Evaporation material recovery device

Abstract

The utility model discloses an evaporation material recovery device which comprises a dust collection box, an adsorption mechanism arranged in the dust collection box and used for adsorbing organic materials and a cooling mechanism used for cooling the dust collection box, the adsorption mechanism is in contact with the inner wall face of the dust collection box, and the cooling mechanism is in contact with the outer wall face of the dust collection box. According to the evaporation material recovery device, the dust collection box is matched with the adsorption mechanism and the cooling mechanism, so that the evaporation material can be efficiently recovered, and the utilization rate of the evaporation material is increased.

Description

Technical Field

[0001] The utility model belongs to the technical field of evaporation equipment, and specifically relates to an evaporation material recovery device. Background Art

[0002] The light-emitting layer of the organic light-emitting display panel is a light-emitting device composed of a stack of multiple functional layers, and evaporation is required during the preparation process.

[0003] An evaporation machine is needed for evaporation. The utilization rate of organic materials in existing evaporation machines is low. The reason for the low utilization rate is that there needs to be a wafer in the evaporation chamber and the shutter (the baffle used in the evaporation process) will not be opened for coating after the alignment is completed, and the source (evaporation source) will not be opened at the same time when there are 6 coatings in total, so a lot of material is wasted by evaporation on the chamber wall and the baffle. Therefore, the utilization rate of point source materials used in mass production lines is about 5%, and the utilization rate of line source materials is about 40%, which is low. However, the unit price of organic materials is relatively high, and there is a lot of waste of resources.

[0004] For example, the patent document with the publication number CN114481035A discloses a vapor deposition device, including a vapor deposition source, a limiting plate and a blocking member, wherein the vapor deposition source includes a vapor deposition chamber for placing vapor deposition materials and at least one vapor deposition hole located on one side of the vapor deposition chamber in the first direction and connected to the vapor deposition chamber. At least two limiting plates are arranged on both sides of the vapor deposition hole in the second direction, and the first direction intersects with the second direction; the blocking member is located on the side of the limiting plate close to the vapor deposition hole, and the side of the blocking member facing the vapor deposition hole has a plurality of deposition holes formed concavely along the second direction. The vapor deposition material expands outward through the vapor deposition hole to form a preset evaporation area, the limiting plate includes a first part located in the preset evaporation area, and the orthographic projection of the blocking member on the limiting plate at least partially overlaps with the first part, so that at least part of the vapor deposition material is deposited on the blocking member. The technical solution disclosed in the patent document also fails to solve the technical problems described above. Utility Model Content

[0005] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model provides a vapor deposition material recovery device, the purpose of which is to improve the utilization rate of the vapor deposition material.

[0006] In order to achieve the above-mentioned purpose, the technical solution adopted by the utility model is: a vapor deposition material recovery device, including a dust box, an adsorption mechanism arranged inside the dust box and used to adsorb organic materials, and a cooling mechanism for cooling the dust box, the adsorption mechanism is in contact with the inner wall surface of the dust box, and the cooling mechanism is in contact with the outer wall surface of the dust box.

[0007] The adsorption mechanism comprises a first adsorption member, and the first adsorption member is arranged on the inner wall surface of the dust collecting box.

[0008] The first adsorbent is activated carbon, and the activated carbon has a honeycomb structure.

[0009] The adsorption mechanism comprises a second adsorption member, which is arranged at the bottom of the dust collecting box, the height of the second adsorption member is less than the height of the air inlet of the dust collecting box, and the material of the second adsorption member is metal.

[0010] The second adsorption member is a spherical structure, and a plurality of second adsorption members are provided.

[0011] The second adsorption component is made of silicon carbide.

[0012] The cooling mechanism comprises a cooling pipeline, which is arranged on the outer wall surface of the dust collecting box, and cooling water flows into the cooling pipeline.

[0013] The evaporation material recovery device also includes a rotating mechanism connected to the dust collecting box and used to control the dust collecting box to rotate.

