Graphite boat and coating system

Abstract

The utility model provides a graphite boat and a coating system, relates to the technical field of solar cell equipment, and solves the technical problem that the utilization rate of the space in a reaction chamber is low due to the adoption of a square structure in the graphite boat in the prior art. The graphite boat comprises a plurality of stacked graphite boat sheets, the widths of the stacked graphite boat sheets have at least two sizes, and the plurality of graphite boat sheets are stacked from one side to the other side according to the sequence that the widths are reduced in sequence; or the plurality of graphite boat sheets are stacked from the middle part to the two sides according to the sequence that the widths are reduced in sequence. The graphite boat sheets with multiple sizes are stacked in the reaction chamber of the tubular coating furnace, and the space, far away from the center, in the reaction chamber can be fully utilized, so that the single-time sheet loading amount of the graphite boat can be increased, the space utilization rate of the reaction chamber is improved, and the productivity is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of solar cell equipment, in particular to a graphite boat and a coating system. Background Art

[0002] The technical principle of plasma enhanced chemical vapor deposition (PECVD) is to use low-temperature plasma as an energy source. The sample is placed on the cathode of glow discharge under low pressure. The glow discharge is used to heat the sample to a predetermined temperature, and then an appropriate amount of reaction gas is introduced. The gas undergoes a series of chemical reactions and plasma reactions to form a solid film on the sample surface.

[0003] Graphite boat is an important component in the PECVD coating process, which directly affects the distribution of electric field, plasma generation, gas flow direction, film quality, etc. The current graphite boat adopts a square structure, while the reactor tube is mainly a round tube structure, which makes the space utilization rate of the reaction chamber of the reactor tube low, the single loading volume is low, and the production capacity is low. Utility Model Content

[0004] The purpose of the utility model is to provide a graphite boat and a coating system to solve at least one technical problem in the prior art. The preferred technical solution among the many technical solutions provided by the utility model can produce many technical effects as described below.

[0005] In order to achieve the above purpose, the utility model provides the following technical solutions:

[0006] The graphite boat provided by the utility model comprises a plurality of stacked graphite boat sheets, wherein the widths of the plurality of stacked graphite boat sheets have at least two sizes;

[0007] The plurality of graphite boat sheets are stacked in a sequence of decreasing width from one side to the other side;

[0008] Alternatively, the plurality of graphite boat sheets are stacked in a sequence of decreasing widths from the middle to both sides.

[0009] As a further improvement of the utility model, the multiple stacked graphite boat sheets include more than two boat sheet groups: wherein the widths of the graphite boat sheets in the same boat sheet group are the same, and the widths of the graphite boat sheets in different boat sheet groups are different.

[0010] As a further improvement of the utility model, the plurality of stacked graphite boat sheets include first graphite boat sheets and second graphite boat sheets that are alternately and insulated; the plurality of first graphite boat sheets are electrically connected together, and the plurality of second graphite boat sheets are electrically connected together;

[0011] The graphite boat further comprises a support rod, a first electrode rod and a second electrode rod, a plurality of stacked graphite boat sheets are arranged on the support rod, and the first electrode rod and the second electrode rod are arranged at the bottom of the graphite boat;

[0012] The first electrode rod is electrically connected to the plurality of first graphite boats, and the second electrode rod is electrically connected to the plurality of second graphite boats.

[0013] As a further improvement of the present invention, the first electrode rod and the second electrode rod are both fixedly connected to the support rod, and the support rod is used to support and fix the first electrode rod and the second electrode rod.

[0014] As a further improvement of the utility model, the plurality of stacked graphite boat sheets include a first end and a second end opposite to each other along the length direction of the graphite boat;

[0015] The first electrode rod is electrically connected to first ends of the first graphite boats, and the second electrode rod is electrically connected to second ends of the second graphite boats.

[0016] As a further improvement of the present invention, the first electrode rod and the second electrode rod are respectively arranged on the same side in the length direction of the graphite boat.

[0017] As a further improvement of the present invention, a plurality of the first graphite boat sheets are connected to the first electrode rod via a positive conductive block; a plurality of the second graphite boat sheets are connected to the second electrode rod via a negative conductive block.

[0018] As a further improvement of the utility model, the positive electrode conductive block includes a first positive electrode lower support block, a first positive electrode upper support block and a plurality of positive electrode conductive spacers, and the negative electrode conductive block includes a first negative electrode lower support block, a first negative electrode upper support block and a plurality of negative electrode conductive spacers;

[0019] The first positive electrode lower support block and the first negative electrode lower support block are arranged on the support rod, the first positive electrode lower support block is connected to the first electrode rod; the first negative electrode lower support block is connected to the second electrode rod; in the same boat sheet group, the two first graphite boat sheets arranged at intervals are connected by a positive electrode conductive spacer, and the two second graphite boat sheets arranged at intervals are connected by a negative electrode conductive spacer;

[0020] The first positive electrode upper support block is connected to a graphite boat which is disposed in the first boat group and is closest to the second boat group and is electrically connected to the first electrode rod, and the first negative electrode upper support block is connected to a graphite boat which is disposed in the first boat group and is closest to the second boat group and is electrically connected to the second electrode rod;

[0021] The first boat sheet group includes the boat sheet group with the largest width; and the second boat sheet group includes the boat sheet group remaining in the graphite boat after the first boat sheet group is removed.

