Single crystal furnace with double auxiliary chambers

Abstract

The utility model provides a single crystal furnace with double auxiliary chambers, which comprises a main chamber and an isolating valve bin communicated with the main chamber, a cut-off chamber is arranged in the first auxiliary chamber cylinder, and a first port is formed in the top of the cut-off chamber; a lifting cavity is formed in the second auxiliary chamber cylinder, a second port is formed in the bottom of the lifting cavity, and the first port is communicated with the second port; the lifting mechanism is arranged in the lifting chamber; the storage bin is arranged on the outer side of the first auxiliary chamber cylinder, a storage chamber is formed in the storage bin and communicates with the cut-off chamber, and a storage chamber bin door connected with the storage chamber is arranged on the outer side of the storage bin; the cut-off mechanism is arranged at the second port and used for cutting off the broken-edge crystal with the thin neck from the thin neck; and the transfer mechanism is connected with the storage bin and used for receiving the short-rod crystals in the cut-off chamber and transferring the short-rod crystals into the storage chamber. According to the single crystal furnace with the double auxiliary chambers, the storage bin is arranged on the outer side of the first auxiliary chamber cylinder, so that the extraction efficiency of short-rod crystals is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic manufacturing, in particular to a double-sub-chamber single crystal furnace. Background Art

[0002] In the production process of straight-pulled single crystal silicon rods, the main pulling processes include furnace dismantling, charging, melting, temperature adjustment, seeding, shoulder release, shoulder rotation, equal diameter, finishing, furnace shutdown, etc., and single crystal silicon broken edges often occur in the crystal pulling processes of shoulder release, shoulder rotation, and equal diameter. Broken edge crystals include normal seed crystals, short rod crystals, and the thin neck connecting the seed crystals and short rod crystals. The short rod crystals can include only the crystal shoulder, or both the crystal shoulder and the truncated portion connected to the crystal shoulder. When broken edge crystals are produced, the short rod crystals need to be taken out from the auxiliary chamber of the single crystal furnace, and then the next subsequent pulling process such as temperature adjustment, seeding, shoulder release, etc. is carried out.

[0003] At present, the method for removing short-rod crystals is to lift the broken crystals to the sub-chamber tube, and the sub-chamber tube is isolated from the main chamber tube by an isolation valve in the isolation valve compartment. After the sub-chamber is filled to normal pressure, the sub-chamber tube is unscrewed to separate the sub-chamber tube from the main chamber tube, and then, a person wearing high-temperature resistant gloves manually cuts off the thin neck from the sub-chamber and removes the high-temperature short-rod crystal. Since the sub-chamber is in contact with the outside world after the sub-chamber tube is unscrewed, it is necessary to manually clean the sub-chamber and then rotate the sub-chamber tube back, and re-stabilize the weight connected to the seed crystal to ensure the stability of the high-purity crystal pulling environment of the single crystal furnace. This unloading method is not only time-consuming and increases the labor intensity, but also poses a safety hazard due to the high temperature of the crystal. In addition, with the continuous improvement of single crystal silicon crystal growth technology, the diameter of the grown single crystal silicon is getting larger and larger, and the weight of the short-rod crystal is also increasing. It is more dangerous to manually unload high-temperature and high-radiation crystals. Utility Model Content

[0004] In view of this, the utility model provides a double-sub-chamber single crystal furnace, which can improve the extraction efficiency of short rod crystals and reduce safety hazards.

