in the wafer box, and a box cover is in threaded connection with the outer surface of the wafer box. The wafer box has the advantages that the protection ring, the isolation pad, the box cover, the storage groove, the positioning clamping groove, the positioning clamping block and the elastic piece are arranged in a matched mode, a structure for pressing the wafer and the isolation pad is additionally arranged on the box cover, and therefore when the wafer box is not filled with the wafer and the isolation pad, the situation that the position of the wafer shakes and deviates is avoided; according to the technical scheme of the utility model, the plurality of wafers are arranged on the box cover, the isolation pads are additionally arranged between the wafers, the plurality of wafers are separated and protected, the edges of the wafers are protected through the protection rings, the situation that the wafers are damaged is avoided, and the box cover and the connecting components thereof can be reused.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer boxes, in particular to a multi-wafer horizontal tank-type wafer box. Background Art

[0002] A wafer refers to a silicon chip used in the manufacture of silicon semiconductor integrated circuits. Due to its round shape, it is called a wafer. Wafer boxes mainly play the role of placing and transporting wafers in semiconductor production. In order to simplify transportation and minimize the risk of contamination, chip manufacturers use wafer boxes to transport and store wafers.

[0003] The most common wafer box in the prior art is the can-type wafer box, which is widely used due to its simple structure and low production cost. However, the can-type wafer box in the prior art still has certain disadvantages. During use, if the wafers do not fill the can-type wafer box, when the can-type wafer box encounters vibration, it will cause the wafers inside the wafer box to vibrate. In severe cases, the wafers may even be damaged, affecting the service life of the wafers. Although some wafer boxes have sponges and other fillers added inside to prevent the wafers from shaking, after the wafers are taken out of the wafer box, the sponges and other fillers are easily lost, resulting in a waste of resources. Therefore, a multi-piece horizontal can-type wafer box is needed to solve the above problem. Utility Model Content

[0004] The purpose of the present invention is to solve at least one of the above technical deficiencies.

[0005] Therefore, one purpose of the present invention is to provide a multi-wafer horizontal tank-type wafer box to solve the problems mentioned in the background technology and overcome the shortcomings of the prior art.

[0006] In order to achieve the above-mentioned purpose, an embodiment of the utility model on one hand provides a multi-wafer horizontal tank-type wafer box, including a wafer box, the inner wall of the wafer box is fixedly connected with a protective ring, a plurality of wafers and a plurality of isolation pads are arranged inside the wafer box, the outer surface of the wafer box is threadedly connected with a box cover, one side of the box cover is provided with a plurality of storage grooves, a plurality of positioning slots and a plurality of installation grooves, the inner walls of several of the positioning slots are clamped with positioning blocks, one side of several of the positioning blocks are fixedly connected with spring sheets, and the inner walls of several of the installation slots are fixedly connected with a fixing structure for fixing the positioning blocks.

[0007] Preferably, any of the above schemes comprises a fixing structure comprising a guide rod, a fixing spring, a slider and a hollow fixing rod; the inner wall of the mounting groove is fixedly connected with the guide rod and the fixing spring; the outer surface of the guide rod is slidably connected with a T-shaped slider; one side of the slider is fixedly connected with a hollow fixing rod; and one side of the positioning block is provided with a fixing hole matching the size of the hollow fixing rod.

[0008] Preferably, any of the above schemes is that the materials of the protection ring and the isolation pad are both foam, and a plurality of wafers and a plurality of isolation pads are distributed inside the wafer box at intervals.

[0009] Preferably, any of the above schemes has the same number of storage slots and positioning slots as the installation slots, the storage slots are connected to the positioning slots, the positioning slots are connected to the installation slots, and the width of the installation slots is smaller than the width of the positioning slots.

[0010] Preferably, any of the above schemes has the shape of the positioning slot and the positioning block both being dovetail-shaped, and the size of the positioning block is adapted to that of the positioning slot.

[0011] Preferably, in any of the above schemes, the positions of the spring sheet and the storage slot correspond to each other, and the width of the spring sheet is smaller than the width of the storage slot.

[0012] Preferably, any of the above schemes is that a portion of the guide rod is located inside the hollow fixing rod, the hollow fixing rod is slidably connected to the guide rod, the hollow fixing rod is adapted to the size of the fixing hole, the end of the fixing spring away from the inner wall of the mounting groove is fixedly connected to the slider, a portion of the guide rod is located inside the fixing spring, and the slider is slidably connected to the mounting groove.