[0022] As a further improvement of the utility model, the positive electrode conductive block further includes a second positive electrode lower support block and a second positive electrode upper support block, and the negative electrode conductive block further includes a second negative electrode lower support block and a second negative electrode upper support block;

[0023] The first positive electrode upper support block extends toward the second negative electrode upper support block, and an insulating spacer is provided between the first positive electrode upper support block and the second negative electrode upper support block, and the first negative electrode upper support block extends toward the second positive electrode upper support block, and an insulating spacer is provided between the second positive electrode upper support block and the first negative electrode upper support block;

[0024] The first positive electrode lower support block extends toward the second negative electrode lower support block, and an insulating spacer is provided between the first positive electrode lower support block and the second negative electrode lower support block; the first negative electrode lower support block extends toward the second positive electrode lower support block, and an insulating spacer is provided between the second positive electrode lower support block and the first negative electrode lower support block.

[0025] As a further improvement of the present invention, the first graphite boat sheet and the second graphite boat sheet each include at least one boat ear, the first graphite boat sheet is connected to at least one of the positive electrode conductive blocks through the boat ear, and the second graphite boat sheet is connected to at least one of the negative electrode conductive blocks through the boat ear.

[0026] As a further improvement of the utility model, the graphite boat sheet has a first end and a second end which are arranged opposite to each other in the length direction, the first end includes one or two boat ears, and the second end includes one or two boat ears.

[0027] As a further improvement of the utility model, the graphite boat sheet is provided with placement grooves of more than one specification and size, and the placement grooves are used to place electrode sheets matching the size of the placement grooves.

[0028] As a further improvement of the present invention, the length directions of more than one placement grooves are parallel to each other, and the width directions of more than one placement grooves are parallel to each other.

[0029] A coating system comprises a tubular coating furnace and at least one group of graphite boats as described above.

[0030] As a further improvement of the utility model, at least two groups of graphite boats are provided, and the graphite boats are arranged in sequence in the tubular coating furnace along the length direction of the tubular coating furnace.

[0031] As a further improvement of the utility model, the graphite boat sheets of the graphite boat are arranged in a horizontal stack or a vertical stack.

[0032] The beneficial effects of the present invention are as follows: the graphite boat and coating system provided by the present invention comprise a plurality of stacked graphite boat sheets, wherein the widths of the plurality of stacked graphite boat sheets have at least two sizes, and the plurality of graphite boat sheets are stacked from one side to the other in the order of decreasing width; or, the plurality of graphite boat sheets are stacked from the middle to both sides in the order of decreasing width, which can be rationally arranged according to the internal space of the reaction chamber of the tubular coating furnace, making full use of the space away from the center of the reaction chamber, thereby increasing the single-time loading capacity of the graphite boat, improving the space utilization rate of the reaction chamber, and improving the production capacity.

[0033] Furthermore, in the utility model, the first electrode rod and the second electrode rod are connected to the first end and the second end of the graphite boat respectively, and the first electrode rod and the second electrode rod are connected to the positive and negative electrodes outside respectively. Since the first electrode rod and the second electrode rod are located at the first end and the second end of the graphite boat, under high frequency conditions, no power loss will be generated at the rear end of the graphite boat, and the electromagnetic field distribution of the graphite boat sheet can be made more uniform, avoiding the problem of standing wave power loss and uneven electromagnetic field distribution at the rear end of the graphite boat, thereby effectively improving the coating quality.

[0034] In addition, in the utility model, the first electrode rod and the second electrode rod are arranged at the bottom of the tubular coating furnace, so that after the graphite boat is placed on the support rod, the graphite boat is directly electrically connected to the first electrode rod and the second electrode rod, which can avoid poor contact caused by deformation of the electrode rods. Moreover, since the support point is arranged at the bottom of the tubular coating furnace, deformation fatigue of the electrode rods can be avoided, thereby effectively reducing the failure rate during the coating process.

[0035] Preferably, the first electrode rod and the second electrode rod are connected to a support rod, and the first electrode rod and the second electrode rod are supported by the support rod, so that the relative positions of the first electrode rod and the second electrode rod and the support rod can be ensured, and the connection effect of the first electrode rod, the second electrode rod and the graphite boat can be effectively guaranteed, and deformation fatigue of the electrode rods can be avoided, so as to more effectively reduce the failure rate in the coating process. BRIEF DESCRIPTION OF THE DRAWINGS

[0036] In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0037] Figure 1 This is a schematic diagram of the graphite boat tube installation structure of the utility model;

[0038] Figure 2 It is a schematic diagram of the structure of a graphite boat from one viewing angle of the first embodiment of the utility model;

[0039] Figure 3 It is a schematic diagram of the structure of a graphite boat from another perspective of the first embodiment of the utility model;

[0040] Figure 4 It is a partial enlarged structural schematic diagram of the first embodiment of the utility model;

[0041] Figure 5 It is a structural schematic diagram of a double-boat structure from one perspective in the first embodiment of the utility model;

[0042] Figure 6 It is a structural schematic diagram of the double-boat structure in another perspective in the first embodiment of the utility model;

[0043] Figure 7 It is a schematic diagram of the structure of a graphite boat of the second embodiment of the utility model;

[0044] Figure 8 This is a schematic diagram of the structure of a half-sheet double-arranged long-side graphite boat sheet of the utility model;

[0045] Fig. 9 This is a schematic diagram of the structure of the whole-piece double-arranged long-side graphite boat sheet of the utility model;

[0046] Fig.10 It is a schematic diagram of the structure of the double-arranged long and short side graphite boat sheet of the utility model;

[0047] Fig.11 This is a schematic diagram of the structure of the single-arranged long-side graphite boat sheet of the utility model;

[0048] Fig.12 It is a schematic diagram of the structure of the single-arranged short-side graphite boat sheet of the utility model.

