Multifunctional purification filter

Abstract

The utility model provides a multifunctional purification filter. The multifunctional purification filter comprises a filter container and a purification assembly positioned in the filter container, the purification assembly comprises a base, a filter medium positioned in the base, a supporting piece for supporting the filter medium, a filler pipe of which the bottom end is connected into the base, and filler positioned in the filler pipe; the bottom end of the filler pipe is pressed on the filter medium, the base is provided with a through hole, and the top end of the filler pipe is connected to the filter container. According to the multifunctional purification filter provided by the utility model, the purification component is arranged in the filter container, so that the cleaning liquid can be purified, the cleaning liquid flows through the filler and is in full contact with the filler, the reaction and the adsorption are realized, the purification efficiency is high, the filler can be prevented from being mixed into the purified cleaning liquid, and the purity of the cleaning liquid is ensured.

Description

Technical Field

[0001] The utility model relates to the technical field of filters, in particular to a multifunctional purification filter. Background Art

[0002] Due to the reduction of the critical size of semiconductors, the surface of semiconductors such as silicon wafers must be clean before undergoing the process. Therefore, before the process, the contaminants on the surface of the silicon wafer need to be removed by cleaning. The contaminants on the surface of the silicon wafer include: particles, organic matter, inorganic matter and natural oxide layer. Particle pollution includes silicon slag, dust, bacteria, microorganisms, organic colloid fibers, etc., which can cause various defects; organic pollution includes photoresist, organic solvent residues, synthetic wax and grease or fibers brought by human contact with devices, tools, and utensils; inorganic pollution includes heavy metals such as gold, copper, iron, chromium, etc., which seriously affect the minority carrier lifetime and surface conductivity, and alkali metals such as sodium can cause serious leakage; each process step is a potential source of pollution for devices on the silicon wafer, so the cleaning process of the silicon wafer runs through the entire process of chip production. The purity of the cleaning fluid itself is particularly important, and there are clear limits on the impurity content of the cleaning fluid. For example, some semiconductor processes require the metal ion content of the cleaning fluid to be 0.5ppb. These indicators are far beyond the cleaning concept of traditional industries. Therefore, how to purify the cleaning fluid is crucial. The multifunctional purification filter provided by the utility model can effectively solve the purification problem of the cleaning fluid. Utility Model Content

[0003] The utility model aims to disclose a multifunctional purification filter. By installing a purification component in a filter container, a cleaning liquid can be purified so that the cleaning liquid flows through a filler and fully contacts, reacts and adsorbs the filler. The purification efficiency is high and the filler can be prevented from mixing into the purified cleaning liquid, thereby ensuring the purity of the cleaning liquid.

[0004] To achieve the above-mentioned purpose, the utility model provides a multifunctional purification filter, including a filter container, a purification component located in the filter container; the purification component includes a base, a filter medium located in the base and a support member supporting the filter medium, a filling tube connected to the base at the bottom end, and a filler located in the filling tube; the bottom end of the filling tube is pressed on the filter medium, the base is provided with a through hole, and the top end of the filling tube is connected to the filter container.

[0005] In some embodiments, the bottom end of the filling tube is threaded into the base.

[0006] In some embodiments, a first sealing ring is provided between the bottom end of the filling tube and the filter medium.

[0007] In some embodiments, a first annular boss and a plurality of second annular bosses are provided at the top end of the filling tube, a groove is formed between the first annular boss and the second annular boss, and a second sealing ring is provided between adjacent second annular bosses.

[0008] In some embodiments, a card plate is provided in the filter container, and the card plate is held in a card slot.

[0009] In some embodiments, the filtration container includes a cylinder, an end cover, a nut, and a third sealing ring; the cylinder and the end cover are connected by the nut, and the third sealing ring is located at the junction of the cylinder and the end cover.

[0010] In some embodiments, the end cover is provided with an inlet, and the cylinder is provided with an outlet.

[0011] In some embodiments, the support member is a mesh support member.

[0012] In some embodiments, the filler is a resin or porous particles or chemically reactive particles.

[0013] In some embodiments, the filler tube has an aspect ratio greater than 1.

[0014] Compared with the prior art, the beneficial effects of the utility model are as follows: the multifunctional purification filter provided by the utility model can purify the cleaning liquid by installing a purification component in the filter container, so that the cleaning liquid flows through the filler and fully contacts, reacts and adsorbs with the filler, with high purification efficiency, and can prevent the filler from mixing into the purified cleaning liquid, thereby ensuring the purity of the cleaning liquid. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 This is a schematic diagram of the structure of a multifunctional purification filter shown in the utility model;

[0016] Figure 2 for Figure 1 Schematic diagram of some structures in ;

[0017] Figure 3 for Figure 1 Schematic diagram of the structure of the purification assembly shown in;

[0018] Figure 4 for Figure 1 Schematic diagram of the structure of the filtration container shown in FIG. DETAILED DESCRIPTION

[0019] The present invention is described in detail below in conjunction with the various embodiments shown in the accompanying drawings, but it should be noted that these embodiments are not limitations of the present invention, and any equivalent transformations or substitutions in functions, methods, or structures made by ordinary technicians in the field based on these embodiments are all within the scope of protection of the present invention.

[0020] like Figure 1-4 The multifunctional purification filter shown comprises a filter container 7 and a purification component 8 installed in the filter container 7. The filter container 7 is made of ultrapure resin.

