Carrier carrying trolley

Abstract

The utility model provides a carrier carrying trolley which is provided with a stock bin and a containing part, the stock bin is exactly located above a first flow channel when the stock bin is located to a locking position by a locating mechanism, the containing part is exactly located below the stock bin and used for containing the first flow channel, and the front side and the upper side of the stock bin are open openings. And an opening through which the first runner passes up and down is formed in the bottom of the stock bin. The carrier carrying trolley provided by the utility model can be matched with the positioning mechanism and the first runner, so that the lower carrier plate or the upper cover can be put conveniently and quickly.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor processing, and in particular relates to a carrier transport trolley. Background Art

[0002] In the field of semiconductor processing, the cleaning of the wafer (usually refers to the substrate of silicon wafer or other semiconductor materials) is a crucial step. This process ensures that the surface of the wafer will not be contaminated during subsequent processing, such as lithography, etching, chemical vapor deposition (CVD), etc., thus ensuring the performance and reliability of semiconductor devices.

[0003] In order to support and fix the blank and ensure that the blank is not mechanically damaged during the cleaning process, the blank needs to be fixed in a carrier (composed of a download plate and an upper cover) before cleaning.

[0004] In the prior art, the blanks need to be assembled into the carrier manually, which is inefficient and costly.

[0005] In order to improve the efficiency of loading the blanks into the carrier, it is necessary to provide a carrier transport trolley for conveniently and quickly placing the download plate or cover plate. Utility Model Content

[0006] Based on this, in order to solve the above technical problems, a carrier transport trolley is provided.

[0007] In order to solve the above technical problems, the utility model adopts the following technical solutions:

[0008] A carrier transport trolley, characterized in that the trolley has a silo that is located just above a first flow channel when the trolley is positioned in a locked position by a positioning mechanism, and a accommodating portion that accommodates the first flow channel just below the silo, the front side and the upper side of the silo are both open, and the bottom of the silo has an opening for the first flow channel to pass up and down.

[0009] The carrier transport trolley of the utility model can cooperate with the positioning mechanism and the first flow channel, so that the download plate or the upper cover can be dropped conveniently and quickly. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 It is a three-dimensional structural schematic diagram of an embodiment of the utility model;

[0011] Figure 2 It is a front structural schematic diagram of an embodiment of the utility model;

[0012] Figure 3 This is a schematic diagram of the structure of the retaining edge of an embodiment of the utility model;

[0013] Figure 4It is a schematic diagram of an embodiment of the utility model;

[0014] Figure 5 This is a schematic diagram of the structure of a locking unit according to an embodiment of the utility model;

[0015] Figure 6 for Figure 5 Schematic diagram of the rear view structure. DETAILED DESCRIPTION

[0016] The following will illustrate the implementation methods of the utility model in conjunction with the drawings in the specification. It should be noted that the implementation methods involved in this specification are not exhaustive and do not represent the only implementation methods of the utility model. The following corresponding embodiments are only for the purpose of clearly illustrating the utility model content of the utility model patent, and are not intended to limit its implementation methods. For ordinary technicians in this field, different forms of changes and modifications can be made on the basis of the description of this embodiment. All obvious changes or modifications that belong to the technical concept and utility model content of the utility model are also within the scope of protection of the utility model.

[0017] like Figure 1 and Figure 4 As shown, this embodiment provides a carrier transport cart 1250 , including a bottom plate 1251 , a back plate 1252 , a silo 1253 and a receiving portion 1254 .

[0018] The rear side of the bottom plate 1251 is connected to the lower side of the back plate 1252. A brake part 1251a and a plurality of pulleys 1251b are provided on the lower surface of the bottom plate 1251. A cart handle 1252a is provided on the upper position of the rear surface of the back plate 1252. Cross beams 1252b extending horizontally forward are respectively provided on the left and right sides of the front middle surface of the back plate 1252.

[0019] like Figure 1 As shown, a positioning groove 1252c corresponding to the positioning unit 1230 is provided on the outer side surface of the cross beam 1252b.

[0020] The positioning unit 1230 includes a pair of positioning components, which are symmetrically arranged on the left and right sides and are used to position the trolley 1250 on the left and right sides.

