Flower basket transfer device
By designing a flower basket transfer device including two guide rails and two robots, the problem of traditional devices being difficult to meet the efficient transport between multiple inserters and cleaning machines is solved, and more efficient flower basket transfer and equipment expansion support is achieved. .
Patent Information
- Application Number
- CN202420853124.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-04-24
- Publication Date
- 2025-02-14
- Estimated Expiration
- 2034-04-24
AI Technical Summary
With the expansion of silicon wafer processing equipment, traditional flower basket transfer devices are difficult to meet the efficient transport needs between multiple insertion machines and cleaning machines, resulting in an increase in the situation of waiting for empty baskets or full baskets on the side of the insertion machine.
A flower basket transfer device consisting of two guide rails and two robots is designed. By setting up multiple working platforms, empty basket platforms and full basket platforms on the guide rails, the flower baskets are moved between the platforms and transferred between the conveying lines. , improve transportation efficiency.
The device improves the efficiency of flower basket transportation, can meet the needs of three or four insert machines at the same time, reduces the workload of the robot and the cost of the device, reduces the footprint, and supports flexible expansion during equipment production expansion.
Smart Images
Figure CN222483322U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of silicon wafer production, in particular to a flower basket transfer device. Background Art
[0002] At present, in the processing equipment of silicon wafers, a basket transfer device is set between the wafer inserter and the cleaning machine, which is used to transfer the basket full of silicon wafers from the wafer inserter side to the cleaning machine side for cleaning. The traditional transfer device is set between two wafer inserters and one cleaning machine, mainly including a manipulator, an empty basket return line and a full basket discharge line. The manipulator is directly used to grab the full basket on the wafer inserter side to the full basket return line, or the manipulator is directly used to grab the empty basket on the empty basket return line to the wafer inserter side. However, with the expansion of equipment production, the number of wafer inserters has also increased accordingly. Using a manipulator to transfer empty baskets and full baskets between three or four wafer inserters can no longer meet the working efficiency of the wafer inserter, and it is easy to wait for the empty basket to be loaded or the full basket to be discharged on the wafer inserter side. Summary of the invention
[0003] In order to overcome the defects in the prior art, an embodiment of the utility model provides a flower basket transfer device, which has a simple structure and reasonable layout, can improve the efficiency of flower basket transfer and meet the needs of silicon wafer production Shenbei to expand production capacity.
[0004] In order to achieve the above-mentioned purpose, the technical solution adopted by the utility model is: a flower basket transfer device, comprising:
[0005] a first guide rail, at least three working platforms arranged along the length direction of the first guide rail below, an empty basket platform and a full basket platform respectively arranged on both sides of the working platform, and the number of the empty basket platforms and the number of the full basket platforms are both less than the number of the working platforms, and a first manipulator arranged on the first guide rail, the first manipulator is used to move the flower baskets between the platforms;
[0006] a second guide rail, and at least one empty basket return line, an empty basket conveyor line, a full basket conveyor line and at least one full basket feeding line arranged below the second guide rail, each of the empty basket return lines being connected to an empty basket platform respectively, the empty basket conveyor line being connected to the remaining empty basket platforms, the full basket conveyor line being connected to the full basket platforms, the full basket feeding line being connected to a cleaning machine, and a second manipulator being arranged on the second guide rail, the second manipulator being used for moving flower baskets between the full basket conveyor line and the full basket feeding line and between the empty basket return line and the empty basket conveyor line.
[0007] In the present application, a basket without silicon wafers is an empty basket, and a basket full of silicon wafers is a full basket. The empty basket platform is used to place an empty basket, that is, a basket without silicon wafers. The full basket platform is used to place a full basket, that is, a basket full of silicon wafers. The empty basket platform and the full basket platform are alternately arranged along the first guide rail. Specifically, the empty basket platform, the full basket platform, the empty basket platform, and the full basket platform are arranged in sequence along the first guide rail.
