Photomask cassette compatible with multiple sizes
By designing a multi-size photomask cassette, using the removable first sling board and fixed structure, the problem that existing packaging boxes are difficult to adapt to photomasks of different sizes is solved, and efficient utilization of resources is achieved.
Patent Information
- Application Number
- CN202421264354.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-04
- Publication Date
- 2025-03-04
- Estimated Expiration
- 2034-06-04
AI Technical Summary
Existing photomask packaging boxes are difficult to compatible with photomasks of multiple sizes, resulting in mismatch in the size of the packaging box and wasted resources.
A photomask cassette compatible with multi-sizes is designed. By setting a plurality of fixed structures and a removable first card board on the inner side wall of the box, the clamping structure of the first card board and the fixed structure of the box body are used to adapt the photomasks of different sizes.
The application of photomasks of multiple sizes is achieved, reducing the manufacturing cost of packaging boxes and avoiding waste caused by size mismatch.
Smart Images
Figure CN222561905U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of photomask packaging, in particular to a photomask cassette compatible with multiple sizes. Background Art
[0002] A photomask is a photomask that is used as a graphic master in the photolithography process. The pattern is transferred from the photomask to the substrate. A photomask is a transparent substrate made of materials such as metal or glass, on which a pattern generated by software is printed.
[0003] During transportation, the photomask needs to be placed in a dedicated box or container to avoid external shock or vibration during transportation. The box or container should have sufficient strength and cushioning performance to resist possible collisions and bumps. Therefore, in general, the photomask is clamped in the box or container, and the two remain relatively still. The clamping structure in the box or container corresponds to the size of the photomask.
[0004] However, the size of the photomask is not fixed. Therefore, in order to adapt to photomasks of different sizes and models, the size of the packaging box or container also changes with the change of the size of the photomask, which easily leads to too many packaging boxes or containers being idle. Utility Model Content
[0005] The utility model aims to solve at least one of the technical problems existing in the prior art. To this end, the utility model proposes a photomask cassette compatible with multiple sizes, which can be suitable for transporting photomasks of various sizes and reduce the manufacturing cost of the cassette.
[0006] The photomask cassette compatible with multiple sizes according to the embodiment of the utility model comprises: a cassette body, one side of which is open, and the inner side wall of which is provided with a plurality of fixing structures;
[0007] A box cover, the box cover is arranged on the opening side of the box body;
[0008] Multiple first card plates are relatively distributed, and multiple first card plates are detachably connected to the box body through the fixed structure to adjust the distance between the relative first card plates. The first card plates are provided with multiple first card-mounting structures, and the relatively distributed first card-mounting structures form a placement position.
[0009] The multi-size compatible photomask cassette according to the embodiment of the utility model has at least the following beneficial effects: the box body serves as a container, and a plurality of first clamping plates are installed in the box body, the plurality of first clamping plates have a plurality of first clamping structures, and the relatively distributed first clamping structures constitute a placement position for clamping the photomask, and when transporting the photomask, the photomask in the placement position remains relatively still with the box body through the first clamping structure; the plurality of first clamping plates are detachably connected to the box body through a fixed structure, and the box body has a plurality of fixed structures, and the first clamping plates are installed at the fixed structure at a specified position, so that the distance between the first clamping plates can be moved and adjusted, thereby changing the size of the placement position between the first clamping plates to accommodate photomasks of different sizes; the box cover is provided at the opening of the box body to seal the space where the photomask is located.
[0010] According to some embodiments of the utility model, a plurality of second clamping plates are provided at the inner bottom of the box body, a plurality of second clamping structures are provided on the side of the second clamping plate facing the first clamping plate, and the second clamping structures and the first clamping structures together constitute the placement position.
[0011] According to some embodiments of the present invention, a positioning structure is provided at the inner bottom of the box body, and the second clamping plate is fixed to the box body through the positioning structure.
[0012] According to some embodiments of the utility model, a plurality of card slots are provided on the surface of the first card board, and the card slots form the first card mounting structure. The plurality of card slots are distributed in parallel, and the relatively distributed card slots constitute the placement positions, and the card slots at the same placement position are in the same plane.
[0013] According to some embodiments of the present invention, the side wall of the card slot forms an angle with the bottom surface of the card slot, and the distance between the two side walls of the card slot gradually decreases along the opening of the card slot toward the bottom surface of the card slot.
