Jig for stripping optical film on surface of mask

Abstract

The utility model discloses a jig for stripping an optical film on the surface of a mask. Relates to the technical field of stripping operation. Comprising a stripping supporting piece which is used for prying an optical film on the surface of a mask plate and is supported between the mask plate and the optical film, and a supporting rod which is used for applying prying force to a stripping structure; the stripping supporting piece and the supporting rod are detachably mounted; according to the scheme, the structure is improved on the basis of the prior art, the stripping supporting pieces and the supporting rods are detachably installed, the supporting rods are matched with the multiple stripping supporting pieces, and the problems that in the stripping operation process, the optical film frame and the mask plate are repeatedly bonded, and the work of stripping the optical film on the surface of the mask plate is inconvenient are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of stripping operations, in particular to a jig for stripping an optical film on the surface of a mask plate. Background Art

[0002] The mask plate (also known as photomask, chrome plate) is a graphic master plate used in the photolithography process commonly used in micro-nano processing technology. Usually, the mask pattern structure is formed on a transparent glass substrate by opaque metal chromium, and then the pattern information is transferred to the product substrate through the exposure process.

[0003] The optical film of the mask is usually made of polymer materials. It is a transparent film used to cover the surface of the mask. It mainly plays a physical and chemical protection role for the mask. Physical protection: protect the pattern on the surface of the mask from physical damage during transportation or use. Prevent dust and other contaminants from falling directly on the surface of the mask and affecting the effect of the pattern circuit of the mask. Chemical protection: prevent chemical reagents or corrosive gases from chemically reacting with the surface of the mask.

[0004] When the optical film is affected by external stress and causes film breakage, wrinkling, or contamination, or when the accumulated exposure energy of the optical film has affected the optical film's surface light transmittance, optical film strength and other performance effects after long-term use, the optical film on the mask needs to be peeled off and replaced to continue the use of the mask.

[0005] Currently, when the optical film on the surface of the mask is peeled off, since there is a strong adhesive at the bottom of the optical film frame connecting to the mask, a special film prying jig is needed to pry up the optical film frame from the edge during the peeling operation to separate the optical film from the mask. When prying up a part of the optical film frame, the film prying jig needs to be transferred to other areas to pry up the optical film frame. Since the size of the optical film is relatively large, when it is moved to other areas for operation, the optical film frame pried up in front may fall down again and come into contact with the mask, and the optical film frame with a strong adhesive will be connected to the mask again, resulting in the need to pry the film repeatedly and dirty the surface again. Utility Model Content

[0006] The technical problem to be solved by the utility model is: in the process of stripping the mask plate, the traditional film prying jig can only pry up a part of the optical film frame. During the transfer process, the pried up optical film frame may fall down again and come into contact with the mask plate, and the optical film frame with a strong adhesive will be connected to the mask plate again, resulting in the need for repeated prying and further soiling of the surface. The utility model aims to provide a jig for stripping the optical film on the surface of the mask plate, which can be detachably installed by a stripping support member and a support rod, and the support rod cooperates with a plurality of stripping support members to solve the problem of repeated adhesion between the optical film frame and the mask plate during the stripping operation, and the inconvenience of stripping the optical film on the surface of the mask plate.

[0007] The utility model is realized by the following technical solutions:

[0008] This solution provides a jig for peeling off the optical film on the surface of a mask, including:

[0009] A peeling support member is used to pry up the optical film on the surface of the mask and is supported between the mask and the optical film;

[0010] The support rod is used to apply a prying force to the peeling structure; the peeling support member and the support rod are detachably mounted.

[0011] Working principle of this solution: In the process of peeling off the mask plate, the traditional film prying jig can only pry up the partial optical film frame. During the transfer process, the pried up optical film frame may fall down again and come into contact with the mask plate, and the optical film frame with strong adhesive will be connected to the mask plate again, resulting in the need to pry the film repeatedly and dirty the surface again. The purpose of this utility model is to provide a jig for peeling off the optical film on the surface of the mask plate, which can be detachably installed by the peeling support member and the support rod, and the support rod cooperates with a plurality of peeling support members to solve the problem of repeated adhesion between the optical film frame and the mask plate during the peeling operation, and the inconvenience of peeling off the optical film on the surface of the mask plate.