[0008] An empty basket platform and a full basket platform are respectively set up on both sides of each platform. A full basket conveyor line is set up in connection with the full basket platform, and an empty basket conveyor line is set up in connection with the empty basket platform. The second manipulator on the second guide rail can transfer the full basket from the full basket conveyor line to the full basket feeding line connected to the cleaning machine, or transfer the empty basket from the empty basket return line to the empty basket conveyor line, so as to ensure that the full basket on the full basket platform can be quickly removed and the empty basket can be replenished in time on the empty basket platform. When the flower basket on the workbench needs to be replaced, the first manipulator can immediately move the full basket on the workbench to the full basket platform next to it, and move the empty basket on the empty basket platform next to it to the workbench, so as to reduce the waiting time on the workbench side and improve the efficiency of flower basket transportation.
[0009] The device only needs to set up two guide rails, and a manipulator is set on each guide rail, which is responsible for the movement of the flower baskets between platforms and on the conveyor line respectively. The task allocation of the manipulator is more reasonable, and it can meet the use of three or four inserting machines at the same time. The number of guide rails and manipulators used in the device is less, which reduces the processing cost of the device, is conducive to the miniaturization design of the device, and reduces the footprint of the device in the workshop.
[0010] When the number of inserting machines or cleaning machines needs to be further increased to meet the needs of production expansion, equipment can be directly added on the basis of the existing device to reduce changes to the device and reduce the cost of equipment expansion. For example, when the number of inserting machines is increased to five, in order to prevent the first manipulator or the second manipulator from not having enough time to transfer the flower basket, two first manipulators can be set on the first guide rail, and two second manipulators can be set on the second guide rail. An empty basket return line and a full basket feeding line are set at both ends of the guide rail. The two first manipulators on the first guide rail or the two manipulators on the second guide rail are respectively responsible for the inserting machines and cleaning machines corresponding to half of the guide rails to meet the needs of production expansion.
[0011] In order to further improve the efficiency of the first manipulator in moving the flower baskets between platforms, reduce the waiting time of the working platform, and improve the production rhythm. The distance between the adjacent empty basket platform and the working platform, and the distance between the adjacent full basket platform and the working platform are set to be equal. The first manipulator is provided with two clamping positions, so that the two clamping positions can clamp the flower baskets on two adjacent platforms at the same time. Specifically, when the flower basket on the working platform is full of silicon wafers and needs to be replaced, the first manipulator clamps the adjacent empty basket and full basket at the same time and moves to the full basket platform on one side, so that the empty basket and the full basket can be moved at the same time in one transportation, thereby improving the movement efficiency. The distance between the two adjacent platforms can be set according to the actual situation. In the case of no interference, the distance between the two adjacent platforms can be minimized as much as possible, thereby reducing the distance of each transportation movement of the first manipulator and reducing the time required for movement. It can also reduce the length of the entire device and reduce the floor space required for the device.
[0012] The number of the empty basket return lines and the empty basket conveyor lines in the flower basket transfer device can be adjusted according to the actual situation of the equipment. When the number of the empty basket return lines is equal to the number of the empty basket platforms, the empty basket conveyor lines may not be set in the flower basket transfer device.
[0013] As a further improvement, the flower basket transfer device includes three working platforms, which are opposite to the inserting machine. Compared with the two inserting machines and two working platforms commonly used at present, it can meet the production expansion needs with less cost investment.
[0014] In conjunction with the three working platforms, the basket transfer device can include an empty basket return line and a full basket feed line. The empty basket return line is used to deliver empty baskets to the device, and the full basket feed line can deliver full baskets directly to the cleaning machine.
[0015] As a further improvement, the full basket feeding line is located below the middle of the second guide rail. Setting the full basket feeding line in the middle of the flower basket transfer device can reduce the overall moving distance of the second manipulator and further improve the transfer efficiency.
[0016] As a further improvement, the empty basket return line and the empty basket conveyor line are provided with a first flipping mechanism at one end facing the empty basket platform, and the first flipping mechanism is used to flip the flower basket on the feeding position of the empty basket return line or the empty basket conveyor line from a flat state to a vertical state on the empty basket platform. The first flipping mechanism can flip the flower basket directly from the empty basket return line or the empty basket conveyor line to the empty basket platform, and this process does not require the assistance of a manipulator, which reduces the workload of the manipulator and makes the structure of the manipulator simpler.