[0005] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0006] A double-sub-chamber single crystal furnace according to an embodiment of the utility model comprises: a main chamber, a first sub-chamber tube, a second sub-chamber tube, a storage bin, a lifting mechanism, a cutting mechanism and a transfer mechanism. Among them, an isolation valve bin is arranged above the main chamber, and the isolation valve bin is connected with the main chamber; the first sub-chamber tube is arranged above the isolation valve bin and a truncation chamber is arranged inside, and a first port is formed at the top of the truncation chamber; the second sub-chamber tube is arranged above the first sub-chamber tube and a pulling chamber is formed inside, and a second port is formed at the bottom of the pulling chamber, and the first port is connected with the second port; the storage bin is arranged on the outside of the first sub-chamber tube, and a storage chamber is arranged in the storage bin, and the storage chamber and the truncation chamber can be selectively connected; the pulling mechanism is arranged in the pulling chamber, which is used to pull the broken-edge crystal with a thin neck from the main chamber to the truncation chamber; the truncation mechanism is arranged at the second port, which is used to cut the broken-edge crystal with a thin neck from the thin neck at the thin neck to form a short rod crystal and a seed crystal, the short rod crystal is located in the truncation chamber, and the seed crystal is located in the pulling chamber; the transfer mechanism can move between the truncation chamber and the storage chamber, which is used to receive the short rod crystal in the truncation chamber and transfer the short rod crystal to the storage chamber.

[0007] In this embodiment, by arranging a storage bin outside the first sub-chamber, the storage chamber and the truncation chamber are connected, and a truncation mechanism and a transfer mechanism are respectively arranged, the short rod crystals truncated by the truncation mechanism can be transferred to the storage chamber through the transfer mechanism, and then the short rod crystals can be taken out by opening the storage chamber door. Thus, the extraction efficiency of the short rod crystals is effectively improved and safety hazards are reduced.

[0008] In one embodiment of the present invention, the cut-off mechanism comprises:

[0009] A plurality of cutting tools are arranged at the second port and can selectively extend into the lifting chamber inside the second secondary chamber tube or retract from the lifting chamber;

[0010] The truncation drive cylinder is arranged on the outside of the second auxiliary chamber tube and connected to the truncation tool. It is used to drive the truncation tool to extend into the pulling chamber inside the second auxiliary chamber tube or retract from the pulling chamber to cut the broken-edge crystal with a thin neck at the thin neck to form a short rod crystal and a seed crystal.

[0011] In one embodiment of the utility model, the transfer mechanism comprises:

[0012] a crystal tray, movable between the cut-off chamber and the storage chamber to selectively extend into the cut-off chamber or retract from the cut-off chamber into the storage chamber;

[0013] The transfer drive cylinder is arranged outside the storage bin and connected to the crystal tray, and is used to drive the crystal tray to selectively extend into the cut-off chamber, or to retract from the cut-off chamber into the storage chamber.

[0014] In one embodiment of the present invention, a storage chamber door is provided on the storage bin.

[0015] In one embodiment of the present utility model, the double sub-chamber single crystal furnace further includes an isolation mechanism, and the isolation mechanism includes:

[0016] A separation plate, which can selectively extend into the cut-off chamber or retract from the cut-off chamber to selectively connect or isolate the cut-off chamber and the storage chamber;

[0017] The isolation plate driving cylinder is connected to the isolation plate and is used for driving the isolation plate to retract from the cut-off chamber or to drive the isolation plate to extend into the cut-off chamber.

[0018] In one embodiment of the present invention, the lifting mechanism comprises:

[0019] Tungsten wire rope;

[0020] A heavy hammer, connected to a tungsten wire rope;

[0021] Graphite chuck, connected to a heavy hammer, is used to clamp broken-edge crystals with thin necks.

[0022] In one embodiment of the present utility model, the double-sub-chamber single crystal furnace further includes a stabilizing mechanism, which is connected to the second sub-chamber cylinder, and the stabilizing mechanism includes:

[0023] A plurality of groups of grippers are disposed in the lifting chamber;

[0024] The stabilizing driving cylinder is arranged outside the second auxiliary chamber cylinder and connected to the clamper, and is used to drive the clamper to extend and retract in the radial direction to clamp or release the heavy hammer.

[0025] In one embodiment of the utility model, the double sub-chamber single crystal furnace further comprises:

[0026] An air extraction pipe, connected to the storage chamber, for extracting gas from the storage chamber;

[0027] an air filling pipe, connected to the storage chamber, and used for filling the storage chamber with gas;

[0028] The pressure gauge is connected to the storage chamber and is used to measure the gas pressure in the storage chamber.

