Flower basket toothed bar

Abstract

The utility model discloses a flower basket toothed bar, which relates to the technical field of silicon wafer flower baskets and comprises a toothed bar body, end bars are fixedly arranged at two ends of the toothed bar body, a plurality of slots are arranged on a flat groove, and two groups of symmetrically arranged built-in grooves are arranged in the slots. The device further comprises an inserting block arranged in the inserting groove, a connecting mechanism arranged in the built-in groove and a supporting mechanism arranged on the inserting block. According to the device, the connecting mechanism is arranged, so that a worker can insert an inserting block into a corresponding inserting groove according to actual use requirements, the distance between supporting plates in the connecting mechanism arranged on the inserting block can be adjusted, and the device can be suitable for silicon wafers with different thicknesses; therefore, the application range of the flower basket toothed bar is widened to a certain extent; and meanwhile, by arranging the connecting mechanism, the worker can conveniently replace the inserting block, so that the worker can conveniently replace the worn area on the flower basket toothed bar, and the maintenance cost of the flower basket toothed bar is reduced to a certain extent.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer flower baskets, in particular to a flower basket gear rod. Background Art

[0002] The flower basket tooth bar is an important part of the silicon wafer cleaning equipment in the production process of semiconductor devices. Its design and material selection are crucial to improving production efficiency and product quality. After the single crystal silicon rod is cut into single crystal silicon wafers by a slicer, it is generally necessary to use a flower basket for packaging and then clean and inspect. The tooth bar is the most important part of the flower basket, which consists of a core rod made of metal and a tooth column structure made of composite plastic.

[0003] The current turnbuckles are all of an integral structure. After long-term use, parts of the turnbuckles will be worn out. At this time, the turnbuckles need to be replaced. However, replacing the entire turnbuckle at one time makes the maintenance cost high, and the current fixed turnbuckle models can only be used for silicon wafers of fixed sizes, which makes the current turnbuckles have a narrow scope of application, and therefore urgently needs to be improved. Utility Model Content

[0004] In view of the deficiencies in the prior art, the purpose of the present invention is to provide a turnbuckle gear rod, aiming to solve the above technical problems.

[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0006] A turnbuckle tooth bar comprises a tooth bar body, end bars are fixedly arranged at both ends of the tooth bar body, the end bars are provided with through holes, a flat groove is provided on the tooth bar body, a plurality of slots are provided on the flat groove, and the plurality of slots are evenly distributed on the tooth bar body, two groups of symmetrically arranged built-in slots are provided in the slots, and the turnbuckle tooth bar also comprises:

[0007] An insert block is slidably disposed in the slot, and a curved slot is provided on the surface of the insert block close to the built-in slot;

[0008] A connecting mechanism is arranged in the built-in slot, and the connecting mechanism is used to fix the plug-in block inserted into the slot;

[0009] The supporting mechanism is arranged on the inserting block, and the supporting mechanism is used for supporting the silicon wafer.

[0010] Preferably, the connecting mechanism comprises:

[0011] A fixed cover, disposed in the built-in groove and fixedly connected to the gear rod body;

[0012] The inserting portion is arranged in the built-in groove, and the inserting portion is used to fix the inserting block inserted into the slot.

[0013] Preferably, the inserting portion comprises:

[0014] A sliding column is disposed in the built-in groove and is slidably connected to the built-in groove, and one end of the sliding column close to the arc-shaped slot is matched with the inner surface of the arc-shaped slot;

[0015] A first spring is arranged in the built-in groove, one end of the first spring away from the plug block is fixedly connected to the gear rod body, and the first spring is always in a compressed state;

[0016] The auxiliary part is arranged on the sliding column, and the auxiliary part is used to prevent the sliding column from being separated from the built-in groove after the plug-in block is pulled out of the slot.

[0017] Preferably, the auxiliary part comprises:

[0018] A connecting rod is arranged on the sliding column, and one end of the connecting rod close to the sliding column is fixedly connected to the sliding column, and the connecting rod is slidably connected to the fixed cover;

[0019] The blocking plate is located in the fixing cover, and the blocking plate is fixedly arranged at one end of the connecting rod away from the sliding column.

[0020] Preferably, the supporting mechanism comprises:

[0021] A support plate is located directly above the plug block, a rectangular groove is provided on the surface of the support plate close to the plug block, and two groups of symmetrical prismatic grooves are provided in the rectangular groove;

[0022] A rectangular block is fixedly arranged on the insert block, the rectangular block is slidably connected to the rectangular groove, a surface of the rectangular block close to the prismatic groove is provided with a plurality of equally spaced inner grooves, and the spacing between the inner grooves is equal to the spacing between adjacent prismatic grooves in each group of prismatic grooves;

[0023] The locking portion is arranged in the inner groove, and the locking portion is used to fix the rectangular block inserted into the rectangular groove.