[0017] As a further improvement, the first flipping mechanism comprises a first cylinder, a rotating member and a mounting seat, the telescopic rod of the first cylinder is connected to the rotating member connected to the empty basket platform, and the rotating member is sleeved on the mounting seat. The first flipping mechanism has a simple structure and reliable operation.
[0018] As a further improvement, a second flipping mechanism is provided at one end of the full basket conveyor line facing the full basket platform, and the second flipping mechanism is used to flip the flower basket in a vertical state on the full basket platform to a flat state on the receiving position of the full basket conveyor line. Similarly, the second flipping mechanism can flip the flower basket directly from the full basket platform to the full basket conveyor line, and this process does not require the assistance of the robot, which reduces the workload of the robot and makes the structure of the robot simpler.
[0019] As a further improvement, a clamping mechanism is provided on the full basket platform, and the clamping mechanism is used to clamp the flower basket carried by the full basket platform when the second flipping mechanism flips the flower basket. By providing the clamping mechanism, the full basket is always in a state of abutting against the full basket platform during the flipping process, thereby preventing the flower basket from shaking during the flipping process and preventing the silicon wafers in the flower basket from breaking. This is particularly suitable for the case where the thickness of the silicon wafer is less than 125μm.
[0020] As a further improvement, the second flipping mechanism includes a motor, a rotating shaft connected to the motor, and the full basket platform is sleeved on the rotating shaft. The motor is used to control the rotation of the second platform. Compared with the cylinder, the motor can better control the entire movement process, ensuring that the entire flipping process is carried out at a uniform speed and smoothly, reducing shaking.
[0021] Due to the application of the above technical solution, the present invention has the following advantages compared with the prior art:
[0022] 1. An empty basket platform and a full basket platform are respectively set up on both sides of each platform. A full basket conveyor line is set up in connection with the full basket platform, and an empty basket conveyor line is set up in connection with the empty basket platform. The second manipulator on the second guide rail can be used to transfer the full basket from the full basket conveyor line to the full basket feeding line connected to the cleaning machine, or to transfer the empty basket from the empty basket return line to the empty basket conveyor line, so as to ensure that the full basket on the full basket platform can be quickly removed and the empty basket can be replenished on the empty basket platform in time. When the flower basket on the workbench needs to be replaced, the first manipulator can immediately move the full basket on the workbench to the full basket platform next to it, and move the empty basket on the empty basket platform next to it to the workbench, so as to reduce the waiting time on the workbench side and improve the efficiency of flower basket transportation.
[0023] 2. The device only needs to set up two rails, and a manipulator is set on each rail, which is responsible for the movement of the flower baskets between platforms and on the conveyor line respectively. The task allocation of the manipulator is more reasonable, and it can meet the use of three or four inserting machines at the same time. The number of rails and manipulators used in the device is less, which reduces the processing cost of the device, is conducive to the miniaturization design of the device, and reduces the footprint of the device in the workshop.
[0024] 3. The flower basket transfer device has a simple structure. If further expansion is needed, equipment can be directly added on the existing basis, reducing the need for device improvements and reducing the cost of equipment expansion.
[0025] 4. The first flipping mechanism is set to flip the flower basket directly from the empty basket return line or the empty basket conveyor line to the empty basket platform, and the second flipping mechanism is set to flip the flower basket directly from the full basket platform to the full basket conveyor line. This process does not require the assistance of the robot, reducing the workload of the robot and making the structure of the robot simpler.
[0026] 5. By setting a clamping mechanism, the full basket is always in contact with the full basket platform during the flipping process, thereby preventing the basket from shaking during the flipping process and preventing the silicon wafers in the basket from breaking. It is especially suitable for silicon wafers with a thickness of less than 125μm.
[0027] In order to make the above and other purposes, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are specifically cited below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS
[0028] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.
