Thermocouple assembly for vacuum equipment and vacuum equipment
By designing a thermocouple assembly for vacuum equipment, the elasticity of the corrugated tube and elastic parts is used to adapt to thermal expansion, the problem of the inability to adapt to thermal expansion of the straight-inserted thermocouple to reduce the temperature measurement accuracy, and achieve higher temperature measurement accuracy.
Patent Information
- Application Number
- CN202421422441.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-21
- Publication Date
- 2025-03-14
- Estimated Expiration
- 2034-06-21
AI Technical Summary
In vacuum equipment, the direct-insert thermocouple cannot adaptively thermal expansion, resulting in a decrease in the temperature measurement accuracy and the temperature of the measured parts cannot be accurately measured.
A thermocouple assembly is designed, including a thermocouple, a first mounting plate, a mounting rod, a second mounting plate, a corrugated tube and an elastic member. The mounting plate is connected by the mounting rod, and the temperature measuring end and connection section of the thermocouple pass through the elastic member, the corrugated pipe and the mounting plate, and are arranged in the temperature measuring blind hole of the vacuum cavity, so as to adapt to thermal expansion by using the elasticity of the corrugated pipe and the elastic member.
The adaptability of the thermocouple in the case of thermal expansion is achieved, and the accuracy of temperature measurement is improved through thermal conduction, avoiding distortion of temperature values.
Smart Images
Figure CN222618050U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of solar cell manufacturing, in particular to a thermocouple assembly used for vacuum equipment and the vacuum equipment. Background Art
[0002] In photovoltaic coating equipment, direct-insert thermocouples are generally used to directly insert the vacuum chamber from the atmospheric side. After the temperature measuring point at the end of the thermocouple is against the position where the temperature needs to be measured, the thermocouple is fixed on the chamber using a vacuum seal, and the thermocouple has no margin for movement. When the temperature measuring position of the measured component is deformed and displaced due to repeated temperature changes, the temperature measuring point of the thermocouple will be separated from the component to be measured. In a vacuum environment, heat conduction is converted into heat radiation, causing the measured temperature value to be distorted, reducing the accuracy of the equipment's temperature control.
[0003] Therefore, how to provide a thermocouple assembly and vacuum equipment for vacuum equipment so that the thermocouple can adapt to thermal expansion and improve the accuracy of temperature measurement by measuring temperature through heat conduction has become a technical problem that needs to be solved urgently in the industry. Utility Model Content
[0004] In view of the above-mentioned problems in the prior art, the utility model proposes a thermocouple assembly for vacuum equipment, wherein the vacuum equipment comprises a vacuum cavity having a plurality of outer walls, the thermocouple assembly comprises a thermocouple and a first mounting plate for mounting the thermocouple on the outer wall of the vacuum cavity, the thermocouple comprises a temperature measuring end, a connecting section, a lead section and a thermocouple flange arranged on the connecting section, the thermocouple assembly further comprises a mounting rod, a second mounting plate, a bellows and an elastic member, the mounting rod connects a first mounting plate and a second mounting plate which are parallel to each other, the lead section passes through the second mounting plate and the temperature measuring end and the connecting section pass through the elastic member, the bellows, the first mounting plate and the outer wall of the vacuum cavity in sequence so as to be arranged in a temperature measuring blind hole inside the vacuum cavity, the bellows comprises a tube body and a first flange and a second flange located on both sides of the tube body, the first flange is sealedly connected to the thermocouple flange through a first fastening assembly and a first sealing member, and the second flange is sealedly connected to the outer wall of the vacuum cavity through the first mounting plate and the second fastening assembly thereon and the second sealing member.
[0005] In one embodiment, the second mounting plate is provided with a first through hole corresponding to the thermocouple, the first through hole is larger than the diameter of the connecting section of the thermocouple, one end of the elastic member abuts against the thermocouple flange, and the other end abuts against a gasket arranged adjacent to the second mounting plate, and the outer diameter of the gasket is larger than the diameter of the first through hole.
