Ultrasonic vibration device for assisting laser processing and laser processing device

Abstract

The utility model provides an ultrasonic vibration device for assisting laser processing, which belongs to the technical field of laser processing and manufacturing and comprises a focusing part, an ultrasonic vibration generator and a vibration mode conversion mechanism. The focusing piece is arranged below a laser opening of the laser emitting device and located above the workpiece. A fixed connecting seat is arranged on the periphery of the focusing piece; and the vibration generating end of the ultrasonic vibration generator is connected with the fixed connecting seat through the vibration mode conversion mechanism. In the prior art, when a light spot moves according to a preset processing track in a traditional laser processing technology, laser processing is carried out by utilizing a heat effect mechanism generated by energy accumulation of laser, and because the energy density is large, local energy accumulation is inevitably generated, and the processing efficiency is improved. Microcosmic ablation pits are formed in the machined surface, and the machining quality is seriously affected.

Description

Technical Field

[0001] The utility model relates to the technical field of laser processing and manufacturing, and more specifically, to an ultrasonic vibration device for assisting laser processing. Background Art

[0002] Laser products are mainly used in industrial processing, occupying more than 40% of the market space. In particular, the unique advantages of picosecond lasers and femtosecond lasers in application areas such as microstructure and microhole processing have attracted widespread attention in the processing and manufacturing industry.

[0003] However, in traditional laser processing technology, the light spot moves according to the preset processing trajectory. Laser processing uses the thermal effect mechanism generated by the energy accumulation of the laser for processing. Due to its high energy density, local energy accumulation is inevitable, resulting in microscopic ablation pits on the processing surface, which seriously affects the processing quality. Therefore, the industry is in urgent need of new processes and methods to solve the above problems.

[0004] The existing patent "An Ultrasonic Water-Assisted Laser Grooving System and Method" (CN 117620436 A) discloses an auxiliary laser groove engraving system and method. The system uses the superposition of the incident wave and the reflected wave generated by the ultrasonic transducer and the reflective disk to form a standing wave acoustic field, so that the plasma and molten spatter generated during the laser processing process are gathered at the fixed wave nodes of the standing wave acoustic field, and then sucked away by negative pressure, avoiding the molten spatter generated by the processing from falling back to the processing area, resulting in a continuous decrease in laser propagation energy and a deterioration in processing quality and efficiency. The method described in the patent only solves the problem of spatter deposition, and cannot solve the problem of uneven energy distribution of the laser focus spot.

[0005] The existing patent "A laser and ultrasonic grinding composite processing tool handle and processing method" (CN 114932410B) discloses a laser and ultrasonic grinding composite processing tool handle structure, including a tool handle body, a window plate, a transducer, a horn, a focusing lens, a laser processing head, a tool clamping device and a processing grinding wheel. The structure described in the patent only uses the addition of a laser device on the tool handle to achieve the effect of softening the material by the laser thermal effect, and simultaneously performs ultrasonic assisted grinding to achieve the purpose of improving processing efficiency and reducing tool wear. The patent also cannot solve the problem of uneven energy distribution of the laser focus spot. Utility Model Content

[0006] In view of the above problems, the purpose of the utility model is to provide an ultrasonic vibration device for assisting laser processing, so as to solve the problem in the prior art that in the traditional laser processing technology, the light spot moves according to a preset processing trajectory. Laser processing is a process that uses the thermal effect mechanism generated by the energy accumulation of the laser for processing. Due to its high energy density, local energy accumulation will inevitably occur, resulting in microscopic ablation pits on the processing surface, which seriously affects the processing quality.

[0007] The utility model provides an ultrasonic vibration device for assisting laser processing, comprising a focusing piece, an ultrasonic vibration generator and a vibration type conversion mechanism; wherein the focusing piece is arranged below the laser port of a laser emitting device and above a workpiece; a fixed connection seat is arranged on the outer periphery of the focusing piece; and the vibration emitting end of the ultrasonic vibration generator is connected to the fixed connection seat through the vibration type conversion mechanism.

[0008] In addition, a preferred solution is that the focusing element is a focusing lens.

