Scraper device and waste gas treatment equipment

Abstract

The utility model discloses a scraper device and waste gas treatment equipment. The scraper device is applied to a gas inlet pipeline of the waste gas treatment equipment, the gas inlet pipeline introduces waste gas into the waste gas treatment equipment, and the scraper device comprises a driving device arranged on a mounting port of the gas inlet pipeline; one end of the main shaft is connected with the driving device, and the other end of the main shaft extends into the air inlet pipeline from the mounting port; the scraper assembly is located in the air inlet pipeline and hinged to the main shaft; the driving device drives the main shaft to rotate and provides centrifugal force for the scraper assembly, and the scraper assembly is unfolded under the action of the centrifugal force and makes contact with the inner wall of the air inlet pipeline so as to remove attachments on the inner wall of the air inlet pipeline. Centrifugal force brought by the driving device is used for driving the scraper assembly to unfold and make contact with the inner wall of the gas inlet pipeline so as to remove attachments on the inner wall of the pipeline, accumulation of crystals in the pipeline can be effectively prevented, the maintenance frequency of waste gas treatment equipment is reduced, and the operation time of the equipment is prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor manufacturing, in particular to a scraper device and waste gas treatment equipment. Background Art

[0002] In the semiconductor manufacturing process, each chamber of the semiconductor manufacturing equipment will transport a variety of complex exhaust gases generated during the production process to the exhaust gas treatment machine for purification through the exhaust pipe. These exhaust gases, such as silane, boron trifluoride, trichlorotoluene, etc., usually react chemically with water or oxygen in the air to form acidic crystals. During the long-term operation of semiconductor equipment, due to the changes in the internal pressure and temperature of the exhaust pipe, these acidic crystals are blocked in large quantities at the connection between the exhaust pipe of the equipment and the combustion chamber of the exhaust gas treatment machine. These large amounts of deposited crystals not only affect the gas flowability, reducing the efficiency of exhaust gas treatment, but also easily corrode the exhaust pipe, causing exhaust gas leakage.

[0003] In order to clean the crystals in time, it is necessary to use a scraper to automatically clean the gas pipeline. The existing scraper device has the following disadvantages:

[0004] 1. Usually, a single-axis locking cylinder or a motor is used to drive the scraper to rotate. The ability to remove crystals is limited, making the scraper and exhaust pipe easily corroded.

[0005] 2. The scraper device adopts a special-shaped structure that combines T-type and L-type. The shape is fixed and located in the center of the pipeline. The projection area of ​​the main structure is large, which seriously affects the flow of gas in the pipeline. In addition, the scraper will affect the motor spindle due to the change of the center of gravity when in use, resulting in accelerated loss of the motor.

[0006] 3. The motor speed is low and fixed and cannot be adjusted. When the types of exhaust gas introduced are different, the motor will cause abnormal load changes. However, since the operating status of the motor cannot be monitored and the alarm cannot be set, the motor is in a high temperature state for a long time, which shortens the life of the motor, seriously affects the machine operation time, and increases the maintenance cost.

[0007] 4. There is a gap between the scraper and the pipe wall, and the scraper cannot remove the crystals attached to the surface of the pipe wall, resulting in a sudden reduction in the service life of the pipeline. In addition, the scraper is usually made of metal and is easily corroded. Utility Model Content

[0008] The purpose of the utility model is to provide a scraper device and exhaust gas treatment equipment, which utilizes the centrifugal force brought by a driving device to drive the scraper assembly to unfold and contact the inner wall of the intake pipe to remove the attachments on the inner wall of the pipe, which can effectively prevent the accumulation of crystals in the pipe, reduce the maintenance frequency of the exhaust gas treatment equipment, and extend the operation time of the equipment.

[0009] In order to achieve the above object, the utility model is implemented through the following technical solutions:

[0010] A scraper device is applied to an air intake pipe of an exhaust gas treatment device, wherein the air intake pipe introduces exhaust gas into the exhaust gas treatment device, comprising:

[0011] A driving device, arranged on a mounting port of the air intake duct;

[0012] A main shaft, one end of which is connected to the driving device and the other end of which extends from the mounting port into the air intake duct;

[0013] A scraper assembly is located in the air inlet duct and is hinged to the main shaft;

[0014] The driving device drives the main shaft to rotate, providing centrifugal force for the scraper assembly. Under the action of the centrifugal force, the scraper assembly unfolds and contacts the inner wall of the air intake pipe to remove attachments on the inner wall of the air intake pipe.

