Emergency protection device for semiconductor wafer cleaning equipment
By designing an emergency protection device in semiconductor wafer cleaning equipment, and using components such as conversion tubes and sliding columns to cut off the water flow, the problem of continuous flushing of the water flow during motor failure and stopping is solved, and the emergency shutdown protection is achieved, and the protection effect of the wafer is improved.
Patent Information
- Application Number
- CN202421263303.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-04
- Publication Date
- 2025-03-14
- Estimated Expiration
- 2034-06-04
AI Technical Summary
When the existing semiconductor wafer cleaning equipment fails and stops, the cleaning water pump continues to spray water flow, resulting in uneven force on the wafer, and a certain area is subjected to excessive wear and tear, and lacks emergency stop protection measures for failure, which may cause damage to the wafer.
An emergency protection device for semiconductor wafer cleaning equipment is designed, including a conversion tube, sliding column, water pass tank, drainage tank, diversion tank and return spring. Through the cooperation of these components, the water flow is cut off when the driving motor fails and stops, and the continuous flushing is avoided.
It realizes emergency shutdown protection when the drive motor fails, avoids the continuous flushing of the semiconductor wafer in a single position of the cleaning water flow, and improves the protection effect of the wafer.
Smart Images
Figure CN222619703U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of wafer processing, in particular to an emergency protection device for semiconductor wafer cleaning equipment. Background Art
[0002] Wafer refers to the silicon wafer used to make silicon semiconductor circuits. Its original material is silicon. High-purity polysilicon is dissolved and mixed with silicon crystal seeds, and then slowly pulled out to form cylindrical single crystal silicon. After grinding, polishing and slicing, the silicon crystal rod forms a silicon wafer, that is, a wafer. During the production or processing of semiconductor wafers, it is necessary to clean the semi-finished products to ensure the cleanliness of the factory.
[0003] At present, the existing semiconductor wafer cleaning equipment has the situation that the motor fails and stops during use. After the motor fails and stops, the cleaning water pump continues to spray water, and at this time the water flow only continues to flush a certain area of the wafer, causing uneven force on the wafer and excessive wear of a certain area by the impact force. The existing equipment lacks the necessary emergency stop protection measures for faults, and such flushing may cause damage to the wafer. Therefore, an emergency protection device for semiconductor wafer cleaning equipment is proposed. Utility Model Content
[0004] The purpose of the utility model is to solve the problem that the prior art lacks necessary emergency stop protection measures and that when the motor stops due to a fault, the continuously sprayed water flow may cause damage to the wafer, and an emergency protection device for semiconductor wafer cleaning equipment is proposed.
[0005] In order to achieve the above purpose, the utility model adopts the following technical solutions:
[0006] An emergency protection device for semiconductor wafer cleaning equipment includes a cleaning seat and a water pump fixed on the side wall thereof, and also includes: a mounting plate fixed on the side wall of the cleaning seat, the mounting plate is provided with a flushing pipe sliding along the straight section of the mounting plate, the flushing pipe is provided with a protection part for emergency interception and drainage of water flow inside the flushing pipe, wherein the protection part includes a conversion tube, the conversion tube is fixed through the upper part of the flushing pipe, and the flushing pipe is connected to the inner cavity of the conversion tube, a sliding column is slidably connected inside the conversion tube, the end of the inclined section on the conversion tube is connected to a guide tube, a reset spring is fixedly connected between the side wall of the sliding column and the inner wall of the conversion tube, and the end of the conversion tube is connected to a driving part for pushing the sliding column to slide.
[0007] In order to achieve emergency protection, preferably, the driving part includes a friction wheel, a driving compartment is provided on the side wall of the cleaning seat, the friction wheel is rotatably connected in the driving compartment, a driving motor is fixedly connected in the cleaning seat, and a cleaning disk is fixedly connected to the output shaft end of the driving motor, the friction wheel rotates in fit with the side wall of the cleaning disk, a driven compartment is provided in the cleaning seat located below the driving compartment, the rotating shaft of the friction wheel extends through the driven compartment and is fixedly connected to a push flow blade, the side wall of the cleaning seat is fixedly connected to a guide ring, the bottom of the side wall of the driven compartment is connected to the inner cavity of the guide ring, and the end of the guide tube away from the conversion tube is connected to the inner cavity of the guide ring.
[0008] Furthermore, a water passage groove is provided on the side wall of the sliding column, and a drainage groove and a guide groove are provided on both sides of the interior of the sliding column.
[0009] Furthermore, the two ends of the drainage groove are respectively connected to the flushing pipe and the lower inclined section of the conversion pipe, and the two ends of the guide groove are respectively connected to the flushing pipe and the upper inclined section of the conversion pipe.
[0010] In order to improve the protection effect, preferably, the lower inclined section of the flushing pipe is fixed and connected to a drainage pipe.
[0011] Furthermore, a water pump is fixedly connected to the side wall of the cleaning seat, an upper end of the flushing pipe is fixed and connected to a water inlet pipe, and the other end of the water inlet pipe is fixed and connected to an output end of the water pump.