[0021] Figure 4 The positioning assembly on the right side of the positioning unit 1230 is shown, which includes a support plate 1231, a first pulley 1232 and a second pulley 1233, see Figure 5 .

[0022] The support plate 1231 is arranged vertically, and its left side opposite to the right side of the trolley 1250 is provided with a sliding rod 1231a and a mounting plate 1231b extending horizontally toward the trolley 1250. There are two sliding rods 1231a, which are arranged up and down and located on the front side of the mounting plate 1231b. The two sliding rods 1231a are fixed to the support plate 1231 by a fixing plate 1231c.

[0023] The first pulley 1232 can rotate horizontally and is used to cooperate with the positioning groove 1252c to realize the positioning of the trolley 1250. The upper and lower ends of the rotating shaft 1232a are respectively slidably mounted on the two sliding rods 1231a. Two springs 1234 are respectively mounted on the two sliding rods 1231a between the rotating shaft 1232a and the fixed plate 1231c. Figure 5 The slide bar 1231a and the spring 1234 are shown on the upper side.

[0024] The second pulley 1233 can rotate horizontally. There are two of them, which are used to guide the trolley 1250 when it is pushed into the locking position. The two second pulleys 1233 are arranged front and back, and the rotating shaft of each second pulley 1233 is arranged on the mounting plate 1231b.

[0025] like Figure 1 As shown, the silo 1253 is fixed on the crossbeam 1252b, and the space between the silo 1253 and the bottom plate 1251 forms the above-mentioned receiving portion 1254. When the trolley 1250 is pushed into the locking position, the silo 1253 is located just above the first flow channel 1240, and at the same time, the receiving portion 1254 is just below the silo 1253 to accommodate the first flow channel 1240. Figure 4 .

[0026] The silo 1253 is used for stacking materials up and down, such as Figure 1 As shown, it is composed of left and right side plates 1253a and a lower side plate, so its front side and upper side are open, and the lower side plate has an opening for the first flow channel 1240 to pass through up and down.

[0027] In order to prevent the material from falling out of the front opening of the silo 1253 when the trolley is pushed, Figure 2 As shown, the left edge of the front opening of the silo 1253 is provided with a retaining edge 1255. Figure 1 and Figure 3 As shown, the retaining edge 1255 includes a connecting strip 1255a and a retaining plate 1255b.

[0028] like Figure 1 As shown, the connecting strip 1255a is connected to the outer side of the left side plate 1253a of the silo 1253, as shown in FIG. Figure 3As shown, left and right horizontal slide rails 1255a-1 are respectively provided on the upper and lower sides of the side (i.e., the front side) of the connecting strip 1255a facing the baffle 1255b, two spring seats 1255a-2 are provided between the two left and right horizontal slide rails 1255a-1, and a limiting pin 1255a-3 and a stop protrusion 1255a-4 are provided between the slide rail 1255a-1 and the spring seat 1255a-2.

[0029] The baffle 1255b is used to block the front opening of the silo 1253 at the initial position. Figure 3 As shown, the rear side is provided with a sliding seat 1255b-1 corresponding to the sliding rail 1255a-1, a spring seat opposite to the spring seat 1255a-2 (not shown in the figure), a limiting hole 1255b-2 corresponding to the limiting pin 1255a-3 and a groove 1255b-3 corresponding to the blocking protrusion 1255a-4.

[0030] Among them, the sliding seat 1255b-1 is slidably arranged on the sliding rail 1255a-1, so as to realize the left and right horizontal sliding cooperation between the baffle 1255b and the front side of the connecting strip 1255a, and a return spring 1255c is arranged between the two left and right opposite spring seats. The limiting pin 1255a-3 passes through the limiting hole 1255b-2 to play a limiting role, and the blocking protrusion 1255a-4 and the groove 1255b-3 also play a limiting role.

[0031] like Figure 3 As shown, the baffle 1255b has a claw opening 1255b-4, and the corresponding side opening unit 1270 includes a claw portion 1271, left and right horizontal telescopic units 1272 and a support frame 1273, see Figure 2 .

[0032] When the trolley is pushed into the locking position, the claw portion 1271 just extends into the claw opening 1255b-4. Driven by the left and right horizontal telescopic units 1272 (such as cylinders), the claw portion 1271 drives the baffle 1255b to slide horizontally to the open position.