[0009] In addition, a preferred solution is that the ultrasonic vibration generator is an ultrasonic transducer.

[0010] In addition, a preferred solution is that the vibration mode conversion mechanism is a longitudinal torsional amplitude transformer; one end of the longitudinal torsional amplitude transformer is connected to the ultrasonic transducer, and the other end is connected to the fixed connection seat.

[0011] In addition, a preferred solution is that the vibration mode conversion mechanism is a longitudinal bending amplitude rod; one end of the longitudinal bending amplitude rod is connected to the ultrasonic transducer, and the other end is connected to the fixed connection seat.

[0012] In addition, a preferred solution is that the focusing component includes at least two sub-focusing lenses arranged parallel to each other up and down; the vibration type conversion mechanism includes a vibration amplitude variation mechanism fixedly mounted on a fixed connecting seat of each of the sub-focusing lenses; each of the vibration amplitude variation mechanisms is connected to the ultrasonic vibration generator; and the vibration type conversion mechanism includes at least two vibration amplitude variation mechanisms that vibrate along different directions.

[0013] In addition, a preferred solution is that the focusing lens includes a first sub-focusing lens and a second sub-focusing lens arranged in parallel and opposite to each other in an upper and lower direction; the vibration type conversion mechanism includes a first vibration amplitude variation mechanism fixedly mounted on a fixed connecting seat of the first sub-focusing lens and a second vibration amplitude variation mechanism fixedly mounted on a fixed connecting seat of the second sub-focusing lens; the first vibration amplitude variation mechanism is connected to a first ultrasonic vibration generator; the second vibration amplitude variation mechanism is connected to a second ultrasonic vibration generator; the first vibration amplitude variation mechanism and the second vibration amplitude variation mechanism are vibration amplitude variation mechanisms that vibrate in different directions.

[0014] In addition, a preferred solution is that the first vibration amplitude variation mechanism is a bending amplitude variation rod; and the second vibration amplitude variation mechanism is a longitudinal torsional amplitude variation rod.

[0015] In addition, a preferred solution is that the vibration mode conversion mechanism includes a composite vibration plate; a through hole is provided in the middle of the composite vibration plate; the fixed connection seat of the focusing lens is embedded in the through hole; and at least three ultrasonic vibration generators with different frequencies and different amplitudes located at different action points are fixedly provided at the bottom of the composite vibration plate.

[0016] The utility model provides a laser processing device, comprising a laser emitting device and also comprising the above-mentioned ultrasonic vibration device for assisting laser processing.

[0017] From the above technical scheme, it can be known that the ultrasonic vibration device for auxiliary laser processing provided by the utility model, through the structure and position design of the focusing part, ultrasonic vibration generator and vibration type conversion mechanism, converts the electrical signal into an acoustic signal output through the ultrasonic vibration generator to generate the energy of ultrasonic vibration, and converts the longitudinal vibration output by the ultrasonic vibration generator into a 3D composite vibration through the vibration type conversion mechanism, and uses the 3D composite vibration to excite the focusing part to perform 3D composite vibration, so that the light spot generated by the focusing part moves along the preset processing trajectory while also performing high-frequency 3D motion, effectively dispersing the energy distribution in the processing area, making the energy distribution more uniform, avoiding local ablation damage, and the high-frequency curve motion of the light spot reduces the energy density of the traditional laser processing focus point, thereby improving the surface quality and processing efficiency of the laser processing. The utility model can not only be applied to laser processing, such as drilling, cutting, shot peening and other material removal fields, but also can be applied to laser welding, additive manufacturing and other related fields, playing the role of homogenizing the laser focusing energy, and can effectively improve the surface quality and efficiency of the processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] By referring to the following description in conjunction with the accompanying drawings, and with a more comprehensive understanding of the present invention, other purposes and results of the present invention will become more clear and easy to understand. In the accompanying drawings:

[0019] Figure 1 It is a schematic diagram of the principle of an ultrasonic vibration device for assisting laser processing according to an embodiment of the utility model;

[0020] Figure 2 It is a structural schematic diagram of an ultrasonic vibration device for assisting laser processing according to Example 1 of the utility model;

[0021] Figure 3 It is a structural schematic diagram of an ultrasonic vibration device for assisting laser processing according to Example 2 of the utility model;

[0022] Figure 4It is a schematic structural diagram of an ultrasonic vibration device for assisting laser processing according to Example 3 of the utility model;

[0023] Figure 5 It is a schematic structural diagram of an ultrasonic vibration device for assisting laser processing according to Embodiment 4 of the utility model;

[0024] Figure 6 The present invention is a flow chart of a method for performing auxiliary laser processing using the present invention.

