Double-cover-door wafer detection device

Abstract

The utility model relates to a double-cover-door wafer detection device. The double-cover-door wafer detection device comprises a box body and a cover door assembly, wherein the box body is provided with a sample cavity with an opening at one end; the cover door assembly is used for sealing the sample cavity, the cover door assembly comprises a first cover door and a second cover door, the first cover door is rotatably connected with the box body, and the second cover door is at least partially embedded in the first cover door and rotatably connected with the first cover door. According to the double-cover-door wafer detection device, only the second cover door is opened under the condition that the first cover door is closed relative to the box body, and excessive dust is prevented from entering the sample cavity, so that the dust is prevented from influencing the detection accuracy of the double-cover-door wafer detection device on a to-be-detected sample.

Description

Technical Field

[0001] The present application relates to the field of wafer detection technology, and in particular to a double-cover door wafer detection device. Background Art

[0002] In a wafer inspection device, a robot arm is often used to transfer the sample to be inspected to a sample chamber for inspection. When the sample to be inspected needs to be placed manually in the sample chamber, the entire cover of the wafer inspection device often needs to be opened to facilitate the operator to place the sample in the sample chamber. However, it is inconvenient to open the entire cover of the wafer inspection device to place the sample to be inspected, and some dust may enter the sample chamber, thereby affecting the inspection accuracy of the sample to be inspected. Utility Model Content

[0003] In view of this, the present application provides a double-door wafer inspection device, which can open only the second door when the first door is closed relative to the box body, thereby preventing excessive dust from entering the sample chamber, thereby preventing dust from affecting the accuracy of the double-door wafer inspection device in detecting the sample to be inspected.

[0004] The present application provides a double-door wafer detection device, which includes: a box body and a door assembly, wherein the box body has a sample cavity with an opening at one end; the door assembly is used to close the sample cavity, and the door assembly includes a first door and a second door, wherein the first door is rotatably connected to the box body, and the second door is at least partially embedded in the first door and rotatably connected to the first door.

[0005] Furthermore, the first cover door includes a first part and two second parts, the two second parts are spaced apart on the same side of the first part, the first part and the two second parts enclose an opening window, and the second cover door is rotatably connected to a side of the first part close to the second part for closing the opening window; the second part has a groove located on the surface away from the sample chamber; the cover door assembly also includes a retractable support member, one end of the retractable support member is rotatably connected to the second part and located in the groove, and the other end is rotatably connected to a side of the second cover door facing the sample chamber.

[0006] Furthermore, the cover door assembly also includes a limiting subassembly, which is arranged on the surface of the first cover door away from the sample chamber. When the second cover door is rotated to a preset position relative to the first cover door in a direction away from the sample chamber, the limiting subassembly presses against the side of the second cover door away from the sample chamber to limit the relative position of the second cover door and the first cover door.

[0007] Furthermore, the limiting subassembly includes a first limiting member, a second limiting member and a fastener. The first limiting member and the second limiting member are arranged adjacent to each other and are both arranged on the side of the first cover door away from the sample chamber. The fastener is respectively passed through the first limiting member and the second limiting member to connect the first limiting member and the second limiting member and adjust the relative position of the second limiting member and the first limiting member.

[0008] Furthermore, the cover door assembly also includes a locking subassembly, which is arranged on the side of the second part away from the sample chamber and close to the window. When the second cover door is closed, the locking subassembly partially protrudes toward the window and presses against the side of the second cover door away from the sample chamber to lock the second cover door with the first cover door; when the locking subassembly retracts the second part, the second cover door can rotate relative to the first cover door.

[0009] Furthermore, the locking subassembly includes a first locking member and a second locking member, the first locking member is arranged on a side of the second part away from the sample chamber and close to the window opening, and the second locking member can be slidably connected to the first locking member; the second locking member has a first position and a second position relative to the first locking member, when the second locking member is in the first position, the second locking member protrudes from the first locking member and protrudes from the second part toward the window opening; when the second locking member is in the second position, the second locking member avoids the window opening.

[0010] Further, the second locking member includes a locking member body and a supporting sub-member, the locking member body can be slidably connected to the first locking member, the supporting sub-member is arranged at the end of the locking member body close to the window, and along the arrangement direction of the locking sub-assembly and the first cover door, the thickness of the supporting sub-member gradually decreases from the side close to the window toward the side away from the window; the locking member body has a slide groove, the supporting sub-member is penetrated by the slide groove, and along the arrangement direction of the locking sub-assembly and the first cover door, the width of the slide groove gradually decreases from the side close to the window toward the side away from the window.

[0011] Furthermore, the cover door assembly also includes a tensioning subassembly, which includes an elastic member, a first tensioning rod and a second tensioning rod, the first tensioning rod is arranged on the first cover door, the second tensioning rod is arranged on the second locking member, the first tensioning rod is arranged farther away from the second cover door than the second tensioning rod, and the opposite ends of the elastic member are respectively connected to the first tensioning rod and the second tensioning rod.

[0012] Furthermore, the cover door assembly also includes a first rotating shaft and a second rotating shaft, the first rotating shaft is installed on the box body and passes through a side of the first cover door, so that the first cover door can rotate relative to the box body; the second rotating shaft is installed on the first cover door and passes through a side of the second cover door, so that the second cover door can rotate relative to the first cover door.