[0014] According to some embodiments of the utility model, a plurality of groups of slots are provided on the inner side of the box body, and the slots extend from the opening end of the box body toward the bottom of the box body and are in the insertion direction. The plurality of groups of slots are arranged along the lines relative to the first card board, and the first card board is inserted into the slots.
[0015] According to some embodiments of the present invention, each of the slots accommodates at least two of the first card boards, and a plurality of the first card boards are arranged along the insertion direction of the slots.
[0016] According to some embodiments of the utility model, the distance between the two side walls of the first card board and the insertion direction of the slot is the width of the first card board, and among the multiple first card boards in the same slot, the width of the first card board close to the opening end of the box body is greater than the width of the first card board away from the opening end of the box body.
[0017] According to some embodiments of the utility model, a circle of ridges is provided on the opening side of the box body, and the cross-sectional size of the ridges gradually decreases in the direction away from the box body to form a conical structure. A circle of grooves is provided on the side of the box cover facing the box body, and the ridges can be inserted into the grooves.
[0018] According to some embodiments of the present invention, outer surfaces of the box body and the box cover are respectively provided with arc-shaped portions protruding outward.
[0019] Additional aspects and advantages of the present invention will be given in part in the following description, and in part will become apparent from the following description, or will be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] The present invention is further described below with reference to the accompanying drawings and embodiments, wherein:
[0021] Figure 1 This is a schematic structural diagram of a photomask cassette compatible with multiple sizes according to an embodiment of the utility model;
[0022] Figure 2 This is a schematic diagram of the bottom structure of a photomask cassette compatible with multiple sizes according to an embodiment of the utility model;
[0023] Figure 3 This is a schematic structural diagram of a first cardboard according to an embodiment of the utility model;
[0024] Figure 4 This is a schematic diagram of the internal structure of the box body of an embodiment of the utility model;
[0025] Figure 5 This is a schematic diagram of the structure of the first card board and the slot in an embodiment of the utility model;
[0026] Figure 6 This is a schematic diagram of the connection structure between the box body and the box cover of an embodiment of the utility model;
[0027] Figure 7 The figure is a schematic diagram of the appearance structure of the box body and the box cover of the embodiment of the utility model.
[0028] Figure Number:
[0029] The box body 100 , the positioning structure 110 , the slot 120 , the ridge 130 , the arc portion 140 , the box cover 200 , the groove 210 , the first clamping plate 300 , the clamping slot 310 , and the second clamping plate 400 . DETAILED DESCRIPTION
[0030] The embodiments of the present invention are described in detail below, and examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.
[0031] In the description of the present invention, it should be understood that the descriptions involving orientation, such as the orientation or positional relationship indicated as up, down, etc., are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.
[0032] In the description of the present utility model, "a plurality" means more than two. If there is a description of "first" or "second", it is only for the purpose of distinguishing the technical features, and cannot be understood as indicating or implying the relative importance or implicitly indicating the number of the indicated technical features or implicitly indicating the order of the indicated technical features.
[0033] In the description of the present invention, unless otherwise clearly defined, terms such as setting, installing, connecting, etc. should be understood in a broad sense, and technicians in the relevant technical field can reasonably determine the specific meanings of the above terms in the present invention based on the specific content of the technical solution.
[0034] The photomask needs to be placed in a special packaging box during transportation to avoid external shock or vibration during transportation. The packaging box should have sufficient strength and cushioning performance to withstand possible collisions and bumps. Therefore, in general, the photomask is clamped in the packaging box, and the two remain relatively still. The clamping structure in the packaging box corresponds to the size of the photomask. In order to be able to transport photomasks of different sizes, in the related art, it is accustomed to design different packaging boxes according to the size of the photomask to adapt to it. After the production line of the photomask is switched, a large number of packaging boxes that do not meet the size of the photomask will be idle or wasted.