[0029] In one embodiment of the utility model, a cut-off chamber observation window communicating with the cut-off chamber is arranged on the outer side of the first sub-chamber cylinder.

[0030] In one embodiment of the present invention, a storage chamber observation window communicating with the storage chamber is provided on the outside of the storage bin.

[0031] The above technical solution of the embodiment of the utility model has at least one of the following beneficial effects:

[0032] The double-sub-chamber single crystal furnace of the utility model embodiment realizes process automation by using a truncation mechanism to truncate the broken prism crystals and using a transfer mechanism to transfer the short rod crystals, effectively reducing the labor intensity and improving the extraction efficiency of the short rod crystals. At the same time, by setting a storage bin outside the first sub-chamber tube to store the truncated short rod crystals, there is no need to unscrew the sub-chamber tube, the sub-chamber is not in contact with the outside world, and there is no need to clean the sub-chamber again, thus ensuring the crystal pulling growth environment. After the short rod crystals are transferred to the storage bin, they can be taken out manually after the crystals are completely cooled, avoiding manual contact with high-temperature crystals and reducing safety hazards. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 It is a cross-sectional view of a double-sub-chamber single crystal furnace in an embodiment of the utility model;

[0034] Figure 2 This is a schematic diagram of the structure of a double-sub-chamber single crystal furnace in an embodiment of the utility model;

[0035] Figure 3 This is another cross-sectional view of the double sub-chamber single crystal furnace in the embodiment of the utility model.

[0036] Reference numerals: 100, first auxiliary chamber cylinder; 101, seed crystal; 102, narrow neck; 103, short rod crystal; 110, truncation chamber; 120, truncation chamber observation window;

[0037] 200, second auxiliary chamber cylinder; 201, auxiliary chamber positioning pin; 202, auxiliary chamber positioning hole; 210, lifting chamber observation window;

[0038] 300, storage bin; 310, storage room; 320, storage room door; 330, storage room observation window;

[0039] 400, lifting mechanism; 410, tungsten wire rope; 420, heavy hammer; 430, graphite chuck;

[0040] 500, cutting mechanism; 510, cutting tool; 520, cutting drive cylinder;

[0041] 610. crystal tray; 620. transfer drive cylinder;

[0042] 700, isolation valve compartment; 710, isolation plate; 720, isolation plate driving cylinder; 730, isolation valve compartment observation window;

[0043] 800, stabilizing mechanism; 810, clamping device; 820, stabilizing driving cylinder;

[0044] 910, exhaust pipe; 920, filling pipe; 930, pressure gauge. DETAILED DESCRIPTION

[0045] In order to make the purpose, technical solution and advantages of the embodiment of the utility model clearer, the technical solution of the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings of the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. Based on the described embodiment of the utility model, all other embodiments obtained by ordinary technicians in this field belong to the scope of protection of the utility model.

[0046] The following first describes in detail the double sub-chamber single crystal furnace according to an embodiment of the utility model in conjunction with the accompanying drawings.

[0047] refer to Figure 1 and Figure 2 , Figure 1 This is a cross-sectional view of a double-sub-chamber single crystal furnace in an embodiment of the utility model. Figure 2 It is a schematic structural diagram of a double-sub-chamber single crystal furnace in an embodiment of the utility model.

[0048] like Figure 1 and Figure 2 As shown, the double-sub-chamber single crystal furnace of the embodiment of the utility model includes: a main chamber, a first sub-chamber tube 100, a second sub-chamber tube 200, a storage bin 300, a pulling mechanism 400, a cut-off mechanism 500 and a transfer mechanism. Among them, an isolation valve bin 700 is arranged above the main chamber, and the isolation valve bin 700 is connected with the main chamber. The first sub-chamber tube 100 is arranged above the isolation valve bin 700, and a cut-off chamber 110 is arranged inside, and a first port is formed at the top of the cut-off chamber 110. The second sub-chamber tube 200 is arranged above the first sub-chamber tube 100, and a pulling chamber is formed inside, and a second port is formed at the bottom of the pulling chamber, and the first port is connected with the second port, so that the cut-off chamber inside the first sub-chamber tube 100 is connected with the pulling chamber inside the second sub-chamber tube 200. The storage bin 300 is arranged outside the first sub-chamber tube 100. Specifically, the storage bin 300 is located on one side of the first sub-chamber tube 100 in the horizontal direction. A storage chamber 310 is arranged inside the storage bin 300. The storage chamber 310 can be selectively connected to the cut-off chamber 110. The storage bin 300 is also provided with a storage chamber door 320 connected to the storage chamber 310. By opening or closing the storage chamber door 320, the storage chamber 310 inside the storage bin 300 can be connected to or cut off from the external space.