[0012] Compared with the prior art, the utility model provides an emergency protection device for semiconductor wafer cleaning equipment, which has the following beneficial effects:
[0013] The emergency protection device for semiconductor wafer cleaning equipment cuts off the water flow in the connecting pipe when the driving motor stops due to a fault through the cooperation between the conversion tube, the sliding column, the water trough, the drainage groove, the guide groove and the reset spring, so as to prevent the cleaning water flow from continuously flushing a single position of the semiconductor wafer, thereby achieving emergency shutdown protection and improving the protection effect on the semiconductor wafer. BRIEF DESCRIPTION OF THE DRAWINGS
[0014] Figure 1 This is a schematic diagram of the overall structure of a main view of an emergency protection device for semiconductor wafer cleaning equipment proposed by the utility model;
[0015] Figure 2 A schematic side view of a half-section structure of an emergency protection device for semiconductor wafer cleaning equipment proposed by the utility model;
[0016] Figure 3 This is a schematic diagram of the internal structure of a conversion tube of an emergency protection device for semiconductor wafer cleaning equipment proposed by the utility model;
[0017] Figure 4 The utility model provides an emergency protection device for semiconductor wafer cleaning equipment. Figure 2 Schematic diagram of the enlarged structure of area A in the middle.
[0018] In the figure: 1. cleaning seat; 2. mounting plate; 21. flushing pipe; 22. drainage pipe; 3. conversion pipe; 31. sliding column; 311. water trough; 312. drainage trough; 313. guide trough; 32. guide pipe; 33. reset spring; 4. friction wheel; 41. driving chamber; 42. driven chamber; 421. push flow blade; 43. guide ring; 5. driving motor; 51. cleaning disc; 6. water pump; 61. water inlet pipe. DETAILED DESCRIPTION
[0019] The technical solutions in the embodiments of the present invention will be described clearly and completely below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, rather than all of the embodiments.
[0020] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "top", "bottom", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific direction, be constructed and operated in a specific direction, and therefore should not be understood as a limitation on the present invention.
[0021] Example:
[0022] Reference Figure 1-Figure 4, an emergency protection device for semiconductor wafer cleaning equipment, comprising a cleaning seat 1 and a water pump 6 fixed on its side wall, and also comprising: a mounting plate 2 fixed to the side wall of the cleaning seat 1, a flushing pipe 21 sliding along the straight section of the mounting plate 2 is arranged on the mounting plate 2, the upper end of the flushing pipe 21 is fixed and connected with a water inlet pipe 61, and the other end of the water inlet pipe 61 is fixed and connected with the output end of the water pump 6; a protection part for emergency interception and drainage of the water flow inside the flushing pipe 21 is arranged on the flushing pipe 21, wherein the protection part comprises a conversion pipe 3, the conversion pipe 3 penetrates and is fixed to the upper part of the flushing pipe 21, and the flushing pipe 21 is connected with the inner cavity of the conversion pipe 3, and the conversion pipe 3 A sliding column 31 is connected internally for sliding movement. A water-passing groove 311 is provided on the side wall of the sliding column 31. A drainage groove 312 and a guide groove 313 are provided on both sides of the interior of the sliding column 31. The two ends of the drainage groove 312 are respectively connected to the flushing pipe 21 and the lower inclined section of the conversion pipe 3. The two ends of the guide groove 313 are respectively connected to the flushing pipe 21 and the upper inclined section of the conversion pipe 3. The lower inclined section of the flushing pipe 21 is fixed and connected to the drainage pipe 22. The end of the upper inclined section of the conversion pipe 3 is connected to the guide pipe 32. A reset spring 33 is fixedly connected between the side wall of the sliding column 31 and the inner wall of the conversion pipe 3. The end of the conversion pipe 3 is connected to a driving part that pushes the sliding column 31 to slide.
[0023] Reference Figure 2 , Figure 4 The driving part includes a friction wheel 4, a driving chamber 41 is provided on the side wall of the cleaning seat 1, the friction wheel 4 is rotatably connected in the driving chamber 41, a driving motor 5 is fixedly connected in the cleaning seat 1, a cleaning disc 51 is fixedly connected to the output shaft end of the driving motor 5, the friction wheel 4 rotates in close contact with the side wall of the cleaning disc 51, a driven chamber 42 is provided in the cleaning seat 1 below the driving chamber 41, the rotating shaft of the friction wheel 4 extends through the driven chamber 42 and is fixedly connected with a push flow blade 421, a guide ring 43 is fixedly connected to the side wall of the cleaning seat 1, the bottom of the side wall of the driven chamber 42 is communicated with the inner cavity of the guide ring 43, and the end of the guide pipe 32 away from the conversion pipe 3 is communicated with the inner cavity of the guide ring 43;
[0024] It should be noted that, in the initial state, the flushing pipe 21 is connected to the drainage groove 312 and is in a state of interception and drainage; when pressure is applied to the sliding column 31, the return spring 33 is compressed to the maximum extent, and the flushing pipe 21 is connected to the water groove 311 and is in a state of accelerated flow, and then when the applied pressure suddenly disappears, it will be converted into a state of interception and drainage.