[0013] Furthermore, the cover door assembly also includes a first handle, which is arranged on a side of the second cover door away from the connection between the first cover door and the second cover door; the locking subassembly also includes a second handle, which is arranged on a surface of the second locking member away from the first locking member.

[0014] In the present application, the box body has a sample cavity with one end open, and the cover door assembly is used to close the sample cavity so that the sample cavity forms a closed space to prevent external dust from entering the sample cavity and affecting the accuracy of the double cover door wafer detection device for detecting the sample to be detected. In addition, the first cover door can be rotatably connected to the box body, so the first cover door can be rotated relative to the box body toward the direction close to the sample cavity or away from the sample cavity to realize the opening and closing of the first cover door relative to the box body, which is convenient for operators to repair the device in the sample cavity. Further, the second cover door is at least partially embedded in the first cover door and rotatably connected to the first cover door. In other words, the second cover door can be rotated relative to the first cover door toward the direction close to the sample cavity or away from the sample cavity to realize the opening or closing of the second cover door relative to the first cover door. When the operator needs to place the sample to be detected in the sample cavity, only the second cover door can be opened when the first cover door is closed relative to the box body, and the sample to be detected can be placed in the sample cavity from the opening of the second cover door. Compared with the solution of directly opening the first cover door, opening only the second cover door is convenient for the operator to operate, and improves the efficiency of the operator in placing the sample to be tested in the sample chamber. In addition, the solution of opening only the second cover door is conducive to preventing excessive dust from entering the sample chamber, thereby preventing dust from affecting the accuracy of the double cover door wafer detection device on the sample to be tested, and improving the accuracy of the double cover door wafer detection device in detecting the sample to be tested. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the implementation will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0016] Figure 1It is a partial structural schematic diagram of a double cover door wafer inspection device according to an embodiment of the present application;

[0017] Figure 2 This is a structural schematic diagram of a cover door assembly according to an embodiment of the present application;

[0018] Figure 3 This is a structural schematic diagram of a cover door assembly according to another embodiment of the present application;

[0019] Figure 4 for Figure 3 A is an enlarged view of the dotted box in center A;

[0020] Figure 5 This is a schematic structural diagram of a locking subassembly according to an embodiment of the present application;

[0021] Figure 6 This is a schematic diagram of the exploded structure of a cover door assembly according to an embodiment of the present application;

[0022] Figure 7 It is a schematic diagram of the exploded structure of a locking subassembly according to an embodiment of the present application.

[0023] Description of reference numerals:

[0024] 100-double cover door wafer detection device, 110-box, 111-sample chamber, 120-cover door assembly, 121-first cover door, 1211-first part, 1212-second part, 1213-opening window, 1214-groove, 1215-setting groove, 122-second cover door, 123-retractable support member, 124-limiting subassembly, 1241-first limiting member, 1242-second limiting member, 1243-fastener, 125 -locking subassembly, 1251-first locking member, 1252-second locking member, 1253-locking member body, 1254-holding subassembly, 1255-slide groove, 1256-first surface, 1257-second surface, 126-tensioning subassembly, 1261-elastic member, 1262-first tensioning rod, 1263-second tensioning rod, 127-first rotating shaft, 128-second rotating shaft, 129-first handle, 131-second handle. DETAILED DESCRIPTION

[0025] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.

[0026] The terms "first", "second", etc. in the specification and claims of this application and the above-mentioned drawings are used to distinguish different objects, rather than to describe a specific order. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not limited to the listed steps or units, but optionally includes steps or units that are not listed, or optionally includes other steps or units inherent to these processes, methods, products or devices.

[0027] Reference to "embodiment" or "implementation" herein means that a particular feature, structure, or characteristic described in conjunction with the embodiment or implementation may be included in at least one embodiment of the present application. The appearance of the phrase in various locations in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described herein may be combined with other embodiments.

[0028] In a wafer inspection device, a robot arm is often used to automatically transfer the sample to be inspected to a sample chamber for inspection. When the sample to be inspected needs to be manually placed in the sample chamber, the entire cover of the wafer inspection device often needs to be opened to facilitate the operator to place the sample in the sample chamber. However, it is inconvenient to open the entire cover of the wafer inspection device to place the sample to be inspected, and some dust may enter the sample chamber, thereby affecting the inspection accuracy of the sample to be inspected.

[0029] See also Figure 1 The present application provides a double-door wafer inspection device 100, which includes: a box body 110 and a door assembly 120, wherein the box body 110 has a sample chamber 111 with an opening at one end; the door assembly 120 is used to close the sample chamber 111, and the door assembly 120 includes a first door 121 and a second door 122, wherein the first door 121 is rotatably connected to the box body 110, and the second door 122 is at least partially embedded in the first door 121 and rotatably connected to the first door 121.

[0030] It can be understood that the box body 110 has a sample cavity 111 with one end open, and the box body 110 can enclose the sample cavity 111, and the sample cavity 111 is open.

