Bubble removing device, concentration measuring device and semiconductor cleaning machine

Abstract

The utility model provides a bubble removing device, a concentration measuring device and a semiconductor cleaning machine, and the bubble removing device comprises a main pipeline, a concentration meter sampling port, a first liquid sensor, a second liquid sensor and an electric valve. The main pipeline comprises a lower inlet and an upper outlet, and the lower inlet is used for sampling liquid to enter the main pipeline. The concentration meter sampling port is formed in the main pipeline, faces the lower side and is used for enabling sampling liquid to enter the concentration meter. The first liquid sensor is arranged on the main pipeline and is higher than the concentration meter sampling port. The second liquid sensor is arranged on the main pipeline and higher than the first liquid sensor. The electric valve is mounted at an upper outlet of the main pipeline. The bubble removing device can remove the bubbles entering the measuring pipeline of the concentration meter, so that the measurement of the concentration meter is not influenced by the bubbles, the measurement accuracy of the concentration meter is improved, the whole control system can obtain correct concentration signals, and the production quality and performance of wafers are ensured.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a degassing device, a concentration measuring device and a semiconductor cleaning machine. Background Art

[0002] In the semiconductor manufacturing process, the cleaning machine is one of the key equipment, which is responsible for removing various pollutants generated on the surface of the wafer during the manufacturing process. In order to ensure the cleaning effect, modern semiconductor cleaning machines are usually equipped with a liquid concentration meter to monitor the concentration of chemical components in the cleaning solution in real time to ensure the consistency and effectiveness of the cleaning process.

[0003] However, the accuracy of the liquid concentration meter may be affected by many factors, one of which is the possible presence of bubbles in the pipeline. Bubbles can be generated by many reasons, such as liquid flow, pump operation or improper pipe connection. When bubbles enter the measuring part of the liquid concentration meter, they will interfere with the propagation of the measuring light or electromagnetic field, thereby affecting the sensor's accurate detection of the liquid concentration.

[0004] If the concentration meter reading is inaccurate, it may cause an erroneous concentration signal to be transmitted to the control system, which will not only trigger unnecessary equipment alarms, but may also cause improper handling of the wafer, resulting in the so-called "wafer impact". This impact may manifest as damage to the wafer surface, incomplete cleaning or excessive cleaning, ultimately affecting the quality of the wafer and the performance of the device.

[0005] Therefore, in the prior art, in order to ensure the accuracy of the liquid concentration meter, it is generally necessary to calibrate the equipment regularly, optimize the pipeline design to reduce the generation of bubbles, and monitor the operating status of the cleaning machine in real time to avoid false alarms and wafer damage caused by bubbles. Although these measures taken in the prior art can reduce bubbles and improve the detection accuracy of the concentration meter, they are relatively time-consuming and labor-intensive, have low reliability, and take a long time to troubleshoot, which may affect the production cycle. Utility Model Content

[0006] The purpose of the embodiments of the present application is to provide a debubble device, a concentration measuring device and a semiconductor cleaning machine, wherein the debubble device can remove bubbles entering the measuring pipeline of the concentration meter, thereby ensuring that the measurement of the concentration meter is not affected by bubbles, improving the measurement accuracy of the concentration meter, and facilitating the entire control system to obtain the correct concentration signal and execute corresponding and correct control instructions, thereby ensuring the quality and performance of wafer production.

[0007] In a first aspect, a debubbling device is provided, comprising a main pipe, a concentration meter sampling port, a first liquid sensor, a second liquid sensor and an electric valve.

[0008] The main pipeline includes a lower inlet and an upper outlet, wherein the lower inlet is used for the sample liquid to enter the main pipeline. The concentration meter sampling port is arranged on the main pipeline and faces downward, and is used for the sample liquid to enter the concentration meter. The first liquid sensor is arranged on the main pipeline and is higher than the concentration meter sampling port. The second liquid sensor is arranged on the main pipeline and is higher than the first liquid sensor. The electric valve is installed at the upper outlet of the main pipeline.

[0009] In an practicable solution, the main pipe of the degassing device is arranged vertically or inclined.