[0013] Compared with the prior art, the advantages and beneficial effects of the utility model are:

[0014] 1. Through the coordinated arrangement of the protective ring, isolation pad, box cover, storage slot, positioning card slot, positioning card block and spring piece, a structure for pressing the wafer and the isolation pad is added to the box cover, so as to avoid the wafer from shaking and shifting when the wafer box is not fully filled with the wafer and the isolation pad, and isolation pads are added between the wafers to separate and protect several wafers, and the edges of the wafers are protected by the protective ring to avoid damage to the wafer, and the box cover and its connecting components can be reused.

[0015] 2. The coordinated arrangement of the positioning slot, positioning block, spring sheet, fixing structure and fixing hole makes it easier to install and remove the positioning block, thereby facilitating replacement of the spring sheet when it is damaged. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 It is a schematic diagram of the structure of the utility model;

[0017] Figure 2 It is a schematic diagram of the cross-sectional structure of the utility model;

[0018] Figure 3 It is a schematic diagram of the explosion structure of the wafer box of the utility model;

[0019] Figure 4 It is a structural schematic diagram of the box cover and its connecting components of the utility model;

[0020] Figure 5 For this utility model Figure 4 A schematic diagram of the structure in which the positioning card block is not assembled;

[0021] Figure 6 This is a schematic diagram of the structure of the positioning card block and its connecting components of the utility model;

[0022] Figure 7 For this utility model Figure 2 Schematic diagram of the enlarged structure at point A in the middle.

[0023] In the figure: 1-wafer box, 2-protective ring, 3-wafer, 4-isolation pad, 5-box cover, 6-storage slot, 7-positioning slot, 8-installation slot, 9-positioning block, 10-spring, 11-fixing structure, 1101-guide rod, 1102-fixing spring, 1103-slider, 1104-hollow fixing rod, 12-fixing hole. DETAILED DESCRIPTION

[0024] The present invention is further described below in conjunction with the accompanying drawings, but the protection scope of the present invention is not limited to the following description.

[0025] like Figures 1 to 7As shown, a multi-wafer horizontal tank-type wafer box comprises a wafer box 1, the inner wall of which is fixedly connected with a protective ring 2, a plurality of wafers 3 and a plurality of isolation pads 4 are arranged inside the wafer box 1, and the plurality of wafers 3 and the plurality of isolation pads 4 are located inside the protective ring 2, a box cover 5 is threadedly connected to the outer surface of the wafer box 1, a plurality of storage grooves 6, a plurality of positioning card grooves 7 and a plurality of installation grooves 8 are opened on one side of the box cover 5, the inner walls of the plurality of positioning card grooves 7 are all clamped with positioning card blocks 9, one side of the plurality of positioning card blocks 9 are all fixedly connected with spring pieces 10, the inner walls of the plurality of installation grooves 8 are all fixedly connected with fixing structures 11 for fixing the positioning card blocks 9, when the wafer box 1 is needed to place wafers 3, firstly, an isolation pad 4 is horizontally placed on the bottom of the wafer box 1, then a wafer 3 is horizontally placed, and then an isolation pad 4 is placed on the surface of the wafer 3 The process of rotating the cover 5 and rotating the cover 5 is described as follows: when the wafer 3 and the isolating pad 4 are placed in the wafer box 1 at intervals, the isolating pad 4 is located on the top layer inside the wafer box 1, so that the wafer 3 located at the top can be protected. After all the wafers 3 and the isolating pad 4 are placed in the wafer box 1, the box cover 5 is rotated and threadedly connected to the wafer box 1. During the downward rotation of the box cover 5, the spring piece 10 first contacts the isolating pad 4 located at the top, and as the box cover 5 moves downward, the spring piece 10 is deformed and a part of the spring piece 10 is retracted into the storage groove 6. When the box cover 5 is completely connected to the wafer box 1, the isolating pad 4 is pressed under the reaction force of the spring piece 10, thereby pressing several isolating pads 4 and wafers 3, avoiding the shaking of the wafer 3 caused by external vibrations and avoiding the influence of external vibrations on the wafer 3.