[0031] It can be understood that the cover door assembly 120 is used to close the sample chamber 111. The cover door assembly 120 can be connected to the box body 110 and arranged on a side of the box body 110 having an opening. The cover door assembly 120 cooperates with the box body 110 to form a closed space for the sample chamber 111.

[0032] It can be understood that the sample chamber 111 is used to place a sample to be detected, and the sample to be detected can be but is not limited to a wafer, a circuit board, etc.

[0033] In this embodiment, the box body 110 has a sample chamber 111 with an open end, and the cover door assembly 120 is used to close the sample chamber 111, so that the sample chamber 111 forms a closed space, preventing external dust from entering the sample chamber 111 and affecting the accuracy of the double cover door wafer inspection device 100 in inspecting the sample to be inspected. In addition, the first cover door 121 can be rotatably connected to the box body 110, so that the first cover door 121 can be rotated relative to the box body 110 toward the direction close to the sample chamber 111 or away from the sample chamber 111, so as to realize the opening and closing of the first cover door 121 relative to the box body 110, which is convenient for operators to repair the devices in the sample chamber 111. Further, the second cover door 122 is at least partially embedded in the first cover door 121 and is rotatably connected to the first cover door 121. In other words, the second cover door 122 can be rotated relative to the first cover door 121 toward the direction close to the sample chamber 111 or away from the sample chamber 111, so as to realize the opening or closing of the second cover door 122 relative to the first cover door 121. When the operator needs to place the sample to be detected in the sample chamber 111, only the second cover door 122 can be opened when the first cover door 121 is closed relative to the box body 110, and the sample to be detected can be placed in the sample chamber 111 from the opening of the second cover door 122. Compared with the solution of directly opening the first cover door 121, opening only the second cover door 122 is convenient for the operator to operate, and improves the efficiency of the operator in placing the sample to be detected in the sample chamber 111. In addition, only opening the second cover door 122 is beneficial to preventing excessive dust from entering the sample chamber 111, thereby preventing dust from affecting the accuracy of the double-cover door wafer inspection device 100 in inspecting the samples to be inspected, thereby improving the accuracy of the double-cover door wafer inspection device 100 in inspecting the samples to be inspected.

[0034] Optionally, the double-cover-door wafer inspection device 100 further includes a sample stage (not shown), which is slidably disposed in the sample cavity 111 , and is used to place a sample to be inspected.

[0035] In this embodiment, the sample stage can be slidably disposed in the sample chamber 111 to achieve position change of the sample stage in the sample chamber 111. When the operator needs to place a wafer to be inspected in the sample chamber 111, the sample stage can be moved to the opening of the second cover door 122 to place the sample to be inspected on the sample stage.

[0036] See also Figure 2 In some embodiments, the first cover door 121 includes a first part 1211 and two second parts 1212, the two second parts 1212 are spaced apart on the same side of the first part 1211, the first part 1211 and the two second parts 1212 enclose a window 1213, the second cover door 122 is rotatably connected to a side of the first part 1211 close to the second part 1212, for closing the window 1213; the second part 1212 has a groove 1214 located on the surface away from the sample chamber 111; the cover door assembly 120 also includes a retractable support member 123, one end of the retractable support member 123 is rotatably connected to the second part 1212 and is located in the groove 1214, and the other end is rotatably connected to a side of the second cover door 122 facing the sample chamber 111.

[0037] It can be understood that the position of the window 1213 partially overlaps with the opening position of the sample chamber 111 .

[0038] It can be understood that the second cover door 122 is disposed between the two second parts 1212 .

[0039] In this embodiment, the first part 1211 and the two second parts 1212 enclose a window 1213, and the second cover door 122 can be rotatably connected to the side of the first part 1211 close to the second part 1212 to realize the opening and closing of the window 1213. When the second cover door 122 is in a closed state relative to the first cover door 121, the window 1213 is in a closed state, the retractable support member 123 is in a retracted state and accommodated in the groove 1214, and the opposite ends of the retractable support member 123 are respectively connected to the second part 1212 and the second cover door 122, thereby making the second cover door 122 tightly closed relative to the first cover door 121. When the second cover door 122 is in an open state relative to the first cover door 121, the window 1213 is in an open state, the retractable support member 123 is in an extended state, one end of the retractable support member 123 abuts against the second portion 1212, and the other end is used to support the second cover door 122, so as to reduce the resistance of the second cover door 122 to rotate relative to the first cover door 121 in a direction away from the sample chamber 111, thereby improving the efficiency of the operator in opening the second cover door 122 and placing the sample to be tested in the sample chamber 111.

[0040] Optionally, the retractable support member 123 may be, but is not limited to, a hydraulic rod or the like.

[0041] Optionally, the first part 1211 has a setting groove 1215, and the setting groove 1215 passes through the surface of the first part 1211 facing the sample cavity 111 and away from the sample cavity 111; the double cover door wafer detection device 100 also includes a needle card assembly (not shown), and the needle card assembly is arranged in the setting groove 1215 and protrudes toward the sample cavity 111 to realize testing of the sample to be detected in the sample cavity 111.