[0049] Continue to refer Figure 1 ,like Figure 1As shown, the pulling mechanism 400 is arranged in the pulling chamber, and is used to pull the broken prism crystal with a narrow neck 102. Specifically, the pulling mechanism 400 can pull the broken prism crystal from the main chamber to the first sub-chamber tube 100 and the second sub-chamber tube 200. The truncation mechanism 500 is arranged at the second port. Specifically, the truncation mechanism 500 is arranged on the upper side of the second port, and is used to truncate the broken prism crystal with a narrow neck 102 at the narrow neck 102 to form a short rod crystal 103 and a seed crystal 101. The short rod crystal 103 is located in the truncation chamber 110 under the action of gravity, and the seed crystal 101 is still located in the pulling chamber due to the traction of the pulling mechanism 400. The transfer mechanism is connected to the storage bin 300, and is used to receive the short rod crystal 103 in the truncation chamber 110 and transfer the short rod crystal 103 to the storage chamber 310.

[0050] In this embodiment, the pulling mechanism 400 can be used to pull the broken prism crystal with the narrow neck 102 into the first sub-chamber tube 100 and the second sub-chamber tube 200, and then the truncation mechanism 500 arranged at the second port at the bottom of the pulling chamber can be used to truncate the broken prism crystal from the narrow neck 102 to form a short rod crystal 103 and a seed crystal 101, and the short rod crystal 103 falls into the truncation chamber 110 under the action of gravity, and the seed crystal 101 is still located in the pulling chamber due to the traction of the pulling mechanism 400. The short rod crystal 103 in the truncation chamber 110 can be transported to the storage chamber 310 connected to the truncation chamber 110 by the transport mechanism. In this way, after being transported to the storage chamber 310, the short rod crystal 103 transported to the storage chamber 310 can be cooled in the storage chamber 310. After cooling, the operator can open the storage chamber door 320 to take out the short rod crystal 103, thereby eliminating the need to unscrew the auxiliary chamber cylinder, thereby improving the extraction efficiency and crystal pulling efficiency of the short rod crystal 103. After the short rod crystal 103 is transported to the storage bin 300, it can be taken out manually after the crystal is completely cooled, thereby avoiding manual contact with high-temperature crystals and reducing safety hazards. In addition, by respectively setting up a cut-off mechanism 500 and a transfer mechanism to cut off and transfer the short rod crystal, process automation is achieved.

[0051] like Figure 1As shown, the cutting mechanism 500 includes: a plurality of cutting tools 510 and a cutting drive cylinder 520. The plurality of cutting tools 510 are arranged at the second port and can selectively extend into the lifting chamber inside the second auxiliary chamber tube 200 or retract from the lifting chamber. Multiple sets of cutting tools 510 can be extended and retracted along the radial direction of the second sub-chamber tube 200. After extending into the pulling chamber in the second sub-chamber tube 200, the narrow neck 102 at the corresponding position can be cut off. After the narrow neck 102 is cut off, the short rod crystal 103 below falls into the cutting chamber 110 under the action of gravity. Specifically, the short rod crystal 103 falls on the transfer mechanism in the cutting chamber 110, and the seed crystal 101 above continues to stay in the pulling chamber under the traction of the pulling mechanism 400. After the short rod crystal 103 is transported out of the cutting chamber 110 by the transfer mechanism, the seed crystal 101 can be lowered into the main chamber under the action of the pulling mechanism 400 for subsequent crystal pulling process. The truncation drive cylinder 520 is arranged outside the second sub-chamber 200 and connected to the truncation tool 510 to drive the truncation tool 510 to extend and retract to truncate the broken prism crystal with a narrow neck 102 at the narrow neck 102 to form a short rod crystal 103 and a seed crystal 101.

