Clamp for sputter coating of flexible substrate

Abstract

The utility model discloses a clamp for sputter coating of a flexible substrate. The clamp comprises a fixed plate, a thin film bottom plate and a pressing plate, the fixing plate is connected with a thin film bottom plate, the thin film bottom plate is connected with a pressing plate, the pressing plate is provided with a plurality of sputtering areas, the thin film bottom plate is provided with a plurality of bosses, each boss is provided with a flexible substrate, the bosses are matched with the sputtering areas, and the pressing plate fixes the flexible substrates on the bosses; a tensioning device is arranged in the boss, the tensioning device stretches out and draws back in the direction of the boss and the flexible substrate, and when the tensioning device stretches out of the boss, the flexible substrate can be tensioned; the device is simple in structure, the thin film substrate is tensioned in a standardized manner, large-scale production and process improvement are facilitated, and the quality of a sputtering thin film is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of magnetron sputtering, in particular to a clamp used for sputtering coating of a flexible substrate. Background Art

[0002] The preparation of flexible films by compositeing functional films with flexible substrates has important applications and broad prospects in the fields of hygiene, environmental protection, electronics, machinery, printing, aerospace, etc. Therefore, it has received more and more attention, and a lot of manpower, material and financial resources have been invested in related research and development.

[0003] In the process of preparing thin films, flexible substrates are used to prepare thin films, because the flexible substrates are thin and prone to deformation. In a patent with patent application number 202010896820.9, an elastic clamp for depositing thin films on a flexible substrate and a method of using the same is designed for the flexible substrate, and the flexible substrate is clamped on a fixing device. The flexible substrate is stretched to a flat state through the action of a spring and the fixing device, and deposition can be performed after the bottom plate is fixed. The position of the elastic clamp is adjusted to fix flexible substrates of different sizes and types, thereby overcoming the problem of bending and deformation of the flexible substrate when depositing dielectric films and functional films, and greatly improving the uniformity of the film compared to the traditional lamination method.

[0004] This patent solves the flatness and uniformity problems of the flexible substrate during coating by stretching the flexible substrate through an elastic clamp. However, in fact, the flexible substrate is suspended in the air for tensioning by the elastic clamp. During sputtering, the surface of the flexible substrate is easily deformed by particle impact, which affects the film performance and is not conducive to widespread use. The stretching with two fixed end points will also cause the flexible substrate to deform or not be stretched in place. The sliding device is controlled by a screw, and the sliding device has only one force point. The sliding device is prone to tilt, and there is a difference in tension at the upper and lower ends, which is not conducive to uniform stretching.

[0005] In a patent for a layered magnetron sputtering coating device for a flexible film and a preparation method thereof with patent application number 202310458337.6, it is mentioned that due to the difference in mechanical properties such as Young's modulus between the flexible substrate and the metal film and the high energy of sputtering, residual stress and local concentration in the film are caused, resulting in the shedding and cracking of the film, affecting the use of the material; to address this problem, a base clamp is designed in the patent, and the flexible substrate is stretched in multiple directions through multiple movable separation clamps on the base clamp to eliminate the stress of the flexible substrate; however, this stretching method still stretches at multiple points, and there is also the problem of uneven stretching and deformation of the flexible substrate. The stress of the flexible substrate cannot be effectively eliminated, and it is easy to cause damage and serious deformation of the flexible substrate. In addition, the operation of installing the flexible substrate is complicated and inefficient, which is not conducive to industrial production. Utility Model Content

[0006] In view of the above problems, the utility model provides a clamp for sputtering coating of flexible substrates. By controlling the extension length of the tensioning device, the flexible substrate is evenly tensioned through the arc surface of the tensioning head, which has a better stretching effect, reduces the shedding and cracking of the film, and improves the coating quality; the tensioning degree can be seen more clearly through the tensioning pointer and the tensioning scale, which is conducive to industrial mass replication; and through the cooperation of the film base plate and the pressure plate, multiple flexible substrates can be coated by one sputtering coating, which improves production efficiency and is conducive to wide use.

[0007] The utility model adopts the following technical solutions:

[0008] A fixture for sputtering coating of a flexible substrate comprises: a fixing plate, a film bottom plate, and a pressing plate; the fixing plate is connected to the film bottom plate, the film bottom plate is connected to the pressing plate, a plurality of hollow sputtering areas are provided on the pressing plate, a plurality of bosses are provided on the film bottom plate, a flexible substrate can be placed on each boss, the bosses match the sputtering areas, and the flexible substrate on the bosses is fixed on the bosses by the pressing plate; a tensioning device is provided in the bosses, the tensioning device is retracted and retracted along the direction of the bosses and the flexible substrate, and the flexible substrate can be tensioned when the tensioning device is extended from the bosses; the pressing plate presses the flexible substrate on the bosses, and by controlling the distance that the tensioning device is extended, the flexible substrate is lifted up and stretched, thereby eliminating the stress of the flexible substrate and preventing the stress concentration of the flexible substrate from affecting the quality of the film during coating.