[0042] See also Figure 3 and Figure 4 In some embodiments, the cover door assembly 120 further includes a limiting subassembly 124, which is disposed on a surface of the first cover door 121 away from the sample chamber 111. When the second cover door 122 rotates to a preset position relative to the first cover door 121 in a direction away from the sample chamber 111, the limiting subassembly 124 presses against a side of the second cover door 122 away from the sample chamber 111 to limit the relative position of the second cover door 122 and the first cover door 121.

[0043] In this embodiment, the limiting subassembly 124 is disposed on a surface of the first cover door 121 away from the sample chamber 111 and is adjacent to the second cover door 122. When the second cover door 122 rotates to a preset position relative to the first cover door 121 in a direction away from the sample chamber 111, in other words, the second cover door 122 is opened relative to the first cover door 121 and the angle between the first cover door 121 and the second cover door 122 reaches a preset angle, the limiting subassembly 124 abuts against a side of the second cover door 122 away from the sample chamber 111 to prevent the second cover door 122 from continuing to rotate relative to the first cover door 121 in a direction away from the sample chamber 111. The limiting subassembly 124 and the retractable support member 123 cooperate with each other to limit the relative position of the second cover door 122 and the first cover door 121, so that the angle between the second cover door 122 and the first cover door 121 is determined. In other words, the degree of opening of the window 1213 is determined. When the second cover door 122 is opened relative to the first cover door 121, the position limiting subassembly 124 improves the stability of the relative position of the second cover door 122 and the first cover door 121. When the operator places the sample to be tested into the sample chamber 111 through the window 1213, the relative position of the second cover door 122 and the first cover door 121 and the size of the window 1213 can be kept stable, thereby improving the stability of the operator placing the sample to be tested into the sample chamber 111.

[0044] Optionally, the number of the limiting subassemblies 124 is one or two. When the number of the limiting subassemblies 124 is two, the two limiting subassemblies 124 are spaced apart on opposite sides of the second cover door 122, and the two limiting subassemblies 124 cooperate with each other to fix the relative positions of the first cover door 121 and the second cover door 122.

[0045] In some embodiments, the limiting subassembly 124 includes a first limiting member 1241, a second limiting member 1242 and a fastener 1243. The first limiting member 1241 and the second limiting member 1242 are adjacently arranged and are both arranged on the side of the first cover door 121 away from the sample chamber 111. The fastener 1243 is respectively passed through the first limiting member 1241 and the second limiting member 1242, and is used to connect the first limiting member 1241 and the second limiting member 1242, and adjust the relative position of the second limiting member 1242 and the first limiting member 1241.

[0046] It can be understood that the first limiting member 1241 is arranged on the surface of the first cover door 121 away from the sample chamber 111, and the second limiting member 1242 is arranged closer to the second cover door 122 than the first limiting member 1241, and the second limiting member 1242 presses against the side of the second cover door 122 away from the sample chamber 111.

[0047] It can be understood that by adjusting the relative position of the first limiting member 1241 and the second limiting member 1242 , the opening degree of the second cover door 122 relative to the first cover door 121 can be adjusted.

[0048] In this embodiment, the first stopper 1241 and the second stopper 1242 are disposed adjacent to each other and are both disposed on the side of the first cover door 121 away from the sample chamber 111. The second stopper 1242 is disposed closer to the second cover door 122 than the first stopper 1241. The first stopper 1241 is disposed on the surface of the first cover door 121 away from the sample chamber 111. The fastener 1243 is respectively disposed through the first stopper 1241 and the second stopper 1242. When the relative positions of the first stopper 1241 and the second stopper 1242 need to be adjusted, When the relative positions of the first limiter 1241 and the second limiter 1242 need to be fixed, the fastener 1243 can be tightened to fix the relative positions of the first limiter 1241 and the second limiter 1242, so that the second limiter 1242 can abut against the side of the second cover door 122 away from the sample chamber 111, so as to fix the relative positions of the second limiter 1242 and the first limiter 1241. In this embodiment, the relative positions of the first limiter 1241 and the second limiter 1242 are adjustable, so that the limiter subassembly 124 can limit the angle between the first cover door 121 and the second cover door 122 to different angles, so as to meet the operating requirements of the operator and improve the applicability of the double cover door wafer detection device 100.

[0049] Optionally, the limiting subassembly 124 is disposed at an end of the second portion 1212 close to the first portion 1211 to block the second cover door 122 and fix the relative positions of the first cover door 121 and the second cover door 122 .

[0050] Optionally, the number of the fasteners 1243 is at least one, and the more the fasteners 1243 are, the stronger the connection effect between the first limit member 1241 and the second limit member 1242 is, so that the fixation of the relative position of the first limit member 1241 and the second limit member 1242 is more stable; accordingly, the more the fasteners 1243 are, the more times the fasteners 1243 need to be adjusted when adjusting the relative position of the first limit member 1241 and the second limit member 1242, which reduces the efficiency of adjusting the relative position of the first limit member 1241 and the second limit member 1242, that is, reduces the efficiency of adjusting the relative position of the first cover door 121 and the second cover door 122.

[0051] In the terminology of the present application, "at least one" means greater than or equal to one, and can be one, two, three, etc.