[0049] In the figure, 1, graphite boat; 2, first electrode rod; 3, second electrode rod; 4, support rod; 10, reaction furnace tube; 11, first boat group; 12, 13, 14, 15, 16, 17, second boat group; 101, first graphite boat; 102, second graphite boat; 111, positive electrode conductive spacer; 112, negative electrode conductive spacer; 113, first positive electrode upper support block; 114, second positive electrode upper support block; 115, second negative electrode upper support block; 116, first negative electrode upper support block; 117, first positive electrode lower support block; 118, second positive electrode lower support block; 119, second negative electrode lower support block; 110, first negative electrode lower support block; 1111, insulating pad. DETAILED DESCRIPTION

[0050] Please refer to the attached figure below Figures 1 to 12 And the text content understands the content of the utility model and the difference between the utility model and the prior art. The following is a further detailed description of the technical solution (including the preferred technical solution) of the utility model by means of the accompanying drawings and the enumeration of some optional embodiments of the utility model. It should be noted that: any technical feature and any technical solution in the present embodiment are one or more of a variety of optional technical features or optional technical solutions. In order to describe the need for brevity, it is impossible to exhaustively list all the alternative technical features and alternative technical solutions of the utility model in this document, and it is not convenient for the implementation of each technical feature to emphasize that it is one of the optional multiple implementations, so those skilled in the art should know that: any technical means provided by the utility model can be replaced or any two or more technical means or technical features provided by the utility model can be combined with each other to obtain a new technical solution. Any technical feature and any technical solution in this embodiment do not limit the scope of protection of the utility model. The scope of protection of the utility model should include any alternative technical solutions that can be thought of by those skilled in the art without creative labor and new technical solutions obtained by combining any two or more technical means or technical features provided by the utility model.

[0051] In the description of the present invention, it should be noted that, unless otherwise specified, "multiple" means two or more than two; the directions or positional relationships indicated by the terms "upper", "lower", "left", "right", "inner", "outer", "front end", "rear end", "head", "tail", etc. are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", "third", etc. are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0052] In the description of the present invention, it is also necessary to explain that, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to the specific circumstances.

[0053] The utility model provides a graphite boat and a coating system for improving the space utilization rate of a reaction chamber.

[0054] Combine the following Figures 1 to 12 The technical solution provided by the utility model is described in more detail.

[0055] The utility model provides a graphite boat, which comprises a plurality of graphite boat sheets which are stacked, wherein the widths of the plurality of graphite boat sheets which are stacked have at least two sizes.

[0056] The graphite boat provided by the utility model is formed by stacking graphite boat sheets of various sizes, which can increase the single-time loading amount of the graphite boat within the limited space in the reaction chamber, improve the space utilization rate of the reaction chamber, and improve the production capacity.

[0057] Specifically, the plurality of graphite boat sheets are stacked from one side to the other side in a decreasing order of width; or, the plurality of graphite boat sheets are stacked from the middle to both sides in a decreasing order of width.

[0058] In this further improvement, the multiple graphite boat sheets are stacked from one side to the other in the order of decreasing width. Specifically, the multiple graphite boat sheets can be stacked from the left side to the right side in the order of decreasing width, from the bottom side to the top side in the order of decreasing width, from the top side to the bottom side in the order of decreasing width, or from the right side to the left side in the order of decreasing width. Among them, the multiple graphite boat sheets can be stacked from the left side to the right side in the order of decreasing width and from the right side to the left side in the order of decreasing width. Specifically, the multiple graphite boat sheets can be stacked from the left side to the right side in the order of decreasing width and stacked from the right side to the left side in the order of decreasing width. Specifically, the support rod is set at the bottom of the graphite boat to support the graphite boat; the stacking from the bottom side to the top side in the order of decreasing width is specifically implemented by: the support rod is set at the bottom of the graphite boat to support the graphite boat; the stacking from the top side to the bottom side in the order of decreasing width is specifically implemented by: the graphite boat is positioned by the support rod in a hanging manner.

[0059] Since the support rod and the manipulator occupy a certain space, the graphite boat sheet in the above embodiment becomes narrower as it moves to one side. In some other embodiments, the space occupied by the support rod may be reduced by changing the position of the support rod or the supporting method, and this space may be used to place the graphite boat sheet. The specific arrangement of the graphite boat sheet may be as follows: a plurality of the graphite boat sheets are stacked from the middle to both sides in the order of decreasing width. It is understandable that a plurality of the graphite boat sheets may be stacked from the middle to the upper and lower sides in the order of decreasing width, or may be stacked from the middle to the left and right sides in the order of decreasing width.

[0060] It should be noted that the sequential reduction in the above text should be understood as sequential reduction according to the width size of the graphite boats, wherein the graphite boats may have the same width, and graphite boats of the same width are arranged adjacent to each other.

[0061] As a further improvement of the utility model, the plurality of stacked graphite boat sheets include at least two boat sheet groups: wherein the widths of the graphite boat sheets in the same boat sheet group are the same, and the widths of the graphite boat sheets in different boat sheet groups are different.

[0062] In this further improvement, graphite boats of the same width are one boat group, and graphite boats of at least two widths are divided into at least two boat groups. The at least two boat groups can be stacked and stacked in a decreasing order from one side to the other; or stacked in a decreasing order from the middle to both sides. In some embodiments, the graphite boat can include three boat groups, that is, the graphite boat includes three graphite boats of different widths.

[0063] Arranging the graphite boats in groups can improve the placement efficiency of the graphite boats. In order to further improve the utilization rate of the tubular coating furnace, more graphite boat groups can be arranged, for example, 4 groups, 5 groups, 6 groups, etc.