[0029] Figure 1 This is a schematic diagram of the structure of the flower basket transfer device in the first embodiment of the utility model. Figure 1 ;
[0030] Figure 2 This is a schematic diagram of the structure of the flower basket transfer device in the first embodiment of the utility model. Figure 2 ;
[0031] Figure 3 This is a schematic diagram of the connection between the full basket conveyor line and the full basket platform in the first embodiment of the utility model;
[0032] Figure 4 This is a schematic diagram of a flower basket in a flat state on a full basket conveyor line in the first embodiment of the utility model;
[0033] Figure 5 It is a top view of the flower basket transfer device in the first embodiment of the utility model.
[0034] The figure marks of the above drawings are: 1. first guide rail; 2. second guide rail; 3. working platform; 31. first working platform; 32. second working platform; 33. third working platform; 4. empty basket platform; 41. first empty basket platform; 42. second empty basket platform; 5. full basket platform; 51. first full basket platform; 52. second full basket platform; 6. empty basket return line; 7. empty basket conveyor line; 8. full basket conveyor line; 9. full basket feeding line; 10. flower basket; 11. first manipulator; 12. second manipulator; 13. first turning mechanism; 14. second turning mechanism; 15. clamping mechanism. DETAILED DESCRIPTION
[0035] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.
[0036] Example 1: See Figures 1 to 5 As shown, a flower basket transfer device comprises a first guide rail 1 and a second guide rail 2 arranged in parallel. Three working platforms 3 are arranged below the first guide rail 1 and on the side of the first guide rail 1 facing away from the second guide rail 2, and the three working platforms 3 are arranged at intervals along the length direction of the first guide rail 1. Two empty basket platforms 4 and two full basket platforms 5 are also arranged below the first guide rail 1. The two empty basket platforms 4 and the two full basket platforms 5 are arranged alternately, so that an empty basket platform 4 and a full basket platform 5 are respectively arranged on both sides of each of the working platforms 3. An empty basket return line 6, an empty basket conveyor line 7, two full basket conveyor lines 8 and a full basket feeding line 9 are arranged below the second guide rail 2. The empty basket return line 6 is connected to one of the empty basket platforms 4, the empty basket conveyor line 7 is connected to another of the empty basket platforms 4, the full basket conveyor line 8 is connected to the full basket platform 5, and the full basket feeding line 9 is connected to the cleaning machine. A first manipulator 11 is provided on the first guide rail 1, and the first manipulator 11 is used to move flower baskets 10 between platforms. A second manipulator 12 is provided on the second guide rail 2, and the second manipulator 12 is used to move the flower basket 10 between the full basket conveying line 8 and the full basket feeding line 9 and between the empty basket return line 6 and the empty basket conveying line 7.
[0037] In a possible implementation, the spacing between the adjacent empty basket platforms 4 and the working platform 3 is set equal to the spacing between the adjacent full basket platforms 5 and the working platform 3. The first manipulator 11 is provided with two clamping positions, so that the two clamping positions can clamp the flower baskets 10 on two adjacent platforms at the same time. The empty basket and the full basket can be moved at the same time in one handling, thereby improving the moving efficiency.
[0038] In a possible embodiment, the empty basket return line 6 and the empty basket conveyor line 7 are provided with a first flipping mechanism 13 at one end facing the empty basket platform 4, and the first flipping mechanism 13 is used to flip the flower basket 10 on the feeding position of the empty basket return line 6 or the empty basket conveyor line 7 from a horizontal state to a vertical state on the empty basket platform 4. The first flipping mechanism 13 can flip the flower basket 10 directly from the empty basket return line 6 or the empty basket conveyor line 7 to the empty basket platform 4, and this process does not require the assistance of a manipulator, thereby reducing the workload of the manipulator and making the structure of the manipulator simpler.
[0039] See also Figure 2 As shown, the first turning mechanism 13 includes a first cylinder, a rotating member and a mounting seat, the telescopic rod of the first cylinder is connected to the rotating member connected to the empty basket platform 4, and the rotating member is sleeved on the mounting seat. The mounting seat is fixed on the empty basket return line 6 or the empty basket conveying line 7.
