Multi-station deviation rectifying device

Abstract

The utility model belongs to the technical field of silicon wafer conveying, and particularly relates to a multi-station deviation rectifying device which comprises a driver used for driving an annular belt to rotate; and a first deviation rectifying mechanism and a second deviation rectifying mechanism. The first deviation rectifying mechanism comprises a plurality of first deviation rectifying assemblies. The second deviation rectifying mechanism comprises a plurality of second deviation rectifying assemblies corresponding to the first deviation rectifying assemblies. The annular belt is suitable for driving the first deviation rectifying mechanism and the second deviation rectifying mechanism to move reversely when rotating, so that the first deviation rectifying assemblies and the corresponding second deviation rectifying assemblies move face to face, and the substrates in the corresponding conveying stations are rectified. According to the multi-station deviation rectifying device, the multiple first deviation rectifying assemblies are matched with the multiple second deviation rectifying assemblies so as to synchronously rectify the deviation of the substrates on the multiple conveying stations, and the cost and occupied space can be effectively reduced.

Description

Technical Field

[0001] The utility model belongs to the technical field of silicon wafer conveying, and specifically relates to a multi-station deviation correction device. Background Art

[0002] Silicon wafers will deviate during the transportation process. In order to make the moving direction and path of the silicon wafers more accurate, they need to be corrected so that they move to the required position and path.

[0003] However, the existing correction device can only correct the silicon wafer in one workstation. When there are multiple workstations, multiple correction devices need to be set up to correct them respectively, resulting in a waste of cost and space.

[0004] Therefore, how to achieve multi-station correction by a correction device is a technical problem that technical personnel in this field need to solve urgently. Utility Model Content

[0005] In order to solve the technical problems mentioned in the background technology, the utility model provides a multi-station correcting device, which includes: a driver for driving an endless belt to rotate; and a first correcting mechanism and a second correcting mechanism; wherein the first correcting mechanism includes: a plurality of first correcting components; the second correcting mechanism includes: a plurality of second correcting components corresponding to the first correcting components; the endless belt is suitable for driving the first correcting mechanism and the second correcting mechanism to move in opposite directions when rotating, so that each first correcting component moves facing the corresponding second correcting component to correct the substrate in the corresponding conveying station.

[0006] In one of the embodiments, the multi-station correcting device also includes: a third profile; wherein the third profile is provided with a guide rail; the first correcting mechanism and the second correcting mechanism both include: a slider, a mounting plate and a belt clamp; wherein the slider is slidably arranged on the guide rail, the mounting plate is arranged on the slider, and the belt clamp is arranged on the mounting plate and connected to the annular belt; the annular belt is suitable for driving the two belt clamps to move in opposite directions when rotating, so that the two mounting plates move in opposite directions synchronously.

[0007] In one of the embodiments, a first profile is provided on the mounting plate of the first correcting mechanism, and a second profile is provided on the mounting plate of the second correcting mechanism; wherein each of the first correcting components is mounted on the first profile, and each of the second correcting components is mounted on the second profile; when the two mounting plates move in opposite directions, each of the first correcting components moves facing the corresponding second correcting components to correct the substrate in the corresponding conveying station.

[0008] In one embodiment, the first profile and the second profile are staggered so that the first-stage first deviation-correcting assembly and the first-stage second deviation-correcting assembly are located on both sides of the conveying station.

[0009] In one embodiment, each of the first deviation-correcting components is arranged at an equal distance; and each of the second deviation-correcting components is arranged at an equal distance.

[0010] In one of the embodiments, the first correcting component includes: a first connecting plate connected to the first profile, on which a first correcting column group is arranged; the second correcting component includes: a second connecting plate connected to the second profile, on which a second correcting column group is arranged; wherein, the first correcting column group and the corresponding second correcting column group are located on both sides of the corresponding conveying station; when the two mounting plates move in opposite directions, the first correcting column group and the corresponding second correcting column group move facing each other to correct the substrate in the corresponding conveying station.

