Four-axis needle seat and needle arm structure of low-temperature probe station

Abstract

The utility model designs a four-axis needle seat and needle arm structure of a low-temperature probe station. The four-axis needle seat and needle arm structure comprises an XYZ three-direction displacement mechanism, a corrugated pipe, a rotating assembly and a probe arm, the rotating assembly is arranged at the front end of the XYZ three-direction displacement mechanism; the probe arm is arranged at the front end of the rotating assembly; the corrugated pipe is arranged outside the probe arm, and the bottom of the corrugated pipe is fixedly connected with the rotating assembly; the rotating assembly comprises a working table and a base; the working table is connected with the base through a rotating shaft; a limiting device is arranged at the right end of the base and used for controlling rotation of the working table top. And the base is fixedly connected with the probe arm. According to the invention, the rotating assembly is additionally arranged on the XYZ three-direction displacement mechanism, so that the angle of the probe arm can be adjusted at will, the adjustment of the angle of the needle point in a radio frequency test is facilitated, the needle seat has better structural stability and higher precision, it can be ensured that the probe is not liable to shift in the test process, and the accuracy and stability of the test are improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of probe testing, and in particular relates to a four-axis needle seat needle arm structure of a low-temperature probe station. Background Art

[0002] At present, my country's instrument manufacturers are mainly concentrated in some large scientific research institutes and universities. The scale of enterprises is relatively small, and their technological development capabilities and market development capabilities need to be improved.

[0003] In terms of market demand, with the development of fields such as materials science and nanoscience, the demand for probe stations has gradually increased, which has provided new market opportunities for the application of probe stations.

[0004] However, existing cryogenic probe station needle holders on the market suffer from poor stability, mediocre accuracy, and a lack of needle arm rotation. These issues, such as structural instability, affect the accuracy and stability of test results. Therefore, it is necessary to design a needle holder with a stable structure, high accuracy, and needle arm rotation. Utility Model Content

[0005] In order to solve the problem that the probe station needle seat on the market has poor stability and does not have the needle arm rotation function, the present application designs a four-axis needle seat needle arm structure of a low-temperature probe station to achieve the rotatable function of the probe station needle seat.

[0006] A four-axis needle seat and needle arm structure of a low-temperature probe station, comprising an XYZ three-axis displacement mechanism, a bellows, a rotating assembly, and a probe arm;

[0007] The rotating assembly is arranged at the front end of the XYZ three-axis displacement mechanism;

[0008] The probe arm is arranged at the front end of the rotating assembly;

[0009] The bellows is arranged outside the probe arm, and the bottom of the bellows is fixedly connected to the rotating assembly.

[0010] Preferably, the rotating assembly includes a work surface and a base;

[0011] The work surface is connected to the base via a rotating shaft;

[0012] A limiting device is provided at the right end of the base for controlling the rotation of the work surface;

[0013] The base and the probe arm are fixedly connected.

[0014] Preferably, a rotating handle is also provided on the side of the work surface.

[0015] Preferably, a fixed panel is provided at the bottom of the bellows, and the bellows fixing column is connected to the base of the rotating assembly.

[0016] Preferably, a transition block is further provided between the fixed panel and the work surface.

[0017] Preferably, a reserved expansion interface is provided on the transition block.

[0018] Preferably, an electrical interface is also provided on the transition block.

[0019] The advantages and effects of this application are as follows:

[0020] The present application designs a four-axis needle seat needle arm structure of a low-temperature probe station, including an XYZ three-dimensional displacement mechanism, a bellows, a rotation assembly and a probe arm; the rotation assembly is arranged at the front end of the XYZ three-dimensional displacement mechanism; the probe arm is arranged at the front end of the rotation assembly; the bellows is arranged on the outside of the probe arm, and the bottom of the bellows is fixedly connected to the rotation assembly; the rotation assembly includes a work surface and a base; the work surface is connected to the base through a rotating shaft; a limiting device is provided at the right end of the base for controlling the rotation of the work surface; the base and the probe arm are fixedly connected. The present application adds a rotation assembly to the XYZ three-dimensional displacement mechanism, so that the angle of the probe arm can be arbitrarily adjusted, which is helpful for adjusting the needle tip angle in radio frequency testing, thereby achieving better structural stability and higher precision of the needle seat, and can ensure that the probe is not easily offset during the test process, thereby improving the accuracy and stability of the test.