[0026] As an optional technical solution of the utility model, the fixing structure 11 includes a guide rod 1101, a fixing spring 1102, a slider 1103 and a hollow fixing rod 1104. The inner wall of the mounting groove 8 is fixedly connected with the guide rod 1101 and the fixing spring 1102. The outer surface of the guide rod 1101 is slidably connected with a T-shaped slider 1103. One side of the slider 1103 is fixedly connected with the hollow fixing rod 1104. A fixing hole 12 matching the size of the hollow fixing rod 1104 is provided on one side of the positioning block 9. When installing the spring piece 10, first move the slider 1103 to move it away from the positioning slot 7, so that the hollow fixing rod 1104 is moved from the inner side of the positioning slot 7. The spring 1102 is then moved out, at which time the fixing spring 1102 is in a compressed state, and then the positioning block 9 is connected to the positioning slot 7. At this time, a part of the spring 10 is located inside the receiving slot 6, and the fixing hole 12 corresponds to the position of the hollow fixing rod 1104, and then the slider 1103 is slowly released, and the hollow fixing rod 1104 is reset and inserted into the fixing hole 12 under the reaction force of the fixing spring 1102, thereby completing the operation of installing the spring 10, making the operation of installing the spring 10 relatively simple, and also convenient for removing the spring 10. When the elasticity of the spring 10 is reduced or damaged, it is convenient to replace a new spring 10, and whether to install the spring 10 can be selected according to actual needs during use.

[0027] As an optional technical solution of the utility model, the materials of the protective ring 2 and the isolation pad 4 are both foam, and a plurality of wafers 3 and a plurality of isolation pads 4 are spaced apart and distributed inside the wafer box 1, which can better protect the wafers 3, avoid mutual friction between the wafers 3, and avoid the surface of the wafer 3 directly contacting and rubbing against the inner wall of the wafer box 1.

[0028] As an optional technical solution of the present utility model, the number of storage slots 6 and positioning slots 7 is the same as the number of installation slots 8, the storage slots 6 are connected to the positioning slots 7, the positioning slots 7 are connected to the installation slots 8, and the width of the installation slots 8 is smaller than the width of the positioning slots 7.

[0029] As an optional technical solution of the utility model, the positioning slot 7 and the positioning block 9 are both dovetail-shaped, and the size of the positioning block 9 is adapted to the positioning slot 7, so that the connection between the positioning block 9 and the positioning slot 7 is more secure.

[0030] As an optional technical solution of the present invention, the position of the spring piece 10 corresponds to the storage groove 6, and the width of the spring piece 10 is smaller than the width of the storage groove 6, which can avoid the spring piece 10 interfering with the inner wall of the storage groove 6 during the deformation process.

[0031] As an optional technical solution of the present invention, a portion of the guide rod 1101 is located inside the hollow fixed rod 1104, the hollow fixed rod 1104 is slidably connected to the guide rod 1101, and the hollow fixed rod 1104 is adapted to the size of the fixing hole 12, so that the hollow fixed rod 1104 can be smoothly inserted into the fixing hole 12, and the end of the fixing spring 1102 away from the inner wall of the mounting groove 8 is fixedly connected to the slider 1103, and a portion of the guide rod 1101 is located inside the fixing spring 1102, and the slider 1103 is slidably connected to the mounting groove 8, so that the slider 1103 can smoothly move along the direction of the mounting groove 8 and cause the fixing spring 1102 to produce elastic deformation, and the guide rod 1101 can prevent the fixing spring 1102 from bending during the elastic deformation process.

[0032] A multi-wafer horizontal tank-type wafer box, the working principle is as follows:

[0033] An isolation pad 4 is placed horizontally at the bottom of the wafer box 1, and then a wafer 3 is placed horizontally, and then an isolation pad 4 is placed on the surface of the wafer 3, and this process is repeated, so that the wafer 3 and the isolation pad 4 are placed inside the wafer box 1 at intervals, and the isolation pad 4 is located on the top layer inside the wafer box 1, so that the wafer 3 located at the top can be protected. After all the wafers 3 and isolation pads 4 are placed inside the wafer box 1, the box cover 5 is rotated and threadedly connected to the wafer box 1. During the downward rotation of the box cover 5, the spring piece 10 first contacts the isolation pad 4 located at the top, and as the box cover 5 moves downward, the spring piece 10 is deformed and a part of the spring piece 10 is retracted into the inside of the storage groove 6. When the box cover 5 is completely connected to the wafer box 1, the isolation pad 4 is pressed under the reaction force of the spring piece 10, and a plurality of isolation pads 4 and wafers 3 are pressed, thereby completing the operation of fixing the wafer 3 in the storage box.