[0010] In an implementable solution, the angle between the main pipe of the degassing device and the horizontal plane is 10° to 90°.

[0011] In an implementable solution, the angle between the main pipe of the degassing device and the horizontal plane is 45° to 90°.

[0012] In an implementable solution, the first liquid sensor and the second liquid sensor of the degassing device are both capacitive sensors.

[0013] In an implementable solution, the degassing device includes a control device, which is connected to the first liquid sensor, the second liquid sensor and the electric valve signal.

[0014] In one practicable solution, the degassing device includes a first state and a second state;

[0015] In the first state, the liquid level of the sampled liquid rises from the lower inlet of the main pipeline to the upper outlet; if the first liquid sensor and the second liquid sensor both have no liquid induction, the electric valve remains open; if the first liquid sensor has liquid induction and the second liquid sensor has no liquid induction, the electric valve remains open; if the first liquid sensor and the second liquid sensor both have liquid induction, the electric valve remains closed;

[0016] In the second state, the liquid level of the sampled liquid drops from the upper outlet to the lower inlet of the main pipeline; if both the first liquid sensor and the second liquid sensor sense liquid, the electric valve remains closed; if the second liquid sensor does not sense liquid and the first liquid sensor senses liquid, the electric valve remains closed; if both the first liquid sensor and the second liquid sensor do not sense liquid, the electric valve remains open.

[0017] According to the second aspect of the present application, a concentration measuring device is also provided, comprising a concentration meter and the debubble device in the above technical solution. The inlet of the concentration meter is connected to the concentration meter sampling port of the debubble device.

[0018] In an implementable solution, the outlet of the concentration meter of the concentration measuring device merges with the outlet of the electric valve and then discharges.

[0019] According to the third aspect of the present application, a semiconductor cleaning machine is also provided, comprising a chemical solution circulation pipeline and the concentration measuring device in the aforementioned technical solution, wherein the lower inlet of the main pipeline of the debubble device is connected to the chemical solution circulation pipeline.

[0020] Compared with the prior art, the beneficial effects of this application include at least:

[0021] In summary, in the debubble device of the present application, with the help of the setting of the main line and the sampling port of the concentration meter, the bubbles in the sampled liquid and the liquid produce a gas-liquid separation effect at the sampling port of the concentration meter. At the same time, the liquid level height in the main line is detected by the first liquid sensor and the second liquid sensor, and the bubbles and air in the main line are discharged by the timely opening and closing of the electric valve to reduce the excessive accumulation of bubbles in the main line and prevent bubbles from entering the concentration meter from the sampling port of the concentration meter. Therefore, the debubble device of this embodiment realizes gas-liquid separation, removes bubbles entering the measurement pipeline of the concentration meter, thereby ensuring that the measurement of the concentration meter is not affected by bubbles, and basically avoids the false alarm of the concentration meter due to the detection of bubbles. Pharmaceutical concentration, thereby improving the measurement accuracy of the concentration meter, is beneficial for the entire control system to obtain the correct concentration signal, execute the corresponding and correct control instructions, and thus ensure the quality and performance of wafer production. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other related drawings can be obtained based on these drawings without paying creative work.

[0023] Figure 1 A schematic diagram of a degassing device according to an embodiment of the present application Figure 1 ;

[0024] Figure 2 It is a structural schematic diagram of a concentration measurement device according to an embodiment of the present application;

[0025] Figure 3 A graph showing changes in concentration values ​​measured by a concentration meter in the prior art;

[0026] Figure 4 A graph showing changes in concentration values ​​measured by a concentration meter after using the degassing device of an embodiment of the present application;

[0027] Figure 5A schematic diagram of a degassing device according to an embodiment of the present application Figure 2 .

[0028] In the figure: 10, main line; 11, lower inlet; 12, upper outlet; 20, concentration meter sampling port; 30, first liquid sensor; 40, second liquid sensor; 50, electric valve; 60, control device; 100, concentration meter. DETAILED DESCRIPTION

[0029] In order to make the purpose, technical solution and advantages of the embodiments of the present application clearer, the technical solution in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations.