[0040] In a possible embodiment, a second flipping mechanism 14 is provided at one end of the full basket conveyor line 8 facing the full basket platform 5, and the second flipping mechanism 14 is used to flip the flower basket 10 in a vertical state on the full basket platform 5 to a flat state on the receiving position of the full basket conveyor line 8. Similarly, the second flipping mechanism 14 can flip the flower basket 10 directly from the full basket platform 5 to the full basket conveyor line 8, and this process does not require the assistance of a robot, which reduces the workload of the robot and makes the structure of the robot simpler.
[0041] See also Figure 3 , 4 As shown, the second flipping mechanism 14 includes a motor, a rotating shaft connected to the motor, and the full basket platform 5 is sleeved on the rotating shaft. The motor is used to control the rotation of the second platform. Compared with the cylinder, the motor can better control the entire movement process, ensuring that the entire flipping process is carried out at a uniform speed and smoothly, reducing shaking.
[0042] In a possible implementation, a clamping mechanism 15 is provided on the full basket platform 5, and the clamping mechanism 15 is used to clamp the flower basket 10 carried by the full basket platform 5 when the second flipping mechanism 14 flips the flower basket 10. By providing the clamping mechanism 15, the full basket is always in a state of abutting against the full basket platform 5 during the flipping process, thereby preventing the flower basket 10 from shaking during the flipping process and preventing the silicon wafers in the flower basket 10 from breaking. It is particularly suitable for the case where the thickness of the silicon wafer is less than 125 μm.
[0043] The clamping mechanism 15 includes a second cylinder and a clamp connected to the telescopic rod of the second cylinder. During the flipping process, the second cylinder controls the clamp to apply pressure to the flower basket 10. When the flower basket 10 is flat after the flipping is completed, the second cylinder controls the clamp to release the flower basket 10 so that the flower basket 10 can be taken away by the full basket conveyor line 8 and moved to the feeding position. The clamp can rotate relative to the side plate of the full basket platform 5 to switch between clamping and loosening to avoid interference with the movement of the flower basket 10.
[0044] See also Figure 5 As shown, the working platform 3 includes a first working platform 31, a second working platform 32, and a third working platform 33 which are sequentially arranged along the length direction of the first guide rail 1. A first empty basket platform 41 is provided on the side of the first working platform 31 facing away from the second working platform 32, and a first full basket platform 51 is provided between the first working platform 31 and the second working platform 32. A second empty basket platform 42 is provided between the second working platform 32 and the third working platform 33, and a second full basket platform 52 is provided on the side of the third working platform 33 facing away from the second working platform 32. An empty basket return line 6 is provided across the first guide rail 1 and the second guide rail 2, docked with the first empty basket platform 41. A full material feeding line is provided below the second guide rail 2, opposite to the first working platform 31. An empty basket conveying line 7 is provided across the first guide rail 1 and the second guide rail 2, docked with the second empty basket platform 42. A full basket conveying line 8 is provided across the first guide rail 1 and the second guide rail 2, docked with the first full basket platform 51 and the second full basket platform 52, respectively.
[0045] The working process of the flower basket transfer device includes:
[0046] Empty basket platform loading process: The empty basket is recirculated and transferred from the silicon wafer processing equipment by the empty basket reflow line 6. The empty basket is transferred to the loading position by the empty basket reflow line 6, and then the empty basket on the loading position is flipped to the first empty basket platform 41 by the first flip mechanism 13. The empty basket on the empty basket reflow line 6 is transferred to the empty basket conveying line 7 by the second manipulator 12, and the empty basket is transferred to the loading position by the empty basket conveying line 7, and then the empty basket on the loading position is flipped to the second empty basket platform 42 by the first flip mechanism 13.
[0047] Full basket platform discharging process: the full baskets on the first full basket platform 51 and the second full basket platform 52 are flipped to the corresponding receiving positions of the full basket conveyor line 8 by the second flipping mechanism 14, and the full baskets are transferred to the feeding position by the full basket conveyor line 8, and then the full baskets on the full basket conveyor line 8 are transferred to the full basket feeding line 9 by the second manipulator 12, and then transported to the cleaning machine through the full basket feeding line 9.
