Control device for reducing aggregation of grinding fluid particles and grinding fluid supply system

Abstract

The utility model discloses a control device for reducing grinding fluid particle aggregation and a grinding fluid supply system, which comprise a stirring module arranged in a grinding fluid conveying pipeline in front of a filter, and the stirring module is used for stirring the flowing grinding fluid under the control so as to stir the grinding fluid through the applied stirring force. The grinding particles in the grinding fluid are in a uniformly dispersed state, so that the microscopic state of the grinding particles in the grinding fluid is changed, the overall macroscopic performance of the grinding fluid is further controlled, the grinding fluid keeps good uniformity before entering grinding equipment, and the stability of the grinding quality is guaranteed. According to the utility model, the state of grinding liquid particles in the pipeline can be effectively controlled, and higher grinding efficiency can be obtained.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a control device for reducing the aggregation of grinding liquid particles and a grinding liquid supply system. Background Art

[0002] The chemical mechanical polishing process in the chip manufacturing process has the characteristics of large removal volume and high requirements for the surface morphology of the wafer. The polishing liquid is in direct contact with the wafer during the polishing process. Through chemical reaction and mechanical friction, the film to be removed is worn away, while the film to be retained is thinned. It is also required to be able to suppress polishing scratches and depressions to obtain a higher polishing rate and selectivity. It can be seen that the polishing liquid plays an important role in the chemical mechanical polishing process, so it is very necessary to ensure the stability of the polishing liquid state during the polishing process.

[0003] refer to Figure 1 The existing grinding liquid supply system includes a grinding liquid supply pipeline 100. The grinding liquid supply pipeline 100 is provided with a grinding liquid stock liquid barrel 11, a mixing barrel 13, a liquid supply barrel 14, a delivery pump 18 and a filter 17 which are sequentially connected through a delivery pipe 12. The filter 17 is connected to a liquid supply arm 15 on the grinding equipment through the delivery pipe 12. Among them, a circulation pipe 19 is provided between the delivery pump 18 and the liquid supply barrel 14. The grinding liquid delivered from the liquid supply barrel 14 to the delivery pump 18 through the circulation pipe 12 can be provided to the liquid supply arm 15 after being filtered by the filter 17 under control, or partly or completely returned to the liquid supply barrel 14 through the circulation pipe 19 under control, so as to form a circulating supply of the grinding liquid.

[0004] During the grinding process, the grinding liquid is stirred by the liquid supply barrel 14, and then enters the circulation pipe 19 under the suction of the delivery pump 18, and the grinding particles of the grinding liquid are filtered through the filter 17, and finally sprayed on the polishing pad of the rotating platform 16 through the liquid supply arm 15, so that the processed wafer is ground on the polishing pad under the pressure of the grinding head, such as Figure 1 However, since the grinding liquid is easily aggregated during the transportation and circulation in the delivery pipe 12 before the filter 17, some aggregated particles that cannot be filtered out by the filter 17 will enter the grinding equipment with the grinding liquid. The aggregated grinding particles act on the wafer under the pressure of the grinding head, which will cause arc-shaped scratch defects on the wafer after grinding, such as Figure 2 When there are many aggregated particles in the polishing liquid, since more polishing particles are filtered out by the filter 17, it will also cause the problem of more polishing particle loss in the polishing liquid, resulting in fluctuations in the polishing rate, and further affecting the wafer quality. Utility Model Content

[0005] The purpose of the utility model is to overcome the above-mentioned defects in the prior art and to provide a control device and a polishing liquid supply system for reducing the aggregation of polishing liquid particles.

[0006] To achieve the above purpose, the technical solution of the utility model is as follows:

[0007] The utility model provides a control device for reducing the aggregation of grinding liquid particles, comprising:

[0008] A stirring module is arranged in the grinding liquid delivery pipeline before the filter, and is used to controllably stir the grinding liquid flowing through, so that the grinding particles in the grinding liquid are in a uniformly dispersed state through the applied stirring force.

[0009] Furthermore, it also includes: a control module, which is used to control the opening and closing of the stirring module and the stirring speed.