[0030] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application for which protection is sought, but merely represents selected embodiments of the present application. Based on the embodiments in the present application, all other embodiments obtained by ordinary technicians in the field without creative work are within the scope of protection of the present application.

[0031] like Figure 1 As shown, this embodiment first provides a degassing device, including a main line 10, a concentration meter sampling port 20, a first liquid sensor 30, a second liquid sensor 40 and an electric valve 50.

[0032] The main line 10 includes a lower inlet 11 and an upper outlet 12, wherein the lower inlet 11 is used for the sample liquid to enter the main line 10. The concentration meter sampling port 20 is arranged on the main line 10 and faces downward, and is used for the sample liquid to enter the concentration meter 100. The first liquid sensor 30 is arranged on the main line 10 and is higher than the concentration meter sampling port 20. The second liquid sensor 40 is arranged on the main line 10 and is higher than the first liquid sensor 30, and a predetermined length is reserved between the first liquid sensor 30 and the second liquid sensor 40. The electric valve 50 is installed at the upper outlet 12 of the main line 10.

[0033] It should be noted that the bubbles and the sampling liquid are separated at the concentration meter sampling port 20, so the concentration meter sampling port 20 cannot be oriented upwards, it can be vertically downwards, or it can be tilted and tilted downwards, so that when the sampling liquid enters the concentration sampling port 20, the bubbles can float up smoothly under the buoyancy to achieve gas-liquid separation.

[0034] When the degassing device of this embodiment is used, Figure 2As shown, the sampling liquid of the main line 10 enters from the lower inlet 11, and the bubbles in the sampling liquid will rise along the main line 10, and at the position of the concentration meter sampling port 20, the bubbles will continue to rise, and part of the sampling liquid will be discharged into the concentration meter 100 through the downward concentration meter sampling port 20.

[0035] The degassing device includes a first state and a second state. In the first state, the main pipeline 10 is initially in an air state, and the sampled liquid enters the main pipeline 10, that is, the liquid level of the sampled liquid rises from the lower inlet 11 to the upper outlet 12 of the main pipeline 10. At this time, when the first liquid sensor 30 and the second liquid sensor 40 have no liquid sensing, it means that the main pipeline 10 above the first liquid sensor 30 is full of gas, and the electric valve 50 remains open to discharge the air. When the first liquid sensor 30 senses liquid and the second liquid sensor 40 has no liquid sensing, it means that the liquid level of the sampled liquid has risen to above the concentration meter sampling port 20, and the electric valve 50 remains open to continue to discharge the air. When the first liquid sensor 30 and the second liquid sensor 40 both sense liquid, it means that the main pipeline 10 below the second liquid sensor 40 is full of liquid, and the gas electric valve 50 can remain closed.

[0036] In the second state, as the sampled liquid continues to enter the main line 10, the bubbles in the sampled liquid continue to separate from the gas and liquid at the concentration meter sampling port 20, and the bubbles continue to gather in the main line 10 above the concentration meter sampling port 20. When enough bubbles gather in the upper part of the main line 10, the liquid level of the sampled liquid drops from the upper outlet 12 to the lower inlet 11 of the main line 10. When both the first liquid sensor 30 and the second liquid sensor 40 sense liquid, it means that the liquid level of the sampled liquid is higher than the second liquid sensor 40, and the bubbles basically will not enter the concentration meter sampling port 20, and the electric valve 50 can still remain closed. When the second liquid sensor 40 has no liquid sensing and the first liquid sensor 30 has liquid sensing, it means that the liquid level of the sampled liquid is higher than the first liquid sensor 30, and the bubbles basically will not enter the concentration meter sampling port 20, and the electric valve 50 can still remain closed. When the first liquid sensor 30 and the second liquid sensor 40 both have no liquid sensing, it means that the bubbles in the sampled liquid are gathered in large quantities at the upper part of the main line 10. If the sampled liquid continues to be introduced, it is likely that the liquid level of the sampled liquid will be lower than the concentration meter sampling port 20, causing bubbles to enter the concentration meter 100. At this time, the electric valve 50 opens in time to discharge the gas formed by the bubble gathering in the main line 10 to prevent the bubbles from entering the concentration meter.

