Feeding device

Abstract

The utility model belongs to the technical field of wafer conveying, and particularly relates to a feeding device which comprises an overturning pair, the movable end of the overturning pair is hinged to the end portion of a movable frame, in the initial state, a vertical plate is in the vertical state, a transverse plate is in the horizontal state, the lower portion of a flower basket is supported by the transverse plate, and the opening of the flower basket faces upwards; when the movable end is in the minimum stroke, the vertical plate is in the horizontal state, the transverse plate is in the vertical state, the rear portion of the flower basket is supported by the vertical plate, and at the moment, the opening of the flower basket is in the horizontal state. The movable end of the overturning pair drives the movable frame to stably rotate on the supporting frame so as to drive the flower basket to overturn, and the opening of the flower basket can also overturn along with the flower basket. When the movable end is in the minimum stroke, the vertical plate is in the horizontal state, the rear portion of the basket is supported by the vertical plate, the opening of the basket is in the horizontal state, the wafer is also in the horizontal state, feeding of a mechanical arm is facilitated, and the feeding efficiency is improved.

Description

Technical Field

[0001] The utility model belongs to the technical field of wafer conveying, and in particular relates to a loading device. Background Art

[0002] In the process of wafer production, different cleaning equipment is required for cleaning according to different process flows; when cleaning a single wafer, the wafer needs to be pre-impregnated first, which can remove loose dirt, particles and preliminary oxide layers on the surface of the wafer, and avoid excessive consumption of chemical cleaning solution and premature failure of the cleaning agent when cleaning the wafer; after the wafer is pre-impregnated, the wafer needs to be transported to the cleaning device for cleaning, and in order to facilitate wafer loading, the wafer needs to be in a horizontal state; in the related art, due to the limitation of the movement of the robot arm, the flower basket can only be lifted and translated, and the flower basket cannot be flipped, so that the wafer cannot be in a horizontal state, and the automatic loading effect cannot be achieved, which affects the work efficiency;

[0003] Therefore, in order to solve the problem that the wafer cannot be kept level during the loading process, a loading device is urgently needed. Utility Model Content

[0004] The purpose of the utility model is to provide a feeding device.

[0005] In order to solve the above technical problems, the utility model provides a feeding device, including: a support plate, which is vertically arranged, and a movable frame with an "L"-shaped cross-section is rotatably arranged on the front part of the support plate; a flip pair, the movable end of the flip pair is hinged to the end of the movable frame, wherein in an initial state, the vertical plate is in a vertical state, the horizontal plate is in a horizontal state, the lower part of the flower basket is supported by the horizontal plate, and the opening of the flower basket faces upward; when the movable end is in a minimum stroke, the vertical plate is in a horizontal state, the horizontal plate is in a vertical state, the rear part of the flower basket is supported by the vertical plate, and at this time, the opening of the flower basket is in a horizontal state.

[0006] Furthermore, a pair of connecting plates are provided on the upper part of the vertical plate, a pair of fixing plates are provided on the front part of the supporting plate, and the connecting and fixing plates are provided with corresponding latch holes; wherein the latch holes are suitable for inserting latches to enable the connecting plates to rotate and are provided on the inner side of the fixing plates.

[0007] Furthermore, the flip pair includes a flip cylinder, a first hinged plate and a second hinged plate, wherein the first hinged plate is arranged at the lower part of the flip cylinder, and the movable end is the end of the piston rod of the flip cylinder; the second hinged plate is arranged at the upper part of the movable end, and a hinged support seat is arranged at the front part of the support plate; wherein the first hinged plate is hinged to the hinged support seat, and the second hinged plate is hinged to the end of the connecting plate.

[0008] Furthermore, a connecting rod is provided on the side wall of the connecting plate, and the connecting rod is hinged to the second hinged plate.

[0009] Furthermore, a lifting pair is connected to the rear of the support plate, and the lifting pair includes a linear motor, a guide rail and a slider; the slider is slidably arranged on the guide rail and connected to the driving end of the linear motor, and the support plate is arranged on the side wall of the slider.

[0010] Furthermore, a clamping assembly is provided on the movable frame, and the clamping assembly is suitable for limiting the position of the flower basket.

[0011] Furthermore, the clamping assembly includes a plurality of pairs of abutting blocks, the abutting blocks are mirror-imaged at the front of the vertical plate, and the abutting blocks are back-to-back provided with abutting notches, wherein the abutting notches are suitable for abutting the upper part of the flower basket.

[0012] Furthermore, the clamping assembly also includes a positioner, which is arranged on the upper part of the horizontal plate, and a positioning rod is arranged at the movable end of the positioner, wherein the positioning rod is suitable for abutting against the front part of the flower basket.