[0011] In one embodiment, the deflection correcting columns in the first deflection correcting column group are arranged along the conveying direction of the substrate; and the deflection correcting columns in the second deflection correcting column group are arranged along the conveying direction of the substrate.

[0012] In one embodiment, the first connecting plate and the second connecting plate are arranged adjacent to each other between adjacent conveying stations.

[0013] In one embodiment, a receiving position is provided on the first connecting plate, and the second connecting plate adjacent thereto is located in the receiving position.

[0014] In one embodiment, two pulleys are provided on the third profile.

[0015] The beneficial effect of the utility model is that the multi-station deviation correction device adopts a method of cooperating multiple first deviation correction components with multiple second deviation correction components to synchronously correct the substrates on multiple conveying stations, which can effectively reduce costs and space occupancy.

[0016] Other features and advantages of the utility model will be described in the following description, and partly become apparent from the description, or understood by practicing the utility model. The purpose and other advantages of the utility model are realized and obtained by the structures particularly pointed out in the description and the drawings.

[0017] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, preferred embodiments are given below and described in detail with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 This is a structural schematic diagram of the multi-station deviation correction device;

[0020] Figure 2 This is a schematic diagram of the structure of the multi-station deviation correction device viewed from above;

[0021] Figure 3 yes Figure 2 Schematic diagram of the enlarged structure at point A in the middle.

[0022] In the figure:

[0023] Driver 1;

[0024] Endless belt 2, pulley 21;

[0025] A first deviation-correcting mechanism 3, a first deviation-correcting assembly 31, a first connecting plate 311, a first deviation-correcting column group 312, a receiving position 313, a mounting plate 32, a belt clip 33, and a slider 34;

[0026] A second deviation-correcting mechanism 4, a second deviation-correcting assembly 41, a second connecting plate 411, and a second deviation-correcting column group 412;

[0027] Substrate 5;

[0028] A first profile 61, a second profile 62, a third profile 63, and a guide rail 631;

[0029] Conveying station 7. DETAILED DESCRIPTION

[0030] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution of the utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0031] like Figure 1As shown, at least one embodiment provides a multi-station correcting device, which includes: a driver 1 for driving an endless belt 2 to rotate; and a first correcting mechanism 3 and a second correcting mechanism 4; wherein the first correcting mechanism 3 includes: a plurality of first correcting components 31; the second correcting mechanism 4 includes: a plurality of second correcting components 41 corresponding to the first correcting components 31; the endless belt 2 is suitable for driving the first correcting mechanism 3 and the second correcting mechanism 4 to move in the opposite direction when rotating, so that each first correcting component 31 moves facing the corresponding second correcting component 41 to correct the substrate 5 in the corresponding conveying station 7.

[0032] In some embodiments, a plurality of first deflection correction components 31 and a plurality of second deflection correction components 41 are used in coordination to synchronously correct the substrates 5 on a plurality of conveying stations 7, which can effectively reduce costs and space occupancy; specifically, a first deflection correction component 31 and a second deflection correction component 41 are arranged on each conveying station 7, and the first deflection correction component 31 and the second deflection correction component 41 are respectively located on both sides of the conveying station 7. In order to achieve deflection correction, the first deflection correction component 31 and the second deflection correction component 41 need to move in a facing direction to reduce the distance between them. Therefore, the present scheme adopts an annular belt 2 as a driving source. The annular belt 2 has two opposite conveying directions. When it rotates, it drives the first deflection correction mechanism 3 and the second deflection correction mechanism 4 to move in the opposite direction, which can drive the first deflection correction component 31 and the second deflection correction component 41 to move in a facing direction; when the deflection correction is completed, the driver 1 drives the annular belt 2 to reset.