[0052] In this embodiment, by setting a plurality of groups of cutting tools 510 at the second port, after cutting off the broken prism crystal with the narrow neck 102, the short rod crystal 103 can be located in the cutting chamber 110 in the first sub-chamber tube 100. Thus, there is no need to manually cut off and move the hot short rod crystal 103, and the seed crystal 101 can be immediately lowered into the main chamber for subsequent crystal pulling process after cutting, which effectively improves production efficiency. In addition, the cutting tool 510 is driven by the cutting drive cylinder 520 to cut off the broken prism crystal, without manual operation, which improves the automation level, reduces labor intensity, and reduces safety hazards.

[0053] refer to Figure 1 , and combined with Figure 3 , Figure 3 This is another cross-sectional view of the double-sub-chamber single crystal furnace in the embodiment of the utility model. Figure 1 and Figure 3 As shown, the transfer mechanism includes: a crystal tray 610 and a transfer drive cylinder 620. The crystal tray 610 is arranged in the storage chamber 310, and is used to receive the short rod crystal 103. The transfer drive cylinder 620 is arranged outside the storage bin 300 and is connected to the crystal tray 610, and is used to drive the crystal tray 610 to extend into the truncation chamber 110, or to retract from the truncation chamber 110 into the storage chamber 310.

[0054] In this embodiment, after the lifting mechanism 400 lifts the broken prism crystal to the truncation chamber 110, the transfer drive cylinder 620 can be used to drive the crystal tray 610 to extend into the truncation chamber 110 in the horizontal direction to receive the short rod crystal 103 cut by the broken prism crystal. Then, the crystal tray 610 can be driven by the transfer drive cylinder 620 to retract into the storage chamber 310 in the horizontal direction. In this way, the transfer of the short rod crystal 103 is completed, and no manual operation is required during the transfer of the short rod crystal 103, which improves the level of automation, reduces labor intensity, and reduces safety hazards.

[0055] like Figure 2 As shown, a truncation chamber observation window 120 connected to the truncation chamber 110 is provided on the outside of the first sub-chamber 100. By providing the truncation chamber observation window 120, the truncation of the broken prism crystal and the condition of the crystal tray 610 supporting the short rod crystal 103 can be observed. In this way, manual intervention can be performed in the event of an unexpected situation, effectively improving safety performance.

[0056] like Figure 2 As shown, a storage chamber observation window 330 communicating with the storage chamber 310 is provided on the outside of the storage bin 300. By providing the storage chamber observation window 330, the arrival and cooling conditions of the short rod crystal 103 can be observed.

[0057] like Figure 2 As shown, an isolation valve bin observation window 730 is provided on the isolation valve bin 700, and a pulling chamber observation window 210 is provided on the second sub-chamber tube 200. By providing the isolation valve bin observation window 730 and the pulling chamber observation window 210, the pulling condition of the crystal can be observed, thereby improving safety.

[0058] like Figure 2 As shown, the truncation mechanism 500 is provided with a positioning plate protruding outward in the circumferential direction, and the positioning plate is provided with a sub-chamber positioning hole 202. After the second sub-chamber tube 200 is aligned with the first sub-chamber tube 100 using the sub-chamber positioning hole 202, the second sub-chamber tube 200 can be fixedly connected with the first sub-chamber using the sub-chamber positioning pin 201. Thus, the connection stability and assembly efficiency between the two components are effectively improved.

[0059] like Figure 1 As shown, in one embodiment of the present invention, the pulling mechanism 400 includes: a tungsten wire rope 410, a weight 420 and a graphite chuck 430. The weight 420 is connected to the tungsten wire rope 410. The graphite chuck 430 is connected to the weight 420 and is used to clamp the broken edge crystal with a thin neck 102. The tungsten wire rope 410 has high strength and can stably pull the seed crystal 101, thereby improving stability and safety.