[0052] See also Figure 5 and Figure 6 In some embodiments, the cover door assembly 120 further includes a locking subassembly 125, which is disposed on a side of the second portion 1212 away from the sample chamber 111 and close to the window 1213. When the second cover door 122 is closed, the locking subassembly 125 partially protrudes toward the window 1213 and presses against a side of the second cover door 122 away from the sample chamber 111 to lock the second cover door 122 with the first cover door 121; when the locking subassembly 125 retracts into the second portion 1212, the second cover door 122 can rotate relative to the first cover door 121.

[0053] It can be understood that when the second cover door 122 is closed, the first cover door 121 and the second cover door 122 are coplanar. In other words, the first cover door 121 and the second cover door 122 are flush.

[0054] In this embodiment, when the second cover door 122 is closed, the second cover door 122 closes the window 1213, so that the first cover door 121 and the second cover door 122 are coplanar, and the locking subassembly 125 partially protrudes toward the window 1213 and presses against the side of the second cover door 122 away from the sample chamber 111 to prevent the second cover door 122 from opening relative to the first cover door 121. The locking subassembly 125 can lock the second cover door 122 and the first cover door 121 and connect them into an integrated structure, so that the operator can directly open the first cover door 121 to prevent the second cover door 122 and the first cover door 121 from loosening and interfering with the opening of the first cover door 121. When the locking subassembly 125 retracts the second part 1212 in the direction away from the window 1213, the second cover door 122 is unlocked from the first cover door 121, and the second cover door 122 can rotate relative to the first cover door 121, so that the operator only needs to open the second cover door 122 to avoid excessive dust from entering the sample chamber 111. The locking subassembly 125 can realize the locking and unlocking of the first cover door 121 and the second cover door 122, which improves the convenience of the operator to open the first cover door 121 or the second cover door 122 alone, and is beneficial to improving the efficiency of the double cover door wafer inspection device 100 for inspecting the samples to be inspected.

[0055] Optionally, the number of the locking subassemblies 125 is one or two. When the number of the locking subassemblies 125 is two, the two locking subassemblies 125 are respectively arranged on the two second parts 1212. In other words, one locking subassembly 125 is arranged in one second part 1212, and the two locking subassemblies 125 cooperate with each other to realize the locking and unlocking of the second cover door 122 and the first cover door 121.

[0056] In some embodiments, the locking subassembly 125 includes a first locking member 1251 and a second locking member 1252, the first locking member 1251 is arranged on the side of the second part 1212 away from the sample chamber 111 and close to the window 1213, and the second locking member 1252 is slidably connected to the first locking member 1251; the second locking member 1252 has a first position and a second position relative to the first locking member 1251, when the second locking member 1252 is in the first position, the second locking member 1252 protrudes from the first locking member 1251 and protrudes from the second part 1212 toward the window 1213; when the second locking member 1252 is in the second position, the second locking member 1252 is arranged to avoid the window 1213.

[0057] It can be understood that the extension direction of the first locking member 1251 is parallel to the sliding direction of the second locking member 1252 relative to the first locking member 1251 .

[0058] In this embodiment, the locking subassembly 125 includes a first locking member 1251 and a second locking member 1252, and the first locking member 1251 and the second locking member 1252 are both disposed close to the window 1213. The first locking member 1251 is disposed on a side of the second portion 1212 away from the sample chamber 111, and the second locking member 1252 can slide relative to the first locking member 1251 toward a direction close to the window 1213 or away from the window 1213, so as to realize the switching of the second locking member 1252 between the first position and the second position. When the second locking member 1252 is located at the first position, the second locking member 1252 protrudes from the first locking member 1251 and protrudes from the second portion 1212 toward the window 1213, so that the side of the second locking member 1252 facing the sample chamber 111 presses against the side of the second cover door 122 away from the sample chamber 111, so as to prevent the second cover door 122 from rotating in the direction away from the sample chamber 111 to connect with the first cover door 121, thereby locking the first cover door 121 and the second cover door 122, so as to facilitate the operator to directly open or close the first cover door 121. When the second locking member 1252 is in the second position, the second locking member 1252 retracts the second portion 1212 in the direction away from the window 1213, so that the side of the second locking member 1252 facing the sample chamber 111 avoids the side of the second cover door 122 away from the sample chamber 111, and the side of the second locking member 1252 facing the sample chamber 111 presses against the surface of the second portion 1212 away from the sample chamber 111, so that the first cover door 121 and the second cover door 122 are unlocked, and the second cover door 122 can be rotated relative to the first cover door 121, so that the operator only needs to open the second cover door 122 to avoid excessive dust from entering the sample chamber 111, thereby improving the accuracy of the double-cover-door wafer inspection device 100 in detecting samples to be inspected. The first locking member 1251 and the second locking member 1252 cooperate with each other to realize the locking and unlocking of the first cover door 121 and the second cover door 122, thereby improving the convenience for the operator to open the first cover door 121 or the second cover door 122 separately, and is beneficial to improving the efficiency of the double cover door wafer inspection device 100 for inspecting samples to be inspected.