[0033] In some embodiments, the multi-station correcting device also includes: a third profile 63, the third profile 63 is a main mounting frame, used to install components such as the driver 1, the endless belt 2, the first correcting mechanism 3 and the second correcting mechanism 4; wherein the third profile 63 is provided with a guide rail 631; the first correcting mechanism 3 and the second correcting mechanism 4 both include: a slider 34, a mounting plate 32 and a belt clamp 33; wherein the slider 34 is slidably set on the guide rail 631, the mounting plate 32 is set on the slider 34, and the belt clamp 33 is set on the mounting plate 32 and connected to the endless belt 2; the endless belt 2 is suitable for driving the two belt clamps 33 to move in the opposite direction when rotating, so that the two mounting plates 32 move in the opposite direction synchronously.

[0034] like Figure 2As shown, in some embodiments, a first profile 61 is provided on the mounting plate 32 of the first correcting mechanism 3, and a second profile 62 is provided on the mounting plate 32 of the second correcting mechanism 4; wherein each of the first correcting components 31 is provided on the first profile 61, and each of the second correcting components 41 is provided on the second profile 62, and each of the first correcting components 31 can be moved synchronously by driving the first profile 61 to move, and the same applies to the second profile 62; when the two mounting plates 32 move in opposite directions, each of the first correcting components 31 moves facing the corresponding second correcting components 41 to correct the substrate 5 in the corresponding conveying station 7.

[0035] In some embodiments, the first profile 61 and the second profile 62 are staggered so that the first-stage first correcting component 31 and the first-stage second correcting component 41 are respectively located on both sides of the conveying station 7; the staggered setting can realize correction for multiple stations as much as possible.

[0036] In some embodiments, the first deviation-correcting components 31 are arranged equidistantly; and the second deviation-correcting components 41 are arranged equidistantly.

[0037] like Figure 3 As shown, in some embodiments, the first correcting component 31 includes: a first connecting plate 311 connected to the first profile 61, on which a first correcting column group 312 is arranged; the second correcting component 41 includes: a second connecting plate 411 connected to the second profile 62, on which a second correcting column group 412 is arranged; wherein, the first correcting column group 312 and the corresponding second correcting column group 412 are located on both sides of the corresponding conveying station 7; when the two mounting plates 32 move in opposite directions, the first correcting column group 312 and the corresponding second correcting column group 412 move facing each other to correct the substrate 5 in the corresponding conveying station 7.

[0038] Optionally, the first deflection correcting column group 312 includes: at least two deflection correcting columns, and a certain distance is left between the two deflection correcting columns to achieve surface contact; the second deflection correcting column group 412 is similar.

[0039] In some embodiments, the deflection correcting columns in the first deflection correcting column group 312 are arranged along the conveying direction of the substrate 5 ; and the deflection correcting columns in the second deflection correcting column group 412 are arranged along the conveying direction of the substrate 5 .

[0040] In some embodiments, the first connecting plate 311 and the second connecting plate 411 are disposed adjacent to each other between adjacent conveying stations 7 .

[0041] In some embodiments, a receiving position 313 is disposed on the first connecting plate 311 , and the second connecting plate 411 adjacent thereto is located in the receiving position 313 .

[0042] like Figure 1As shown, in some embodiments, two pulleys 21 are provided on the third profile 63; the annular belt 2 is sleeved on the pulleys 21, and the driver 1 can rotate the annular belt 2 by driving the pulleys 21 to rotate.

[0043] In summary, the multi-station correcting device adopts a method of cooperating multiple first correcting components 31 and multiple second correcting components 41 to synchronously correct the substrates 5 on multiple conveying stations 7, which can effectively reduce costs and space occupancy.

[0044] The various devices selected in this application (components whose specific structures are not described) are all universal standard parts or components known to those skilled in the art, and their structures and principles can be known to those skilled in the art through technical manuals or conventional experimental methods.

[0045] In the description of the embodiments of the present invention, unless otherwise clearly specified and limited, the terms "installed", "connected", and "connected" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0046] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention. In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance.