[0035] Reference Figure 1As shown, a photomask cassette compatible with multiple sizes according to an embodiment of the utility model comprises a cassette body 100, a cassette cover 200 and a plurality of first clamping plates 300. One side of the cassette body 100 is open, and the inner side wall of the cassette body 100 is provided with a plurality of fixing structures; the cassette cover 200 is provided on the open side of the cassette body 100; the plurality of first clamping plates 300 are relatively distributed, and the plurality of first clamping plates 300 are detachably connected to the cassette body 100 through the fixing structure to adjust the distance between the relative first clamping plates 300, and the first clamping plates 300 are provided with a plurality of first clamping structures, and the relatively distributed first clamping structures form a placement position. The photomask cassette compatible with multiple sizes according to the utility model can be applicable to the transportation of photomasks of various sizes, thereby reducing the manufacturing cost of the cassette.
[0036] The box body 100 is a container for holding the photomask, with one side open and a receiving cavity inside. A plurality of first clamping plates 300 are installed in the box body 100, and the plurality of first clamping plates 300 have a plurality of first clamping structures. The first clamping structures that are relatively distributed form a placement position for clamping the photomask. For example, one side edge of the photomask contacts with the first clamping structure on one first clamping plate 300, and the opposite side edge of the photomask contacts with the first clamping structure on another opposite first clamping plate 300, so that the photomask is fixed between the opposite first clamping plates 300, and the photomask is boxed. When transporting the photomask, the photomask in the placement position is kept relatively still with the box body 100 through the first clamping structure.
[0037] A plurality of first card plates 300 are detachably connected to the box body 100 through a fixed structure, and a plurality of fixed structures are arranged in the box body 100. By adjusting the first card plates 300 to be installed on the fixed structures at different positions, the spacing between the first card plates 300 can be moved and adjusted, so that the size of the placement position between the first card plates 300 is changed to adapt to photomasks of different sizes. As in the above embodiment, one side of the photomask contacts the first clamping structure on one first card plate 300, and the opposite side of the photomask contacts the first clamping structure on another opposite first card plate 300. If the size of the photomask changes, the size of a group of opposite sides of the photomask will also change. Therefore, after the distance between the opposite first card plates 300 is adjusted, it can adapt to the photomask of the new size. The box cover 200 is arranged at the opening of the box body 100 to seal the space where the photomask is located to prevent the photomask from being contaminated.
[0038] Specifically, in some embodiments, the box body 100 has a length, a width and a height, the height direction is from the opening of the box body 100 to the bottom direction, and in a plane perpendicular to the height direction, the long side of the box body 100 is long and the short side is wide. The first cardboards 300 in the box body 100 are relatively distributed along the length direction of the box body 100, the first clamping structure is distributed on the first cardboard 300 along the width direction of the box body 100, a plurality of photomasks are inserted between the relative first cardboards 300, and the plurality of photomasks are arranged along the width direction of the box body 100. The first cardboard 300 is disassembled from the fixed structure, moved along the length direction of the box body 100 and then installed on a new fixed structure, so that the distance between the relative first cardboards 300 can be changed to adapt to the clamping of photomasks of different sizes.
[0039] Reference Figure 2 As shown, it can be understood that a plurality of second clamping plates 400 are provided at the inner bottom of the box body 100, and a plurality of second clamping structures are provided on the side of the second clamping plate 400 facing the first clamping plate 300, and the second clamping structures and the first clamping structures together form a placement position.
[0040] The second clamping plate 400 is located at the bottom of the box body 100, and is used to fix the side of the photomask at the bottom of the box body 100, so as to further improve the stability of the photomask clamping. For example, based on the above embodiment, the second clamping plate 400 is arranged along the length direction of the box body 100, and the second clamping structure is arranged along the width direction of the box body 100, so that the position of the second clamping structure corresponds to the position of the first clamping structure, and together they form a placement position.
[0041] It is understandable that a positioning structure 110 is provided at the inner bottom of the box body 100 , and the second clamping plate 400 is fixed to the box body 100 through the positioning structure 110 .
[0042] The second clamping plate 400 can be quickly installed on the bottom of the box body 100 and positioned by the positioning structure 110 , so that the second clamping structure on the second clamping plate 400 corresponds to the position of the first clamping structure.
[0043] Specifically, in some embodiments, a plurality of positioning cavities are provided at the inner bottom of the box body 100, and the outer contour of the cavities is adapted to the outer contour of the second card board 400. The second card board 400 can be placed flat in the positioning cavities, and the side edges of the second card board 400 are in contact with the inner walls of the positioning cavities to determine the placement position of the second card board 400.