[0010] Furthermore, it also includes: a detection module, which is arranged on the grinding liquid delivery pipeline before the stirring module, and is used to detect the aggregation state of the grinding particles in the grinding liquid flowing through. The control module controls the opening and closing and the stirring speed of the stirring module according to the detection result of the detection module.

[0011] Furthermore, the stirring module includes an electromagnetic stirring module, the electromagnetic stirring module is provided with a matching magnetic stirring rotor and a magnetic field generator, the magnetic stirring rotor is arranged in the grinding liquid delivery pipeline, the magnetic field generator is correspondingly arranged on the outer wall of the grinding liquid delivery pipeline, the control module is provided with a control panel, the magnetic field generator is connected to the control panel, and the control panel is used to control the opening and closing and the rotation speed of the magnetic stirring rotor through the magnetic field generator.

[0012] Furthermore, there are multiple magnetic stirring rotors, and they are distributed along the direction of the grinding liquid delivery pipeline and the cross-sectional direction of the grinding liquid delivery pipeline. The magnetic stirring rotor is provided with multiple symmetrically distributed stirring arms, and the ends of the stirring arms are connected to magnetic stirring heads. The rotating surface formed by each stirring arm and its magnetic stirring head on the magnetic stirring rotor is arranged parallel to the direction of the grinding liquid delivery pipeline.

[0013] Furthermore, the detection module includes a laser detection module, and the laser detection module is provided with a matching laser transmitter and a signal receiver, and the signal receiver includes an area array CCD.

[0014] Furthermore, a delivery pump is provided before the filter, the stirring module includes a first stirring module arranged in the grinding liquid delivery pipeline between the delivery pump and the filter, the detection module includes a first detection module arranged before the first stirring module and coordinated with the first stirring module, and the first stirring module and the first detection module are connected to the control module.

[0015] Furthermore, a grinding liquid supply barrel is provided before the delivery pump, and the stirring module also includes a second stirring module arranged in the grinding liquid delivery pipeline between the grinding liquid supply barrel and the delivery pump, and the grinding liquid delivery pipeline between the grinding liquid supply barrel and the delivery pump includes a circulation pipeline, and the circulation pipeline includes a circulation output branch pipeline arranged between the grinding liquid supply barrel and the delivery pump and a circulation input branch pipeline arranged between the delivery pump and the grinding liquid supply barrel, and the second stirring module is arranged in the circulation input branch pipeline, and the detection module also includes a second detection module arranged before the second stirring module and cooperating with the second stirring module, and the second stirring module and the second detection module are connected to the control module, and the control module performs corresponding control on the opening and closing and the stirring speed of the first stirring module and the second stirring module according to the respective detection results of the first detection module and the second detection module.

[0016] The utility model also provides a grinding liquid supply system, comprising a grinding liquid supply pipeline, on which the above-mentioned control device for reducing the aggregation of grinding liquid particles is arranged.

[0017] Furthermore, the grinding liquid supply pipeline is provided with a grinding liquid stock barrel, a grinding liquid mixing barrel, a grinding liquid supply barrel, a delivery pump and a filter which are connected in sequence through a grinding liquid delivery pipeline, the filter is connected to a supply arm on the grinding equipment through a grinding liquid delivery pipeline, the grinding liquid delivery pipeline between the grinding liquid supply barrel and the delivery pump includes a circulation pipeline, the circulation pipeline includes a circulation output branch pipeline arranged between the grinding liquid supply barrel and the delivery pump and a circulation input branch pipeline arranged between the delivery pump and the grinding liquid supply barrel; the control device includes a stirring module and a detection module connected to the control module, the stirring module includes a first stirring module arranged in the grinding liquid delivery pipeline between the delivery pump and the filter, and a second stirring module arranged in the circulation input branch pipeline, the control module controls the start, shutdown and stirring speed of the first stirring module and the second stirring module according to the detection result of the detection module; wherein, the grinding liquid flowing through is stirred by the second stirring module to reduce the circulation preparation time of the grinding liquid, and the grinding liquid flowing through is stirred by the first stirring module to perform secondary adjustment on the uniformity state of the grinding particles in the grinding liquid after the circulation preparation.