[0064] As a further improvement of the utility model, the plurality of stacked graphite boat sheets include first graphite boat sheets and second graphite boat sheets that are alternately and insulated; the plurality of first graphite boat sheets are electrically connected together, and the plurality of second graphite boat sheets are electrically connected together;

[0065] The graphite boat further comprises a support rod, a first electrode rod and a second electrode rod, a plurality of stacked graphite boat sheets are arranged on the support rod, and the first electrode rod and the second electrode rod are arranged at the bottom of the graphite boat;

[0066] The first electrode rod is electrically connected to the plurality of first graphite boats, and the second electrode rod is electrically connected to the plurality of second graphite boats.

[0067] In this further improvement, the first electrode rod and the second electrode rod are arranged at the bottom of the graphite boat, which can further improve the reliability of the contact between the first electrode rod and the second electrode rod and the graphite boat, and effectively reduce the coating failure caused by poor contact. The first graphite boat sheet and the second graphite boat sheet, which are arranged alternately and insulated, are respectively connected to the first electrode rod and the second electrode rod arranged at the bottom of the graphite boat. After the graphite boat is placed on the support rod, it can be connected to the first electrode rod and the second electrode rod, avoiding the prior art of introducing positive and negative power supplies by connecting the electrode rods through two electrode holes at the front end or the rear end of the boat, resulting in deformation of the electrode rods, causing poor connection between the graphite boat and the power supply, and thus causing coating failure, as well as the problem of low coating quality due to power loss, effectively ensuring the coating quality.

[0068] As a further improvement of the present invention, the first electrode rod and the second electrode rod are both fixedly connected to the support rod, and the support rod is used to support and fix the first electrode rod and the second electrode rod.

[0069] In this further improvement, the first electrode rod and the second electrode rod are connected to the support rod, and the first electrode rod and the second electrode rod are supported by the support rod, so that the relative positions of the first electrode rod and the second electrode rod and the support rod can be ensured, and the connection effect of the first electrode rod, the second electrode rod and the graphite boat is effectively guaranteed, and deformation fatigue of the electrode rods is avoided, so as to more effectively reduce the failure rate in the coating process.

[0070] As a further improvement of the utility model, the plurality of stacked graphite boat sheets include a first end and a second end opposite to each other along the length direction of the graphite boat;

[0071] The first electrode rod is electrically connected to first ends of the plurality of first graphite boats, and the second electrode rod is electrically connected to second ends of the plurality of second graphite boats.

[0072] In this further improvement, the first electrode rod is electrically connected to the first ends of the plurality of first graphite boat sheets, and the second electrode rod is electrically connected to the second ends of the plurality of second graphite boat sheets, so that the front and rear sides in the length direction of the graphite boat are respectively connected to the positive pole and the negative pole of the power supply. Under high-frequency conditions, no power loss will occur at the rear end of the graphite boat, and the electromagnetic field distribution of the graphite boat sheets can be made more uniform, thus avoiding the problems of standing wave power loss and uneven electromagnetic field distribution at the rear end of the graphite boat.

[0073] As a further improvement of the present invention, the first electrode rod and the second electrode rod are respectively arranged on the same side in the length direction of the graphite boat.

[0074] In this further improvement, the first electrode rod and the second electrode rod are respectively arranged on the same side of the length direction of the graphite boat, the front and rear ends of the same side of the long side of the graphite boat are respectively connected to the first electrode rod and the second electrode rod, and the first electrode rod and the second electrode rod are respectively connected to the positive pole and the negative pole of the power supply, so that the structure of the graphite boat is more simple and compact, avoiding the structural interference problem that may be caused by the diagonal arrangement.

[0075] As a further improvement of the present invention, a plurality of the first graphite boat sheets are connected to the first electrode rod via a positive conductive block; a plurality of the second graphite boat sheets are connected to the second electrode rod via a negative conductive block. The positive conductive block and the negative conductive block realize the connection of graphite boat sheets of the same polarity connected to the first electrode rod.

[0076] As a further improvement of the utility model, the positive electrode conductive block includes a first positive electrode lower support block, a first positive electrode upper support block and a plurality of positive electrode conductive spacers, and the negative electrode conductive block includes a first negative electrode lower support block, a first negative electrode upper support block and a plurality of negative electrode conductive spacers;

[0077] The first positive electrode lower support block and the first negative electrode lower support block are arranged on the support rod, the first positive electrode lower support block is connected to the first electrode rod; the first negative electrode lower support block is connected to the second electrode rod; in the same boat sheet group, the two first graphite boat sheets arranged at intervals are connected by a positive electrode conductive spacer, and the two second graphite boat sheets arranged at intervals are connected by a negative electrode conductive spacer;

[0078] The first positive electrode upper support block is connected to a graphite boat which is disposed in the first boat group and is closest to the second boat group and is electrically connected to the first electrode rod, and the first negative electrode upper support block is connected to a graphite boat which is disposed in the first boat group and is closest to the second boat group and is electrically connected to the second electrode rod;

[0079] The first boat sheet group includes the boat sheet group with the largest width; and the second boat sheet group includes the boat sheet group remaining in the graphite boat after the first boat sheet group is removed.

[0080] In the above further improvement, by setting a first positive electrode lower support block, a first positive electrode upper support block, a positive electrode conductive spacer, a first negative electrode lower support block, a first negative electrode upper support block and a negative electrode conductive spacer; ensuring that the positive and negative poles of the power supply are connected to two adjacent graphite boats, and the spaced graphite boats are connected to the same positive power supply or negative power supply, thereby ensuring that two adjacent graphite boats can be provided with electrode sheets to complete coating, thereby increasing the electrode sheet carrying capacity and improving work efficiency.