[0044] Reference Figure 3 As shown, it can be understood that a plurality of card slots 310 are provided on the surface of the first card board 300, and the card slots 310 form a first card-mounting structure. The plurality of card slots 310 are distributed in parallel, and the relatively distributed card slots 310 form placement positions, and the card slots 310 in the same placement position are in the same plane.
[0045] The slot 310 can be formed by removing material from the first card board 300, or a convex strip is provided on the surface of the first card board 300, and the slot 310 is formed between two convex strips. After the photomask is inserted into the placement position, the side edge of the photomask actually enters the slot 310 of the first card board 300, and the side edge of the photomask contacts the slot 310 to achieve the card installation.
[0046] It is understandable that the side wall of the slot 310 forms an angle with the bottom surface of the slot 310 , and the distance between the two side walls of the slot 310 gradually decreases along the opening of the slot 310 toward the bottom surface of the slot 310 .
[0047] When the side wall of the slot 310 forms an angle with the bottom surface of the slot 310, the side edge of the photomask is inserted into the slot 310, and in fact, the side edge of the photomask contacts the side wall of the slot 310. This can minimize the contact of the slot 310 with the photomask and avoid friction damage to the surface of the photomask.
[0048] Reference Figure 4 and Figure 5 As shown, it can be understood that a plurality of slots 120 are provided on the inner side of the box body 100, and the slots 120 extend from the open end of the box body 100 toward the bottom of the box body 100 and are in the insertion direction. The plurality of slots 120 are arranged along the lines relative to the first card board 300, and the first card board 300 is inserted into the slots 120.
[0049] The slot 120 is a fixed structure in the box body 100. The slot 120 extends from the open end of the box body 100 toward the bottom of the box body 100 and is in the insertion direction, that is, the insertion direction of the slot 120 is along the height direction of the box body 100. In some embodiments, the slots 120 are specifically arranged and distributed along the length direction of the box body 100. The first card board 300 selects different slots 120 for insertion, and the distance between the relative first card boards 300 can be changed. Specifically, the slot 120 is composed of two side grooves, which are arranged along the height direction of the box body 100, and the two side grooves are arranged on the two side walls of the box body 100 at intervals in the width direction of the box body 100. When the first card board 300 is inserted into the slot 120, the two side edges of the first card board 300 enter into the side grooves respectively.
[0050] It is understandable that each slot 120 accommodates at least two first card boards 300 , and the plurality of first card boards 300 are arranged along the insertion direction of the slot 120 .
[0051] In a preferred design, the slot 120 can accommodate two first card boards 300 . When the two first card boards 300 are inserted into the same slot 120 , it can adapt to the photomask carding of a higher height.
[0052] It can be understood that the distance between the two side walls of the first card board 300 parallel to the insertion direction of the slot 120 is the width of the first card board 300, and among the multiple first card boards 300 in the same slot 120, the width of the first card board 300 close to the opening end of the box body 100 is greater than the width of the first card board 300 away from the opening end of the box body 100.
[0053] Since the box body 100 is often manufactured by injection molding, the box body 100 has a draft angle, and the size of the opening end of the box body 100 is slightly larger than the bottom size. Therefore, the size of the slot 120 also changes accordingly. Among the multiple first card boards 300 in the same slot 120, the width of the first card board 300 close to the opening end of the box body 100 is greater than the width of the first card board 300 far from the opening end of the box body 100, so that the first card board 300 can better match the size of the slot 120.
[0054] Reference Figure 6 As shown, it can be understood that a circle of ridges 130 is provided on the opening side of the box body 100, and the cross-sectional size of the ridges 130 gradually decreases in the direction away from the box body 100 to form a conical structure, and a circle of grooves 210 is provided on the side of the box cover 200 facing the box body 100, and the ridges 130 can be inserted into the grooves 210.
[0055] The convex rib 130 is inserted into the groove 210, and can realize the positioning and connection between the box cover 200 and the box body 100. If the cross-sectional size of the convex rib 130 does not change, then after the convex rib 130 is inserted into the groove 210, the side wall of the convex rib 130 fits together with the side wall of the groove 210. When the box cover 200 is taken out, a closed cavity with negative pressure is formed between the convex rib 130 and the groove 210, so that the resistance to opening the box cover 200 changes, and it is difficult to open the box cover 200. When the convex rib 130 is in a conical structure, the box cover 200 moves slightly in the opening direction to allow air to enter between the convex rib 130 and the groove 210, and no negative pressure cavity is generated, which is conducive to the opening of the box cover 200.