[0018] It can be seen from the above technical scheme that the utility model sets a stirring module in the grinding liquid delivery pipeline before the filter on the grinding liquid supply pipeline to stir the grinding liquid flowing through. The agglomerated grinding particles in the grinding liquid can be broken up by the stirring force, so that the grinding particles in the grinding liquid are in a uniformly dispersed state, thereby changing the microscopic state of the grinding particles in the grinding liquid, and then controlling the overall macroscopic properties of the grinding liquid, so that the grinding liquid maintains good uniformity before entering the grinding equipment, so as to ensure the stability of the grinding quality. Among them, by mechanically stirring the grinding liquid in the circulation input branch pipe (circulation end) between the delivery pump and the grinding liquid supply barrel, the diffusion of microparticles such as grinding particles is promoted, and the agglomeration of grinding particles is reduced, which can greatly reduce the grinding liquid circulation preparation time; by mechanically stirring the grinding liquid in the grinding liquid delivery pipe (supply end) between the delivery pump and the filter, the state of the grinding liquid after circulation preparation can be secondary adjusted to ensure that the grinding liquid entering the grinding equipment remains uniform; by integrating laser detection and electromagnetic stirring in the device, the grinding liquid flowing through can be detected and stirred at any time, and according to the detected grinding liquid state, a reasonable electromagnetic field energy can be set on the control panel accordingly, and then the rotation stirring speed of the magnetic stirring rotor can be adjusted in real time, so that the uniformity of the grinding liquid can be improved in a shorter time, and the effective control of the grinding liquid particle state in the pipeline can be achieved, and higher grinding efficiency is obtained. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 The figure is a schematic diagram of the structure of an existing grinding liquid supply system.

[0020] Figure 2 Schematic diagram of the principle of scratches on the wafer after grinding caused by agglomerated grinding particles in the grinding liquid acting on the wafer under the pressure of the grinding head.

[0021] Figure 3 The present invention is a schematic structural diagram of a control device for reducing the aggregation of grinding liquid particles in a preferred embodiment of the present invention.

[0022] Figure 4 The figure is a schematic structural diagram of a grinding liquid supply system according to a preferred embodiment of the utility model. DETAILED DESCRIPTION

[0023] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be clearly and completely described below. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the utility model. Unless otherwise defined, the technical terms or scientific terms used herein should be understood by people with general skills in the field to which the utility model belongs. "Including" and similar words used in this article mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects.

[0024] The specific implementation of the utility model is further described in detail below in conjunction with the accompanying drawings.

[0025] refer to Figure 3 and Figure 4 The utility model discloses a control device for reducing the aggregation of grinding liquid particles, comprising a stirring module 31. The control device is arranged on the grinding liquid supply pipeline 200, and the grinding liquid supply pipeline 200 is provided with a filter 27 and a grinding liquid delivery pipeline 22, and the stirring module 31 is arranged in the grinding liquid delivery pipeline 22 before the filter 27. The stirring module 31 is used to controllably stir the grinding liquid flowing through the grinding liquid delivery pipeline 22, so that the grinding particles in the grinding liquid are in a uniformly dispersed state through the action of the applied stirring force.

[0026] In some embodiments, the control module 34 is also provided to control the opening and closing of the stirring module 31 and the rotation speed during stirring.

[0027] In some embodiments, the aggregation state of the grinding particles in the grinding liquid flowing through is also detected by the detection module 35 disposed on the grinding liquid delivery pipeline 22 before the stirring module 31. In addition, the control module 34 controls the opening and closing of the stirring module 31 and the stirring speed according to the detection result of the detection module 35.

[0028] refer to Figure 3. In some embodiments, the stirring module 31 includes an electromagnetic stirring module. The electromagnetic stirring module is provided with a matching magnetic stirring rotor 312 and a magnetic field generator 311. Among them, the magnetic stirring rotor 312 is arranged in the grinding liquid delivery pipeline 22, and the magnetic field generator 311 is correspondingly arranged on the outer walls of both sides of the grinding liquid delivery pipeline 22. The magnetic field generator 311 and the magnetic stirring rotor 312 (magnetic rotor) constitute an electromagnetic stirring system. The control module 34 is provided with a control panel 341, and the magnetic field generator 311 is connected to the control panel 341. The magnetic field generator 311 is controlled by the control panel 341 to realize the control of the opening and closing and the rotation speed of the magnetic stirring rotor 312.

