Novel PVD (Physical Vapor Deposition) surface treatment device

Abstract

The novel PVD surface treatment device comprises a vacuum evaporator, a collecting box, a guide plate and an electric sliding rail, the collecting box is fixedly connected to the bottom of the inner wall of the vacuum evaporator, air outlet holes are formed in the outer wall of the collecting box, the guide plate is fixedly connected to the inner wall of the collecting box, and the electric sliding rail is fixedly connected to the guide plate. An electric sliding rail is fixedly connected to the top of the inner wall of the vacuum evaporator, and an electric sliding block is slidably connected to the outer wall of the electric sliding rail. According to the novel PVD surface treatment device, the widths of the multiple groups of guide plates are sequentially increased from bottom to top in the collecting box, and after an evaporation substance enters the collecting box, the guide plates can discontinuously change the floating direction of the evaporation substance, so that the evaporation substance can uniformly float to the surface of a mold insert; not only is the uniformity of film coating on the surface of the mold insert improved, but also the utilization rate of evaporation substances can be improved, and the production cost is saved.

Description

Technical Field

[0001] The utility model relates to the technical field related to PVD surface treatment, in particular to a novel PVD surface treatment device. Background Art

[0002] PVD surface treatment, PVD is the abbreviation of Physical Vapor Deposition in English. It uses low voltage and high current arc discharge technology under vacuum conditions, uses gas discharge to evaporate the target material and ionize the evaporated substance and the gas, and uses the acceleration of the electric field to deposit the evaporated substance and its reaction products on the die insert. The PVD process has a low treatment temperature, below 600°C, and does not change the metallographic structure of the die insert. PVD technology not only improves the impact bonding strength of the film and the cutting edge insert matrix material, but also the coating composition is TiC, TiCN, ZrN, CrN, MoS2, TiAlN, TiAlCN, TiN-AlN, CNx, DLC and ta-C and other multi-composite coatings. Therefore, a new type of PVD surface treatment device is particularly needed.

[0003] However, in the use of the existing PVD surface treatment device, the mold insert is first suspended and placed inside the vacuum chamber, and then the evaporated material is converted into gas through the evaporation chamber and introduced into the vacuum chamber. Due to the mass of the gas itself, the gas sinks to the bottom of the vacuum chamber when entering the vacuum chamber. In order to ensure the uniformity of the coating on the surface of the mold insert, only when the evaporated material in the vacuum chamber reaches a certain amount, the acceleration effect of the electric field is utilized to deposit the evaporated material and its reaction products on the mold insert and complete the coating on the surface of the mold insert. In this way, the evaporated material in the vacuum chamber cannot be fully utilized, thereby increasing the production cost. Utility Model Content

[0004] The purpose of the utility model is to provide a new type of PVD surface treatment device to solve the problem of the existing PVD surface treatment device proposed in the above background technology. During use, the mold insert is first suspended in the vacuum chamber, and then the evaporated material is converted into gas through the evaporation chamber and then introduced into the vacuum chamber. Due to the quality of the gas itself, the gas sinks to the bottom of the vacuum chamber when entering the vacuum chamber. In order to ensure the uniformity of the coating on the surface of the mold insert, only when the evaporated material in the vacuum chamber reaches a certain amount, the acceleration effect of the electric field is utilized to deposit the evaporated material and its reaction products on the mold insert and complete the coating on the surface of the mold insert. In this way, the evaporated material in the vacuum chamber cannot be fully utilized, which increases the production cost.

[0005] To achieve the above-mentioned objectives, the utility model provides the following technical solutions: a new PVD surface treatment device, comprising a vacuum evaporator, a collection box, a guide plate and an electric slide rail, wherein the vacuum evaporator is fixedly connected to the bottom of the inner wall of the vacuum evaporator, and an air outlet is provided on the outer wall of the collection box, a guide plate is fixedly connected to the inner wall of the collection box, an electric slide rail is fixedly connected to the top of the inner wall of the vacuum evaporator, and an electric slider is slidably connected to the outer wall of the electric slide rail.

[0006] Preferably, the guide plates are inclined surfaces inside the collection box, and multiple groups of guide plates are arranged inside the collection box.

[0007] Preferably, the air outlet holes are provided in multiple groups on the outer surface of the collecting box.

[0008] Preferably, it also includes an electric turntable, which is slidably connected to an electric slide rail via an electric slider, and the electric slide rail is symmetrically arranged with respect to the central axis of the electric turntable.

[0009] Preferably, it also includes an electric telescopic rod, which is symmetrically arranged with respect to the central axis of the electric turntable.

[0010] Preferably, it also includes a connecting piece, and the connecting piece forms a telescopic structure with the electric telescopic rod and the electric turntable.