[0048] The process of moving the flower baskets between platforms: when the flower baskets on the first working platform 31 are full, the first manipulator 11 is used to simultaneously clamp the empty basket on the first empty basket platform 41 and the full basket on the first working platform 31, and move them toward one side of the second working platform 32, so that the empty basket moves to the first working platform 31, and the full basket moves to the first full basket platform 51.
[0049] When the flower basket on the second working platform 32 is full, the first robot 11 is used to simultaneously clamp the empty basket on the second empty basket platform 42 and the full basket on the second working platform 32, and move them toward one side of the first working platform 31, so that the empty basket moves to the second working platform 32, and the full basket moves to the first full basket platform 51.
[0050] When the flower basket on the third working platform 33 is full, the first manipulator 11 is used to simultaneously clamp the empty basket on the second empty basket platform 42 and the full basket on the third working platform 33, and move toward one side of the third working platform 33, so that the empty basket moves to the third working platform 33, and the full basket moves to the second full basket platform 52.
[0051] The present invention uses specific embodiments to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method and core idea of the present invention. At the same time, for those skilled in the art, according to the idea of the present invention, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as a limitation on the present invention.
Claims
1. A flower basket transport device, characterized in that: include: a first guide rail, at least three working platforms arranged along the length direction of the first guide rail below, an empty basket platform and a full basket platform respectively arranged on both sides of the working platform, and the number of the empty basket platforms and the number of the full basket platforms are both less than the number of the working platforms, and a first manipulator arranged on the first guide rail, the first manipulator is used to move the flower baskets between the platforms; a second guide rail, and at least one empty basket return line, an empty basket conveyor line, a full basket conveyor line and at least one full basket feeding line arranged below the second guide rail, each of the empty basket return lines being connected to an empty basket platform respectively, the empty basket conveyor line being connected to the remaining empty basket platforms, the full basket conveyor line being connected to the full basket platforms, the full basket feeding line being connected to a cleaning machine, and a second manipulator being arranged on the second guide rail, the second manipulator being used for moving flower baskets between the full basket conveyor line and the full basket feeding line and between the empty basket return line and the empty basket conveyor line.
2. The flower basket transport device according to claim 1, characterized in that: The distance between the adjacent empty basket platforms and the working platform is equal to the distance between the adjacent full basket platforms and the working platform; the first manipulator is provided with two clamping positions, and the two clamping positions can clamp the flower baskets on two adjacent platforms at the same time.
3. The flower basket transport device according to claim 1, characterized in that: The flower basket transfer device comprises three working platforms, and the working platforms are opposite to the inserting machine.
4. The flower basket transport device according to claim 3, characterized in that: The flower basket transfer device comprises an empty basket return line and a full basket feeding line.
5. The flower basket transport device according to claim 1 or 4, characterized in that: The full basket feeding line is located below the middle portion of the second guide rail.
6. The flower basket transport device according to claim 1, characterized in that: The empty basket return line and the empty basket conveyor line are provided with a first flipping mechanism, which is used to flip the flower baskets on the feeding position of the empty basket return line or the empty basket conveyor line from a flat state to a vertical state on the empty basket platform.
7. The flower basket transport device according to claim 6, characterized in that: The first flipping mechanism comprises a first cylinder, a rotating member and a mounting seat, the telescopic rod of the first cylinder is connected to the rotating member connected to the empty basket platform, and the rotating member is sleeved on the mounting seat.
8. The flower basket transfer device according to claim 1, characterized in that: A second flipping mechanism is provided at one end of the full basket conveyor line facing the full basket platform, and the second flipping mechanism is used to flip the flower basket in a vertical state on the full basket platform to a flat state on the receiving position of the full basket conveyor line.
9. The flower basket transport device according to claim 8, characterized in that: The full basket platform is provided with a clamping mechanism, and the clamping mechanism is used to clamp the flower basket carried by the full basket platform when the second turning mechanism turns over the flower basket.
10. The flower basket transfer device according to claim 8, characterized in that: The second flipping mechanism comprises a motor and a rotating shaft connected to the motor, and the full basket platform is sleeved on the rotating shaft.