[0013] Furthermore, the clamping assembly also includes a pair of limiting bars, which are mirror-disposed on the upper part of the transverse plate, wherein the lower part of the flower basket is inserted between the limiting bars to be limited by the limiting bars.

[0014] Furthermore, the horizontal plate and the vertical plate are provided with a plurality of water holes.

[0015] Furthermore, a pre-washing tank is provided below the movable frame, and a water receiving tray is provided below the pre-washing tank.

[0016] Beneficial effects of the utility model:

[0017] In the initial state, the cross plate is in a horizontal state, the bottom of the flower basket is supported by the cross plate, and the opening of the flower basket faces upward. The movable end of the flipping pair drives the movable frame to rotate stably on the support frame, thereby driving the flower basket to flip, and the opening of the flower basket can also flip accordingly; when the movable end is in the minimum stroke, at this time, the vertical plate is in a horizontal state, and the rear of the flower basket is supported by the vertical plate. At this time, the opening of the flower basket is in a horizontal state, and the wafer is also in a horizontal state, which is convenient for the robot to load and improves the loading efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0019] Figure 1 It is a schematic diagram of the structure of the feeding device of the utility model from a top view;

[0020] Figure 2 yes Figure 1 A partial enlarged view of the middle A;

[0021] Figure 3 It is a structural schematic diagram of the initial state of the feeding device of the utility model from a side view;

[0022] Figure 4 It is a structural schematic diagram of the second state of the feeding device of the utility model from a side perspective;

[0023] Figure 5 It is a structural schematic diagram of the feeding device of the utility model from a front view angle.

[0024] In the figure:

[0025] 100, movable frame, 110, vertical plate, 111, connecting plate, 1111, latch hole, 1112, latch, 1113, connecting rod, 112, holding block, 1121, holding notch, 120, horizontal plate, 121, positioner, 1211, positioning rod, 122, limiting strip, 130, water hole, 200, flip pair, 210, flip cylinder, 211, piston rod, 2111, movable end, 220, first hinge plate, 230, second hinge plate, 300, lifting pair, 310, linear motor, 320, guide rail, 330, slider, 400, flower basket, 410, support plate, 411, fixed plate, 412, hinged support seat, 420, pre-washing tank, 430, water receiving tray, 440, opening, 450, flange. DETAILED DESCRIPTION

[0026] In order to make the purpose, technical solution and advantages of the embodiments of the utility model clearer, the technical solution of the utility model will be clearly and completely described below in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the utility model, not all of the embodiments. Based on the embodiments of the utility model, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the utility model.

[0027] In some embodiments, Figures 1 to 5 As shown, the utility model provides a feeding device, comprising: a support plate 410, the support plate 410 is vertically arranged, and the front part of the support plate 410 is rotatably provided with a movable frame 100 with an "L"-shaped cross section; a flip pair 200, and the movable end 2111 of the flip pair 200 is hinged to the end of the movable frame 100, wherein in the initial state, the vertical plate 110 is in a vertical state, the horizontal plate 120 is in a horizontal state, the lower part of the flower basket 400 is supported by the horizontal plate 120, and the opening 440 of the flower basket 400 faces upward; when the movable end 2111 is in the minimum stroke, the vertical plate 110 is in a horizontal state, the horizontal plate 120 is in a vertical state, and the rear part of the flower basket 400 is supported by the vertical plate 11 0, at this time, the opening 440 of the flower basket 400 is in a horizontal state; in the initial state, the horizontal plate 120 is in a horizontal state, the bottom of the flower basket 400 is supported by the horizontal plate 120, and the opening 440 of the flower basket 400 faces upward, and the movable end 2111 of the flipping pair 200 drives the movable frame 100 to rotate stably on the support frame, thereby driving the flower basket 400 to flip, and the opening 440 of the flower basket 400 can also flip accordingly; when the movable end 2111 is in the minimum stroke, at this time, the vertical plate 110 is in a horizontal state, and the rear part of the flower basket 400 is supported by the vertical plate 110. At this time, the opening 440 of the flower basket 400 is in a horizontal state, and the wafer is also in a horizontal state, which is convenient for the robot (not shown in the figure) to load the material, thereby improving the loading efficiency.