[0081] As a further improvement of the utility model, the positive electrode conductive block further includes a second positive electrode lower support block and a second positive electrode upper support block, and the negative electrode conductive block further includes a second negative electrode lower support block and a second negative electrode upper support block;

[0082] The first positive electrode upper support block extends toward the second negative electrode upper support block, and an insulating spacer is provided between the first positive electrode upper support block and the second negative electrode upper support block, and the first negative electrode upper support block extends toward the second positive electrode upper support block, and an insulating spacer is provided between the second positive electrode upper support block and the first negative electrode upper support block;

[0083] The first positive electrode lower support block extends toward the second negative electrode lower support block, and an insulating spacer is provided between the first positive electrode lower support block and the second negative electrode lower support block; the first negative electrode lower support block extends toward the second positive electrode lower support block, and an insulating spacer is provided between the second positive electrode lower support block and the first negative electrode lower support block.

[0084] In this further improvement, the conductive block also includes a second positive electrode lower support block, a second positive electrode upper support block, a second negative electrode lower support block, and a second negative electrode upper support block; an insulating spacer is arranged between the first positive electrode upper support block and the second negative electrode upper support block, and an insulating spacer is arranged between the second positive electrode upper support block and the first negative electrode upper support block. The connection through the insulating spacers can ensure that the graphite boat has a high stability; at the same time, the first positive electrode upper support block and the first negative electrode lower support block can be respectively connected to the graphite boat sheets arranged thereon, so that the graphite boat sheets arranged thereon at intervals have different polarities.

[0085] As a further improvement of the present invention, the first graphite boat sheet and the second graphite boat sheet each include at least one boat ear, the first graphite boat sheet is connected to at least one of the positive electrode conductive blocks through the boat ear, and the second graphite boat sheet is connected to at least one of the negative electrode conductive blocks through the boat ear.

[0086] As a further improvement of the utility model, the graphite boat sheet has a first end and a second end which are arranged opposite to each other in the length direction, the first end includes one or two boat ears, and the second end includes one or two boat ears.

[0087] Specifically, a boat ear is provided on the first end; or, a boat ear is provided on each of the first end and the second end, and the boat ears on the first end and the second end are distributed diagonally on the graphite boat sheet; or a boat ear is provided on the first end, and two boat ears are provided on the second end.

[0088] As a further improvement of the utility model, the graphite boat is provided with placement grooves of more than one specification and size, and the placement grooves are used to place electrode sheets matching the size of the placement grooves. In this further improvement, electrode sheets of one specification can be placed in the graphite boat, or electrode sheets of multiple sizes and specifications can be placed. Specifically, a half-sheet electrode sheet or a whole-sheet electrode sheet can be placed in the graphite boat; here, the whole-sheet electrode sheet and the half-sheet electrode sheet have preset sizes, and the two have the same length, and the width of the half-sheet electrode sheet is half of the width of the whole-sheet electrode sheet.

[0089] As a further improvement of the utility model, the length directions of more than one placement groove are parallel to each other, and the width directions of more than one placement groove are parallel to each other. By setting the length and width directions of each placement groove in parallel, the directions of the electrode sheets placed in the graphite boat are consistent, and when the electrode sheets are loaded, the robot does not need to be turned over, thereby increasing the loading speed and improving the coating efficiency.

[0090] A coating system comprises a tubular coating furnace and at least one group of graphite boats as described above.

[0091] As a further improvement of the utility model, at least two groups of graphite boats are provided, and the graphite boats are arranged in sequence in the tubular coating furnace along the length direction of the tubular coating furnace.

[0092] As a further improvement of the utility model, the graphite boat sheets of the graphite boat are arranged in horizontal stacking or vertical stacking. When stacked horizontally, the electrode sheet enters the graphite boat from the side, and the electrode sheet does not need to be set with a card point for positioning, thereby avoiding the generation of card point marks on the electrode sheet; when stacked vertically, the electrode sheet enters the graphite boat from the top, and the electrode sheet needs to be set with a card point for positioning. Graphite boat sheets of different sizes are stacked in the vertical direction, which can make full use of the horizontal space in the tubular coating furnace, thereby increasing the single-time loading capacity of the graphite boat, improving the space utilization rate of the reaction chamber, and improving production capacity.

[0093] The graphite boat of the present application is described below through specific embodiments.

[0094] The graphite boat provided in this embodiment is as follows Figure 1 As shown, during coating, the reactor tube 10 of the tubular coating furnace is arranged inside, and includes a plurality of stacked graphite boats 1, and the widths of the plurality of stacked graphite boats 1 have four sizes. Graphite boats 1 of the same size are stacked to form a boat group, and graphite boats 1 of four sizes form four boat groups, and the four boat groups are stacked.

[0095] Specifically, the four boat sheet groups are stacked horizontally from bottom to top, and the widths of the four boat sheet groups are stacked in a decreasing order.

[0096] Furthermore, the graphite boat 1 is provided with placement grooves of more than one specification size, and the placement grooves are used to place electrode sheets matching the size of the placement grooves. It is understandable that one placement groove can be provided in the graphite boat 1, or two or more placement grooves can be provided, and different placement grooves are used to place electrode sheets corresponding to the size of the placement grooves.

[0097] In order to achieve smooth coating, two adjacent graphite boats need to be connected to electrodes of different polarities so that the electrode sheet in the placement slot between the two graphite boats can be coated. Specifically, any two adjacent graphite boats can be connected to electrodes of different polarities, thereby ensuring a higher electrode sheet carrying capacity and improving work efficiency.

[0098] Furthermore, if Figure 2-4 As shown, the multiple stacked graphite boat sheets 1 include first graphite boat sheets 101 and second graphite boat sheets 102 that are alternately and insulated; the multiple first graphite boat sheets 101 are electrically connected together, and the multiple second graphite boat sheets 102 are electrically connected together;

[0099] The graphite boat further comprises a support rod 4, a first electrode rod 2 and a second electrode rod 3, a plurality of stacked graphite boat sheets 1 are arranged on the support rod 4, the first electrode rod 2 and the second electrode rod 3 are arranged at the bottom of the graphite boat, and the first electrode rod 2 and the second electrode rod 3 are both fixedly connected to the support rod 4, and the support rod 4 is used to support and fix the first electrode rod 2 and the second electrode rod 3;

[0100] The first electrode rod 2 is electrically connected to the plurality of first graphite boats 101 , and the second electrode rod 3 is electrically connected to the plurality of second graphite boats 102 .