[0033] The left and right horizontal telescopic units 1272 are fixed on a support frame 1273 , and a sensor 1273 a is also provided on the support frame 1273 for detecting whether the baffle 1255 b moves to the open position.

[0034] like Figure 6As shown, after the trolley 1250 is positioned in the locking position by the positioning unit 1230, it is locked by the locking unit 1280. The locking unit 1280 includes a locking tongue 1281 and a lock body 1282. The locking tongue 1281 is fixed to the front end surface of the bottom plate 1251 of the trolley 1250, and the lock body 1282 is fixed on the support frame 1273. When the trolley 1250 is positioned in the locking position by the positioning unit 1230, the locking tongue 1281 just extends into the lock hole of the lock body 1282, thereby locking the trolley 1250.

[0035] Taking the loading of the download plates of the carrier as an example, when in use, the trolley 1250 carrying the download plates stacked up and down is manually pushed into the locking position, and the trolley 1250 is locked by the locking unit 1280. After the trolley 1250 is locked, the locking unit 1280 will output a signal. According to the signal output by the locking unit 1280, it can be detected that the trolley 1250 has been locked. At this time, the retaining edge 1255 is opened, and at the same time, the first flow channel 1240 rises and docks with the second flow channel 1211, so that all the download plates on the trolley 1250 are lifted up and transported to the second flow channel 1211. The second flow channel 1211 lifts the download plates in turn, and the download plates are placed on the main flow channel by the vacuum suction cup. After all the download plates on the trolley 1250 are transported to the second flow channel 1211, the locking unit 1280 can be remotely controlled by the touch screen to unlock the trolley 1250.

[0036] Among them, after the download plate in the silo 1253 is transported to the second flow channel 1211 by the first flow channel 1240, the first flow channel 1240 returns to the initial position, the left and right horizontal telescopic units 1272 of the side guard opening unit 1270 stop working, and under the action of the return spring 1255c, the baffle 1255b returns to the initial position from the open position.

[0037] It can be seen from the above that the carrier transport trolley provided in the embodiment of the present application can cooperate with the positioning mechanism and the first flow channel, so that the download plate or the upper cover can be dropped conveniently and quickly.

[0038] Obviously, those skilled in the art should realize that the above embodiments are only used to illustrate the present invention, and are not used to limit the present invention. As long as they are within the spirit of the present invention, any changes or modifications to the above embodiments will fall within the scope of the claims of the present invention.

Claims

1. A vehicle transport trolley, characterized in that: The trolley has a silo that is located just above the first flow channel when it is positioned in a locked position by a positioning mechanism, and a accommodating portion that accommodates the first flow channel just below the silo. The front and upper sides of the silo are both open, and the bottom of the silo has an opening for the first flow channel to pass up and down.

2. A carrier transport vehicle according to claim 1, characterized in that: The left and right sides of the trolley are both provided with positioning grooves corresponding to the positioning mechanism.

3. A carrier transport vehicle according to claim 1, characterized in that: A side guard is provided on one of the left and right edges of the front opening of the silo, and the side guard includes a connecting strip and a baffle for blocking the front opening in an initial position, the connecting strip is connected to the outer side of the side plate of the silo, the baffle is horizontally slidably matched with the front side surface of the connecting strip, and a return spring is arranged in the left and right horizontal directions between the two for allowing the baffle to return from the open position to the initial position, and the baffle has a claw opening for the claw of the side guard opening unit to just extend into when the trolley is positioned at the locking position.

4. A carrier transport vehicle according to claim 2, characterized in that: The trolley includes a bottom plate and a back plate, the rear side of the bottom plate is connected to the lower side of the back plate, a brake part and a plurality of pulleys are provided on the lower surface of the bottom plate, a handle is provided on the upper position of the rear surface of the back plate, and cross beams extending horizontally forward are provided on the left and right sides of the front middle surface of the back plate, respectively. The silo is fixed on the cross beam, and the space between the cross beam and the bottom plate forms the accommodating portion.

5. A carrier transport vehicle according to claim 4, characterized in that: The positioning groove is arranged on the outer side surface of the cross beam.

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