[0059] See also Figure 7In some embodiments, the second locking member 1252 includes a locking member body 1253 and a supporting sub-member 1254, the locking member body 1253 can be slidably connected to the first locking member 1251, the supporting sub-member 1254 is arranged at the end of the locking member body 1253 close to the window 1213, along the arrangement direction of the locking sub-assembly 125 and the first cover door 121, the thickness of the supporting sub-member 1254 is gradually reduced from the side close to the window 1213 toward the side away from the window 1213 at least partially; the locking member body 1253 has a slide groove 1255, the supporting sub-member 1254 is penetrated by the slide groove 1255, along the arrangement direction of the locking sub-assembly 125 and the first cover door 121, the width of the slide groove 1255 is gradually reduced from the side close to the window 1213 toward the side away from the window 1213 at least partially.

[0060] It can be understood that, along the arrangement direction of the locking subassembly 125 and the first cover door 121, the thickness of the supporting sub-component 1254 at least partially gradually decreases from the side close to the window 1213 toward the side away from the window 1213. It can be that, along the arrangement direction of the locking subassembly 125 and the first cover door 121, the supporting sub-component 1254 includes a first surface 1256 and a second surface 1257 arranged in opposite directions, the first surface 1256 is arranged facing the first cover door 121, and the distance between the first surface 1256 and the second surface 1257 at least partially gradually decreases from the side close to the window 1213 toward the side away from the window 1213.

[0061] It can be understood that, along the arrangement direction of the locking sub-assembly 125 and the first cover door 121, the width of the slide groove 1255 at least partially gradually decreases from the side close to the window 1213 toward the side away from the window 1213. It can be that, along the arrangement direction of the locking sub-assembly 125 and the first cover door 121, the width of the space for the supporting sub-assembly 1254 to pass through the locking member body 1253 at least partially gradually decreases from the side close to the window 1213 toward the side away from the window 1213.

[0062] In this embodiment, the abutting sub-component 1254 is disposed at the end of the locking member body 1253 close to the window 1213. When the locking member body 1253 is slidably connected to the first locking member 1251, the abutting sub-component 1254 is driven to slide toward the direction close to the window 1213 or away from the window 1213, so as to realize the transition of the second locking member 1252 between the first position and the second position. When the second locking member 1252 is located at the first position, the surface of the abutting sub-component 1254 facing the sample chamber 111 abuts against the side of the second cover door 122 away from the sample chamber 111, so as to prevent the second cover door 122 from being unlocked from the second cover door 122 toward the side away from the sample chamber 111, so as to facilitate the operator to open or close the first cover door 121 alone. In the process that the locking member body 1253 drives the abutting sub-member 1254 to move toward the direction close to the window 1213 or away from the window 1213 for multiple times, the abutting sub-member 1254 and the locking member body 1253 may become loose, causing the abutting sub-member 1254 to be separated from the locking member body 1253 in the direction away from the window 1213. In this embodiment, along the arrangement direction of the locking sub-assembly 125 and the first cover door 121, the thickness of the abutting sub-member 1254 at least partially gradually decreases from the side close to the window 1213 to the side away from the window 1213, and the width of the slide groove 1255 at least partially gradually decreases from the side close to the window 1213 to the side away from the window 1213, so that the surface of the locking member body 1253 facing the first cover door 121 can abut the abutting sub-member 1254. The sub-component 1254 is used to prevent the abutting sub-component 1254 from falling off from the locking member body 1253 in the direction away from the window 1213, so that when the operator pushes the locking member body 1253 to slide relative to the first locking member 1251, the abutting sub-component 1254 can be driven to slide relative to the first locking member 1251, thereby achieving the locking and unlocking of the first cover door 121 and the second cover door 122, which is beneficial to prolonging the service life of the locking sub-component 125. Furthermore, the convenience of the operator opening the first cover door 121 or the second cover door 122 alone is improved, which is beneficial to improving the efficiency of the double cover door wafer inspection device 100 for inspecting the sample to be inspected.

[0063] Optionally, the number of the abutting sub-components 1254 is one or two. When the number of the abutting sub-components 1254 is two, the two abutting sub-components 1254 are spaced apart in the slide groove 1255. When the second locking member 1252 is in the first position, the two abutting sub-components 1254 are used to abut the side of the second cover door 122 away from the sample chamber 111.

[0064] See also Figures 1 to 7 In some embodiments, the cover door assembly 120 further includes a tensioning subassembly 126, and the tensioning subassembly 126 includes an elastic member 1261, a first tensioning rod 1262, and a second tensioning rod 1263. The first tensioning rod 1262 is disposed on the first cover door 121, and the second tensioning rod 1263 is disposed on the second locking member 1252. The first tensioning rod 1262 is disposed farther away from the second cover door 122 than the second tensioning rod 1263. The opposite ends of the elastic member 1261 are respectively connected to the first tensioning rod 1262 and the second tensioning rod 1263.

[0065] Optionally, the elastic member 1261 is a spring member.

[0066] It can be understood that the first tension rod 1262 and the second tension rod 1263 are arranged along a preset direction, and the preset direction is the sliding direction of the second locking member 1252 relative to the first locking member 1251 .