[0101] Further, the plurality of stacked graphite boat sheets 1 include a first end and a second end opposite to each other along the length direction of the graphite boat;

[0102] The first electrode rod 2 is electrically connected to the first ends of the plurality of first graphite boats 101 , and the second electrode rod 3 is electrically connected to the second ends of the plurality of second graphite boats 102 .

[0103] The first electrode rod 2 and the second electrode rod 3 are arranged along the length direction of the graphite boat, and are respectively connected to the front and rear ends (the first end and the second end) of the graphite boat, and the first electrode rod 2 and the second electrode rod 3 are respectively connected to the positive and negative electrodes of the power supply; that is, the first end of the first graphite boat sheet 101 and the second end of the second graphite boat sheet 102 are respectively connected to the first electrode rod 2 and the second electrode rod 3, under high-frequency conditions, no power loss will be generated at the rear end of the graphite boat, the electromagnetic field distribution of the graphite boat sheet 1 can be made more uniform, and the problem of standing wave power loss and uneven electromagnetic field distribution at the rear end of the graphite boat can be avoided.

[0104] During coating, the graphite boat is placed in the reaction furnace tube 10 by a robot, and the first graphite boat 101 and the second graphite boat 102 are connected to the first electrode rod 2 and the second electrode rod 3 respectively, thereby ensuring that adjacent graphite boats 1 are connected to electrodes of different polarities respectively.

[0105] Preferably, the first electrode rod 2 and the second electrode rod 3 are respectively arranged on the same side in the length direction of the graphite boat.

[0106] Since the first electrode rod 2 and the second electrode rod 3 are arranged on the same side of the graphite boat, the structure of the graphite boat is more concise and compact, and the structural interference problem that may be caused by the diagonal arrangement is avoided.

[0107] For ease of understanding, Figure 1 As shown, the four boat sheet groups are respectively the first boat sheet group 11, the second boat sheet group including the remaining three boat sheet groups of width, namely the boat sheet group 12, the boat sheet group 13 and the boat sheet group 14 from bottom to top.

[0108] Among them, Figure 8-12 As shown, the first boat plate group 11 is a double-arranged long-side graphite boat plate group (half-sheet double-arranged long-side graphite boat plates are stacked and / or full-sheet double-arranged long-side graphite boat plates are stacked), the boat plate group 12 is a long-short-side graphite boat plate group (long-short-side graphite boat plates are stacked), the boat plate group 13 is a single-arranged long-side graphite boat plate group (single-arranged long-side graphite boat plates are stacked), and the boat plate group 14 is a single-arranged short-side graphite boat plate group (single-arranged short-side graphite boat plates are stacked).

[0109] The electrode sheets of the four boat sheet groups are all inserted from the sides of the boat sheet groups. Since boat sheet group 12 is a long-short-side graphite boat sheet group and boat sheet group 14 is a single-row short-side graphite boat sheet group, the long side directions of the electrode sheets in boat sheet groups 12 and 14 are not completely consistent with the long side directions of the first boat sheet group 11 and 13, and turning is required when inserting the electrode sheets.

[0110] In order to further improve work efficiency, ensure that the insertion direction of the electrode sheet is consistent, and reduce the number of rotations when the electrode sheet is inserted, it is preferred to use a combination of a double-arranged long-side graphite boat sheet group and a single-arranged long-side graphite boat sheet group, a combination of a double-arranged short-side graphite boat sheet group and a single-arranged long-side graphite boat sheet group, or a combination of a single-arranged long-side graphite boat sheet group and a single-arranged short-side graphite boat sheet group to form a graphite boat, and the insertion directions of the electrode sheets in the two graphite boat sheet groups using the above combinations are consistent.

[0111] Specifically, the first boat sheet group 11 includes a plurality of graphite boat sheets 1, which are connected along the length direction by ceramic rods and separated by ceramic tubes. Since this part of the structure is a conventional setting in the prior art, it will not be described in detail here.

[0112] In this embodiment, if Figure 8 and Fig. 9 As shown, the two ends of the graphite boat sheet 1 of the first boat sheet group 11 in the length direction are respectively the first end and the second end, a boat ear is respectively arranged on the first end and the second end, and the boat ears on the first end and the second end are distributed diagonally on the graphite boat sheet.

[0113] The boat ears on the first graphite boat 101 and the second graphite boat 102 are arranged in a mirror image with respect to the center line of the graphite boat 1, so that it is only necessary to connect the first electrode rod 2 and the second electrode rod 3 to the boat ears of the first graphite boat 101 and the second graphite boat 102 respectively, so as to ensure that the first graphite boat 101 and the second graphite boat 102 are connected to different electrodes.

[0114] like Figure 10-12 As shown, the graphite boats 1 in the boat group 12 , the boat group 13 and the boat group 14 are all provided with a boat ear on the first end.

[0115] In this embodiment, if Figure 2-6 As shown, in order to connect the boat ears of two adjacent graphite boat sheets to the first electrode rod 2 and the second electrode rod 3 respectively, the first boat sheet group 11 is provided with:

[0116] The first positive electrode upper support block 113, the second positive electrode upper support block 114, the second negative electrode upper support block 115, the first negative electrode upper support block 116, the first positive electrode lower support block 117, the second positive electrode lower support block 118, the second negative electrode lower support block 119, the first negative electrode lower support block 110, the positive electrode conductive spacer 111 and the negative electrode conductive spacer 112.