[0025] In the accompanying drawings, 1-focusing member, 11-first sub-focusing lens, 12-second sub-focusing lens, 2-ultrasonic vibration generator, 21-first ultrasonic vibration generator, 22-first ultrasonic vibration generator, 3-mode conversion mechanism, 31-longitudinal torsion amplitude transformer, 32-longitudinal bending amplitude transformer, 331-first vibration amplitude transformer mechanism, 332-second vibration amplitude transformer mechanism, 34-composite vibration plate, 4-laser emitting device, 5-workpiece, 6-fixed connecting seat.

[0026] The same reference numerals throughout the drawings indicate similar or corresponding features or functions. DETAILED DESCRIPTION

[0027] In the following description, for the purpose of explanation, numerous specific details are set forth in order to provide a thorough understanding of one or more embodiments. However, it is apparent that these embodiments may also be implemented without these specific details.

[0028] In view of the above-mentioned prior art, in the traditional laser processing technology, the light spot moves according to the preset processing trajectory. Laser processing uses the thermal effect mechanism generated by the energy accumulation of the laser for processing. Due to its high energy density, local energy accumulation will inevitably occur, resulting in microscopic ablation pits on the processing surface, which seriously affects the processing quality. Therefore, an ultrasonic vibration device to assist laser processing is proposed.

[0029] The specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.

[0030] In order to illustrate the ultrasonic vibration device for assisting laser processing provided by the utility model, Figure 1 The principle of the ultrasonic vibration device for assisting laser processing according to an embodiment of the utility model is shown; Figure 2 The structure of the ultrasonic vibration device for assisting laser processing according to Embodiment 1 of the utility model is shown; Figure 3 The structure of the ultrasonic vibration device for assisting laser processing according to the second embodiment of the utility model is shown; Figure 4 The structure of the ultrasonic vibration device for assisting laser processing according to the third embodiment of the utility model is shown; Figure 5The structure of the ultrasonic vibration device for assisting laser processing according to Embodiment 4 of the utility model is shown; Figure 6 A flow chart of a method for auxiliary laser processing using the utility model is shown.

[0031] like Figures 1 to 6 As shown together, the ultrasonic vibration device for assisting laser processing provided by the utility model comprises a focusing member 1, an ultrasonic vibration generator 2 and a vibration type conversion mechanism 3; wherein,

[0032] The focusing member 1 is arranged below the laser port of the laser emitting device 4 and is located above the workpiece 5; the vibration emitting end of the ultrasonic vibration generator 2 is connected to the focusing member through the vibration mode conversion mechanism 3.

[0033] Among them, a fixed connection seat 6 is provided on the outer periphery of the focusing member 1; the vibration emitting end of the ultrasonic vibration generator 2 is connected to the fixed connection seat through the vibration mode conversion mechanism 3. The fixed connection seat 6 facilitates the connection between the focusing member 1 and the curve conversion mechanism 3, and has a protective effect on the focusing member. The fixed connection seat 6 is preferably a shell structure with upper and lower openings, and the focusing member 1 is embedded in the shell structure.

[0034] The vibration mode conversion mechanism 3 and the focusing member 1, and the vibration mode conversion mechanism 3 and the ultrasonic vibration generator 2 are preferably, but not limited to, detachably fixedly connected, so that the disassembly and assembly between the three are more convenient, and parts replacement and maintenance are convenient. For example, threaded connection or snap connection is used. Of course, non-detachable connection such as welding can also be used, and this is not particularly limited in the present invention.