[0034] To sum up, the multi-wafer horizontal can-type wafer box, through the coordinated arrangement of the protective ring 2, the isolation pad 4, the box cover 5, the storage slot 6, the positioning card slot 7, the positioning block 9 and the spring 10, adds a structure on the box cover 5 to compress the wafer 3 and the isolation pad 4, so as to avoid the wafer 3 from shaking and shifting when the wafer 3 and the isolation pad 4 do not fill the wafer box 1 fully, and isolation pads 4 are added between the wafers 3 to separate and protect several wafers 3, and the edges of the wafers 3 are protected by the protective ring 2 to avoid damage to the wafer 3, and the box cover 5 and its connecting components can be reused, and the coordinated arrangement of the positioning card slot 7, the positioning block 9, the spring 10, the fixing structure 11 and the fixing hole 12 makes it easier to install and remove the positioning block 9, so that it is convenient to replace the spring 10 with a new one when the spring 10 is damaged.

Claims

1. A multi-wafer horizontal tank-type wafer box, characterized in that: The invention comprises a wafer box (1), the inner wall of which is fixedly connected with a protective ring (2), a plurality of wafers (3) and a plurality of isolation pads (4) are arranged inside the wafer box (1), the outer surface of the wafer box (1) is threadedly connected with a box cover (5), one side of the box cover (5) is provided with a plurality of storage grooves (6), a plurality of positioning slots (7) and a plurality of installation grooves (8), the inner walls of a plurality of the positioning slots (7) are all clamped with positioning blocks (9), a side of a plurality of the positioning blocks (9) are all fixedly connected with spring sheets (10), and the inner walls of a plurality of the installation grooves (8) are all fixedly connected with a fixing structure (11) for fixing the positioning blocks (9).

2. The multi-wafer horizontal tank-type wafer box according to claim 1, characterized in that: The fixing structure (11) comprises a guide rod (1101), a fixing spring (1102), a slider (1103) and a hollow fixing rod (1104); the inner wall of the mounting groove (8) is fixedly connected to the guide rod (1101) and the fixing spring (1102); the outer surface of the guide rod (1101) is slidably connected to a slider (1103) in a T-shape; one side of the slider (1103) is fixedly connected to the hollow fixing rod (1104); and one side of the positioning block (9) is provided with a fixing hole (12) that matches the size of the hollow fixing rod (1104).

3. The multi-wafer horizontal tank-type wafer box according to claim 2, characterized in that: The protective ring (2) and the isolation pad (4) are both made of foam, and a plurality of wafers (3) and a plurality of isolation pads (4) are distributed in the interior of the wafer box (1) at intervals.

4. The multi-wafer horizontal tank-type wafer box according to claim 3, characterized in that: The number of the receiving slots (6) and the positioning slots (7) is the same as the number of the mounting slots (8); the receiving slots (6) are connected to the positioning slots (7); the positioning slots (7) are connected to the mounting slots (8); and the width of the mounting slots (8) is smaller than the width of the positioning slots (7).

5. The multi-wafer horizontal tank-type wafer box according to claim 4, characterized in that: The positioning slot (7) and the positioning block (9) are both dovetail-shaped, and the positioning block (9) is adapted in size to the positioning slot (7).

6. The multi-wafer horizontal tank-type wafer box according to claim 5, characterized in that: The positions of the spring sheet (10) and the receiving groove (6) correspond, and the width of the spring sheet (10) is smaller than the width of the receiving groove (6).

7. The multi-wafer horizontal tank-type wafer box according to claim 6, characterized in that: A portion of the guide rod (1101) is located inside the hollow fixed rod (1104), the hollow fixed rod (1104) is slidably connected to the guide rod (1101), the hollow fixed rod (1104) is adapted to the size of the fixing hole (12), one end of the fixing spring (1102) away from the inner wall of the mounting groove (8) is fixedly connected to the slider (1103), a portion of the guide rod (1101) is located inside the fixing spring (1102), and the slider (1103) is slidably connected to the mounting groove (8).

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