[0067] In this embodiment, the first tension rod 1262 is disposed on the first cover door 121, and the second tension rod 1263 is disposed on the second locking member 1252 and is disposed closer to the second cover door 122 than the first tension rod 1262. When the second locking member 1252 is in the first position, the side of the second locking member 1252 facing the sample chamber 111 abuts against the side of the second cover door 122 away from the sample chamber 111, and the first tension rod 1262 and the second tension rod 1263 respectively tighten the opposite ends of the elastic member 1261, and at this time, the elastic member 1261 is in a stretched state. When the second locking member 1252 is switched from the first position to the second position, the operator pulls the second locking member 1252 to move away from the window 1213. At this time, the elastic member 1261 elastically recovers, and the elastic member 1261 pulls the second tensioning rod 1263 to move away from the window 1213, thereby driving the second locking member 1252 to move away from the window 1213, so as to reduce the resistance of the second locking member 1252 to move away from the window 1213, so that the operator can pull the second locking member 1252 to move away from the window 1213 with less effort. The tensioning subassembly 126 is conducive to improving the efficiency of the operator in unlocking the second cover door 122 and the first cover door 121, and improving the operating experience of the operator.

[0068] Optionally, the tensioning subassembly 126 is disposed on the second portion 1212 .

[0069] In some embodiments, the cover door assembly 120 also includes a first rotating shaft 127 and a second rotating shaft 128, the first rotating shaft 127 is installed on the box body 110 and passes through a side of the first cover door 121, so that the first cover door 121 can rotate relative to the box body 110; the second rotating shaft 128 is installed on the first cover door 121 and passes through a side of the second cover door 122, so that the second cover door 122 can rotate relative to the first cover door 121.

[0070] It can be understood that the first rotating shaft 127 and the second rotating shaft 128 are arranged at an interval, and the extending direction of the first rotating shaft 127 is parallel to the extending direction of the second rotating shaft 128 .

[0071] In this embodiment, the first cover door 121 is connected to the housing 110 via the first rotating shaft 127, and rotates relative to the housing 110 via the first rotating shaft 127. When the locking subassembly 125 locks the first cover door 121 and the second cover door 122, the first cover door 121 and the second cover door 122 are an integrated structure, and an operator can directly open the first cover door 121 and the second cover door 122 to open the opening of the sample chamber 111, so that the operator can perform maintenance on the device in the sample chamber 111. Further, the second cover door 122 is connected to the first cover door 121 through the second rotating shaft 128, and rotates relative to the first cover door 121 through the second rotating shaft 128. When the locking subassembly 125 unlocks the first cover door 121 and the second cover door 122, the second cover door 122 can rotate relative to the first cover door 121 around the second rotating shaft 128, so as to open the second cover door 122 when the first cover door 121 is closed relative to the box body 110, and place the sample to be detected in the sample chamber 111 through the window 1213. Opening only the second cover door 122 is convenient for the operator to operate, and improves the efficiency of the operator placing the sample to be detected in the sample chamber 111. In addition, the solution of opening only the second cover door 122 is conducive to preventing excessive dust from entering the sample chamber 111, thereby preventing dust from affecting the accuracy of the double cover door wafer detection device 100 on the detection of the sample to be detected, and improving the accuracy of the double cover door wafer detection device 100 on the detection of the sample to be detected.

[0072] In some embodiments, the cover door assembly 120 further includes a first handle 129 , and the first handle 129 is disposed on a side of the second cover door 122 away from a connection between the first cover door 121 and the second cover door 122 .

[0073] In this embodiment, the first handle 129 is disposed on a side of the second cover door 122 away from the connection between the first cover door 121 and the second cover door 122. In other words, the first handle 129 is disposed on a side of the second cover door 122 away from the second rotating shaft 128. When the locking subassembly 125 locks the first cover door 121 and the second cover door 122, the second locking member 1252 is in the first position, and the operator can open and close the first cover door 121 relative to the box body 110 by holding the first handle 129; when the locking assembly unlocks the first cover door 121 and the second cover door 122, the second locking member 1252 is in the second position, and the operator can hold the first handle 129 to rotate the second cover door 122 relative to the first cover door 121, thereby opening and closing the window 1213. The first handle 129 is reused and is applicable to scenarios where only the second cover door 122 needs to be opened or both the first cover door 121 and the second cover door 122 need to be opened at the same time. This improves the utilization rate of the first handle 129 and saves space for setting the first handle 129 on the double-cover door wafer inspection device 100, thereby improving the simplicity of assembly of the double-cover door wafer inspection device 100.

[0074] In some embodiments, the locking subassembly 125 further includes a second handle 131 , and the second handle 131 is disposed on a surface of the second locking member 1252 facing away from the first locking member 1251 .

[0075] In this embodiment, the second handle 131 is arranged on the surface of the second locking member 1252 away from the first locking member 1251. When the second locking member 1252 needs to be switched between the first position and the second position, the operator can hold the second handle 131 to push the second locking member 1252 relative to the first locking member 1251 in the direction closer to the window 1213 or away from the window 1213. The second handle 131 is convenient for the operator to operate and helps to improve the operator's operating experience.