[0025] Reference Figure 1-Figure 4When in use, the driving motor 5 will drive the cleaning disc 51 to rotate, and the friction between the cleaning disc 51 and the friction wheel 4 will cause the friction wheel 4 to drive the flow-pushing blade 421 to rotate, thereby generating a downward airflow thrust in the driven chamber 42, and this part of the airflow will enter the conversion tube 3 along the guide ring 43 and the guide tube 32, and push the sliding column 31 in the conversion tube 3 to move, so that the water groove 311 on the side wall of the sliding column 31 moves to the connection with the flushing tube 21, thereby completing the conversion of the flushing connection state. When the driving motor 5 stops rotating due to a fault, the friction wheel 4 and the flow-pushing blade 4 21 will stop rotating. At this time, the guide tube 32 will stop applying thrust to the conversion tube 3. Under the rebound action of the reset spring 33, the sliding column 31 will move up and reset, and return to the state where the flushing tube 21 is connected with the drainage groove 312. At this time, the water will flow out along the drainage tube 22 to avoid the sudden interception and cause the water pump 6 to overload, thereby improving the protection effect on the water pump 6. There will be no more water delivery in the flushing tube 21, realizing emergency shutdown protection, avoiding the cleaning water flow from continuously flushing a single position of the semiconductor wafer when the drive motor 5 fails, thereby improving the protection effect on the semiconductor wafer.
[0026] The above description is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any technician familiar with the technical field can make equivalent replacements or changes within the technical scope disclosed by the present invention according to the technical scheme and the utility model concept of the present invention, which should be covered by the protection scope of the present invention.
Claims
1. An emergency protection device for semiconductor wafer cleaning equipment, comprising a cleaning seat (1) and a water pump (6) fixed to the side wall thereof, characterized in that: Also includes: A mounting plate (2) is fixed to the side wall of the cleaning seat (1), the mounting plate (2) is provided with a flushing pipe (21) which slides along the straight section of the mounting plate (2), and the flushing pipe (21) is provided with a protective part for emergency interception and drainage of water flow inside the flushing pipe (21). The protection part comprises a conversion tube (3), the conversion tube (3) is fixedly passed through the upper part of the flushing tube (21), and the flushing tube (21) is communicated with the inner cavity of the conversion tube (3), a sliding column (31) is slidably connected inside the conversion tube (3), the end of the upper inclined section of the conversion tube (3) is communicated with a guide tube (32), a return spring (33) is fixedly connected between the side wall of the sliding column (31) and the inner wall of the conversion tube (3), and the end of the conversion tube (3) is communicated with a driving part for pushing the sliding column (31) to slide.
2. The emergency protection device for semiconductor wafer cleaning equipment according to claim 1, characterized in that: The driving part comprises a friction wheel (4); a driving chamber (41) is provided on the side wall of the cleaning seat (1); the friction wheel (4) is rotatably connected in the driving chamber (41); a driving motor (5) is fixedly connected in the cleaning seat (1); a cleaning disc (51) is fixedly connected to the output shaft end of the driving motor (5); the friction wheel (4) rotates in close contact with the side wall of the cleaning disc (51); a driven chamber (42) is provided in the cleaning seat (1) below the driving chamber (41); a rotating shaft of the friction wheel (4) extends through the driven chamber (42) and is fixedly connected to a push flow blade (421); a guide ring (43) is fixedly connected to the side wall of the cleaning seat (1); the bottom of the side wall of the driven chamber (42) is communicated with the inner cavity of the guide ring (43); and the end of the guide pipe (32) away from the conversion pipe (3) is communicated with the inner cavity of the guide ring (43).
3. The emergency protection device for semiconductor wafer cleaning equipment according to claim 1, characterized in that: The side wall of the sliding column (31) is provided with a water passage groove (311), and the inside of the sliding column (31) is provided with a drainage groove (312) and a guide groove (313) on both sides thereof.
4. The emergency protection device for semiconductor wafer cleaning equipment according to claim 3, characterized in that: The two ends of the drainage groove (312) are respectively connected to the flushing pipe (21) and the lower inclined section of the conversion pipe (3), and the two ends of the guide groove (313) are respectively connected to the flushing pipe (21) and the upper inclined section of the conversion pipe (3).
5. The emergency protection device for semiconductor wafer cleaning equipment according to claim 1, characterized in that: The lower inclined section of the flushing pipe (21) is fixed and connected to a drainage pipe (22).
6. The emergency protection device for semiconductor wafer cleaning equipment according to claim 1, characterized in that: The upper end of the flushing pipe (21) is fixed and connected to a water inlet pipe (61), and the other end of the water inlet pipe (61) is fixed and connected to an output end of a water pump (6).