[0006] In one embodiment, the first mounting plate is provided with a second through hole and a plurality of third through holes corresponding to the thermocouple and the second fastening assembly respectively, the second sealing member is arranged in the second through hole, and the second fastening assembly passes through the plurality of third through holes to seal and fix the first mounting plate and the bellows to the outer wall of the vacuum chamber.
[0007] In one embodiment, the vacuum equipment is a PECVD equipment including an inner cavity and an outer cavity, the multiple outer walls of the vacuum cavity are the outer cavity walls, and the temperature measurement blind hole is opened on the outer wall of the inner cavity wall.
[0008] In one embodiment, when the inner cavity is displaced due to thermal expansion or contraction, the thermocouple adapts to the longitudinal displacement of the inner cavity by moving in the first through hole and the second through hole, and the thermocouple adapts to the lateral displacement of the inner cavity through the elastic force provided by the elastic member and the bellows.
[0009] In one embodiment, the first fastening assembly is a stainless steel vacuum clamp, including a first half and a second half hinged to each other and a first locking piece locking the first half and the second half, and the thermocouple flange, the first seal and the first flange are locked and sealed between the first half and the second half by the first locking piece.
[0010] In one embodiment, the bellows is a welded bellows, the length of the welded bellows is in the range of 110-130 mm, the length after compression is in the range of 90 mm-110 mm, and the diameter is in the range of 25-35 mm.
[0011] In one embodiment, the elastic member is a spring, the elastic coefficient of the spring is 3.1 N / mm, the free height is 35 mm, the maximum displacement is 11.2 mm, and the allowable load range is 30-50 N.
[0012] In one embodiment, the first sealing member and the second sealing member are both vacuum sealing rings.
[0013] In one embodiment, the thermocouple assembly includes two mounting rods, a first end of each mounting rod is mounted on a first mounting plate, and a second end of each mounting rod is mounted on a second mounting plate.
[0014] The utility model also discloses a vacuum device, which includes a vacuum cavity, wherein the vacuum cavity includes a plurality of outer walls and a temperature measuring blind hole arranged inside the vacuum cavity, a plurality of thermocouple assemblies pass through the outer walls and are arranged in the temperature measuring blind holes, and the thermocouple assemblies are the thermocouple assemblies described in any one of the above items.
[0015] Compared with the prior art, which uses a straight-insert thermocouple without a movable margin and cannot accurately measure the temperature due to deformation and displacement, the thermocouple assembly of the utility model includes a thermocouple, a first mounting plate, a mounting rod, a second mounting plate, a bellows and an elastic member, the mounting rod connects the first and second mounting plates parallel to each other, the temperature measuring end and the connecting section of the thermocouple sequentially pass through the second mounting plate, the elastic member, the bellows, the first mounting plate and the outer wall of the vacuum cavity to be arranged in the temperature measuring blind hole of the vacuum cavity of the vacuum equipment, the bellows includes a tube body and a first flange and a second flange located on both sides of the tube body, the first flange is sealed and connected to the thermocouple flange arranged on the connecting section through a first fastening assembly and a first sealing member, and the second flange is sealed and connected to the outer wall of the vacuum cavity through the first mounting plate and the second fastening assembly thereon and the second sealing member. The utility model can improve the accuracy of temperature measurement by enabling the thermocouple to adapt to thermal expansion and thereby measure temperature by heat conduction. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] The above features and advantages of the present invention can be better understood after reading the detailed description of the embodiments of the present disclosure in conjunction with the following drawings. In the drawings, the components are not necessarily drawn to scale, and components with similar related properties or features may have the same or similar reference numerals.
[0017] Figure 1 The utility model is a three-dimensional structural schematic diagram of a thermocouple assembly for vacuum equipment.
[0018] Figure 2 This is a three-dimensional structural diagram of the thermocouple assembly for vacuum equipment of the utility model from another perspective.