[0029] In some embodiments, there are multiple magnetic stirring rotors 312. In addition, each magnetic stirring rotor 312 is distributed along the direction of the grinding liquid delivery pipeline 22 (the input and output direction of the grinding liquid) and the cross-sectional direction of the grinding liquid delivery pipeline 22. For example, when the electromagnetic stirring is in the off state, each magnetic stirring rotor 312 is adsorbed on the wall of the grinding liquid delivery pipeline 22 by the magnetic force of the fixed magnetic field generated by the magnetic field generator 311. When the magnetic field generator 311 is controlled by the control panel 341 to start stirring, each magnetic stirring rotor 312 will be distributed in a three-dimensional array along the direction of the grinding liquid delivery pipeline 22 and the cross-sectional direction of the grinding liquid delivery pipeline 22 under the magnetic force of the rotating magnetic field generated by the magnetic field generator 311, and rotate, thereby stirring the grinding liquid flowing through, thereby effectively stirring and dispersing the agglomerated grinding particles in the flowing grinding liquid.

[0030] In some embodiments, the magnetic stirring rotor 312 is provided with a plurality of symmetrically distributed stirring arms 3121. Figure 3 exemplarily shows the structure of a magnetic stirring rotor 312 having four symmetrically distributed stirring arms 3121 , but is not limited thereto.

[0031] Furthermore, a magnetic stirring head 3122 is connected to the end of the stirring arm 3121. The magnetic stirring head 3122 may be a spherical structure, and its diameter is larger than the arm diameter of the stirring arm 3121, so that when the magnetic stirring rotor 312 is driven to rotate by magnetic force, the magnetic stirring head 3122 is provided to generate an enhanced stirring effect.

[0032] In some embodiments, the rotating surface formed by each stirring arm 3121 and its magnetic stirring head 3122 on each magnetic stirring rotor 312 is arranged parallel to the direction of the grinding liquid delivery pipeline 22, that is, parallel to the flow direction of the grinding liquid.

[0033] In some embodiments, the rotation planes formed by the magnetic stirring rotors 312 are parallel to each other.

[0034] By reasonably setting the electromagnetic field energy of the magnetic field generator 311 through the control panel 341, and then adjusting the rotation stirring speed of the magnetic stirring rotor 312 in real time, the uniformity of the grinding liquid can be improved in a shorter time and the efficiency is higher.

[0035] refer to Figure 3 In some embodiments, the detection module 35 includes a laser detection module 35. The laser detection module 35 is provided with a matching laser emitter 351 and a signal receiver 352, thereby forming a laser detection system. The laser emitter 351 and the signal receiver 352 are respectively arranged on the two side walls of the grinding liquid delivery pipeline 22 to detect the aggregation state of the grinding particles in the grinding liquid flowing through.

[0036] In some embodiments, the signal receiver 352 includes an area array CCD. When the grinding particles in the grinding liquid agglomerate, this characteristic signal can be obtained through the area array CCD. The area array CCD collects the detection signal and uploads it to the control panel 341 for analysis. The control panel 341 feeds back to the magnetic field generator 311 (stirring module 31) accordingly based on the detection result to decide whether to open or close it. If the characteristics of grinding particle aggregation are detected, the array-distributed magnetic stirring rotor 312 will transmit the rotational mechanical force to the grinding liquid under the influence of the magnetic field generated by the magnetic field generator 311 to enhance the stirring and crushing effect and reduce the aggregation of grinding particles.

[0037] In some embodiments, the laser detection module 35 may use a commercially available laser detector.

[0038] refer to Figure 4 Combined with reference Figure 3 In some embodiments, a delivery pump 28 is further provided on the grinding liquid supply pipeline 200 before the filter 27. The stirring module 31 includes a first stirring module 32 disposed in the grinding liquid delivery pipeline 22 between the delivery pump 28 and the filter 27. The detection module 35 includes a first detection module 36 disposed before the first stirring module 32 and cooperating with the first stirring module 32. The first stirring module 32 and the first detection module 36 are connected to the control panel 341.