[0035] The laser emitting device 4 is preferably but not limited to a laser, which is mainly used to generate a laser energy source for processing.

[0036] Through the structural and positional design of the focusing member 1, the ultrasonic vibration generator 2 and the vibration type conversion mechanism 3, the ultrasonic vibration generator 2 converts the electrical signal into an acoustic signal output to generate the energy of ultrasonic vibration, and the vibration type conversion mechanism 3 converts the longitudinal vibration output by the ultrasonic vibration generator 2 into a 3D composite vibration, and the 3D composite vibration is used to excite the focusing member 1 to perform a 3D composite vibration, so that the light spot generated by the focusing member 1 moves along the preset processing trajectory while also performing high-frequency 3D motion, effectively dispersing the energy distribution in the processing area, making the energy distribution more uniform, avoiding local ablation damage, and the high-frequency curve motion of the light spot reduces the energy density of the traditional laser processing focus point, thereby improving the surface quality and processing efficiency of the laser processing. The utility model can not only be applied to laser processing, such as drilling, cutting, shot peening and other material removal fields, but also can be applied to laser welding, additive manufacturing and other related fields, playing a role in homogenizing the laser focusing energy, and can effectively improve the surface quality and efficiency of the processing.

[0037] As a preferred solution of the present invention, the focusing element 1 is a focusing lens. The focusing element 1 is preferably, but not limited to, a focusing lens, and may also be replaced by other elements with a focusing function, which is not particularly limited in the present invention.

[0038] As a preferred solution of the present invention, the ultrasonic vibration generator 2 is an ultrasonic transducer. The ultrasonic vibration generator 2 is preferably, but not limited to, an ultrasonic transducer, which converts electrical signals into acoustic signals for output, generating ultrasonic vibration energy.

[0039] As a preferred solution of the utility model, the vibration mode conversion mechanism 3 is a longitudinal torsion horn 31; one end of the longitudinal torsion horn 31 is connected to the ultrasonic transducer, and the other end is connected to the focusing lens. Specifically, the other end of the longitudinal torsion horn 31 is connected to the fixed connection seat 6 on the periphery of the focusing lens.

[0040] In the first embodiment of the present invention, the focusing member 1 includes a focusing lens, the ultrasonic vibration generator 2 is an ultrasonic transducer, and the vibration type conversion mechanism 3 is a longitudinal torsion horn 31; one end of the longitudinal torsion horn 31 is connected to the ultrasonic transducer, and the other end is connected to the focusing lens. Figure 2 As shown, the longitudinal vibration amplitude of the ultrasonic transducer is amplified by the longitudinal torsion amplitude transformer 31 and converted into a composite vibration of axial longitudinal vibration and torsion vibration along the axis, causing the focused light spot to perform 3D curve motion.

[0041] As a preferred solution of the present invention, in the second embodiment of the present invention, the focusing member 1 includes a focusing lens, the ultrasonic vibration generator 2 is an ultrasonic transducer, and the vibration type conversion mechanism 3 is a longitudinal bending horn 32; one end of the longitudinal bending horn 32 is connected to the ultrasonic transducer, and the other end is connected to the focusing lens. Specifically, the other end of the longitudinal bending horn 32 is connected to the fixed connection seat 6. Figure 3 As shown, the longitudinal vibration amplitude of the ultrasonic transducer is amplified by the longitudinal bending amplitude transformer 32 and converted into a composite vibration of axial longitudinal vibration and bending along an arc, causing the focused light spot to perform 3D curved motion.

[0042] As a preferred solution of the utility model, the focusing member 1 includes at least two sub-focusing lenses arranged parallel to each other up and down; the vibration type conversion mechanism 3 includes a vibration amplitude change mechanism fixed on the fixed connection seat 6 of each sub-focusing lens; each vibration amplitude change mechanism is connected to the ultrasonic vibration generator 2; the vibration type conversion mechanism 3 includes at least two vibration amplitude change mechanisms that vibrate along different directions. Different vibration combinations can be used to achieve the curved motion of the lens focus. Among them, the number of sub-focusing lenses can be determined according to actual conditions, and the utility model does not make any special restrictions on this.