[0011] Compared with the prior art, the beneficial effects of the utility model are as follows: in this novel PVD surface treatment device, the widths of the multiple groups of guide plates increase successively from bottom to top inside the collecting box. When the evaporated material enters the collecting box, the guide plates can intermittently change the floating direction of the evaporated material, so that the evaporated material can float evenly to the surface of the mold insert, which not only improves the uniformity of the coating on the surface of the mold insert, but also improves the utilization rate of the evaporated material and saves production costs. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 This is a schematic diagram of the side view of the appearance structure of the utility model;

[0013] Figure 2 This is a schematic diagram of the internal structure of the vacuum evaporation machine of the utility model;

[0014] Figure 3 This is a schematic diagram of the structure of the guide plate and the air outlet hole cooperating with each other in the utility model;

[0015] Figure 4 This is a schematic diagram of the structure of the electric slide rail and the electric slider cooperating with each other in the utility model.

[0016] In the figure: 1. Vacuum evaporation machine; 2. Evaporation chamber; 3. Air inlet; 4. Collection box; 5. Guide plate; 6. Air outlet; 7. Electric slide rail; 8. Electric slider; 9. Electric turntable; 10. Electric telescopic rod; 11. Connector; 12. Mold insert. DETAILED DESCRIPTION

[0017] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0018] It should be noted that the terms "first", "second", etc. in the specification and claims of the present utility model and the above-mentioned drawings are used to distinguish similar objects, and are not necessarily used to describe a specific order or sequence. It should be understood that the data used in this way can be interchanged where appropriate, so that the embodiments of the utility model are described here. In addition, the terms "including" and "having" and any of their variations are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0019] In the present invention, the terms "upper", "lower", "left", "right", "front", "back", "top", "bottom", "inside", "outside", "middle", "vertical", "horizontal", "lateral", "longitudinal" and the like indicate positions or positional relationships based on the positions or positional relationships shown in the accompanying drawings. These terms are mainly used to better describe the present invention and its embodiments, and are not used to limit the indicated devices, elements or components to have a specific orientation, or to be constructed and operated in a specific orientation.

[0020] In addition, some of the above terms may be used to express other meanings in addition to indicating orientation or positional relationship. For example, the term "on" may also be used to express a certain dependency or connection relationship in some cases. For those skilled in the art, the specific meanings of these terms in this utility model can be understood according to specific circumstances.

[0021] In addition, the terms "installed", "set", "provided with", "connected", "connected", and "socketed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral structure; it can be a mechanical connection, or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be an internal connection between two devices, elements, or components. For those of ordinary skill in the art, the specific meanings of the above terms in this utility model can be understood according to specific circumstances.

[0022] It should be noted that, in the absence of conflict, the embodiments and features of the embodiments of the present invention can be combined with each other. The present invention will be described in detail below with reference to the accompanying drawings and in combination with the embodiments.

[0023] See also Figure 1-4 The utility model provides a technical solution: a new type of PVD surface treatment device, a new type of PVD surface treatment device, characterized in that it includes a vacuum evaporation machine 1, a collection box 4, a guide plate 5 and an electric slide rail 7, the bottom of the inner wall of the vacuum evaporation machine 1 is fixedly connected with the collection box 4, and the outer wall of the collection box 4 is provided with an air outlet 6, the inner wall of the collection box 4 is fixedly connected with the guide plate 5, the top of the inner wall of the vacuum evaporation machine 1 is fixedly connected with the electric slide rail 7, and the outer wall of the electric slide rail 7 is slidably connected with an electric slider 8, firstly, the mold insert 12 is hung on the connecting piece 11, and then the internal air of the vacuum chamber is extracted, and the evaporation chamber 2 evaporates the evaporation material After vaporization, the evaporated material enters the interior of the collecting box 4 through the air inlet 3. During the floating process of the evaporated material in the collecting box 4, the guide plate 5 can throttle the evaporated material and change the floating direction of the evaporated material, so that the evaporated material floats to the surface of the mold insert 12 through the air outlet 6. After the surface coating of one side of the mold insert 12 is completed, the mold insert 12 is moved away from the collecting box 4 by sliding the electric slider 8 on the surface of the electric slide rail 7, and then the electric turntable 9 is started to rotate the mold insert 12 180°, and then the electric slider 8 is started to slide on the surface of the electric slide rail 7 to move the mold insert 12 to the surface of the collecting box 4, and the surface of the mold insert 12 continues to be coated.

[0024] In this embodiment, the guide plate 5 inside the collecting box 4 is an inclined surface, and multiple groups of guide plates 5 are arranged inside the collecting box 4. The widths of the multiple groups of guide plates 5 increase successively from bottom to top inside the collecting box 4, so that the guide plate 5 can intermittently change the floating direction of the evaporated material, so that the evaporated material can float evenly to the surface of the mold insert 12, thereby improving the uniformity of the coating on the surface of the mold insert 12.