[0019] Figure 3 The utility model is a cross-sectional schematic diagram of the composition structure of the thermocouple assembly used for vacuum equipment.
[0020] Figure 4 for Figure 3 Schematic diagram of the enlarged structure in box A in FIG.
[0021] Figure 5 for Figures 1 to 3 Schematic diagram of the composition structure of the thermocouple 10.
[0022] Figure 6 for Figures 1 to 3 Schematic diagram of the composition structure of the bellows 12.
[0023] Figure 7 for Figures 1 to 3 Schematic diagram of the composition structure of the first fastening component 16. DETAILED DESCRIPTION
[0024] The following specific embodiments illustrate the implementation of the present invention. Those skilled in the art can easily understand other advantages and functions of the present invention from the contents disclosed in this specification. Although the description of the present invention will be introduced in conjunction with the preferred embodiment, this does not mean that the features of this utility model are limited to this implementation. On the contrary, the purpose of introducing the utility model in conjunction with the implementation is to cover other options or modifications that may be extended based on the claims of the present utility model. In order to provide an in-depth understanding of the present utility model, the following description will include many specific details. The present utility model can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present utility model, some specific details will be omitted in the description.
[0025] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or it can be indirectly connected through an intermediate medium, or it can be the internal communication of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.
[0026] In addition, the terms "upper", "lower", "left", "right", "top", "bottom", "horizontal" and "vertical" used in the following description should be understood as the directions shown in the paragraph and the related drawings. Such relative terms are only used for the convenience of description and do not mean that the device described therein must be manufactured or operated in a specific direction, and therefore should not be understood as limiting the present invention.
[0027] It is understood that although the terms "first", "second", "third", etc. may be used herein to describe various components, regions, layers and / or parts, these components, regions, layers and / or parts should not be limited by these terms, and these terms are only used to distinguish different components, regions, layers and / or parts. Therefore, the first component, region, layer and / or part discussed below may be referred to as the second component, region, layer and / or part without departing from some embodiments of the present invention.
[0028] See also Figures 1 to 4 , Figure 1 and Figure 2 The three-dimensional structure diagram of the thermocouple assembly for vacuum equipment of the utility model from different viewing angles is shown in FIG. Figure 3 This is a cross-sectional schematic diagram of the composition structure of the thermocouple assembly for vacuum equipment of the utility model. Figure 4 for Figure 3 Schematic diagram of the enlarged structure in box A in FIG. Figures 1 to 4As shown, the thermocouple assembly 1 for vacuum equipment of the utility model comprises a thermocouple 10, a first mounting plate 11, a bellows 12, a mounting rod 13, a second mounting plate 14, an elastic member 15 and a first fastening assembly 16. The vacuum equipment comprises a vacuum chamber having a plurality of outer walls. The mounting rod 13 connects the first mounting plate 11 and the second mounting plate 14 which are parallel to each other, and the first mounting plate 11 is used to mount the thermocouple 10 on the outer wall of the vacuum chamber, and the outer wall may be one or more of a side wall, a bottom wall or a top wall.
[0029] See also Figure 5 , which is Figures 1 to 3 Schematic diagram of the composition structure of the thermocouple in FIG. As shown in the figure, the thermocouple 10 includes a temperature measuring end 100, a connecting section 102, a lead section 104, and a thermocouple flange 106 arranged on the connecting section 102. The temperature measuring end 100 extends into the vacuum chamber to directly measure the temperature. The connecting section 102 and the thermocouple flange 106 are convenient for fixing the thermocouple. The lead section 104 is used to connect the thermocouple to a measuring instrument to output the measured temperature.