[0039] In some embodiments, a grinding liquid supply barrel 24 is also provided before the delivery pump 28, and the stirring module 31 also includes a second stirring module 33 provided in the grinding liquid delivery pipeline 22 between the grinding liquid supply barrel 24 and the delivery pump 28. The detection module 35 also includes a second detection module 37 provided before the second stirring module 33 and cooperating with the second stirring module 33. Among them, the second stirring module 33 and the second detection module 37 are connected to the control panel 341. The control panel 341 controls the magnetic field generator 311 of the first stirring module 32 and the magnetic field generator 311 of the second stirring module 33 according to the respective detection results received from the first detection module 36 and the second detection module 37, so as to control the opening and closing and the rotation speed of the magnetic stirring rotor 312 of the first stirring module 32 and the magnetic stirring rotor 312 of the second stirring module 33.

[0040] Furthermore, the grinding liquid delivery pipeline 22 between the grinding liquid supply barrel 24 and the delivery pump 28 includes a circulation pipeline, and the circulation pipeline includes a circulation output branch pipeline 30 arranged between the grinding liquid supply barrel 24 and the delivery pump 28 and a circulation input branch pipeline 29 arranged between the delivery pump 28 and the grinding liquid supply barrel 24, and the second stirring module 33 and the second detection module 37 are arranged in the circulation input branch pipeline 29.

[0041] The following is a further detailed description of a grinding liquid supply system of the present invention through specific implementation modes and in conjunction with the accompanying drawings.

[0042] The utility model provides a grinding liquid supply system, which comprises a grinding liquid supply pipeline 200 and the above-mentioned control device for reducing the aggregation of grinding liquid particles of the utility model arranged on the grinding liquid supply pipeline 200 .

[0043] refer to Figure 4 and Figure 3 In some embodiments, the polishing liquid supply pipeline 200 is provided with a polishing liquid stock tank 21, a polishing liquid mixing tank 23, a polishing liquid supply tank 24, a delivery pump 28 and a filter 27 which are sequentially connected through a polishing liquid delivery pipeline 22; the filter 27 is further connected to a liquid supply arm 25 on the polishing device through the polishing liquid delivery pipeline 22. A rotating platform 26 is provided below the liquid supply arm 25, and a polishing pad is provided on the rotating platform 26. The polishing liquid is sprayed on the polishing pad through the liquid supply arm 25, and the processed wafer is polished on the polishing pad under the pressure of the polishing head.

[0044] Among them, the grinding liquid delivery pipeline 22 between the grinding liquid supply barrel 24 and the delivery pump 28 includes a circulation pipeline; the circulation pipeline includes a circulation output branch pipeline 30 arranged between the grinding liquid supply barrel 24 and the delivery pump 28, and a circulation input branch pipeline 29 arranged between the delivery pump 28 and the grinding liquid supply barrel 24.

[0045] The control device for reducing the aggregation of grinding liquid particles of the utility model comprises a stirring module 31 and a detection module 35 connected to a control module 34 (control panel 341). The stirring module 31 comprises a first stirring module 32 arranged in the grinding liquid delivery pipeline 22 (liquid supply end) between the delivery pump 28 and the filter 27, and a second stirring module 33 arranged in the circulation input branch pipeline 29 (circulation end). The detection module 35 comprises a first detection module 36 arranged before the first stirring module 32, and a second detection module 37 arranged before the second stirring module 33.

[0046] The control module 34 monitors the state of the grinding particles in the grinding liquid in real time through the detection module 35, and controls the start, stop and rotation speed of the first stirring module 32 and the second stirring module 33 according to the detection results of the first detection module 36 and the second detection module 37. That is, the magnetic stirring rotor 312 of the first stirring module 32 and the magnetic stirring rotor 312 of the second stirring module 33 are started and closed and the rotation speed is controlled accordingly.

[0047] The utility model is based on the current grinding liquid supply method. A stirring module (32, 33) is respectively arranged between the delivery pump 28 and the liquid supply barrel 24 (circulation end), and between the delivery pump 28 and the filter 27 (liquid supply end), and a laser detection system and an electromagnetic stirring system are integrated inside the device. The state of the grinding particles can be monitored in real time by the laser detector, and the results are fed back to the control panel 341. Under the regulation of the control panel 341, the state of the grinding liquid particles in the pipeline is effectively controlled through the mutual cooperation between the electromagnetic field and the magnetic stirring rotor 312.