[0117] The first positive electrode lower support block 117 and the first negative electrode lower support block 110 are arranged on the support rod 4, the first positive electrode lower support block 117 extends toward the second negative electrode lower support block 119, and an insulating spacer block 1111 is arranged between the first positive electrode lower support block 117 and the second negative electrode lower support block 119; the first negative electrode lower support block 110 extends toward the second positive electrode lower support block 118, and an insulating spacer block 1111 is arranged between the second positive electrode lower support block 118 and the first negative electrode lower support block 110.

[0118] The first positive electrode upper support block 113 extends toward the second negative electrode upper support block 115, and an insulating spacer 1111 is arranged between the first positive electrode upper support block 113 and the second negative electrode upper support block 115. The first negative electrode upper support block 116 extends toward the second positive electrode upper support block 114, and an insulating spacer 1111 is arranged between the second positive electrode upper support block 114 and the first negative electrode upper support block 116.

[0119] The first electrode rod 2 is connected to the first positive electrode lower support block 117, the second electrode rod 3 is connected to the second negative electrode lower support block 119, the positive electrode conductive spacer 111 is arranged between the boat ears of two other spaced first graphite boat sheets 101, and the negative electrode conductive spacer 112 is arranged between the boat ears of two adjacent second graphite boat sheets 102.

[0120] It can be understood that a plurality of first graphite boat sheets 101 are arranged between the first positive electrode upper support block 113 and the first positive electrode lower support block 117, and the boat ears of the plurality of first graphite boat sheets 101 are connected between the first positive electrode upper support block 113 and the first positive electrode lower support block 117 through positive electrode conductive spacers 111.

[0121] Similarly, a plurality of second graphite boat sheets 102 are arranged between the first negative electrode upper support block 116 and the first negative electrode lower support block 110 , and the boat ears of the plurality of second graphite boat sheets 102 are connected between the first negative electrode upper support block 116 and the first negative electrode lower support block 110 through negative electrode conductive spacers 112 .

[0122] In this embodiment, by arranging the first positive electrode upper support block 113 and the second negative electrode upper support block 115, the second positive electrode upper support block 114 and the first negative electrode upper support block 116 to be matched with each other in a long and a short manner, and connecting them through the insulating spacer 1111; it is ensured that the graphite boat sheets arranged at intervals in the boat sheet group 12, the boat sheet group 13 and the boat sheet group 14 can be respectively and simultaneously connected to the first positive electrode upper support block 113, or the graphite boat sheets arranged at intervals can be simultaneously connected to the first negative electrode upper support block 116.

[0123] It can be understood that in this embodiment, at the front side of the first boat sheet group 11, the first positive electrode upper support block 113 and the first positive electrode lower support block 117 are longer than the second negative electrode upper support block 115 and the second negative electrode lower support block 119. The first positive electrode lower support block 117 is used to support the support rod 4.

[0124] Since the first electrode rod 2 is arranged at the bottom of the first positive electrode lower support block 117 on the front side, the graphite boats 1 arranged at intervals on the boat group 12, boat group 13 and boat group 14 connected to the first positive electrode upper support block 113 are positive electrodes.

[0125] On the rear side of the first boat assembly 11, the second positive electrode upper support block 114 and the second positive electrode lower support block 118 are shorter than the first negative electrode upper support block 116 and the first negative electrode lower support block 110. The first negative electrode lower support block 110 is used to support the support rod 4.

[0126] Since the second electrode rod 3 is arranged at the bottom of the first negative electrode lower support block 110 at the rear side, the graphite boats 1 arranged at intervals on the boat group 12, boat group 13 and boat group 14 connected to the first negative electrode upper support block 116 are negative electrodes.

[0127] In some embodiments, Figure 7 As shown, the graphite boat includes three groups of boat sheet groups, and the three groups of boat sheet groups are stacked from the middle to both sides, and the three groups of boat sheet groups are stacked in a manner of gradually narrowing the width from the middle to the left and right sides.

[0128] The three groups of boat plates are boat plate group 15, boat plate group 16 and boat plate group 17 from left to right. Adjacent graphite boat plates in boat plate group 15 are respectively connected to the graphite boat plates connected to the positive electrode in boat plate group 16 and the graphite boat plates connected to the negative electrode in boat plate group 16. Adjacent graphite boat plates in boat plate group 17 are respectively connected to the graphite boat plates connected to the positive electrode in boat plate group 16 and the graphite boat plates connected to the negative electrode in boat plate group 16.

[0129] This embodiment adopts a vertical stacking arrangement, which can fully utilize the space on the left and right sides of the graphite boat, thereby increasing the single wafer loading capacity of the graphite boat, improving the space utilization of the reaction chamber, and improving production capacity.

[0130] The utility model also provides a coating system, which comprises a tubular coating furnace and a group of graphite boats in the above embodiment.

[0131] The utility model also provides a coating system, such as Figure 5-6As shown, the invention comprises a tubular coating furnace and two or more groups of graphite boats in the above-mentioned embodiments; each of the graphite boats is arranged in sequence in the tubular coating furnace along the length direction of the tubular coating furnace. Since the length of the tubular coating furnace may be different according to the actual scene, in order to improve the utilization rate of the tubular coating furnace and improve the coating efficiency, multiple graphite boats can be arranged in the tubular coating furnace, that is, multiple graphite boats are arranged in sequence in the tubular coating furnace along the length direction of the tubular coating furnace, and multiple boats are coated simultaneously during coating.