[0056] Reference Figure 7 As shown, it can be understood that the outer surfaces of the box body 100 and the box cover 200 are respectively provided with arc-shaped portions 140 protruding outwards.
[0057] In order to better protect the photomask, the entire dark box bag is evacuated after the photomask is placed in the box body 100 and the box cover 200 is closed. After evacuation, the pressure in the bag is low, and under the effect of atmospheric pressure, the box body 100 and the box cover 200 are deformed inwards. Therefore, the arc portion 140 can well resist the inward deformation, preventing the box body 100 or the box cover 200 from deforming inwards and contacting the photomask to damage the photomask.
[0058] The embodiments of the present invention are described in detail above in conjunction with the accompanying drawings, but the present invention is not limited to the above embodiments, and various changes can be made within the knowledge scope of ordinary technicians in the relevant technical field without departing from the purpose of the present invention.
Claims
1. A photomask cassette compatible with multiple sizes, characterized in that: include: A box body (100), one side of the box body (100) is open, and the inner side wall of the box body (100) is provided with a plurality of fixing structures; A box cover (200), the box cover (200) is arranged to cover the opening side of the box body (100); A plurality of first card plates (300) are relatively distributed, and the plurality of first card plates (300) are detachably connected to the box body (100) via the fixing structure to adjust the distance between the relative first card plates (300), and the first card plates (300) are provided with a plurality of first clamping structures, and the relatively distributed first clamping structures form a placement position.
2. The multi-size compatible photomask cassette according to claim 1, characterized in that: A plurality of second clamping plates (400) are provided at the inner bottom of the box body (100), and a plurality of second clamping structures are provided on the side of the second clamping plate (400) facing the first clamping plate (300), and the second clamping structures and the first clamping structures together constitute the placement position.
3. The multi-size compatible photomask cassette according to claim 2, characterized in that: A positioning structure (110) is provided at the inner bottom of the box body (100), and the second clamping plate (400) is fixed to the box body (100) via the positioning structure (110).
4. The multi-size compatible photomask cassette according to claim 1, characterized in that: A plurality of card slots (310) are provided on the surface of the first card plate (300), the card slots (310) forming the first card mounting structure, the plurality of card slots (310) are distributed in parallel, the card slots (310) that are distributed relatively to each other form the placement positions, and the card slots (310) at the same placement position are located in the same plane.
5. The multi-size compatible photomask cassette according to claim 4, characterized in that: The side wall of the card slot (310) forms an angle with the bottom surface of the card slot (310), and the distance between the two side walls of the card slot (310) gradually decreases along the opening of the card slot (310) towards the bottom surface of the card slot (310).
6. The multi-size compatible photomask cassette according to claim 1, characterized in that: A plurality of groups of slots (120) are provided on the inner side of the box body (100), the slots (120) extending from the open end of the box body (100) toward the bottom of the box body (100) and being in the insertion direction, the plurality of groups of slots (120) are arranged along a line connecting the first card board (300) in a relative direction, and the first card board (300) is inserted into the slots (120).
7. The multi-size compatible photomask cassette according to claim 6, characterized in that: Each of the slots (120) accommodates at least two of the first card boards (300), and a plurality of the first card boards (300) are arranged along the insertion direction of the slots (120).
8. The multi-size compatible photomask cassette according to claim 7, characterized in that: The distance between the two side walls of the first card board (300) parallel to the insertion direction of the slot (120) is the width of the first card board (300), and among the multiple first card boards (300) in the same slot (120), the width of the first card board (300) close to the opening end of the box body (100) is greater than the width of the first card board (300) far from the opening end of the box body (100).
9. The multi-size compatible photomask cassette according to claim 1, characterized in that: The opening side of the box body (100) is provided with a circle of ridges (130), and the cross-sectional dimensions of the ridges (130) gradually decrease in a direction away from the box body (100) to form a tapered structure. The box cover (200) is provided with a circle of grooves (210) on a side facing the box body (100), and the ridges (130) can be inserted into the grooves (210).
10. The multi-size compatible photomask cassette according to claim 1, characterized in that: The outer surfaces of the box body (100) and the box cover (200) are respectively provided with arc-shaped portions (140) protruding outwards.