[0030] Figure 6 for Figures 1 to 3 Schematic diagram of the composition structure of the bellows 12 in FIG. The bellows 12 includes a tube body 120 and a first flange 122 and a second flange 124 located on both sides of the tube body. A plurality of corrugations 1200 are arranged on the tube body 120. The bellows 12 is a welded bellows, and the corresponding cross section of the corrugations 1200 is approximately triangular and is formed by welding. The length of the welded bellows 12 ranges from 110 to 130 mm, the length ranges from 90 mm to 110 mm after compression, and the diameter ranges from 25 to 35 mm.
[0031] Figure 7 for Figures 1 to 3 Schematic diagram of the composition structure of the first fastening component 16. Figure 7 As shown, the first fastening assembly 16 is a stainless steel vacuum clamp, including a first half 160, a second half 162 and a first fastener 164 that are hinged to each other. The first fastener 164 is used to lock the first half 160 and the second half 162. The thermocouple flange 106, the first seal 18 and the first flange 120 are locked and sealed between the first half 160 and the second half 162 by the first fastener 164.
[0032] See also Figure 4The second mounting plate 14 is provided with a first through hole 140 corresponding to the thermocouple 10, and the first through hole 140 is larger than the diameter of the connecting section 102 of the thermocouple 10. One end of the elastic member 15 abuts against the thermocouple flange 106, and the other end abuts against the gasket 17 disposed adjacent to the second mounting plate 14. A dry gasket 170 is further disposed between the gasket 17 and the second mounting plate 14, and the outer diameters of the gasket 17 and the dry gasket 170 are both larger than the diameter of the first through hole 140, and the inner diameters of both are smaller than the diameter of the first through hole 140.
[0033] Continue to see Figure 4 The first mounting plate 11 is provided with a second through hole 112 and a plurality of third through holes (not shown) corresponding to the thermocouple 10 and the second fastening assembly 110, respectively. The second sealing member 19 is disposed in the second through hole 112. The second fastening assembly 110 passes through the plurality of third through holes to seal and fix the first mounting plate 11 and the bellows 12 to the outer wall of the vacuum chamber. The second fastening assembly 110 can be a matching bolt and nut.
[0034] The elastic member 15 is a spring, the elastic coefficient of the spring 15 is 3.1 N / mm, the free height is 35 mm, the maximum displacement is 11.2 mm, and the allowable load range is 30-50 N.
[0035] In this embodiment, the vacuum device is a PECVD device including an inner cavity and an outer cavity, the multiple outer walls of the vacuum cavity are the outer cavity walls, and the temperature measurement blind hole is opened on the outer wall of the inner cavity wall. When the inner cavity is displaced by thermal expansion or thermal contraction, the thermocouple 10 adapts to the longitudinal displacement of the inner cavity by moving in the first through hole 140 and the second through hole 110, and the thermocouple 10 adapts to the lateral displacement of the inner cavity through the elastic force provided by the elastic member 15 and the bellows 12.
[0036] The lead segment 104 of the thermocouple 10 passes through the second mounting plate 14, and the temperature measuring end 100 and the connecting segment 102 pass through the elastic member 15, the bellows 12, the first mounting plate 11 and the outer wall of the vacuum chamber in sequence to be arranged in the temperature measuring blind hole inside the vacuum chamber. The first flange 122 of the bellows 12 is sealedly connected to the thermocouple flange 106 through the first fastening component 16 and the first sealing component 18, and the second flange 124 is sealedly connected to the outer wall of the vacuum chamber through the first mounting plate 11 and the second fastening component 110 thereon and the second sealing component 19.
[0037] The first sealing member 18 and the second sealing member 19 are both vacuum sealing rings. The thermocouple assembly 1 comprises two mounting rods 13 , wherein a first end of each mounting rod 13 is mounted on a first mounting plate 11 , and a second end thereof is mounted on a second mounting plate 14 .