[0024] Preferably, the locking portion comprises:

[0025] A second spring is disposed in the inner groove, and one end of the second spring away from the prismatic groove is fixedly connected to the rectangular block;

[0026] A sliding block is slidably disposed in the inner groove, and one end of the sliding block close to the second spring is fixedly connected to the second spring, and one end of the sliding block close to the prismatic groove fits with the inner surface of the prismatic groove.

[0027] Preferably, one end of the insert block close to the slot is rounded.

[0028] In summary, due to the adoption of the above technical solution, the beneficial effects of the utility model are:

[0029] 1. The device is provided with a connecting mechanism, so that the staff can insert the plug into the corresponding slot according to the actual use requirements, and then adjust the spacing between the support plates in the connecting mechanism provided on the plug, so that the device can be applied to silicon wafers of different thicknesses, thereby improving the application range of the flower basket gear rod to a certain extent; at the same time, by providing a connecting mechanism, it is also convenient for the staff to replace the plug, thereby facilitating the staff to replace the worn area on the flower basket gear rod, thereby reducing the maintenance cost of the flower basket gear rod to a certain extent.

[0030] 2. By providing a supporting mechanism, the staff can adjust the distance between the support plate and the gear rod body according to the size of the silicon wafer placed on the support plate, thereby better supporting silicon wafers of different sizes, thereby improving the application range of the flower basket gear rod to a certain extent.

[0031] 3. By providing a locking portion, the connection and disassembly between the support plate and the rectangular block is realized, and it is also convenient to replace the worn support plate after the support plate is worn in the later stage, thereby reducing the maintenance cost of the basket gear rod to a certain extent. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] In order to more clearly illustrate the technical solutions of the embodiments of the utility model, the drawings required for use in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0033] Figure 1 A schematic diagram of the three-dimensional structure of a turnbuckle gear rod is shown.

[0034] Figure 2 A front view of a turnbuckle is shown.

[0035] Figure 3 Shows Figure 2 Sectional view of AA.

[0036] Figure 4 Shows Figure 3 A schematic diagram of the enlarged local structure at point A in the middle.

[0037] Figure 5 Shows Figure 3 A magnified schematic diagram of the local structure at point B in the middle.

[0038] Figure 6 A side view of a turnbuckle is shown.

[0039] Figure 7 Shows Figure 6 Cross-sectional view of BB.

[0040] Figure 8 A top view of a turnbuckle is shown.

[0041] Fig. 9 An exploded view of a part of the structure of a turnbuckle is shown.

[0042] Fig.10 Shows Fig. 9 Enlarged schematic diagram of the local structure at point C in the middle.

[0043] Legend:

[0044] 1. Gear rod body; 2. End rod; 3. Perforation; 4. Flat groove; 5. Slot; 6. Built-in groove; 7. Insert block; 8. Arc-shaped slot; 9. Fixed cover; 10. Sliding column; 11. First spring; 12. Connecting rod; 13. Block plate; 14. Support plate; 15. Rectangular groove; 16. Prismatic groove; 17. Rectangular block; 18. Inner groove; 19. Second spring; 20. Sliding block. DETAILED DESCRIPTION

[0045] The following will be combined with the drawings in the embodiments of the utility model to clearly and completely describe the technical solutions in the embodiments of the utility model. Obviously, the described embodiments are only part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0046] In the description of the present invention, it should be understood that the terms "length", "width", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0047] It should be noted that when a component is referred to as being "fixed to" another component, it may be directly on the other component or there may also be a component centered. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may also be a component centered. When a component is considered to be "set on" another component, it may be directly set on the other component or there may also be a component centered. The terms "vertical", "horizontal", "left", "right" and similar expressions used herein are for illustrative purposes only.

[0048] In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present utility model, the meaning of "plurality" is two or more, unless otherwise clearly and specifically defined.

[0049] Reference Figures 1 to 10 , a flower basket gear rod embodiment of the utility model is further described.

[0050] A flower basket toothed rod, comprising a toothed rod body 1, end rods 2 are fixedly arranged at both ends of the toothed rod body 1, the end rods 2 are used to insert the toothed rod body 1 into the flower basket end plate, the end rods 2 are provided with a through hole 3, the toothed rod body 1 is provided with a flat groove 4, the flat groove 4 is provided with a plurality of slots 5, and the plurality of slots 5 are equidistantly distributed on the toothed rod body 1, the slots 5 are provided with two groups of symmetrically arranged built-in grooves 6, and the flower basket toothed rod also includes:

[0051] An insert block 7 is slidably disposed in the slot 5. An arc-shaped slot 8 is provided on the surface of the insert block 7 close to the built-in slot 6. One end of the insert block 7 close to the slot 5 is rounded.