[0015] Optionally, the main axis is arranged parallel to or coaxially with the central axis of the air intake duct.

[0016] Optionally, the scraper assembly includes: a scraper; and a swing arm, wherein both ends of the swing arm are hinged to the main shaft and the scraper respectively.

[0017] Optionally, the swing arm comprises: a main swing arm and a restraining arm;

[0018] The two ends of the main swing arm and the restraining arm are respectively hinged to the main shaft and the scraper to form a quadrilateral.

[0019] Optionally, the scraper assembly further comprises: a constraining and limiting baffle, wherein the constraining and limiting baffle is arranged at a diagonal of the quadrilateral away from the main axis to limit the deployment angle of the scraper assembly.

[0020] Optionally, the restraining and limiting baffle is in the shape of a right-angled triangle, and one right-angled side of the restraining and limiting baffle is connected to the main swing arm, or to the restraining arm, or to the back of the scraper.

[0021] Optionally, the scraper is made of alumina ceramic or zirconia ceramic.

[0022] Optionally, the driving device comprises:

[0023] A variable frequency motor, which is arranged on the mounting port of the air intake duct and has an output shaft connected to the main shaft;

[0024] A control system, connected to the variable frequency motor, for controlling the speed of the variable frequency motor;

[0025] A detection system is connected to the control system and the variable frequency motor respectively, and is used to monitor the operating status of the variable frequency motor.

[0026] Optionally, the control system includes: a PLC control module and a frequency converter, the PLC control module is used to set the working cycle of the variable frequency motor; the working cycle of the variable frequency motor includes a working time period and a non-working time period.

[0027] The PLC control module sends a control signal to the frequency converter, and the frequency converter is used to adjust the rotation speed of the variable frequency motor according to the control signal.

[0028] During the working time period, the variable frequency motor drives the scraper to impact and scrape off the attachments on the inner wall of the air intake duct; during the non-working time period, the variable frequency motor stops working and the scraper shrinks.

[0029] The detection system comprises: a current detection module and an alarm module. The current detection module is used to detect and collect the load current of the variable frequency motor in real time.

[0030] The alarm module is used to determine whether the load current exceeds a predetermined alarm range according to the received load current, and if so, generate and send an alarm signal.

[0031] The PLC control module controls the variable frequency motor to stop working according to the received alarm signal.

[0032] On the other hand, the utility model further provides an exhaust gas treatment device, comprising: a combustion chamber, a scraper device as described above arranged on the combustion chamber, the scraper device being used to remove attachments located on the inner wall of the intake pipe;

[0033] The air intake pipe is a three-way air intake pipe, two ends of which are respectively connected to the gas source of the exhaust gas treatment equipment and the combustion chamber, and the other end is connected to the driving device.

[0034] Compared with the prior art, the utility model has at least one of the following effects:

[0035] The utility model utilizes the centrifugal force brought by the driving device to drive the scraper assembly to unfold and impact the air intake pipe to remove the crystals attached to the inner wall of the air intake pipe, thereby preventing the accumulation of crystals in the pipe and avoiding equipment downtime due to blockage, effectively reducing the number of repairs and maintenance of the exhaust gas treatment equipment and ensuring the long-term operation of the machine.

[0036] The scraper used in the utility model is made of ceramic material, which is sharp, light and more corrosion-resistant than metal, thereby effectively extending the service life of the scraper.

[0037] The scraper of the utility model adopts a movable quadrilateral structure, and its main body projection area is small, which reduces the effect of affecting the circulation of gas in the pipeline. Under the action of the centrifugal force provided by the driving device, the swing arm is unfolded and then the scraper is pushed to hit the crystals on the inner wall of the intake pipe. The scraper moves up and down when removing the attachments on the pipe wall, avoiding hard collisions and violent vibrations, and forming a chopping effect on the crystals on the inner wall of the pipe while increasing the toughness of the scraper. At the same time, the vibration effect generated by the impact can effectively clean the crystals attached to the scraper itself, reducing the probability of the scraper being corroded and reducing the frequency of scraper replacement.