[0014] The rotating mechanism comprises a rotating arm connected to the dust collecting box and a driving motor connected to the rotating arm.

[0015] The evaporation material recovery device of the utility model can realize the efficient recovery of evaporation materials and improve the utilization rate of evaporation materials through the cooperation of the dust collecting box, the adsorption mechanism and the cooling mechanism. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] This specification includes the following drawings, which show the following contents:

[0017] Figure 1 It is a structural schematic diagram of the evaporation material recovery device of the utility model;

[0018] Figure 2 It is a schematic diagram of the structure of honeycomb activated carbon;

[0019] Marked in the figure: 1. first adsorption member; 2. second adsorption member; 3. cooling pipe; 4. first cavity; 5. second cavity; 6. rotating arm; 7. driving motor; 8. guide plate. DETAILED DESCRIPTION

[0020] The specific implementation methods of the utility model are further explained in detail below with reference to the accompanying drawings through the description of embodiments, with the aim of helping technicians in the field to have a more complete, accurate and in-depth understanding of the concept and technical solution of the utility model and facilitating its implementation.

[0021] It should be noted that, in the following embodiments, the “first” and “second” mentioned do not represent an absolute distinction in structure and / or function, nor do they represent a sequential order of execution, but are merely for the convenience of description.

[0022] like Figure 1 As shown, the utility model provides a vapor deposition material recovery device, including a dust box, an adsorption mechanism arranged inside the dust box and used to adsorb organic materials, and a cooling mechanism for cooling the dust box, the adsorption mechanism is in contact with the inner wall surface of the dust box, and the cooling mechanism is in contact with the outer wall surface of the dust box.

[0023] Specifically, if Figure 1 As shown, the dust box is a hollow structure, and the dust box is located below the source shutter (a baffle used in the evaporation process). The adsorption mechanism includes a first adsorption member 1, and the first adsorption member 1 is fixedly arranged on the inner wall surface of the dust box. The first adsorption member 1 is activated carbon, and the activated carbon has a honeycomb structure, and the inner wall surface of the dust box is covered with activated carbon. Activated carbon material is used for organic material adsorption, and the activated carbon is designed to be honeycomb, which is convenient for the recovery operation of the evaporation material and can achieve efficient recovery of the evaporation material.

[0024] like Figure 1 As shown, the adsorption mechanism includes a second adsorption member 2, which is arranged at the bottom of the dust box. The height of the second adsorption member 2 is less than the height of the air inlet of the dust box, and the material of the second adsorption member 2 is metal. Multiple second adsorption members 2 are arranged, and by placing some second adsorption members 2 made of metal materials with good thermal conductivity at the bottom of the dust box, it is possible to prevent the vaporized material from volatilizing or vaporizing back to the inside of the crucible. In addition, the second adsorption member 2 is in contact with the inner wall surface of the dust box, and the second adsorption member 2 can also play a role in heat conduction, so that the temperature of the cooling water on the surface of the dust box can be conducted to the inside of the dust box, which has a condensation effect on the vaporized material and is convenient for efficient recovery of the vaporized material.

[0025] In this embodiment, if Figure 1 As shown, the second adsorbent 2 is a spherical structure, and the material of the second adsorbent 2 is silicon carbide. The inner cavity of the dust collecting box includes a first cavity 4 and a second cavity 5 that are connected, the first cavity 4 is located above the second cavity 5, and the second adsorbent 2 is located in the second cavity 5, and the position of the second adsorbent 2 is relatively low.