[0021] The filter container 7 includes a cylinder 15, an end cover 11, a nut 14, and a third sealing ring 13. The cylinder 15 and the end cover 11 are connected by the nut 14. After the nut 14 is loosened, the cylinder 15 and the end cover 11 can be separated, so that the waste filler 10 can be taken out and refilled with new filler 10 after the purification effect of the filler 10 fails. The third sealing ring 13 is located at the abutment between the cylinder 15 and the end cover 11, and is used to isolate the cleaning liquid from the environment.

[0022] The end cover 11 is provided with an inlet 9, and the cylinder 15 is provided with an outlet 10. The top-in and bottom-out method is adopted to reduce excessive residual solvent after purification.

[0023] The purification component 8 includes a base 2, a filter medium 6 located in the base 2 and a support 4 supporting the filter medium 6, a filler tube 1 connected at the bottom end in the base 2, and a filler 10 located in the filler tube 1. The base 2 is provided with a through hole 20 for easy circulation of the cleaning liquid.

[0024] The bottom end of the stuffing tube 1 is screwed into the base 2, and the bottom end of the stuffing tube 1 is pressed on the filter medium 6. The filter medium 6 is used to prevent the stuffing particles from entering the downstream of the purified cleaning liquid, thereby ensuring the purity of the cleaning liquid. The support member 4 is a mesh support member, which, on the one hand, supports the filter medium 6 to prevent the filter medium 6 from being damaged under pressure, and on the other hand, constructs multiple fluid channels to prevent channel blockage.

[0025] The filler 10 is a resin or porous particles or chemical reaction particles, which can be selected according to the purification needs, and the cleaning liquid is physically and chemically adsorbed, replaced, purified, etc. to achieve the purpose of cleaning liquid purification. The length-to-diameter ratio of the filler tube 1 is greater than 1, thereby limiting the cleaning liquid from flowing through the filler 10 and fully contacting, reacting, and adsorbing the filler 10 to improve the purification efficiency.

[0026] A first sealing ring 5 is provided between the bottom end of the filling tube 1 and the filter medium 6. The first sealing ring 5 is used to separate the cleaning liquid before and after purification.

[0027] The top of the filling tube 1 is provided with a first annular boss 11 and three second annular bosses 12, a groove 13 is formed between the first annular boss 11 and the second annular boss 12 closest to it, and a second sealing ring 3 is provided between adjacent second annular bosses 12, and the second sealing ring 3 is closely attached to the inner wall of the cleaning liquid inlet channel. The second sealing ring 3 is used to separate the cleaning liquid before and after purification.

[0028] The top end of the filling tube 1 is connected to the filter container 7. Specifically, a clamping plate 12 is provided in the filter container 7, and the clamping plate 12 is clamped in the clamping groove 13. The structure of the clamping plate 12 and the connection method between the clamping plate 12 and the filter container 7 are described in detail in the patent with the authorization announcement number CN217794959U, which will not be repeated here.

[0029] The working principle of the multifunctional purification filter is as follows: the cleaning liquid before purification enters the filling tube 1 from the inlet 9, passes through the filling 10, and then passes through the filter medium 6, the support 4, and the through hole 20 in sequence to enter the cylinder 15. Finally, the purified cleaning liquid is discharged from the outlet 10.

[0030] The series of detailed descriptions listed above are only specific descriptions of feasible implementation methods of the utility model. They are not intended to limit the protection scope of the utility model. Any equivalent implementation methods or changes that do not deviate from the technical spirit of the utility model should be included in the protection scope of the utility model.

[0031] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A multifunctional purification filter, characterized in that: It includes a filter container and a purification component located in the filter container; the purification component includes a base, a filter medium located in the base and a support member supporting the filter medium, a filler tube connected to the base at the bottom end, and a filler located in the filler tube; the bottom end of the filler tube is pressed on the filter medium, the base is provided with a through hole, and the top end of the filler tube is connected to the filter container.

2. A multifunctional purification filter according to claim 1, characterized in that: The bottom end of the filling pipe is screwed into the base.

3. A multifunctional purification filter according to claim 2, characterized in that: A first sealing ring is arranged between the bottom end of the filling tube and the filter medium.

4. A multifunctional purification filter according to claim 1, characterized in that: The top end of the filler tube is provided with a first annular boss and a plurality of second annular bosses, a groove is formed between the first annular boss and the second annular boss, and a second sealing ring is provided between adjacent second annular bosses.

5. A multifunctional purification filter according to claim 4, characterized in that: A clamping plate is arranged in the filtering container, and the clamping plate is clamped in the clamping slot.

6. A multifunctional purification filter according to claim 1, characterized in that: The filtering container comprises a cylinder, an end cover, a nut and a third sealing ring; the cylinder and the end cover are connected via the nut, and the third sealing ring is located at the abutment between the cylinder and the end cover.

7. A multifunctional purification filter according to claim 6, characterized in that: The end cover is provided with an inlet, and the cylinder is provided with an outlet.

8. The multifunctional purification filter according to claim 1, characterized in that: The support member is a mesh support member.

9. The multifunctional purification filter according to claim 1, characterized in that: The filler is resin or porous particles or chemical reaction particles.

10. The multifunctional purification filter according to claim 1, characterized in that: The length-to-diameter ratio of the filling tube is greater than 1.

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