[0038] The restraining limit baffle of the utility model is used to limit the expansion angle of the scraper, so that the scraper can contact the pipe wall of the air intake pipe as far as possible in parallel, can fit the pipe wall to the greatest extent, can effectively remove crystals on the surface of the pipe wall, avoid solidification of crystals, and extend the service life of the pipe.

[0039] The detection system of the utility model can monitor the operating status of the variable frequency motor in real time. At the same time, the control system can control the operation of the variable frequency motor in real time according to the load current changes collected by the detection system, effectively extending the service life of the variable frequency motor, reducing costs, and improving the utilization rate of exhaust gas treatment equipment, maximizing the operating time of the machine, and saving time costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] In order to more clearly illustrate the technical solution of the utility model, the following is a brief introduction to the drawings required for the description. Obviously, the drawings described below are an embodiment of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work:

[0041] Figure 1 A cross-sectional view of the overall structure of a scraper device provided in one embodiment of the utility model;

[0042] Figure 2 A partially enlarged cross-sectional view of a scraper device provided in one embodiment of the utility model. DETAILED DESCRIPTION

[0043] The following is a further detailed description of a scraper device and exhaust gas treatment equipment proposed in the utility model in combination with the accompanying drawings and specific implementation methods. According to the following description, the advantages and features of the utility model will be clearer. It should be noted that the drawings are in a very simplified form and use non-precise proportions, which are only used to conveniently and clearly assist in explaining the purpose of the implementation method of the utility model. In order to make the purpose, features and advantages of the utility model more obvious and easy to understand, please refer to the drawings. It should be noted that the structure, proportion, size, etc. illustrated in the drawings of this specification are only used to match the content disclosed in the specification for people familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the utility model, so it has no technical substantive significance. Any structural modification, change in proportional relationship or adjustment of size, without affecting the effect that the utility model can produce and the purpose that can be achieved, should still fall within the scope of the technical content disclosed by the utility model.

[0044] As described in the background technology, the existing scraper device adopts a special-shaped structure. The special-shaped structure of the scraper body is large and usually located in the center of the pipeline, which will hinder the circulation of gas in the pipeline. Some scraper bodies have the problem of deposited crystals, which causes the scraper to be corroded. When the scraper is in use, the change in the center of gravity will affect the main shaft of the motor, thereby increasing the energy consumption of the motor. In addition, the motor speed used is fixed, and the abnormal load cannot be monitored in time, causing the motor to be in a high temperature state for a long time, seriously affecting the life of the motor. The motor and scraper can only be inspected or replaced when routine maintenance or the pipeline is completely blocked, which seriously affects the operation time of the machine.

[0045] In order to solve the above problems, the utility model provides a scraper device and an exhaust gas treatment device, which increase the service life of the motor and the scraper and reduce the maintenance frequency of the exhaust gas treatment device.

[0046] like Figure 1 As shown, this embodiment provides a scraper device, which is applied to an air intake pipe 1 of an exhaust gas treatment device, and the air intake pipe 1 introduces exhaust gas into the exhaust gas treatment device, comprising: a driving device 2, which is arranged on an installation port of the air intake pipe 1 (this installation port is a port away from the exhaust gas treatment device); a main shaft 3, one end of which is connected to the driving device 2, and the other end extends from the installation port into the air intake pipe 1. A scraper assembly 4 is located in the air intake pipe 1 and is hinged to the main shaft 3. The driving device 2 drives the main shaft 3 to rotate, providing centrifugal force for the scraper assembly 4. The scraper assembly 4 is unfolded under the action of the centrifugal force and contacts the inner wall of the air intake pipe 1 to remove attachments on the inner wall of the air intake pipe 1.

[0047] This embodiment utilizes the centrifugal force generated by the driving device to drive the scraper assembly to unfold and impact the air intake duct to remove crystals attached to the inner wall of the air intake duct, thereby preventing the accumulation of crystals in the duct and avoiding equipment downtime due to blockage, effectively reducing the number of repairs and maintenance of the exhaust gas treatment equipment and ensuring long-term operation of the machine.

[0048] In this embodiment or some other embodiments, the main shaft 3 is arranged parallel or coaxially with the central axis of the air intake duct 1. Preferably, the main shaft 3 is arranged coaxially with the central axis of the air intake duct 1 (the central axis passing through the installation port).