[0012] A further optimized solution is that the stripping support member includes a prying portion, a supporting portion and a connecting portion which are sequentially connected.

[0013] A further optimization solution is that the prying part, the supporting part and the connecting part are connected in one piece.

[0014] A further optimization scheme is that the prying part is a straight triangular prism, and the three side surfaces of the prying part serve as a prying surface, a first connecting surface and a prying bottom surface respectively, and the first connecting surface is connected to the supporting part.

[0015] A further optimization scheme is that the supporting part is a right quadrangular prism, and the three side surfaces of the supporting part serve as a supporting surface, a second connecting surface, a third connecting surface and a supporting bottom surface respectively, the second connecting surface is connected to the first connecting surface by coincidence, and the third connecting surface is connected to the connecting part.

[0016] A further optimization scheme is that the connecting part is a right quadrangular prism, and the four side surfaces of the connecting part serve as the fourth connecting surface, the fifth connecting surface, the sixth connecting surface and the connecting bottom surface respectively; the fourth connecting surface is connected to the third connecting surface, and the fifth connecting surface is detachably connected to the support rod.

[0017] A further optimization scheme is that the connecting bottom surface, the supporting bottom surface and the prying bottom surface are coplanar; the two bottom surfaces of the prying part, the two bottom surfaces of the connecting part, and the two bottom surfaces of the connecting part are coplanarly connected respectively.

[0018] A further optimization scheme is that the support rod is a quadrangular prism, and the four side surfaces of the support rod are respectively coplanar with the fourth connecting surface, the sixth connecting surface and the two bottom surfaces of the connecting part; one bottom surface of the support rod is detachably connected to the fifth connecting surface of the connecting part.

[0019] A further optimization solution is that the plane where the fifth connecting surface is located intersects with the plane where the connecting bottom surface is located.

[0020] A further optimization solution is that the fourth connecting surface is partially overlapped and connected with the third connecting surface.

[0021] Compared with the prior art, the utility model has the following advantages and beneficial effects:

[0022] The utility model provides a jig for stripping the optical film on the surface of the mask plate; the structure is improved on the basis of the existing stripping jig, and the stripping support piece and the support rod are detachably installed. When stripping the optical film on the surface of the mask plate, the optical film frame can be pried up by the stripping support piece. After the support rod is removed, the optical film frame can be easily and quickly separated and play a supporting role in conjunction with a plurality of stripping support pieces, so as to prevent the optical film frame and the mask plate from sticking together again during the operation, and the work of stripping the optical film on the surface of the mask plate can be completed conveniently. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The drawings described herein are used to provide a further understanding of the embodiments of the present utility model, constitute a part of this application, and do not constitute a limitation of the embodiments of the present utility model. In the drawings:

[0024] Figure 1 A schematic diagram of a fixture structure for peeling off an optical film on the surface of a mask;

[0025] Figure 2 It is a schematic diagram of the structure of the peeling support member;

[0026] Figure 3 A partial schematic diagram of the assembly of the stripping support member and the support rod;

[0027] Figure 4 It is a schematic diagram of the assembly of the stripping support member and the support rod;

[0028] Figure 5 A schematic diagram of the process of using a jig to peel off the optical film on the surface of the mask;

[0029] Figure 6 A schematic diagram of the process B of using a jig for peeling off the optical film on the surface of a mask;

[0030] Marks and corresponding parts names in the attached drawings:

[0031] 1-peeling support, 101-prying surface, 102-first connecting surface, 103-prying bottom surface, 111-supporting surface, 112-second connecting surface, 113-third connecting surface, 114-supporting bottom surface, 121-fourth connecting surface, 122-fifth connecting surface, 123-sixth connecting surface, 124-connecting bottom surface, 2-support rod, 3-optical film, 4-mask. DETAILED DESCRIPTION

[0032] In order to make the purpose, technical solutions and advantages of the utility model more clearly understood, the utility model is further described in detail below in conjunction with embodiments and drawings. The schematic implementation manner of the utility model and its description are only used to explain the utility model and are not intended to limit the utility model.