[0038] Before using the thermocouple assembly for vacuum equipment of the utility model, a person skilled in the art first assembles the thermocouple assembly 1 according to the following steps: first, the first mounting plate 11 is mounted on the outer wall of the vacuum chamber, and the second flange 124 of the bellows 12 and the second sealing member 19 are arranged in the second through hole 112 of the first mounting plate 11; then, the temperature measuring end 100 and the connecting section 120 of the thermocouple 10 are sequentially passed through the dry gasket 170, the gasket 17, the elastic member 15, the first sealing member 18, the bellows 12, the first mounting plate 11 and the outer wall of the vacuum chamber to be arranged. In the vacuum chamber; then the thermocouple flange 106, the first seal 18 and the first flange 122 are arranged between the first half 160 and the second half 162 of the first fastening assembly 16 and sealed and connected by the first locking piece 164; then the two mounting rods 13 are installed on the first mounting plate 11; then the lead segment 104 is passed through the second mounting plate 14 and the second mounting plate 14 is fixed to the ends of the two mounting rods 13 near the dry gasket 170 and the gasket 17 by matching screws and nuts, and finally the temperature measuring end 100 of the thermocouple 10 is arranged in the temperature measuring blind hole inside the vacuum chamber. The thermocouple 10 can adapt to the longitudinal displacement by moving in the first through hole 140 and the second through hole 110, and the thermocouple 10 can adapt to the lateral displacement by the elastic force provided by the elastic member 15 and the bellows 12. The thermocouple 10 can have a small displacement follow-up in three dimensions while ensuring the vacuum seal, so that the temperature measuring end 100 of the thermocouple and the measured component are always in contact at different temperatures.
[0039] The utility model also provides a vacuum device, which includes a vacuum cavity, wherein the vacuum cavity includes a plurality of outer walls and a temperature measurement blind hole arranged inside the vacuum cavity, a plurality of thermocouple assemblies pass through the outer walls and are arranged in the temperature measurement blind holes, and the thermocouple assemblies are Figures 1 to 4 The thermocouple assembly 1, for its specific structure, please refer to Figures 1 to 7 As well as the above description, it is not repeated here.
[0040] In summary, the thermocouple assembly of the utility model includes a thermocouple, a first mounting plate, a mounting rod, a second mounting plate, a bellows and an elastic member, the mounting rod connects the first and second mounting plates which are parallel to each other, the temperature measuring end and the connecting section of the thermocouple sequentially pass through the second mounting plate, the elastic member, the bellows, the first mounting plate and the outer wall of the vacuum chamber so as to be arranged in the temperature measuring blind hole of the vacuum chamber of the vacuum equipment, the bellows includes a tube body and a first flange and a second flange located on both sides of the tube body, the first flange is sealed and connected to the thermocouple flange arranged on the connecting section through a first fastening assembly and a first sealing member, and the second flange is sealed and connected to the outer wall of the vacuum chamber through a first mounting plate and a second fastening assembly thereon and a second sealing member. The utility model can improve the accuracy of temperature measurement by enabling the thermocouple to adapt to thermal expansion and thereby measure temperature by heat conduction.
[0041] The previous description of the disclosure is provided to enable any person skilled in the art to make or use the disclosure. Various modifications to the disclosure will be apparent to those skilled in the art, and the universal principles defined herein may be applied to other variations without departing from the spirit or scope of the disclosure. Thus, the disclosure is not intended to be limited to the examples and designs described herein, but should be granted the widest scope consistent with the principles and novel features disclosed herein. The above-mentioned embodiments are provided to persons familiar with the art to implement or use the utility model, and persons familiar with the art may make various modifications or changes to the above-mentioned embodiments without departing from the utility model concept of the utility model, and thus the scope of protection of the utility model is not limited by the above-mentioned embodiments, but should be in accordance with the maximum scope of the innovative features mentioned in the claims.