[0026] like Figure 1As shown, the dust collecting box is provided with a guide plate 8, which is a conical structure with openings at both ends and a hollow interior. The axis of the guide plate 8 is perpendicular to the top surface of the first cavity 4. The top of the guide plate 8 is provided with an opening as the air inlet of the dust collecting box. The diameter of the large diameter end of the guide plate 8 is smaller than the axis of the small diameter end. The air inlet is provided at the small diameter end of the guide plate 8. The distance between the large diameter end of the guide plate 8 and the top surface of the first cavity 4 is smaller than the distance between the small diameter end of the guide plate 8 and the top surface of the first cavity 4. The outer edge of the large diameter end of the guide plate 8 is fixedly connected to the bottom surface of the first cavity 4. A concave design for accommodating a crucible nozzle is formed at the guide plate 8. The guide plate 8 extends into the first cavity 4. The surface of the guide plate 8 located in the first cavity 4 is a downwardly inclined conical surface, which can guide the condensed material to flow downward, thereby avoiding the risk of clogging the crucible nozzle, and can effectively store the condensed material.

[0027] like Figure 1 As shown, the cooling mechanism includes a cooling pipe 3, which is arranged on the outer wall of the dust collecting box. Cooling water flows into the cooling pipe 3, and the cooling pipe 3 with cooling water flows into the dust collecting box to exchange heat with the dust collecting box to reduce the temperature in the inner cavity of the dust collecting box. The cooling pipe 3 is connected to an externally arranged water supply device, and the water supply device provides cooling water to the cooling pipe 3.

[0028] A cooling mechanism is provided to lower the internal temperature of the dust box so that the material evaporates and condenses on the surface when it is cooled. The temperature difference forms an air flow direction so that the material can reach the second cavity 5 at the bottom of the dust box.

[0029] like Figure 1 As shown, the evaporation material recovery device of the utility model also includes a rotating mechanism connected to the dust box and used to control the dust box to rotate. The rotating mechanism includes a rotating arm 6 fixedly connected to the dust box and a driving motor 7 connected to the rotating arm 6. The rotating arm 6 is fixedly connected to the motor shaft of the driving motor 7, and the driving motor 7 is a servo motor. After the driving motor 7 is running, the dust box is driven to rotate through the rotating arm 6 to adjust the position of the dust box.

[0030] The above is an exemplary description of the utility model in conjunction with the accompanying drawings. Obviously, the specific implementation of the utility model is not limited to the above-mentioned method. As long as various non-substantial improvements are made using the method concept and technical solution of the utility model; or the above concept and technical solution of the utility model are directly applied to other occasions without improvement, they are all within the protection scope of the utility model.

Claims

1. Evaporation material recovery device, characterized in that: It includes a dust box, an adsorption mechanism arranged inside the dust box and used for adsorbing organic materials, and a cooling mechanism for cooling the dust box. The adsorption mechanism contacts the inner wall surface of the dust box, and the cooling mechanism contacts the outer wall surface of the dust box.

2. The evaporation material recovery device according to claim 1, characterized in that: The adsorption mechanism comprises a first adsorption member, and the first adsorption member is arranged on the inner wall surface of the dust collecting box.

3. The evaporation material recovery device according to claim 2, characterized in that: The first adsorbent is activated carbon, and the activated carbon has a honeycomb structure.

4. The evaporation material recovery device according to claim 2, characterized in that: The adsorption mechanism comprises a second adsorption member, which is arranged at the bottom of the dust collecting box, the height of the second adsorption member is less than the height of the air inlet of the dust collecting box, and the material of the second adsorption member is metal.

5. The evaporation material recovery device according to claim 4, characterized in that: The second adsorption member is a spherical structure, and a plurality of second adsorption members are provided.

6. The evaporation material recovery device according to claim 4, characterized in that: The second adsorption component is made of silicon carbide.

7. The evaporation material recovery device according to any one of claims 1 to 6, characterized in that: The cooling mechanism comprises a cooling pipeline, which is arranged on the outer wall surface of the dust collecting box, and cooling water flows into the cooling pipeline.

8. The evaporation material recovery device according to any one of claims 1 to 6, characterized in that: It also includes a rotating mechanism connected to the dust box and used to control the dust box to rotate.

9. The evaporation material recovery device according to claim 8, characterized in that: The rotating mechanism comprises a rotating arm connected to the dust collecting box and a driving motor connected to the rotating arm.

Images