[0043] As a preferred solution of the utility model, in the embodiment 3 of the utility model, the focusing lens includes a first sub-focusing lens 11 and a second sub-focusing lens 12 arranged parallel to each other up and down; the vibration mode conversion mechanism 3 includes a first vibration amplitude change mechanism 331 fixed on the fixed connection seat 6 of the first sub-focusing lens 11 and a second vibration amplitude change mechanism 332 fixed on the fixed connection seat 6 of the second sub-focusing lens 12; the first vibration amplitude change mechanism 331 is connected to the first ultrasonic vibration generator 21; the second vibration amplitude change mechanism 332 is connected to the second ultrasonic vibration generator 22; the first vibration amplitude change mechanism 331 and the second vibration amplitude change mechanism 332 are vibration amplitude change mechanisms that vibrate in different directions. The curvilinear motion of the lens focus is achieved through the vibration compound of the two combinations.

[0044] As a preferred solution of the utility model, the first vibration amplitude mechanism 331 is a bending amplitude rod; the second vibration amplitude mechanism 332 is a longitudinal torsion amplitude rod. This is a preferred structure, but it is not limited thereto. The types of the first vibration amplitude mechanism 331 and the second vibration amplitude mechanism 332 can be determined according to actual needs. The longitudinal vibration amplitude of the ultrasonic transducer is amplified by the bending amplitude rod 331 and then converted into the angle polarization of the primary focusing lens on the bending amplitude rod, and then refocused by the composite vibration lens on the longitudinal torsion amplitude rod 332, so that the focused light spot moves in a 3D curve.

[0045] As a preferred embodiment of the present invention, in Example 4 of the present invention, the vibration type conversion mechanism 3 includes a composite vibration plate 34; a through hole is provided in the middle of the composite vibration plate 34; a fixed connection seat 6 of the focusing lens is embedded in the through hole; and at least three ultrasonic vibration generators 2 with different frequencies and different amplitudes located at different action points are fixedly provided at the bottom of the composite vibration plate 34.

[0046] It should be noted that the number of ultrasonic vibration generators 2 is preferably but not limited to three. Figure 5 As shown, the lens vibration is composed of three ultrasonic transducers with different frequencies and amplitudes. Through the synchronous excitation of the transducers with different frequencies and amplitudes at three action points, the focusing spot generated by the focusing lens on the composite vibration plate 34 makes a 3D curve motion.

[0047] The utility model also provides a laser processing device, comprising a laser emitting device and also comprising the ultrasonic vibration device for assisting laser processing as described above in the utility model.

[0048] The ultrasonic vibration device for assisting laser processing provided by the utility model is used to assist the laser emitting device 4 in laser processing of the workpiece 5; the steps include:

[0049] S1, place the workpiece 5 under the focusing member 1, start the laser emitting device 4 to emit laser, and adjust the position of the focusing member 1 so that the laser passes through the focus of the focusing member 1 and converges on the position to be processed of the workpiece 5, so that the laser spot acts on the surface of the workpiece;

[0050] S2, start the power supply of the ultrasonic vibration generator 2, so that the laser spot moves along the preset processing trajectory and synchronously performs high-frequency 3D curve motion to perform ultrasonic-assisted laser processing on the surface of the workpiece.

[0051] It can be seen from the above specific implementation that the ultrasonic vibration device for assisting laser processing provided by the utility model, through the structure and position design of the focusing part, ultrasonic vibration generator and vibration type conversion mechanism, converts the electrical signal into an acoustic signal output through the ultrasonic vibration generator to generate the energy of ultrasonic vibration, and converts the longitudinal vibration output by the ultrasonic vibration generator into a 3D composite vibration through the vibration type conversion mechanism, and uses the 3D composite vibration to excite the focusing part to perform 3D composite vibration, so that the light spot generated by the focusing part moves along the preset processing trajectory while also performing high-frequency 3D motion, effectively dispersing the energy distribution in the processing area, making the energy distribution more uniform, avoiding local ablation damage, and the high-frequency curve motion of the light spot reduces the energy density of the traditional laser processing focus point, thereby improving the surface quality and processing efficiency of the laser processing. The utility model can not only be applied to laser processing, such as drilling, cutting, shot peening and other material removal fields, but also can be applied to laser welding, additive manufacturing and other related fields, playing a role in homogenizing the laser focusing energy, and can effectively improve the surface quality and efficiency of the processing.