[0060] In one embodiment of the present invention, Figure 1 and Figure 3As shown, the double-sub-chamber single crystal furnace also includes a stabilizing mechanism 800, which is connected to the second sub-chamber barrel 200. The stabilizing mechanism 800 includes: multiple groups of clamps 810 and a stabilizing driving cylinder 820. The multiple groups of clamps 810 are arranged in the pulling chamber and can be extended and retracted in the radial direction of the second sub-chamber barrel 200. The stabilizing driving cylinder 820 is arranged outside the second sub-chamber barrel 200 and connected to the clamp 810, and is used to drive the clamp 810 to extend and retract in the radial direction to clamp or release the heavy hammer 420.

[0061] In this embodiment, when the broken prism crystal is cut, the stabilizing driving cylinder 820 can be used to drive the clamp 810 to clamp the main weight 420, thereby ensuring that the seed crystal 101 is stable and does not shake, and there is no need to manually stabilize the weight 420 and the seed crystal 101 under the weight 420 after cutting the broken prism crystal. Therefore, stability and safety are improved.

[0062] like Figure 1 and Figure 3 As shown, the double-sub-chamber single crystal furnace also includes an isolation mechanism, which is arranged outside the isolation valve chamber 700, and includes: an isolation plate 710 and an isolation plate driving cylinder 720. The isolation plate 710 can selectively extend into the cut-off chamber 110 or retract from the cut-off chamber 110 to selectively connect or isolate the cut-off chamber 110 and the storage chamber 310. The isolation plate driving cylinder 720 is connected to the isolation plate 710, and is used to drive the isolation plate 710 to retract from the cut-off chamber 110 or drive the isolation plate 710 to extend into the cut-off chamber 110. Figure 3 As shown, the double-sub-chamber single crystal furnace further includes: an exhaust pipe 910, a gas charging pipe 920 and a pressure gauge 930. The exhaust pipe 910 is connected to the storage chamber 310 and is used to extract the gas in the storage chamber 310. The gas charging pipe 920 is connected to the storage chamber 310 and is used to charge the gas into the storage chamber 310. The pressure gauge 930 is connected to the storage chamber 310 and is used to measure the gas pressure in the storage chamber 310.

[0063] Specifically, before using the lifting mechanism to lift the broken prism crystal, the isolation plate 710 is located below the truncation chamber 110, the truncation chamber 110, the isolation valve compartment 700 and the main chamber are interconnected and are all in a negative pressure state, the truncation chamber 110 and the storage chamber 310 are isolated by the isolation plate 710, when it is necessary to use the crystal tray 610 to carry the truncated short rod crystal 103, the isolation plate 710 needs to be opened to connect the truncation chamber 110 and the storage chamber 310, because the truncation chamber 110 is in a negative pressure state, before opening the isolation plate 710, the storage chamber 310 needs to be evacuated to make the storage chamber 310 in the same negative pressure state as the truncation chamber 110, and then open the isolation plate 710 to make the storage chamber 310 and the truncation chamber 110 The crystal tray 610 is connected to the storage chamber 310, and then the truncation operation is performed. The short rod crystal 103 falls on the crystal tray 610, and then the crystal tray 610 moves into the storage chamber 310. After the crystal tray 610 receives the short rod crystal 103 and retracts into the storage chamber 310, the isolation plate driving cylinder 720 can drive the isolation plate 710 to extend into the truncation chamber 110 to isolate the truncation chamber 110 from the storage chamber 310. At this time, the gas charging tube 920 can be used to pass gas into the storage chamber 310 to accelerate the cooling of the short rod crystal 103. At the same time, the gas exhaust pipe 910 can be used to suck the gas in the storage chamber 310 to increase the flow rate of the gas, and further increase the cooling speed of the short rod crystal 103. When the short rod crystal 103 is completely cooled and the storage chamber 310 reaches normal pressure, the storage chamber door 320 can be opened to take out the cooled short rod crystal 103. Thus, the truncation chamber 110 and the storage chamber 310 are isolated by the isolation plate 710. On the one hand, there is no need to rotate the first sub-chamber cylinder out, and the first sub-chamber cylinder is not in contact with the outside world, so there is no need to clean the first sub-chamber cylinder. On the other hand, when taking out the short rod crystal 103, the truncation chamber 110 and the storage chamber 310 are isolated by the isolation plate 710, which can prevent the outside air from entering the single crystal furnace, thereby ensuring the stability of the crystal growth environment.