[0052] Reference Figures 1 to 10 , a connecting mechanism is arranged in the built-in groove 6, and the connecting mechanism is used to fix the plug-in block 7 inserted into the slot 5, and the connecting mechanism includes:

[0053] A fixed cover 9 is disposed in the built-in groove 6 and fixedly connected to the gear rod body 1;

[0054] The inserting portion is arranged in the built-in groove 6, and the inserting portion is used to fix the inserting block 7 inserted into the slot 5; the inserting portion includes:

[0055] A sliding post 10 is disposed in the built-in groove 6 and is slidably connected to the built-in groove 6. One end of the sliding post 10 close to the arc-shaped slot 8 is fitted with the inner surface of the arc-shaped slot 8.

[0056] A first spring 11 is disposed in the built-in groove 6, and one end of the first spring 11 away from the plug block 7 is fixedly connected to the gear rod body 1, and the first spring 11 is always in a compressed state;

[0057] An auxiliary part is provided on the sliding column 10, and is used to prevent the sliding column 10 from being separated from the built-in groove 6 after the plug 7 is pulled out of the slot 5; the auxiliary part includes:

[0058] A connecting rod 12 is disposed on the sliding column 10, and one end of the connecting rod 12 close to the sliding column 10 is fixedly connected to the sliding column 10, and the connecting rod 12 is slidably connected to the fixed cover 9;

[0059] The blocking plate 13 is located in the fixing cover 9 , and is fixedly disposed at one end of the connecting rod 12 away from the sliding column 10 .

[0060] Reference Figures 1 to 10 When in use, the staff can adjust the spacing between the support plates 14 according to actual use requirements to adapt to silicon wafers of different thicknesses. Specifically, the staff inserts the plug block 7 into the corresponding slot 5. During the insertion of the plug block 7, the rounded area at the end of the plug block 7 first contacts the sliding column 10. As the plug block 7 is continuously inserted, the plug block 7 applies a force to the sliding column 10, thereby squeezing the sliding column 10 into the built-in groove 6 until the plug block 7 is completely inserted into the slot 5. At this time, the sliding column 10 is also inserted into the arc-shaped slot 8 on the plug block 7 under the action of the first spring 11, thereby realizing the connection and fixation between the plug block 7 and the gear rod body 1, so that the staff can insert the plug block 7 into the corresponding slot 5 according to actual use requirements, thereby realizing the adjustment of the spacing between the support plates 14 in the connection mechanism set on the plug block 7;

[0061] The device is provided with a connecting mechanism, so that the staff can insert the plug block 7 into the corresponding slot 5 according to actual use requirements, and then adjust the spacing between the support plates 14 in the connecting mechanism provided on the plug block 7, so that the device can be applied to silicon wafers of different thicknesses, thereby improving the application range of the flower basket gear rod to a certain extent. At the same time, by providing a connecting mechanism, it is also convenient for the staff to replace the plug block 7, thereby facilitating the staff to replace the worn area on the flower basket gear rod, thereby reducing the maintenance cost of the flower basket gear rod to a certain extent.

[0062] Reference Figures 1 to 10 , a supporting mechanism is arranged on the insert block 7, the supporting mechanism is used to support the silicon wafer, and the supporting mechanism includes:

[0063] A support plate 14 is located directly above the insert block 7. A rectangular groove 15 is formed on the surface of the support plate 14 close to the insert block 7. Two groups of symmetrical prismatic grooves 16 are formed in the rectangular groove 15.

[0064] A rectangular block 17 is fixedly disposed on the insert block 7, and the rectangular block 17 is slidably connected to the rectangular groove 15. A surface of the rectangular block 17 close to the prismatic groove 16 is provided with a plurality of equally spaced inner grooves 18, and the spacing between the inner grooves 18 is equal to the spacing between adjacent prismatic grooves 16 in each group of prismatic grooves 16;

[0065] The clamping part is arranged in the inner groove 18, and is used to fix the rectangular block 17 inserted into the rectangular groove 15. The clamping part includes:

[0066] A second spring 19 is disposed in the inner groove 18, and one end of the second spring 19 away from the prismatic groove 16 is fixedly connected to the rectangular block 17;

[0067] The sliding block 20 is slidably disposed in the inner groove 18 , and one end of the sliding block 20 close to the second spring 19 is fixedly connected to the second spring 19 , and one end of the sliding block 20 close to the prismatic groove 16 fits with the inner surface of the prismatic groove 16 .

[0068] During use, the staff slides the support plate 14 as needed. When the support plate 14 slides to the point where the prismatic groove 16 corresponds to the sliding block 20, the sliding block 20 slides into the prismatic groove 16 on the support plate 14 under the action of the second spring 19, thereby connecting and fixing the rectangular block 17 of the support plate 14, thereby preventing the support plate 14 from slipping off the rectangular block 17.