[0025] In this embodiment, the air outlet holes 6 are arranged in multiple groups on the outer surface of the collecting box 4. The evaporable substance floats to the surface of the mold insert 12 through the air outlet holes 6. The multiple groups of air outlet holes 6 can improve the working efficiency of the coating on the surface of the mold insert 12.

[0026] In this embodiment, an electric turntable 9 is also included, and the electric turntable 9 is slidably connected to the electric slide rail 7 through an electric slider 8. The electric slide rail 7 is symmetrically arranged with respect to the central axis of the electric turntable 9. The electric slider 8 slides on the surface of the electric slide rail 7 to control the distance between the mold insert 12 and the collection box 4. When the mold insert 12 needs to rotate, it moves away from the collection box 4. When the surface of the mold insert 12 is coated, the distance to the collection box 4 is shortened. At the same time, the two sets of electric slide rails 7 can improve the stability of the mold insert 12 when it moves.

[0027] In this embodiment, an electric telescopic rod 10 is also included. The electric telescopic rod 10 is symmetrically arranged with respect to the central axis of the electric turntable 9. The mold insert 12 is rotated by the electric turntable 9, so that the coating efficiency of the mold insert 12 can be accelerated and the working time can be shortened.

[0028] In this embodiment, a connecting member 11 is also included. The connecting member 11 forms a telescopic structure with the electric telescopic rod 10 and the electric turntable 9. The electric telescopic rod 10 can adjust the height of the mold insert 12 according to the size of the mold insert 12. When the size of the mold insert 12 is large, the electric telescopic rod 10 contracts. When the size of the mold insert 12 is small, the electric telescopic rod 10 extends outward, so that the surface of the mold insert 12 can be kept level with the air outlet 6 on the surface of the collection box 4, so that the evaporated material can float evenly to the surface of the mold insert 12.

[0029] Working principle: First, the mold insert 12 is hung on the connecting piece 11. The electric telescopic rod 10 can adjust the height of the mold insert 12 according to the size of the mold insert 12, so that the surface of the mold insert 12 is kept level with the air outlet 6 on the surface of the collection box 4. Then, the internal air of the vacuum chamber is extracted. After the evaporation chamber 2 vaporizes the evaporation material, the evaporated material enters the interior of the collection box 4 through the air inlet 3. During the floating process of the evaporated material inside the collection box 4, the width of the multiple groups of guide plates 5 increases from bottom to top in the collection box 4, so that the guide plates 5 can intermittently change the floating direction of the evaporated material. The evaporated material can float evenly to the surface of the mold inlay 12, and the evaporated material floats to the surface of the mold inlay 12 through the air outlet 6. After the surface coating of one side of the mold inlay 12 is completed, the mold inlay 12 is moved away from the collection box 4 by sliding the electric slider 8 on the surface of the electric slide rail 7. Then, the electric turntable 9 is started to rotate the mold inlay 12 180°, and then the electric slider 8 is started to slide on the surface of the electric slide rail 7 to move the mold inlay 12 to the surface of the collection box 4, and continue to coat the surface of the mold inlay 12. In this way, the use process of a new PVD surface treatment device is completed.

[0030] Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and spirit of the present invention, and that the scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A new type of PVD surface treatment device, characterized in that: The invention comprises a vacuum evaporation machine (1), a collection box (4), a guide plate (5) and an electric slide rail (7); the collection box (4) is fixedly connected to the bottom of the inner wall of the vacuum evaporation machine (1), and an air outlet (6) is provided on the outer wall of the collection box (4); the guide plate (5) is fixedly connected to the inner wall of the collection box (4); the electric slide rail (7) is fixedly connected to the top of the inner wall of the vacuum evaporation machine (1), and an electric slider (8) is slidably connected to the outer wall of the electric slide rail (7).

2. A novel PVD surface treatment device according to claim 1, characterized in that: The guide plates (5) are inclined surfaces inside the collection box (4), and multiple groups of guide plates (5) are arranged inside the collection box (4).

3. A novel PVD surface treatment device according to claim 1, characterized in that: The air outlet holes (6) are arranged in multiple groups on the outer surface of the collecting box (4).

4. A novel PVD surface treatment device according to claim 1, characterized in that: It also comprises an electric turntable (9), wherein the electric turntable (9) is slidably connected to an electric slide rail (7) via an electric slider (8), and the electric slide rail (7) is symmetrically arranged with respect to the central axis of the electric turntable (9).

5. A novel PVD surface treatment device according to claim 1, characterized in that: It also comprises an electric telescopic rod (10), wherein the electric telescopic rod (10) is symmetrically arranged with respect to the central axis of the electric turntable (9).

6. A novel PVD surface treatment device according to claim 1, characterized in that: It also comprises a connecting piece (11), wherein the connecting piece (11) forms a telescopic structure with the electric telescopic rod (10) and the electric turntable (9).

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