[0037] In summary, in the debubbling device of the present embodiment, by means of the setting of the main line 10 and the sampling port 20 of the concentration meter, the bubbles in the sampled liquid and the liquid produce a gas-liquid separation effect at the sampling port 20 of the concentration meter. At the same time, the liquid level in the main line 10 is detected by the first liquid sensor 30 and the second liquid sensor 40, and the bubbles and air in the main line 10 are discharged by means of the timely opening and closing of the electric valve 50, so as to reduce the excessive accumulation of bubbles in the main line 10 and prevent bubbles from entering the concentration meter 100 from the sampling port 20 of the concentration meter. Therefore, the debubbling device of the present embodiment realizes gas-liquid separation, removes bubbles entering the measurement pipeline of the concentration meter, thereby ensuring that the measurement of the concentration meter is not affected by bubbles, and basically avoids the false alarm of the pharmaceutical concentration generated by the concentration meter due to the monitoring of bubbles, thereby improving the measurement accuracy of the concentration meter, which is beneficial for the entire control system to obtain the correct concentration signal and execute the corresponding and correct control instructions, thereby ensuring the quality and performance of wafer production.

[0038] like Figure 3 It can be seen that when the degassing device of this embodiment is not used, the presence of bubbles in the sampled liquid causes the concentration value of the liquid measured by the concentration meter to be unstable and fluctuate over a wide range. Figure 4 As shown, after using the debubbling device of this embodiment, all bubbles have been basically removed, and the concentration value of the liquid medicine measured by the concentration meter is relatively stable, without large-scale sudden changes, and the accuracy is improved.

[0039] In this embodiment, if Figure 1 As shown, the main pipe 10 of the degassing device is arranged vertically or inclined.

[0040] In this embodiment, if Figure 1 As shown, the main pipe 10 of the degassing device can have an angle of 10° to 90° with the horizontal plane.

[0041] In this embodiment, if Figure 1 As shown, the angle between the main pipe 10 and the horizontal plane can be 45° to 90°.

[0042] Specifically, for example, the angle between the main pipe 10 and the horizontal plane can be 15°, 30°, 45°, 60°, 80°, 90°, etc.

[0043] In a preferred embodiment, the angle between the main pipe 10 and the horizontal plane is preferably greater than or equal to 45°, so that the bubbles can float up faster and the sample liquid and the bubbles can complete the gas-liquid separation process better.

[0044] In this embodiment, if Figure 1 As shown, both the first liquid sensor 30 and the second liquid sensor 40 can be capacitive sensors.

[0045] In this embodiment, if Figure 5 As shown, the degassing device includes a control device 60 , which is signal-connected to the first liquid sensor 30 , the second liquid sensor 40 and the electric valve 50 .

[0046] In the first state, when the liquid level of the sampled liquid rises from the lower inlet 11 of the main pipeline 10 to the upper outlet 12, when the first liquid sensor 30 and the second liquid sensor 40 have no liquid sensing, that is, the first liquid sensor 30 and the second liquid sensor 40 do not send a liquid sensing signal to the control device 60, at this time, the control device 60 controls the electric valve 50 to remain open to exhaust air. When the first liquid sensor 30 sends a liquid sensing signal to the control device 60, and the second liquid sensor 40 does not send a liquid sensing signal to the control device 60, the control device 60 controls the electric valve 50 to remain open to exhaust air. When the first liquid sensor 30 and the second liquid sensor 40 both sense liquid and send liquid sensing signals to the control device 60, the control device 60 controls the electric valve 50 to remain closed.

[0047] In the second state, when the liquid level of the sampled liquid drops from the upper outlet 12 to the lower inlet 11 of the main pipeline 10, if both the first liquid sensor 30 and the second liquid sensor 40 sense liquid and send liquid sensing signals to the control device 60, the control device 60 controls the electric valve 50 to remain closed. If the second liquid sensor 40 does not send a liquid sensing signal to the control device 60, and the first liquid sensor 30 sends a liquid sensing signal to the control device 60, the control device 60 controls the electric valve 50 to remain closed. If both the first liquid sensor 30 and the second liquid sensor 40 do not send a liquid sensing signal to the control device 60, the control device 60 controls the electric valve 50 to remain open, and discharges the gas gathered by bubbles in the upper part of the main pipeline 10 in time.