[0064] Combine the following Figure 1-Figure 3 The structure of the double-sub-chamber single crystal furnace shown is used to illustrate the working process of each component of the double-sub-chamber single crystal furnace.

[0065] During the crystal pulling process, when the crystal has broken edges, the pulling mechanism 400 can be used to pull the broken edge crystal and pull the broken edge crystal into the truncation chamber 110 in the first sub-chamber tube 100. After the storage chamber 310 is evacuated so that the storage chamber 310 is in the same negative pressure state as the truncation chamber 110, the isolation plate 710 is opened to connect the storage chamber 310 and the truncation chamber 110. Then, the transport drive cylinder 620 of the transport mechanism can drive the crystal tray 610 to extend under the broken edge crystal, while the clamp 810 of the stabilization mechanism 800 clamps the heavy hammer 420 to prevent the broken edge crystal from shaking. After the broken edge crystal is stabilized, the truncation drive cylinder 520 drives the truncation tool 510 to truncate the broken edge crystal. The short rod crystal 103 falls into the crystal tray 610, and the transport drive cylinder 620 drives the crystal tray 610 to retract into the storage chamber 310. Then, the isolation plate driving cylinder 720 can drive the isolation plate 710 to extend into the cut-off chamber 110 to isolate the cut-off chamber 110 from the storage chamber 310. At this time, the gas charging tube 920 can be used to pass gas into the storage chamber 310 to accelerate the cooling of the short rod crystal 103. At the same time, the gas extraction tube 910 can be used to suck the gas in the storage chamber 310 to increase the flow rate of the gas, thereby further increasing the cooling speed of the short rod crystal 103. When the short rod crystal 103 is completely cooled and the storage chamber 310 reaches normal pressure, the storage chamber door 320 can be opened to take out the cooled short rod crystal 103.

[0066] In summary, the double-sub-chamber single crystal furnace of the utility model embodiment realizes process automation by using a truncation mechanism to truncate the broken prism crystals and using a transfer mechanism to transfer the short rod crystals, effectively reducing the labor intensity and improving the extraction efficiency of the short rod crystals. At the same time, by setting a storage bin on the outside of the first sub-chamber tube to store the truncated short rod crystals, there is no need to unscrew the sub-chamber tube, the sub-chamber is not in contact with the outside world, and there is no need to clean the sub-chamber again, thus ensuring the crystal pulling growth environment. After the short rod crystals are transferred to the storage bin, they can be taken out manually after the crystals are completely cooled, avoiding manual contact with high-temperature crystals and reducing safety hazards.

[0067] Unless otherwise defined, the technical terms or scientific terms used in the present invention shall have the usual meanings understood by persons with ordinary skills in the field to which the present invention belongs. The words "first", "second" and similar words used in the present invention do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one" or "one" do not indicate quantity restrictions, but indicate the existence of at least one. Words such as "connect" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship also changes accordingly.

[0068] The above are preferred implementations of the present utility model. It should be pointed out that, for ordinary technicians in this technical field, several improvements and modifications can be made without departing from the principle of the present utility model. These improvements and modifications should also be regarded as the protection scope of the present utility model.