[0049] Combination Figure 1 and Figure 2 As shown, in this embodiment, the scraper assembly 4 includes: a scraper 41; a swing arm 42, and both ends of the swing arm 42 are hinged to the main shaft 3 and the scraper 41 respectively.

[0050] In this embodiment or some other embodiments, the scraper 41 is made of ceramic material, which can be alumina ceramic or zirconia ceramic. This embodiment does not impose any limitation on this. The ceramic material is sharp and more corrosion-resistant than metal, which effectively extends the service life of the scraper.

[0051] In this embodiment, please continue to refer to Figure 2 As shown, the swing arm 42 includes: a main swing arm 421 and a restraining arm 422; both ends of the main swing arm 421 and the restraining arm 422 are respectively hinged to the main shaft 3 and the scraper 41 to form a quadrilateral.

[0052] Specifically, the main shaft 3 is provided with two first pin holes 300 , which are spaced apart along the axial direction of the main shaft 3 ; the scraper 41 is provided with two second pin holes 410 , which are spaced apart along the extension direction of the scraper 41 .

[0053] The two ends of the main swing arm 421 are respectively provided with a third pin hole 4210, and the two ends of the restraining arm 422 are respectively provided with a fourth pin hole 4220. The swing arm also includes four pin shafts ( Figure 2 not shown).

[0054] One end of the main swing arm 421 uses the pin shaft to penetrate the corresponding third pin hole 4210 and the first pin hole 300, so that one end of the main swing arm 421 is hinged to the main shaft 3; the other end of the main swing arm 421 uses the pin shaft to penetrate the corresponding third pin hole 4210 and the second pin hole 410, so that the other end of the main swing arm 421 is hinged to the scraper 41.

[0055] One end of the constraint arm 422 uses the pin shaft to penetrate the corresponding fourth pin hole 4220 and the first pin hole 300, so that one end of the constraint arm 422 is hinged to the main shaft 3; the other end of the constraint arm 422 uses the pin shaft to penetrate the corresponding fourth pin hole 4220 and the second pin hole 410, so that the other end of the constraint arm 422 is hinged to the scraper 41, so that the quadrilateral can be flexibly rotated or deformed. For example, when the scraper assembly 4 is unfolded, the quadrilateral can be deformed into a rectangle. When the scraper 41 is retracted, the quadrilateral is a parallelogram, which is attached to the main shaft 3 and suspended in the intake duct 1.

[0056] The scraper of this embodiment adopts a movable quadrilateral structure. The centrifugal force provided by the driving device causes the swing arm to expand and then push the scraper to hit the crystals on the inner wall of the intake pipe. The scraper will move up and down when removing the attachments on the pipe wall, avoiding hard collisions and violent vibrations. While increasing the toughness of the scraper, it has a chopping effect on the crystals on the inner wall of the pipe. At the same time, the vibration effect generated by the impact can effectively clean the crystals attached to the scraper itself, thereby reducing the chance of the scraper being corroded and reducing the frequency of scraper replacement.

[0057] In this embodiment or some other embodiments, the scraper assembly 4 further includes: a restraining and limiting baffle 43, and the restraining and limiting baffle 43 is arranged on the diagonal of the quadrilateral away from the main axis 3 to limit the deployment angle of the scraper assembly 4.

[0058] Specifically, the restraining and limiting baffle 43 is in the shape of a right triangle, and one right-angled side of the restraining and limiting baffle 43 is connected to the main swing arm 421 , or to the restraining arm 422 , or to the back of the scraper 41 .

[0059] The restraining limit baffle of this embodiment is used to limit the expansion angle of the scraper, so that the scraper can contact the pipe wall of the conveying pipe as parallel as possible, can fit the pipe wall to the greatest extent, can effectively remove crystals on the surface of the pipe wall, avoid solidification of crystals, and extend the service life of the pipeline.

[0060] Please continue to refer to Figure 1 In this embodiment, the driving device 2 includes: a variable frequency motor 21, which is arranged on the mounting port of the intake pipe 1, and its output shaft 210 is connected to the main shaft 3. A control system 5 is connected to the variable frequency motor 21 and is used to control the speed of the variable frequency motor 21. A detection system 6 is respectively connected to the control system 5 and the variable frequency motor 21 and is used to monitor the operating status of the variable frequency motor 21.