[0052] As described above, the ultrasonic vibration device for assisting laser processing according to the utility model is described by way of example with reference to the accompanying drawings. However, those skilled in the art should understand that various improvements can be made to the ultrasonic vibration device for assisting laser processing proposed by the utility model without departing from the content of the utility model. Therefore, the protection scope of the utility model should be determined by the content of the attached claims.

Claims

1. An ultrasonic vibration device for assisting laser processing, characterized in that: It includes a focusing element, an ultrasonic vibration generator and a vibration type conversion mechanism; wherein, The focusing member is arranged below the laser port of the laser emitting device and above the workpiece; a fixed connection seat is arranged around the outer periphery of the focusing member; The vibration emitting end of the ultrasonic vibration generator is connected to the fixed connection seat through the vibration mode conversion mechanism.

2. The ultrasonic vibration device for assisting laser processing according to claim 1, characterized in that: The focusing component is a focusing lens.

3. The ultrasonic vibration device for assisting laser processing according to claim 2, characterized in that: The ultrasonic vibration generator is an ultrasonic transducer.

4. The ultrasonic vibration device for assisting laser processing according to claim 3, characterized in that: The vibration mode conversion mechanism is a longitudinal torsional horn; One end of the longitudinal torsion amplitude transformer is connected to the ultrasonic transducer, and the other end is connected to the fixed connection seat.

5. The ultrasonic vibration device for assisting laser processing according to claim 3, characterized in that: The vibration mode conversion mechanism is a longitudinal bending horn; One end of the longitudinal bending amplitude rod is connected to the ultrasonic transducer, and the other end is connected to the fixed connection seat.

6. The ultrasonic vibration device for assisting laser processing according to claim 1, characterized in that: The focusing element comprises at least two sub-focusing lenses arranged in parallel and opposite to each other up and down; The vibration mode conversion mechanism comprises a vibration amplitude conversion mechanism fixedly mounted on a fixed connection seat of each of the sub-focusing lenses; each of the vibration amplitude conversion mechanisms is connected to the ultrasonic vibration generator; The vibration mode conversion mechanism includes at least two vibration amplitude conversion mechanisms that vibrate in different directions.

7. The ultrasonic vibration device for assisting laser processing according to claim 6, characterized in that: The focusing lens comprises a first sub-focusing lens and a second sub-focusing lens which are arranged parallel to each other up and down; The vibration mode conversion mechanism comprises a first vibration amplitude change mechanism fixedly mounted on a fixed connection seat of the first sub-focusing lens and a second vibration amplitude change mechanism fixedly mounted on a fixed connection seat of the second sub-focusing lens; The first vibration amplitude variation mechanism is connected to a first ultrasonic vibration generator; The second vibration amplitude variation mechanism is connected to a second ultrasonic vibration generator; The first vibration amplitude variation mechanism and the second vibration amplitude variation mechanism are vibration amplitude variation mechanisms that vibrate in different directions.

8. The ultrasonic vibration device for assisting laser processing according to claim 7, characterized in that: The first vibration amplitude variation mechanism is a bending amplitude variation rod; The second vibration amplitude variation mechanism is a longitudinal torsional amplitude variation rod.

9. The ultrasonic vibration device for assisting laser processing according to claim 2, characterized in that: The vibration mode conversion mechanism includes a composite vibration plate; A through hole is provided in the middle of the composite vibration plate; The fixed connection seat of the focusing lens is embedded in the through hole; At least three ultrasonic vibration generators with different frequencies and amplitudes located at different action points are fixedly arranged at the bottom of the composite vibration plate.

10. A laser processing device, comprising a laser emitting device, characterized in that: It also includes an ultrasonic vibration device for assisting laser processing as described in any one of claims 1-9.

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