[0069] By providing the locking portion, the connection and disassembly between the support plate 14 and the rectangular block 17 are realized, and it is also convenient to replace the worn support plate 14 after the support plate 14 is worn in the later stage, thereby reducing the maintenance cost of the basket gear rod to a certain extent.

[0070] When in use, the staff can adjust the distance between the support plate 14 and the gear rod body 1 according to the size of the silicon wafer placed on the support plate 14, so as to better support silicon wafers of different sizes. Specifically, the staff can manually adjust the support plate 14 to slide on the rectangular block 17, thereby adjusting the distance between the support plate 14 and the gear rod body 1;

[0071] By providing a supporting mechanism, the staff can adjust the distance between the support plate 14 and the gear rod body 1 according to the size of the silicon wafer placed on the support plate 14, thereby better supporting silicon wafers of different sizes, thereby improving the application range of the flower basket gear rod to a certain extent.

[0072] The above description of the embodiments enables those skilled in the art to implement or use the present invention. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention will not be limited to the embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A turnbuckle toothed rod, comprising a toothed rod body (1), end rods (2) being fixedly provided at both ends of the toothed rod body (1), characterized in that: The end rod (2) is provided with a through hole (3), the toothed rod body (1) is provided with a flat groove (4), the flat groove (4) is provided with a plurality of slots (5), and the plurality of slots (5) are evenly spaced on the toothed rod body (1), and the slots (5) are provided with two groups of symmetrically arranged built-in grooves (6). The basket toothed rod further comprises: An insert block (7) is slidably disposed in the slot (5), and a curved slot (8) is formed on a surface of the insert block (7) close to the built-in slot (6); A connecting mechanism, disposed in the built-in groove (6), the connecting mechanism being used to fix the inserting block (7) inserted into the slot (5); A supporting mechanism is arranged on the insert block (7), and the supporting mechanism is used to support the silicon wafer.

2. A turnbuckle gear rod according to claim 1, characterized in that: The connecting mechanism comprises: A fixed cover (9) is disposed in the built-in groove (6) and fixedly connected to the gear rod body (1); An insertion portion is arranged in the built-in groove (6), and the insertion portion is used to fix the insertion block (7) inserted into the slot (5).

3. A turnbuckle gear rod according to claim 2, characterized in that: The inserting portion comprises: A sliding column (10) is disposed in the built-in groove (6) and is slidably connected to the built-in groove (6), and one end of the sliding column (10) close to the arc-shaped groove (8) is fitted with the inner surface of the arc-shaped groove (8); A first spring (11) is arranged in the built-in groove (6), one end of the first spring (11) away from the plug block (7) is fixedly connected to the gear rod body (1), and the first spring (11) is always in a compressed state; An auxiliary part is arranged on the sliding column (10), and the auxiliary part is used to prevent the sliding column (10) from being separated from the built-in groove (6) after the insert block (7) is pulled out of the slot (5).

4. A turnbuckle gear rod according to claim 3, characterized in that: The auxiliary part includes: A connecting rod (12) is arranged on the sliding column (10), and one end of the connecting rod (12) close to the sliding column (10) is fixedly connected to the sliding column (10), and the connecting rod (12) is slidably connected to the fixed cover (9); The blocking plate (13) is located in the fixed cover (9), and the blocking plate (13) is fixedly arranged at an end of the connecting rod (12) away from the sliding column (10).

5. A turnbuckle gear rod according to claim 4, characterized in that: The supporting mechanism comprises: A support plate (14) is located directly above the insert block (7); a rectangular groove (15) is formed on a surface of the support plate (14) close to the insert block (7); and two groups of symmetrical prismatic grooves (16) are formed in the rectangular groove (15); a rectangular block (17) fixedly disposed on the insert block (7), the rectangular block (17) being slidably connected to the rectangular groove (15), a surface of the rectangular block (17) close to the prismatic groove (16) being provided with a plurality of equally spaced inner grooves (18), and a spacing between the inner grooves (18) being equal to a spacing between adjacent prismatic grooves (16) in each group of prismatic grooves (16); A locking portion is disposed in the inner groove (18), and the locking portion is used to fix the rectangular block (17) inserted into the rectangular groove (15).

6. A turnbuckle gear rod according to claim 5, characterized in that: The positioning portion comprises: A second spring (19) is disposed in the inner groove (18), and one end of the second spring (19) away from the prismatic groove (16) is fixedly connected to the rectangular block (17); A sliding block (20) is slidably disposed in the inner groove (18), and one end of the sliding block (20) close to the second spring (19) is fixedly connected to the second spring (19), and one end of the sliding block (20) close to the prismatic groove (16) fits with the inner surface of the prismatic groove (16).

7. The turnbuckle gear rod according to claim 1, characterized in that: The insert block (7) is provided with a rounded corner at one end close to the slot (5).

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