[0048] like Figure 2 As shown, this embodiment also provides a concentration measurement device, including a concentration meter 100 and the debubbling device in the above scheme. The inlet of the concentration meter 100 is connected to the concentration meter sampling port 20 of the debubbling device.

[0049] In this embodiment, if Figure 2 As shown, the outlet of the concentration meter 100 merges with the outlet of the electric valve 50 and then discharges, and generally merges to discharge all the way to the outer tank of the process tank.

[0050] This embodiment also provides a semiconductor cleaning machine, including a liquid medicine circulation pipeline and the concentration measuring device in the above-mentioned scheme, and the lower inlet 11 of the main pipeline 10 of the degassing device is connected to the liquid medicine circulation pipeline.

[0051] The above description is only the preferred embodiment of the present application and is not intended to limit the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A degassing device, characterized in that: include: A main pipeline (10) comprises a lower inlet (11) and an upper outlet (12), wherein the lower inlet (11) is used for the sample liquid to enter the main pipeline (10); A concentration meter sampling port (20), arranged on the main pipe (10) and facing downward, for allowing the sampled liquid to enter the concentration meter (100); A first liquid sensor (30) is arranged on the main pipe (10) and is higher than the concentration meter sampling port (20); A second liquid sensor (40) is disposed on the main pipe (10) and is higher than the first liquid sensor (30); An electric valve (50) is installed at the upper outlet (12) of the main pipeline (10).

2. The degassing device according to claim 1, characterized in that: The main pipe (10) is arranged vertically or inclined.

3. The degassing device according to claim 2, characterized in that: The angle between the main pipe (10) and the horizontal plane is 10° to 90°.

4. The degassing device according to claim 2, characterized in that: The angle between the main pipe (10) and the horizontal plane is 45° to 90°.

5. The degassing device according to claim 1, characterized in that: The first liquid sensor (30) and the second liquid sensor (40) are both capacitive sensors.

6. The degassing device according to any one of claims 1 to 4, characterized in that: The degassing device comprises a control device (60), and the control device (60) is signal-connected to the first liquid sensor (30), the second liquid sensor (40) and the electric valve (50).

7. The degassing device according to claim 6, characterized in that: The degassing device includes a first state and a second state; In the first state, the liquid level of the sampled liquid rises from the lower inlet (11) of the main pipeline (10) to the upper outlet (12); if the first liquid sensor (30) and the second liquid sensor (40) both have no liquid sensing, the electric valve (50) remains open; if the first liquid sensor (30) senses liquid and the second liquid sensor (40) does not sense liquid, the electric valve (50) remains open; if the first liquid sensor (30) and the second liquid sensor (40) both sense liquid, the electric valve (50) remains closed; In the second state, the liquid level of the sampled liquid drops from the upper outlet (12) of the main pipeline (10) to the lower inlet (11); if both the first liquid sensor (30) and the second liquid sensor (40) sense liquid, the electric valve (50) remains closed; if the second liquid sensor (40) does not sense liquid and the first liquid sensor (30) senses liquid, the electric valve (50) remains closed; if both the first liquid sensor (30) and the second liquid sensor (40) do not sense liquid, the electric valve (50) remains open.

8. A concentration measuring device, characterized in that: It comprises a concentration meter (100) and a degassing device as claimed in any one of claims 1 to 7; The inlet of the concentration meter (100) is connected to the concentration meter sampling port (20) of the degassing device.

9. The concentration measuring device according to claim 8, characterized in that: The outlet of the concentration meter (100) merges with the outlet of the electric valve (50) and then discharges.

10. A semiconductor cleaning machine, characterized in that: It comprises a liquid medicine circulation pipeline and a concentration measuring device as claimed in claim 9, wherein a lower inlet (11) of a main pipeline (10) of a degassing device is connected to the liquid medicine circulation pipeline.

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