[0021] The above description is only an overview of the technical solution of the present application. In order to more clearly understand the technical means of the present application so that it can be implemented in accordance with the contents of the specification, and to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the following is a detailed description of the preferred embodiment of the present application in conjunction with the accompanying drawings.

[0022] Based on the detailed description of the specific embodiments of the present application in conjunction with the accompanying drawings below, those skilled in the art will become more aware of the above and other objects, advantages and features of the present application. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following will briefly introduce the drawings required for the embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present application. For those of ordinary skill in the art, other drawings can also be obtained based on these drawings without inventive work. In all drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn according to the actual scale.

[0024] Figure 1 A diagram showing the structure of a four-axis needle holder and needle arm of a low-temperature probe station designed for this application;

[0025] Figure 2 Structural diagram of the rotating assembly designed for this application.

[0026] Reference numerals:

[0027] 1. XYZ displacement mechanism; 2. Bellows; 3. Rotation assembly; 4. Probe arm; 5. Work table; 6. Base; 7. Limit device; 8. Rotation handle; 9. Fixed panel; 10. Bellows fixing column; 11. Transition block; 12. Electrical interface. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of the embodiments. In the following description, specific details such as specific configurations and components are provided only to help fully understand the embodiments of the present application. Therefore, it should be clear to those skilled in the art that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of the present application. In addition, for clarity and brevity, the description of known functions and structures has been omitted in the embodiments.

[0029] It should be understood that references throughout this specification to "one embodiment" or "this embodiment" mean that a particular feature, structure, or characteristic associated with the embodiment is included in at least one embodiment of the present application. Therefore, the appearance of "one embodiment" or "this embodiment" throughout this specification does not necessarily refer to the same embodiment. Furthermore, these particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.

[0030] In addition, the present application may repeat reference numerals and / or letters in different examples. This repetition is for the purpose of simplicity and clarity and does not in itself indicate the relationship between the various embodiments and / or settings discussed.

[0031] The term "and / or" in this article is only a description of the association relationship of associated objects, indicating that three relationships can exist. For example, A and / or B can mean: A exists alone, B exists alone, and A and B exist at the same time. The term " / and" in this article describes another type of association object relationship, indicating that two relationships can exist. For example, A / and B can mean: A exists alone, and A and B exist alone. In addition, the character " / " in this article generally indicates that the previous and subsequent associated objects are in an "or" relationship.

[0032] The term "at least one" in this article is merely a description of the association relationship between associated objects, indicating that three relationships may exist. For example, at least one of A and B can mean: A exists alone, A and B exist at the same time, and B exists alone.

[0033] It should also be noted that, in this document, relational terms such as first and second are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "include," "comprises," or any other variations thereof are intended to cover non-exclusive inclusion.

[0034] Example

[0035] This embodiment mainly introduces the basic design of a four-axis needle seat needle arm structure of a low-temperature probe station. Figure 1 , Figure 1 A diagram showing the structure of a four-axis needle base and needle arm of a low-temperature probe station designed for this application; specifically, it includes an XYZ three-axis displacement mechanism 1, a bellows 2, a rotating assembly 3, and a probe arm 4;

[0036] The rotating assembly 3 is arranged at the front end of the XYZ three-way displacement mechanism 1 ; the XYZ three-way displacement mechanism is used to provide the rotating assembly 3 with XYZ three-way movement.

[0037] The probe arm 4 is arranged at the front end of the rotating assembly 3;

[0038] The bellows 2 is arranged outside the probe arm 4 and is connected to the bellows 2 for signal connection, and the bottom of the bellows 2 is fixedly connected to the rotating assembly 3; it is used to compensate for deformation and reduce shock;

[0039] The XYZ three-axis displacement mechanism can be a common XYZ displacement module on the market.

[0040] For further information, please refer to Figure 2 , the rotating assembly 3 includes a work surface 5 and a base 6;

[0041] The work surface 5 is connected to the base 6 via a rotating shaft to ensure that the work surface can rotate relative to the base 6;

[0042] A limiting device 7 is provided at the right end of the base 6 for controlling the rotation of the work surface 5 to ensure the stability of the work surface;

[0043] The base 6 and the probe arm 4 are fixedly connected.