[0033] In the process of peeling off the mask, the traditional prying jig can only pry up the partial optical film frame. During the transfer process, the pried optical film frame may fall again and come into contact with the mask. The optical film frame with strong adhesive will be connected to the mask again, resulting in the need to pry the film repeatedly and dirty the surface again. In view of this, the present invention provides the following embodiments to solve the above technical problems:

[0034] Example 1

[0035] This embodiment provides a jig for peeling off the optical film on the surface of the mask, such as Figure 1 As shown, including:

[0036] The peeling support 1 is used to pry up the optical film on the surface of the mask and is supported between the mask and the optical film;

[0037] The support rod 2 is used to apply a prying force to the peeling structure; the peeling support member and the support rod are detachably mounted.

[0038] like Figure 2 and Figure 3As shown, the stripping support 1 includes a prying portion, a supporting portion and a connecting portion connected in sequence. The support rod 2 needs to withstand the applied external force, and a metal alloy material with a certain hardness is used. The stripping support needs to have good chemical corrosion resistance. At the same time, because it is in direct contact with the mask and the optical film frame, it needs to have anti-static properties, and the hardness should not be too high, so the material used is polytetrafluoroethylene and Teflon. The prying portion, the supporting portion and the connecting portion are connected in one piece.

[0039] The prying part is a right triangular prism, and the three side surfaces of the prying part are respectively used as a prying surface 101, a first connecting surface 102 and a prying bottom surface 103, wherein the first connecting surface 102 is connected to the supporting part. The angle between the prying surface 101 and the prying bottom surface 103 is 39° to 41°, and in the specific implementation process, it is 40° in this embodiment.

[0040] The support part is a right quadrangular prism, and the three side surfaces of the support part are respectively used as a support surface 111, a second connection surface 112, a third connection surface 113 and a support bottom surface 114. The second connection surface 112 is connected to the first connection surface 102 by coincidence, and the third connection surface 113 is connected to the connection part. The angle between the support surface 111 and the prying surface 101 is 159° to 161°, and in the specific implementation process, it is 160° in this embodiment.

[0041] The connecting part is a right quadrangular prism, and the four side surfaces of the connecting part serve as the fourth connecting surface 121, the fifth connecting surface 122, the sixth connecting surface 123 and the connecting bottom surface 124 respectively; the fourth connecting surface 121 is connected to the third connecting surface 113, and the fifth connecting surface 122 is detachably connected to the support rod 2. The angle between the connecting bottom surface 124 and the sixth connecting surface 123 is 119° to 121°, and in the specific implementation process, it is 120° in this embodiment. The connecting bottom surface 124, the supporting bottom surface 114 and the prying bottom surface 103 are coplanar; the two bottom surfaces of the prying part, the two bottom surfaces of the connecting part, and the two bottom surfaces of the connecting part are respectively coplanarly connected.

[0042] The support rod 2 is a quadrangular prism, and the four side surfaces of the support rod are respectively coplanar with the fourth connecting surface 121, the sixth connecting surface 123 and the two bottom surfaces of the connecting part; one bottom surface of the support rod 2 is detachably connected to the fifth connecting surface 122 of the connecting part.

[0043] The plane where the fifth connecting surface 122 is located intersects with the plane where the connecting bottom surface 124 is located.

[0044] The fourth connection surface 121 is partially overlapped and connected with the third connection surface 113 .

[0045] Example 2

[0046] On the basis of the previous embodiment, the peeling support member and the support rod of this embodiment are detachably installed through the protrusion and recessed groove structure, a groove is provided on a bottom surface of the support rod 2, and an integrated protrusion is provided on the fifth connecting surface 122, and the protrusion matches the groove;

[0047] As an optimization, the protrusion includes an integrated first protrusion and a second protrusion, the first protrusion is installed on the fifth connecting surface 122, and the second protrusion is vertically connected to the first protrusion; the corresponding groove on the bottom surface of the support rod 2 includes a first groove and a second groove that are connected; the first groove is perpendicular to the second groove. When in use, the protrusion of the stripping support member is embedded in the groove from the side of the support rod 2. This embodiment adopts a lateral loading method to combine the support rod and the stripping support member.