[0061] In this embodiment, the control system 5 includes: a PLC control module 51 and a frequency converter 52. The PLC control module 51 can formulate a program for controlling the frequency and speed of starting the scraper 41 according to the type of exhaust gas introduced into the intake duct, and can set the working cycle of the variable frequency motor 21. Under the control of the control system 5, the variable frequency motor 21 is started once every hour, and each time it is 30 minutes apart, and then rotates at high speed again. The working cycle of the variable frequency motor 21 includes a working time period and a non-working time period.

[0062] During the working time period, the variable frequency motor 21 rotates at a high speed. Under the action of centrifugal force, the main swing arm 421 and the constraint arm 422 gradually change from the initial vertical falling state to a straight state, thereby pushing the scraper 41 connected to the ends of the main swing arm 421 and the constraint arm 422 to unfold. At the same time, the constraint limit baffle 43 limits the unfolding angle of the scraper 41, so that the scraper 41 can contact the pipe wall of the intake duct 1 as far as possible in parallel. The scraper 41 uses the sharp characteristics of ceramics to scrape off the attachments on the inner wall of the intake duct 1.

[0063] During the non-working time period, the variable frequency motor 21 stops working and the scraper 41 shrinks, which can effectively reduce the main projection area of ​​the scraper 41, reduce the impact of the scraper 41 on the airflow, and reduce the possibility of crystals accumulating on the surface of the scraper 41, thereby stabilizing the operating environment of the exhaust gas treatment machine.

[0064] Please continue to refer to Figure 1 In this embodiment, the detection system 6 includes: a current detection module 61 and an alarm module 62. The current detection module 61 is used to detect and collect the load current of the variable frequency motor 21 in real time. The alarm module 62 receives the load current collected by the current detection module 61. When the variable frequency motor 21 is running, the alarm module 62 can set the alarm range according to the current changes in the scraper-free state, the scraper stuck, or the scraper overload state.

[0065] Specifically, under different conditions of gas type, pipeline blockage degree and corrosion degree of the scraper 41, the load current of the variable frequency motor 21 will be different. When the load current does not exceed the alarm range, these load current changes will be sent to the control system 5 through the detection system 6. The PLC control module 51 generates and sends a control signal to the inverter 52 according to the collected load current changes. The inverter 52 receives the control signal to adjust the speed and operation mode of the variable frequency motor 21, thereby realizing precise control of the variable frequency motor 21 under different loads, so that the variable frequency motor 21 reaches the optimal operating state, improves the efficiency and service life of the variable frequency motor 21, and helps to reduce energy consumption costs.

[0066] When the load current exceeds the alarm range, the alarm module 62 generates an alarm signal and sends it to the PLC control module 51. The PLC control module 51 controls the variable frequency motor 21 to stop working according to the received alarm signal, thereby avoiding damage to the variable frequency motor 21 due to long-term high temperature and complete blockage of the air intake duct 1. At the same time, the scraper 41 can be checked and replaced according to the alarm prompt, effectively improving the service life of the variable frequency motor 21 and the scraper 41, maximizing the operation time of the machine, and reducing the number of maintenance times.

[0067] The detection system of this embodiment can monitor the operating status of the variable frequency motor in real time. At the same time, the control system can control the operation of the variable frequency motor in real time according to the load current changes collected by the detection system, effectively extending the service life of the variable frequency motor, reducing costs, and improving the utilization rate of exhaust gas treatment equipment, maximizing the operating time of the machine, and saving time costs.

[0068] Please continue to refer to Figure 1 As shown, on the other hand, the utility model also provides an exhaust gas treatment device, comprising: a combustion chamber 7, a scraper device as described above arranged on the combustion chamber 7, the scraper device being used to remove attachments located on the inner wall of the intake pipe 1;

[0069] The air intake pipe 1 is a three-way air intake pipe, wherein both ends are connected to the gas source ( Figure 1 The other end is connected to the driving device 2.

[0070] In summary, the scraper device and exhaust gas treatment equipment proposed in this embodiment can prevent the formation of crystals at the connection between the air intake pipe of the semiconductor equipment and the combustion chamber of the exhaust gas treatment equipment. The control system of the utility model can set the speed, starting frequency and interval time of the variable frequency motor according to the type of exhaust gas in the air intake pipe. The frequency converter can realize real-time control of the motor speed through the precise control of the PLC control module, and then control the scraper to clean the residual crystals on the inner wall of the air intake pipe, thereby extending the service life of the scraper. At the same time, the detection system can detect and collect the operating current of the variable frequency motor, and judge whether the equipment is operating normally according to the load current. The variable frequency motor can also select different speeds according to the type of exhaust gas to adapt to the needs of load changes, effectively improve the life of the motor, reduce the number of machine maintenance, and greatly reduce the cost of exhaust gas treatment.