[0048] During use, when the grinding liquid in the circulation end pipeline flows through the circulation input branch pipeline 29 at room temperature, the state of the grinding particles in the grinding liquid is detected by the laser detector (second detection module 37). The area array CCD collects the signal and uploads it to the control panel 341 for analysis. The control panel 341 feeds back the result to the magnetic field generator 311 of the second stirring module 33 to decide whether to open or close it. If the aggregation of grinding particles is detected, the magnetic stirring rotor 312 distributed in the pipeline in an array will rotate under the influence of the magnetic field and transmit the mechanical force of the rotation to the grinding liquid to enhance the stirring and crushing effect and reduce the aggregation of grinding particles.

[0049] At the liquid supply end, in order to avoid the problem of aggregation of grinding particles caused by long-term storage of the grinding liquid, which would have an adverse effect on wafer grinding, the first stirring module 32 is controlled by the control panel 341 to start stirring the grinding liquid, so that the grinding liquid maintains good uniformity before entering the grinding equipment, so as to ensure the stability of the grinding quality of the produced wafers.

[0050] Among them, at the circulation end (circulation input branch pipe 29 between the delivery pump 28 and the grinding liquid supply barrel 24), the flowing grinding liquid is mechanically stirred by the second stirring module 33, which can promote the diffusion of grinding particles and other microparticles, reduce the agglomeration of grinding particles, and greatly reduce the grinding liquid circulation preparation time.

[0051] At the liquid supply end (the grinding liquid delivery pipeline 22 between the delivery pump 28 and the filter 27), the first stirring module 32 mechanically stirs the flowing grinding liquid, and the state of the grinding particles in the grinding liquid after the circulation preparation can be adjusted for the second time to ensure that the grinding liquid entering the grinding equipment (machine) maintains uniformity. At the same time, it also avoids the problem of more grinding particles being lost in the grinding liquid due to more agglomerated grinding particles being filtered out by the filter 27 in the past, thereby avoiding fluctuations in the grinding rate and ensuring the grinding quality of the wafer.

[0052] By integrating the laser detection system and the electromagnetic stirring system in the control device, the grinding liquid flowing through the pipeline can be detected and stirred at any time, and according to the detected state of the grinding liquid, a reasonable electromagnetic field energy can be set on the control panel 341 accordingly, and then the rotation stirring speed of the magnetic stirring rotor 312 can be adjusted in real time, which can improve the uniformity of the grinding liquid in a shorter time, realize effective control of the state of the grinding liquid particles in the pipeline, and obtain higher grinding efficiency.

[0053] In summary, the utility model sets a stirring module 31 in the grinding liquid delivery pipeline 22 before the filter 27 on the grinding liquid supply pipeline 200 to control the stirring of the grinding liquid flowing through. The agglomerated grinding particles in the grinding liquid can be broken up by the stirring force, so that the grinding particles in the grinding liquid are in a uniformly dispersed state, thereby changing the microscopic state of the grinding particles in the grinding liquid, and then controlling the overall macroscopic properties of the grinding liquid, so that the grinding liquid maintains good uniformity before entering the grinding equipment, so as to ensure the stability of the grinding quality.

[0054] Although the embodiments of the present invention are described in detail above, it is obvious to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations are within the scope and spirit of the present invention as described in the claims. Moreover, the present invention described herein may have other embodiments and may be implemented or realized in a variety of ways.

Claims

1. A control device for reducing the aggregation of polishing liquid particles, characterized in that: include: A stirring module is provided in the grinding liquid delivery pipeline before the filter, and the stirring module is used to controllably stir the grinding liquid flowing through, so that the grinding particles in the grinding liquid are in a uniformly dispersed state by applying a stirring force; It also includes: a control module, which is used to control the opening and closing of the stirring module and the stirring speed; The stirring module includes an electromagnetic stirring module, which is provided with a matching magnetic stirring rotor and a magnetic field generator. The magnetic stirring rotor is arranged in a grinding liquid delivery pipeline, and the magnetic field generator is correspondingly arranged on the outer wall of the grinding liquid delivery pipeline. The control module is provided with a control panel, and the magnetic field generator is connected to the control panel. The control panel is used to control the opening and closing and the rotation speed of the magnetic stirring rotor through the magnetic field generator.