[0076] Mentioning "embodiment" and "implementation method" in this application means that the specific features, structures or characteristics described in conjunction with the embodiment may be included in at least one embodiment of the present application. The appearance of the phrases in various places in the specification does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment that is mutually exclusive with other embodiments. It is explicitly and implicitly understood by those skilled in the art that the embodiments described in this application can be combined with other embodiments. In addition, it should also be understood that the features, structures or characteristics described in the various embodiments of the present application can be arbitrarily combined to form another embodiment that does not deviate from the spirit and scope of the technical solution of the present application, provided that there is no contradiction between them.

[0077] Finally, it should be noted that the above implementation modes are only used to illustrate the technical solution of the present application and are not intended to limit it. Although the present application has been described in detail with reference to the above preferred implementation modes, a person of ordinary skill in the art should understand that the technical solution of the present application may be modified or replaced by equivalents without departing from the spirit and scope of the technical solution of the present application.

Claims

1. A double-cover door wafer detection device, characterized in that: The double cover door wafer detection device comprises: a housing having a sample chamber with one end open; and A cover door assembly is used to close the sample chamber. The cover door assembly includes a first cover door and a second cover door. The first cover door is rotatably connected to the box body, and the second cover door is at least partially embedded in the first cover door and is rotatably connected to the first cover door.

2. The double-cover door wafer detection device according to claim 1, characterized in that: The first cover door includes a first part and two second parts, the two second parts are spaced apart on the same side of the first part, the first part and the two second parts enclose an opening window, and the second cover door is rotatably connected to a side of the first part close to the second part for closing the opening window; the second part has a groove located on the surface away from the sample chamber; the cover door assembly also includes a retractable support member, one end of the retractable support member is rotatably connected to the second part and located in the groove, and the other end is rotatably connected to a side of the second cover door facing the sample chamber.

3. The double-cover door wafer detection device according to claim 1, characterized in that: The cover door assembly also includes a limiting subassembly, which is arranged on a surface of the first cover door away from the sample chamber. When the second cover door is rotated to a preset position relative to the first cover door in a direction away from the sample chamber, the limiting subassembly presses against a side of the second cover door away from the sample chamber to limit the relative position of the second cover door and the first cover door.

4. The double-cover door wafer detection device according to claim 3, characterized in that: The limiting subassembly includes a first limiting member, a second limiting member and a fastener. The first limiting member and the second limiting member are arranged adjacent to each other and are both arranged on the side of the first cover door away from the sample chamber. The fastener is respectively passed through the first limiting member and the second limiting member, and is used to connect the first limiting member and the second limiting member, and adjust the relative position of the second limiting member and the first limiting member.

5. The double-cover door wafer detection device according to claim 2, characterized in that: The cover door assembly also includes a locking subassembly, which is arranged on a side of the second part away from the sample chamber and close to the window. When the second cover door is closed, the locking subassembly partially protrudes toward the window and presses against the side of the second cover door away from the sample chamber to lock the second cover door with the first cover door; when the locking subassembly retracts to the second part, the second cover door can rotate relative to the first cover door.

6. The double-cover door wafer inspection device according to claim 5, characterized in that: The locking subassembly includes a first locking member and a second locking member, the first locking member is arranged on a side of the second part away from the sample chamber and close to the window opening, and the second locking member can be slidably connected to the first locking member; the second locking member has a first position and a second position relative to the first locking member, when the second locking member is in the first position, the second locking member protrudes from the first locking member and protrudes from the second part toward the window opening; when the second locking member is in the second position, the second locking member avoids the window opening.

7. The double-cover door wafer inspection device according to claim 6, characterized in that: The second locking member includes a locking member body and a supporting sub-member, the locking member body can be slidably connected to the first locking member, the supporting sub-member is arranged at the end of the locking member body close to the window, and along the arrangement direction of the locking sub-assembly and the first cover door, the thickness of the supporting sub-member gradually decreases from the side close to the window toward the side away from the window; the locking member body has a sliding groove, the supporting sub-member is penetrated by the sliding groove, and along the arrangement direction of the locking sub-assembly and the first cover door, the width of the sliding groove gradually decreases from the side close to the window toward the side away from the window.

8. The double-cover door wafer inspection device according to claim 6, characterized in that: The cover door assembly also includes a tensioning subassembly, which includes an elastic member, a first tensioning rod and a second tensioning rod, wherein the first tensioning rod is arranged on the first cover door, and the second tensioning rod is arranged on the second locking member, and the first tensioning rod is arranged farther away from the second cover door than the second tensioning rod, and the opposite ends of the elastic member are respectively connected to the first tensioning rod and the second tensioning rod.

9. The double-cover door wafer inspection device according to claim 6, characterized in that: The cover door assembly also includes a first rotating shaft and a second rotating shaft, the first rotating shaft is installed on the box body and passes through a side of the first cover door, so that the first cover door can rotate relative to the box body; the second rotating shaft is installed on the first cover door and passes through a side of the second cover door, so that the second cover door can rotate relative to the first cover door.

10. The double-cover door wafer inspection device according to claim 9, characterized in that: The cover door assembly also includes a first handle, which is arranged on a side of the second cover door away from the connection between the first cover door and the second cover door; the locking subassembly also includes a second handle, which is arranged on a surface of the second locking member away from the first locking member.

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