Claims

1. A double-sub-chamber single crystal furnace, characterized in that: include: A main chamber, wherein an isolation valve compartment is arranged above the main chamber, and the isolation valve compartment is communicated with the main chamber; A first auxiliary chamber tube, which is arranged above the isolation valve compartment and has a cut-off chamber arranged therein, and a first port is formed at the top of the cut-off chamber; A second auxiliary chamber tube, wherein the second auxiliary chamber tube is arranged above the first auxiliary chamber tube and has a lifting chamber formed therein, a second port is formed at the bottom of the lifting chamber, and the first port is communicated with the second port; A pulling mechanism is arranged in the pulling chamber and is used to pull the broken prism crystal with a thin neck from the main chamber to the truncation chamber; A storage bin is arranged outside the first auxiliary chamber tube, a storage chamber is formed in the storage bin, and the storage chamber is selectively connected to the cut-off chamber; A truncation mechanism, disposed at the second port, for truncating the broken-edge crystal with a thin neck into a short rod crystal and a seed crystal at the thin neck, wherein the short rod crystal is located in the truncation chamber, and the seed crystal is located in the pulling chamber; The transfer mechanism can move between the truncation chamber and the storage chamber, and is used for receiving the short rod crystals in the truncation chamber and transferring the short rod crystals to the storage chamber.

2. The double-sub-chamber single crystal furnace according to claim 1, characterized in that: The cut-off mechanism comprises: A plurality of sets of cutting tools are disposed at the second port and can selectively extend into or retract from the pulling chamber; The truncation drive cylinder is arranged on the outside of the second sub-chamber tube and connected to the truncation tool. It is used to drive the truncation tool to extend into the pulling chamber or retract from the pulling chamber to cut the broken prism crystal with a thin neck at the thin neck to form the short rod crystal and the seed crystal.

3. The double-sub-chamber single crystal furnace according to claim 1, characterized in that: The transfer mechanism comprises: a crystal tray, movable between the cut-off chamber and the storage chamber to selectively extend into the cut-off chamber or retract from the cut-off chamber into the storage chamber; The transport drive cylinder is arranged outside the storage bin and connected to the crystal tray, and is used to drive the crystal tray to selectively extend into the cut-off chamber, or to retract from the cut-off chamber into the storage chamber.

4. The double-sub-chamber single crystal furnace according to claim 1, characterized in that: The storage bin is provided with a storage chamber door.

5. The double-sub-chamber single crystal furnace according to claim 4, characterized in that: Also included is an isolation mechanism, the isolation mechanism comprising: A separation plate, the separation plate can be selectively extended into the cut-off chamber or retracted from the cut-off chamber to selectively connect or isolate the cut-off chamber and the storage chamber; The isolation plate driving cylinder is connected to the isolation plate and is used for driving the isolation plate to retract from the cut-off chamber or to drive the isolation plate to extend into the cut-off chamber.

6. The double-sub-chamber single crystal furnace according to claim 1, characterized in that: The lifting mechanism comprises: Tungsten wire rope; A heavy hammer connected to the tungsten wire rope; A graphite chuck is connected to the weight and is used for clamping the broken-edge crystal with a thin neck.

7. The double-sub-chamber single crystal furnace according to claim 6, characterized in that: It also includes a stabilizing mechanism, which is connected to the second secondary chamber cylinder and includes: A plurality of groups of grippers are disposed in the pulling chamber; The stabilizing driving cylinder is arranged outside the second auxiliary chamber tube and connected to the clamper, and is used to drive the clamper to extend and retract along the radial direction to clamp or release the heavy hammer.

8. The double-sub-chamber single crystal furnace according to claim 1, characterized in that: Also includes: an air extraction pipe, connected to the storage chamber, and used for extracting gas in the storage chamber; an air filling pipe, connected to the storage chamber and used for filling the storage chamber with gas; A pressure gauge is communicated with the storage chamber and is used to measure the gas pressure in the storage chamber.

9. The double-sub-chamber single crystal furnace according to claim 1, characterized in that: A cut-off chamber observation window communicating with the cut-off chamber is arranged on the outer side of the first sub-chamber tube.

10. The double-sub-chamber single crystal furnace according to claim 1, characterized in that: A storage chamber observation window communicating with the storage chamber is arranged outside the storage bin.

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