[0132] The above is only a specific implementation of the utility model, but the protection scope of the utility model is not limited thereto. Any technician familiar with the technical field can easily think of changes or substitutions within the technical scope disclosed by the utility model, which should be included in the protection scope of the utility model. Therefore, the protection scope of the utility model should be based on the protection scope of the claims.

Claims

1. A graphite boat, characterized in that: A plurality of stacked graphite boat sheets are included, wherein the widths of the plurality of stacked graphite boat sheets have at least two sizes; The plurality of graphite boat sheets are stacked in a sequence of decreasing width from one side to the other side; Alternatively, the plurality of graphite boat sheets are stacked in a sequence of decreasing widths from the middle to both sides.

2. The graphite boat according to claim 1, characterized in that: The plurality of stacked graphite boats include more than two groups of boat groups: wherein, The widths of the graphite boats in the same boat group are the same, and the widths of the graphite boats in different boat groups are different.

3. The graphite boat according to claim 2, characterized in that: The plurality of stacked graphite boats include first graphite boats and second graphite boats that are alternately and insulated; the plurality of first graphite boats are electrically connected together, and the plurality of second graphite boats are electrically connected together; The graphite boat further comprises a support rod, a first electrode rod and a second electrode rod, a plurality of stacked graphite boat sheets are arranged on the support rod, and the first electrode rod and the second electrode rod are arranged at the bottom of the graphite boat; The first electrode rod is electrically connected to the plurality of first graphite boats, and the second electrode rod is electrically connected to the plurality of second graphite boats.

4. The graphite boat according to claim 3, characterized in that: The first electrode rod and the second electrode rod are both fixedly connected to the support rod, and the support rod is used to support and fix the first electrode rod and the second electrode rod.

5. The graphite boat according to claim 3, characterized in that: The plurality of stacked graphite boat sheets include a first end and a second end opposite to each other along the length direction of the graphite boat; The first electrode rod is electrically connected to first ends of the plurality of first graphite boats, and the second electrode rod is electrically connected to second ends of the plurality of second graphite boats.

6. The graphite boat according to claim 5, characterized in that: The first electrode rod and the second electrode rod are respectively arranged on the same side of the graphite boat in the length direction.

7. The graphite boat according to claim 3, characterized in that: The plurality of first graphite boats are connected to the first electrode rods through positive conductive blocks; the plurality of second graphite boats are connected to the second electrode rods through negative conductive blocks.

8. The graphite boat according to claim 7, characterized in that: The positive electrode conductive block includes a first positive electrode lower support block, a first positive electrode upper support block and a plurality of positive electrode conductive spacers, and the negative electrode conductive block includes a first negative electrode lower support block, a first negative electrode upper support block and a plurality of negative electrode conductive spacers; The first positive electrode lower support block and the first negative electrode lower support block are arranged on the support rod, the first positive electrode lower support block is connected to the first electrode rod; the first negative electrode lower support block is connected to the second electrode rod; in the same boat sheet group, the two first graphite boat sheets arranged at intervals are connected by a positive electrode conductive spacer, and the two second graphite boat sheets arranged at intervals are connected by a negative electrode conductive spacer; The first positive electrode upper support block is connected to a graphite boat which is disposed in the first boat group and is closest to the second boat group and is electrically connected to the first electrode rod, and the first negative electrode upper support block is connected to a graphite boat which is disposed in the first boat group and is closest to the second boat group and is electrically connected to the second electrode rod; The first boat sheet group includes the boat sheet group with the largest width; the second boat sheet group includes the boat sheet group remaining in the graphite boat after the first boat sheet group is removed.

9. The graphite boat according to claim 8, characterized in that: The positive electrode conductive block further includes a second positive electrode lower support block and a second positive electrode upper support block, and the negative electrode conductive block further includes a second negative electrode lower support block and a second negative electrode upper support block; The first positive electrode upper support block extends toward the second negative electrode upper support block, and an insulating spacer is provided between the first positive electrode upper support block and the second negative electrode upper support block, and the first negative electrode upper support block extends toward the second positive electrode upper support block, and an insulating spacer is provided between the second positive electrode upper support block and the first negative electrode upper support block; The first positive electrode lower support block extends toward the second negative electrode lower support block, and an insulating spacer is provided between the first positive electrode lower support block and the second negative electrode lower support block; the first negative electrode lower support block extends toward the second positive electrode lower support block, and an insulating spacer is provided between the second positive electrode lower support block and the first negative electrode lower support block.

10. The graphite boat according to claim 9, characterized in that: The first graphite boat sheet and the second graphite boat sheet each include at least one boat ear, the first graphite boat sheet is connected to at least one of the positive electrode conductive blocks via the boat ear, and the second graphite boat sheet is connected to at least one of the negative electrode conductive blocks via the boat ear.

11. The graphite boat according to claim 9, characterized in that: The graphite boat sheet has a first end and a second end that are oppositely arranged in the length direction, the first end includes one or two boat ears, and the second end includes one or two boat ears.

12. The graphite boat according to claim 1, characterized in that: The graphite boat sheet is provided with placement grooves of more than one specification and size, and the placement grooves are used to place electrode sheets matching the size of the placement grooves.

13. The graphite boat according to claim 12, characterized in that: The length directions of more than one placement grooves are parallel to each other, and the width directions of more than one placement grooves are parallel to each other.

14. A coating system, characterized in that: It comprises a tubular coating furnace and at least one group of graphite boats as described in any one of claims 1-13.

15. The coating system according to claim 14, characterized in that: At least two groups of graphite boats are provided, and the graphite boats are arranged in sequence in the tubular coating furnace along the length direction of the tubular coating furnace.

16. The coating system according to claim 14, characterized in that: The graphite boat sheets of the graphite boat are stacked horizontally or vertically.

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