[0009] Preferably, the tensioning device includes a tensioning head, a support rod, and a tensioning bolt; the tensioning device passes through a fixed plate to a boss of the film bottom plate, the tensioning bolt is threadedly connected to the fixed plate, the upper end of the tensioning bolt is connected to the support rod, and a tensioning head is provided on the upper end surface of the support rod; the tensioning device controls the extension length of the tensioning head by tightening the tensioning bolt, thereby controlling the tensioning degree of the flexible substrate.

[0010] Preferably, the upper end surface of the tensioning head is an arc surface; when the tensioning device is not working, the highest point of the upper end surface of the tensioning head is flush with the upper end surface of the boss; when the tensioning device is working, the tensioning head is pushed out by the tensioning bolt, and the upper end surface of the tensioning head tensions the flexible base on the boss; the flexible base is flexibly tensioned by the arc surface, and the arc surface is in surface contact with the flexible base, so that the flexible base is more evenly stressed, thereby preventing uneven stress and damage to the flexible base.

[0011] Preferably, the support rod is a T-shaped support rod; the T-shaped support rod can slide up and down better in the through hole, reducing materials and reducing costs.

[0012] Preferably, the tensioning head is made of high temperature resistant silicone; it is resistant to high temperatures and can remain unchanged during sputtering. The silicone material will not wear or damage the flexible substrate and also has a certain protective effect.

[0013] Preferably, a tensioning scale is provided on the back of the fixing plate, and a tensioning pointer is provided on the tensioning bolt, and the tensioning pointer cooperates with the tensioning scale; the tensioning bolt is rotated to push out the tensioning head, and the tensioning head protrudes from the upper end surface of the boss, thereby tensioning the flexible substrate on the boss. By cooperating with the tensioning scale and the tensioning pointer, the tensioning degree of each flexible substrate can be strictly controlled and the tensioning degree can be visualized.

[0014] Preferably, the fixing plate is concave, fixedly connected to the film bottom plate, the film bottom plate is hinged to one end of the pressing plate, and the other end of the pressing plate is connected to the fixing plate by a pressing sheet; the fixing plate is concave, the film bottom plate and the pressing plate are fixed in the concave part to complement each other, and the pressing plate can be fixed by the pressing sheet while fixing the film bottom plate, which can effectively utilize the space, ensure the smoothness of the clamp, and is easier to install and disassemble.

[0015] Preferably, an elastic buffer sheet is provided between the pressure plate and the film base plate, and the fitting pressure between the pressure plate and the film base plate is adjusted by bolts; the elastic buffer sheet protects the flexible base, and provides buffering when the pressure plate and the film base plate boss are pressed tightly, and the wear prevention device also protects the flexible base.

[0016] The beneficial effects of the utility model are:

[0017] The utility model uses a tensioning device arranged on the upper end surface of the boss to allow the tensioning head and the flexible base to be tensioned through surface contact, thereby ensuring uniformity of force on the flexible base when tensioned; at the same time, the rotation distance of the tensioning bolt and the protruding height of the tensioning head can be intuitively seen through the tensioning pointer and the tensioning scale, thereby visualizing the degree of tensioning, and can ensure that the tensioning degree is controlled within the same range for batch production, which is beneficial to mass production and replication; the elastic buffer sheet simultaneously provides a buffer between the pressure plate and the flexible base, protects the flexible base, reduces wear between the devices, increases the service life of the devices, and is beneficial to production and processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings of the embodiments will be briefly introduced below. Obviously, the drawings in the following description only relate to some embodiments of the present utility model, rather than limiting the present utility model.

[0019] Figure 1 This is a front view of the structure of the utility model;

[0020] Figure 2 This is the AA cross-sectional view of the utility model;

[0021] Figure 3 This is a front view of the connection between the fixed plate and the film bottom plate of the utility model;

[0022] Figure 4 This is a bottom view of the utility model;

[0023] Figure 5 It is a cross-sectional view of the connection between the film bottom plate and the pressure plate of the utility model;

[0024] Figure 6 For the utility model Figure 3 Sectional view;

[0025] Figure 7 For this utility model Figure 6 A partial enlarged view of middle Ⅰ;

[0026] In the figure:

[0027] 1-fixed plate, 2-film base plate, 201-boss, 202-tensioning device, 202a-tensioning head, 202b-support rod, 202c-tensioning bolt, 202d-tensioning pointer, 3-pressure plate, 301-sputtering area, 302-tensioning scale, 303-clamp, 304-pressure bolt, 305-elastic buffer. DETAILED DESCRIPTION

[0028] In order to make the purpose, technical scheme and advantages of the embodiment of the utility model clearer, the technical scheme of the embodiment of the utility model will be clearly and completely described in conjunction with the drawings of the embodiment of the utility model. Unless otherwise defined, the technical terms or scientific terms used in the present disclosure should be the usual meanings understood by people with general skills in the field to which the present disclosure belongs. The words "including" or "comprising" and the like used in the present disclosure mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0029] The utility model is further described below in conjunction with the accompanying drawings and embodiments.