[0048] like Figure 4-Figure 6 As shown, when in use, the support rod 2 is installed on the first peeling support 1, and the optical film 3 is first pried off the mask 4 by the prying part of the first peeling support, and then the optical film is placed on the supporting part, and then the support rod is removed from the first peeling support. The first peeling support can support the optical film in situ, and the support rod is installed on the second peeling support to peel off the optical film in other directions; when using a jig to peel off the optical film on the surface of the mask, the direction of the force applied to the support rod is perpendicular to the direction in which the protrusion is embedded in the groove, so the support rod will not be easily removed from the peeling support; when disassembly is required, the peeling support can be taken out in the direction in which the protrusion is embedded in the groove.

[0049] The jig is simple and convenient to use. When peeling off the optical film on the surface of the mask, it can be used to pry up the optical film frame, and can also be easily and quickly separated and play a supporting role to prevent the optical film frame and the mask from sticking together again during the operation, making it convenient to peel off the optical film on the surface of the mask. While reducing repetitive prying operations, it also reduces the risk of damage to the mask and the optical film during the operation of peeling the optical film from the mask.

[0050] The specific implementation methods described above further illustrate the purpose, technical solutions and beneficial effects of the utility model in detail. It should be understood that the above description is only the specific implementation method of the utility model and is not used to limit the protection scope of the utility model. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the utility model should be included in the protection scope of the utility model.

Claims

1. A jig for peeling off an optical film on the surface of a mask, characterized in that: include: A peeling support member is used to pry up the optical film on the surface of the mask and is supported between the mask and the optical film; The support rod is used to apply a prying force to the peeling structure; the peeling support member and the support rod are detachably mounted.

2. A jig for peeling off an optical film on a mask surface according to claim 1, characterized in that: The peeling support member includes a prying portion, a supporting portion and a connecting portion which are sequentially connected in sequence.

3. The jig for peeling off the optical film on the surface of the mask according to claim 2, characterized in that: The prying portion, the supporting portion and the connecting portion are integrally connected.

4. The jig for peeling off the optical film on the surface of the mask according to claim 3, characterized in that: The prying part is a straight triangular prism, and the three side surfaces of the prying part serve as a prying surface, a first connecting surface and a prying bottom surface respectively, and the first connecting surface is connected to the supporting part.

5. The jig for peeling off the optical film on the surface of the mask according to claim 4, characterized in that: The supporting part is a right quadrangular prism, and the three side surfaces of the supporting part serve as a supporting surface, a second connecting surface, a third connecting surface and a supporting bottom surface respectively. The second connecting surface is connected to the first connecting surface by coincidence, and the third connecting surface is connected to the connecting part.

6. The jig for peeling off the optical film on the surface of the mask according to claim 5, characterized in that: The connecting part is a right quadrangular prism, and the four side surfaces of the connecting part serve as a fourth connecting surface, a fifth connecting surface, a sixth connecting surface and a connecting bottom surface respectively; the fourth connecting surface is connected to the third connecting surface, and the fifth connecting surface is detachably connected to the support rod.

7. The jig for peeling off the optical film on the surface of the mask according to claim 6, characterized in that: The connecting bottom surface, the supporting bottom surface and the prying bottom surface are coplanar; the two bottom surfaces of the prying part, the two bottom surfaces of the connecting part, and the two bottom surfaces of the connecting part are coplanarly connected.

8. The jig for peeling off the optical film on the surface of the mask according to claim 6, characterized in that: The support rod is a quadrangular prism, and the four side surfaces of the support rod are respectively coplanar with the fourth connecting surface, the sixth connecting surface and the two bottom surfaces of the connecting part; a bottom surface of the support rod is detachably connected to the fifth connecting surface of the connecting part.

9. The jig for peeling off the optical film on the surface of the mask according to claim 6, characterized in that: The plane where the fifth connecting surface is located intersects with the plane where the connecting bottom surface is located.

10. The jig for peeling off the optical film on the surface of the mask according to claim 6, characterized in that: The fourth connection surface is partially overlapped and connected with the third connection surface.

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