2. The control device for reducing the aggregation of polishing liquid particles according to claim 1, characterized in that: Also includes: The detection module is arranged on the grinding liquid delivery pipeline before the stirring module, and is used to detect the aggregation state of the grinding particles in the grinding liquid flowing through. The control module controls the opening and closing and the stirring speed of the stirring module according to the detection result of the detection module.

3. The control device for reducing the aggregation of polishing liquid particles according to claim 1, characterized in that: There are multiple magnetic stirring rotors, and they are distributed along the direction of the grinding liquid delivery pipeline and the cross-sectional direction of the grinding liquid delivery pipeline. The magnetic stirring rotor is provided with multiple symmetrically distributed stirring arms, and the ends of the stirring arms are connected to magnetic stirring heads. The rotating surface formed by each stirring arm and its magnetic stirring head on the magnetic stirring rotor is arranged parallel to the direction of the grinding liquid delivery pipeline.

4. The control device for reducing the aggregation of polishing liquid particles according to claim 2, characterized in that: The detection module comprises a laser detection module, and the laser detection module is provided with a matched laser transmitter and a signal receiver, and the signal receiver comprises a planar array CCD.

5. The control device for reducing the aggregation of polishing liquid particles according to claim 2, characterized in that: A delivery pump is provided before the filter, the stirring module includes a first stirring module arranged in a grinding liquid delivery pipeline between the delivery pump and the filter, the detection module includes a first detection module arranged before the first stirring module and coordinated with the first stirring module, and the first stirring module and the first detection module are connected to the control module.

6. The control device for reducing the aggregation of polishing liquid particles according to claim 5, characterized in that: A grinding liquid supply barrel is provided before the delivery pump, and the stirring module also includes a second stirring module arranged in the grinding liquid delivery pipeline between the grinding liquid supply barrel and the delivery pump, and the grinding liquid delivery pipeline between the grinding liquid supply barrel and the delivery pump includes a circulation pipeline, and the circulation pipeline includes a circulation output branch pipeline arranged between the grinding liquid supply barrel and the delivery pump and a circulation input branch pipeline arranged between the delivery pump and the grinding liquid supply barrel, and the second stirring module is arranged in the circulation input branch pipeline, and the detection module also includes a second detection module arranged before the second stirring module and cooperating with the second stirring module, and the second stirring module and the second detection module are connected to the control module, and the control module performs corresponding control on the opening and closing of the first stirring module and the second stirring module and the stirring speed according to the respective detection results of the first detection module and the second detection module.

7. A grinding liquid supply system, characterized in that: It comprises a grinding liquid supply pipeline, on which is provided a control device for reducing the aggregation of grinding liquid particles according to any one of claims 1-6.

8. The grinding liquid supply system according to claim 7, characterized in that: The grinding liquid supply pipeline is provided with a grinding liquid stock barrel, a grinding liquid mixing barrel, a grinding liquid supply barrel, a delivery pump and a filter which are connected in sequence through a grinding liquid delivery pipeline. The filter is connected to a supply arm on the grinding device through a grinding liquid delivery pipeline. The grinding liquid delivery pipeline between the grinding liquid supply barrel and the delivery pump includes a circulation pipeline, and the circulation pipeline includes a circulation output branch pipeline arranged between the grinding liquid supply barrel and the delivery pump and a circulation input branch pipeline arranged between the delivery pump and the grinding liquid supply barrel; the control device includes a stirring module and a detection module connected to the control module, the stirring module includes a first stirring module arranged in the grinding liquid delivery pipeline between the delivery pump and the filter, and a second stirring module arranged in the circulation input branch pipeline, and the control module controls the start, shutdown and stirring speed of the first stirring module and the second stirring module according to the detection result of the detection module; wherein, the grinding liquid flowing through is stirred by the second stirring module to reduce the circulation preparation time of the grinding liquid, and the grinding liquid flowing through is stirred by the first stirring module to perform secondary adjustment on the uniformity state of the grinding particles in the grinding liquid after the circulation preparation.

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