[0047] Based on the above ideal embodiments of the utility model, the relevant staff can make various changes and modifications without deviating from the technical concept of the utility model through the above description. The technical scope of the utility model is not limited to the content of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A multi-station deviation correction device, characterized in that: include: A driver (1) for driving the endless belt (2) to rotate; as well as A first deviation-correcting mechanism (3) and a second deviation-correcting mechanism (4); in The first deviation-correcting mechanism (3) comprises: a plurality of first deviation-correcting components (31); The second deviation-correcting mechanism (4) comprises: a plurality of second deviation-correcting components (41) corresponding to the first deviation-correcting components (31); The endless belt (2) is adapted to drive the first deflection correcting mechanism (3) and the second deflection correcting mechanism (4) to move in opposite directions when rotating, so that each first deflection correcting component (31) and the corresponding second deflection correcting component (41) move in a facing direction to reduce the spacing, thereby correcting the deflection of substrates (5) in a plurality of conveying stations (7).

2. The multi-station deviation correction device according to claim 1, characterized in that: Also includes: Third profile (63); in The third profile (63) is provided with a guide rail (631); The first deviation-correcting mechanism (3) and the second deviation-correcting mechanism (4) both comprise: a slider (34), a mounting plate (32) and a belt clip (33); wherein The slider (34) is slidably disposed on the guide rail (631), the mounting plate (32) is disposed on the slider (34), and the belt clamp (33) is disposed on the mounting plate (32) and connected to the endless belt (2); The annular belt (2) is suitable for driving the two belt clamps (33) to move in opposite directions when rotating, so that the two mounting plates (32) can move in opposite directions synchronously.

3. The multi-station deviation correction device according to claim 2, characterized in that: A first profile (61) is provided on the mounting plate (32) of the first deviation-correcting mechanism (3), and a second profile (62) is provided on the mounting plate (32) of the second deviation-correcting mechanism (4); in Each of the first deviation-correcting components (31) is mounted on a first profile (61), and each of the second deviation-correcting components (41) is mounted on a second profile (62); When the two mounting plates (32) move in opposite directions, each of the first deflection correcting components (31) and the corresponding second deflection correcting components (41) move in a facing direction to correct the deflection of the substrate (5) in the corresponding conveying station (7).

4. The multi-station deviation correction device according to claim 3, characterized in that: The first profile (61) and the second profile (62) are arranged in a staggered manner, so that the first-stage first deviation-correcting assembly (31) and the first-stage second deviation-correcting assembly (41) are located on both sides of the conveying station (7).

5. The multi-station deviation correction device according to claim 4, characterized in that: The first deviation-correcting components (31) are arranged at equal distances; The second deviation-correcting components (41) are arranged at equal distances.

6. The multi-station deviation correction device according to claim 5, characterized in that: The first deviation-correcting component (31) comprises: a first connecting plate (311) connected to the first profile (61), on which a first deviation-correcting column group (312) is arranged; The second deviation-correcting component (41) comprises: a second connecting plate (411) connected to the second profile (62), on which a second deviation-correcting column group (412) is arranged; Wherein, the first deviation-correcting column group (312) and the corresponding second deviation-correcting column group (412) are located on both sides of the corresponding conveying station (7); When the two mounting plates (32) move in opposite directions, the first deviation-correcting column group (312) and the corresponding second deviation-correcting column group (412) move in a facing direction to correct the deviation of the substrate (5) in the corresponding conveying station (7).

7. The multi-station deviation correction device according to claim 6, characterized in that: The deflection correcting columns in the first deflection correcting column group (312) are arranged along the conveying direction of the substrate (5); The deflection correcting columns in the second deflection correcting column group (412) are arranged along the conveying direction of the substrate (5).

8. The multi-station deviation correction device according to claim 6, characterized in that: The first connecting plate (311) and the second connecting plate (411) are arranged adjacent to each other between adjacent conveying stations (7).

9. The multi-station deviation correction device according to claim 6, characterized in that: The first connecting plate (311) is provided with a receiving position (313), and the second connecting plate (411) adjacent thereto is located in the receiving position (313).

10. The multi-station deviation correction device according to claim 2, characterized in that: Two pulleys (21) are provided on the third profile (63).

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