[0030] like Figures 1 to 7 As shown, a fixture for sputtering coating of a flexible substrate comprises: an inner concave fixing plate 1, a film bottom plate 2, and a pressing plate 3;

[0031] The fixed plate 1 is fixedly connected to the film bottom plate 2, one end of the pressing plate 3 is hingedly connected to the film bottom plate 2, 15 bosses 201 are provided on the film bottom plate 2, a flexible substrate to be plated is placed on each boss, and a plurality of hollow sputtering areas 301 are provided on the pressing plate 3, and then the pressing plate 3 is matched with the film bottom plate by rotating the hinge, and the pressing plate 3 and the film bottom plate 2 are fixed on the fixed plate 1 by rotating the clip 303 on the fixed plate 1;

[0032] The 15 sputtering areas 301 of the pressing plate 3 are matched with the 15 bosses 201 on the film bottom plate one by one. A flexible substrate is placed on each boss 201. The hollowed-out range of the sputtering area 301 is smaller than the size of the boss 201. The sputtering area 301 presses the edge of the flexible substrate to fix it. Then, the elastic buffer sheet 305 and the rotating pressure bolt 304 are used to control the fitting pressure of the pressing plate 3 on the flexible substrate. After the pressure bolt 304 is rotated to a suitable position;

[0033] Then turn the tensioning bolt 202c to tension the flexible substrate. When the required requirements are met, record it through the tensioning scale 302 and the tensioning pointer 202d. Perform the same tensioning strength operation on other flexible substrates to ensure the same preparation conditions. Then put the fixture into the sputtering equipment for sputtering. The sputtered material is sputtered onto the flexible substrate through the sputtering area to form a thin film.

[0034] In summary, the utility model effectively solves the problem of eliminating the stress of the flexible base, and also optimizes the tensioning method. Through the surface contact method, the tensioning is more uniform and the effect is better; and the tensioning degree is quantified, which is conducive to mass production; the utility model has a simple structure, is easy to operate, and is conducive to wide use.

[0035] The above description is only a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Although the present invention has been disclosed as a preferred embodiment as above, it is not intended to limit the present invention. Any technician familiar with the profession can make some changes or modifications to equivalent embodiments of equivalent changes using the technical contents disclosed above without departing from the scope of the technical solution of the present invention. However, any simple modification, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A fixture for sputtering coating of a flexible substrate, characterized in that: include: A fixed plate, a film bottom plate, and a pressure plate; the fixed plate is connected to the film bottom plate, the film bottom plate is connected to the pressure plate, the pressure plate is provided with a plurality of sputtering areas, the film bottom plate is provided with a plurality of bosses, a flexible substrate is placed on each boss, the boss matches the sputtering area, and the pressure plate fixes the flexible substrate on the boss; a tensioning device is provided in the boss, the tensioning device is retracted along the direction of the boss and the flexible substrate, and the flexible substrate can be tensioned when the tensioning device extends from the boss.

2. A fixture for sputtering coating of a flexible substrate according to claim 1, characterized in that: The tensioning device includes a tensioning head, a support rod, and a tensioning bolt; the tensioning device passes through a fixed plate to a boss of the film bottom plate, the tensioning bolt is threadedly connected to the fixed plate, the upper end of the tensioning bolt is connected to the support rod, and a tensioning head is provided on the upper end surface of the support rod.

3. A fixture for sputtering coating of a flexible substrate according to claim 2, characterized in that: The upper end surface of the tensioning head is an arc surface; when the tensioning device is not working, the highest point of the upper end surface of the tensioning head is flush with the upper end surface of the boss; when the tensioning device is working, the tensioning head is pushed out by the tensioning bolt, and the upper end surface of the tensioning head tensions the flexible base on the boss.

4. A fixture for sputtering coating of a flexible substrate according to claim 3, characterized in that: The support rod is a T-shaped support rod.

5. The fixture for sputtering coating of a flexible substrate according to claim 3, characterized in that: The tensioning head is made of high temperature resistant silicone.

6. The fixture for sputtering coating of a flexible substrate according to claim 3, characterized in that: A tensioning scale is arranged on the back of the fixing plate, and a tensioning pointer is arranged on the tensioning bolt, and the tensioning pointer cooperates with the tensioning scale.

7. The fixture for sputtering coating of a flexible substrate according to claim 1, characterized in that: The fixing plate is concave, fixedly connected to the film bottom plate, the film bottom plate is hinged to one end of the pressing plate, and the other end of the pressing plate is connected to the fixing plate through a pressing sheet.

8. The fixture for sputtering coating of a flexible substrate according to claim 1, characterized in that: An elastic buffer sheet is arranged between the pressing plate and the film bottom plate, and the fitting pressure between the pressing plate and the film bottom plate is adjusted by a pressure bolt.

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