Claims
1. A thermocouple assembly for vacuum equipment, the vacuum equipment comprising a vacuum chamber having a plurality of outer walls, the thermocouple assembly comprising a thermocouple and a first mounting plate for mounting the thermocouple on the outer wall of the vacuum chamber, the thermocouple comprising a temperature measuring end, a connecting section, a lead section and a thermocouple flange arranged on the connecting section, characterized in that: The thermocouple assembly also includes a mounting rod, a second mounting plate, a bellows and an elastic member, the mounting rod connects a first mounting plate and a second mounting plate which are parallel to each other, the lead segment passes through the second mounting plate, and the temperature measuring end and the connecting segment pass through the elastic member, the bellows, the first mounting plate and the outer wall of the vacuum chamber in sequence, thereby being arranged in a temperature measuring blind hole inside the vacuum chamber, the bellows includes a tube body and a first flange and a second flange located on both sides of the tube body, the first flange is sealed and connected to the thermocouple flange through a first fastening assembly and a first sealing member, and the second flange is sealed and connected to the outer wall of the vacuum chamber through a first mounting plate and a second fastening assembly thereon and a second sealing member.
2. The thermocouple assembly for vacuum equipment according to claim 1, characterized in that: The second mounting plate is provided with a first through hole corresponding to the thermocouple, and the first through hole is larger than the diameter of the connecting section of the thermocouple. One end of the elastic member abuts against the thermocouple flange, and the other end abuts against a gasket arranged adjacent to the second mounting plate, and the outer diameter of the gasket is larger than the diameter of the first through hole.
3. The thermocouple assembly for vacuum equipment according to claim 2, characterized in that: The first mounting plate is provided with a second through hole and a plurality of third through holes corresponding to the thermocouple and the second fastening assembly respectively, the second sealing member is arranged in the second through hole, and the second fastening assembly passes through the plurality of third through holes to seal and fix the first mounting plate and the bellows on the outer wall of the vacuum chamber.
4. The thermocouple assembly for vacuum equipment according to claim 3, characterized in that: The vacuum equipment is a PECVD equipment including an inner cavity and an outer cavity. The multiple outer walls of the vacuum cavity are the outer cavity walls, and the temperature measurement blind holes are opened on the outer walls of the inner cavity walls.
5. The thermocouple assembly for vacuum equipment according to claim 4, characterized in that: When the inner cavity is displaced due to thermal expansion or contraction, the thermocouple adapts to the longitudinal displacement of the inner cavity by moving in the first through hole and the second through hole, and the thermocouple adapts to the lateral displacement of the inner cavity through the elastic force provided by the elastic member and the bellows.
6. The thermocouple assembly for vacuum equipment according to claim 1, characterized in that: The first fastening assembly is a stainless steel vacuum clamp, including a first half and a second half that are hinged to each other and a first locking piece that locks the first half and the second half. The thermocouple flange, the first seal and the first flange are locked and sealed between the first half and the second half by the first locking piece.
7. The thermocouple assembly for vacuum equipment according to claim 1, characterized in that: The bellows is a welded bellows, the length of which ranges from 110 to 130 mm, the length after compression ranges from 90 mm to 110 mm, and the diameter ranges from 25 to 35 mm.
8. The thermocouple assembly for vacuum equipment according to claim 1, characterized in that: The elastic member is a spring, the elastic coefficient of the spring is 3.1N / mm, the free height is 35mm, the maximum displacement is 11.2mm, and the allowable load range is 30-50N.
9. The thermocouple assembly for vacuum equipment according to claim 1, characterized in that: The first sealing member and the second sealing member are both vacuum sealing rings; the thermocouple assembly comprises two mounting rods, a first end of each mounting rod is mounted on a first mounting plate, and a second end of each mounting rod is mounted on a second mounting plate.
10. A vacuum device, comprising a vacuum cavity, wherein the vacuum cavity comprises a plurality of outer walls and a temperature measurement blind hole arranged inside the vacuum cavity, wherein a plurality of thermocouple assemblies pass through the outer walls and are arranged in the temperature measurement blind holes, wherein: The thermocouple assembly is the thermocouple assembly according to any one of claims 1 to 9.