[0071] It should be noted that, in this article, relational terms such as first and second, etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Moreover, the terms "include", "comprise" or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, the elements defined by the sentence "comprise a ..." do not exclude the existence of other identical elements in the process, method, article or device including the elements.

[0072] Although the content of the utility model has been described in detail through the above preferred embodiments, it should be appreciated that the above description should not be considered as a limitation of the utility model. After reading the above content, various modifications and substitutions of the utility model will be obvious to those skilled in the art. Therefore, the protection scope of the utility model should be limited by the attached claims.

Claims

1. A scraper device, applied to an air intake pipe of an exhaust gas treatment device, wherein the air intake pipe introduces exhaust gas into the exhaust gas treatment device, characterized in that: include: A driving device, arranged on a mounting port of the air intake duct; A main shaft, one end of which is connected to the driving device and the other end of which extends from the mounting port into the air intake duct; A scraper assembly is located in the air inlet duct and is hinged to the main shaft; The driving device drives the main shaft to rotate, providing centrifugal force for the scraper assembly. Under the action of the centrifugal force, the scraper assembly unfolds and contacts the inner wall of the air intake pipe to remove attachments on the inner wall of the air intake pipe.

2. The scraper device according to claim 1, characterized in that The main axis is arranged parallel to or coaxially with the central axis of the air intake duct.

3. The scraper device according to claim 1, characterized in that The scraper assembly comprises: scraper; A swing arm, two ends of which are respectively hinged to the main shaft and the scraper.

4. The scraper device according to claim 3, characterized in that The swing arm comprises: a main swing arm and a restraining arm; The two ends of the main swing arm and the restraining arm are respectively hinged to the main shaft and the scraper to form a quadrilateral.

5. The scraper device according to claim 4, characterized in that The scraper assembly further comprises: a restraining and limiting baffle, which is arranged on the diagonal of the quadrilateral away from the main axis to limit the deployment angle of the scraper assembly.

6. The scraper device according to claim 5, characterized in that The restraining and limiting baffle is in the shape of a right-angled triangle, and one right-angled side of the restraining and limiting baffle is connected to the main swing arm, or to the restraining arm, or to the back of the scraper.

7. The scraper device according to claim 3, characterized in that: The scraper is made of alumina ceramic or zirconia ceramic.

8. The scraper device according to claim 1, characterized in that The driving device comprises: A variable frequency motor, which is arranged on the mounting port of the air intake duct and has an output shaft connected to the main shaft; A control system, connected to the variable frequency motor, for controlling the speed of the variable frequency motor; A detection system is connected to the control system and the variable frequency motor respectively, and is used to monitor the operating status of the variable frequency motor.

9. The scraper device according to claim 8, characterized in that The control system includes: a PLC control module and a frequency converter, wherein the PLC control module is used to set the working cycle of the variable frequency motor; the working cycle of the variable frequency motor includes a working time period and a non-working time period; The PLC control module sends a control signal to the frequency converter, and the frequency converter is used to adjust the speed of the variable frequency motor according to the control signal; During the working time period, the variable frequency motor drives the scraper to impact and scrape off the attachments on the inner wall of the air intake duct; during the non-working time period, the variable frequency motor stops working and the scraper shrinks; The detection system comprises: a current detection module and an alarm module, wherein the current detection module is used to detect and collect the load current of the variable frequency motor in real time; The alarm module is used to determine whether the load current exceeds a predetermined alarm range according to the received load current, and if so, generate and send an alarm signal; The PLC control module controls the variable frequency motor to stop working according to the received alarm signal.

10. A waste gas treatment device, characterized in that: It comprises: a combustion chamber, and a scraper device as claimed in any one of claims 1 to 9 arranged on the combustion chamber, wherein the scraper device is used to remove attachments located on the inner wall of the intake duct; The air intake pipe is a three-way air intake pipe, two ends of which are respectively connected to the gas source of the exhaust gas treatment equipment and the combustion chamber, and the other end is connected to the driving device.

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