[0044] Furthermore, a rotary handle 8 is provided on the side of the work surface 5 for adjusting the position of the work surface 5 .

[0045] Furthermore, a fixing panel 9 is provided at the bottom of the bellows 2 , which is connected to the base 6 of the rotating assembly 3 through the bellows fixing column 10 , thereby achieving a fixed connection between the bellows 2 and the rotating assembly 3 .

[0046] Furthermore, a transition block 11 is provided between the fixed panel 9 and the work surface 5 for signal transmission and for filling the gap between the fixed panel 9 and the work surface 5 .

[0047] Furthermore, a reserved expansion interface is provided on the transition block 11 .

[0048] Furthermore, an electrical interface 12 is also provided on the transition block 11 .

[0049] The present application designs a four-axis needle seat needle arm structure of a low-temperature probe station, including an XYZ three-dimensional displacement mechanism, a bellows, a rotation assembly and a probe arm; the rotation assembly is arranged at the front end of the XYZ three-dimensional displacement mechanism; the probe arm is arranged at the front end of the rotation assembly; the bellows is arranged on the outside of the probe arm, and the bottom of the bellows is fixedly connected to the rotation assembly; the rotation assembly includes a work surface and a base; the work surface is connected to the base through a rotating shaft; a limiting device is provided at the right end of the base for controlling the rotation of the work surface; the base and the probe arm are fixedly connected. The present application adds a rotation assembly to the XYZ three-dimensional displacement mechanism, so that the angle of the probe arm can be arbitrarily adjusted, which is helpful for adjusting the needle tip angle in radio frequency testing, thereby achieving better structural stability and higher precision of the needle seat, and can ensure that the probe is not easily offset during the test process, thereby improving the accuracy and stability of the test.

[0050] The above description is merely a preferred embodiment of the present invention and does not limit the scope of protection of the present invention. Those skilled in the art will appreciate that the present invention is susceptible to various modifications and variations. Any variation, modification, replacement, integration, or parameter change to these embodiments, which falls within the spirit and principles of the present invention and achieves the same functionality through conventional substitutions, without departing from the principles and spirit of the present invention, falls within the scope of protection of the present invention.

Claims

1. A four-axis needle seat needle arm structure of a low-temperature probe station, characterized in that: It comprises an XYZ three-dimensional displacement mechanism (1), a bellows (2), a rotating assembly (3) and a probe arm (4); The rotating assembly (3) is arranged at the front end of the XYZ three-dimensional displacement mechanism (1); The probe arm (4) is arranged at the front end of the rotating assembly (3); The bellows (2) is arranged outside the probe arm (4), and the bottom of the bellows (2) is fixedly connected to the rotating assembly (3).

2. The four-axis needle seat needle arm structure of a low-temperature probe station according to claim 1, characterized in that: The rotating assembly (3) comprises a working surface (5) and a base (6); The work surface (5) is connected to the base (6) via a rotating shaft; A limiting device (7) is provided at the right end of the base (6) for controlling the rotation of the work surface (5); The base (6) and the probe arm (4) are fixedly connected.

3. The four-axis needle seat needle arm structure of a low-temperature probe station according to claim 2, characterized in that: A rotating handle (8) is also provided on the side of the work surface (5).

4. The four-axis needle seat needle arm structure of a low-temperature probe station according to claim 1, characterized in that: A fixed panel (9) is provided at the bottom of the bellows (2), and the fixed panel (9) is connected to the base (6) of the rotating assembly (3) via a bellows fixing column (10).

5. The four-axis needle seat needle arm structure of a low-temperature probe station according to claim 4, characterized in that: A transition block (11) is also provided between the fixed panel (9) and the work surface (5).

6. The four-axis needle seat needle arm structure of a low-temperature probe station according to claim 5, characterized in that: The transition block (11) is provided with a reserved expansion interface.

7. The four-axis needle seat needle arm structure of a low-temperature probe station according to claim 6, characterized in that: The transition block (11) is also provided with an electrical interface (12).

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