[0028] See also Figure 1 Combined with Figure 4 A pair of connecting plates 111 are provided on the upper part of the vertical plate 110, and a pair of fixing plates 411 are provided on the front part of the supporting plate 410, and the connecting and fixing plates 411 are provided with corresponding latch holes 1111; wherein the latch hole 1111 is suitable for inserting a latch 1112 so that the connecting plate 111 is rotated on the inner side of the fixing plate 411; after the latch 1112 is inserted into the latch hole 1111, the connecting plate 111 is hinged with the fixing plate 411, and the connecting plate 111 can be stably rotated on the supporting plate 410, so that the movable frame 100 can be stably rotated on the supporting plate 410.

[0029] See also Figures 3 to 5The flip pair 200 includes a flip cylinder 210, a first hinge plate 220 and a second hinge plate 230, wherein the first hinge plate 220 is arranged at the lower part of the flip cylinder 210, and the movable end 2111 is the end of the piston rod 211 of the flip cylinder 210; the second hinge plate 230 is arranged at the upper part of the movable end 2111, and the front part of the support plate 410 is provided with a hinge support seat 412; wherein the first hinge plate 220 is hinged to the hinge support seat 412, and the second hinge plate 230 is hinged to the end of the connecting plate 111 In the initial state, the piston rod 211 is at the maximum stroke. When the flower basket 400 needs to be flipped, the piston rod 211 contracts, and the movable end 2111 drives the second hinged plate 230 to contract, thereby driving the connecting plate 111 to descend. The movable frame 100 rotates in a clockwise direction. When the piston rod 211 contracts to the minimum stroke, the vertical plate 110 is just in a horizontal state, so that the opening 440 of the flower basket 400 is horizontal, which is convenient for loading. The first hinged plate 220 is hinged to the hinged support seat 412, so that the flipping cylinder 210 can follow the movement.

[0030] See also Figure 5 The side wall of the connecting plate 111 is provided with a connecting rod 1113, and the connecting rod 1113 is hinged to the second hinged plate 230, so that there is an appropriate distance between the connecting plate 111 and the second hinged plate 230, and also an appropriate distance between the flip cylinder 210 and the movable frame 100, so as to make a suitable insertion space for the movable frame 100 to descend into the pre-washing tank 420.

[0031] See also Figures 3 to 5 The rear part of the support plate 410 is connected with a lifting pair 300, and the lifting pair 300 includes a linear motor 310, a guide rail 320 and a slider 330; the slider 330 is slidably arranged on the guide rail 320 and connected to the driving end of the linear motor 310, and the support plate 410 is arranged on the side wall of the slider 330; the driving end of the linear motor 310 drives the slider 330 to slide stably on the guide rail 320, thereby driving the support plate 410 to rise and fall, and the lifting of the support plate 410 can drive the movable frame 100 to rise and fall, thereby driving the flower basket 400 to rise and fall.

[0032] See also Figure 1 The movable frame 100 is provided with a clamping assembly, and the clamping assembly is suitable for limiting the flower basket 400; by limiting the flower basket 400 by the clamping assembly, it is possible to prevent the flower basket 400 from shaking when it is turned over, so that the wafers in the flower basket 400 can be turned stably.

[0033] See also Figure 1The clamping assembly includes a plurality of pairs of abutting blocks 112, the abutting blocks 112 are mirror-imaged at the front of the vertical plate 110, and the abutting blocks 112 are back-to-back provided with abutting notches 1121, wherein the abutting notches 1121 are suitable for abutting the upper part of the flower basket 400;

[0034] See also Figure 1 The clamping assembly further includes a positioner 121, which is disposed on the upper portion of the transverse plate 120, and a positioning rod 1211 is disposed at the movable end 2111 of the positioner 121, wherein the positioning rod 1211 is suitable for resisting the front portion of the flower basket 400.

[0035] See also Figure 1 The clamping assembly further includes a pair of limiting bars 122 , which are mirror-imaged on the upper portion of the transverse plate 120 , wherein the lower portion of the flower basket 400 is inserted between the limiting bars 122 to be limited by the limiting bars 122 .

[0036] See also Figures 1 to 5 In the initial state, the horizontal plate 120 is in a horizontal state, the upper flange 450 of the flower basket 400 and the lower part of the flower basket 400 are respectively supported by the supporting notch 1121 and the horizontal plate 120 to prevent the flower basket 400 from axially shaking; the front and rear parts of the flower basket 400 are clamped by the positioning rod 1211 and the front part of the vertical plate 110 to prevent the flower basket 400 from shaking forward and backward; the outer side of the lower part of the flower basket 400 is limited by the inner wall of the limiting strip 122 to prevent the flower basket 400 from shaking left and right; the movable frame 100 rotates to drive the flower basket 400 to flip When the movable end 2111 is at the minimum stroke, the vertical plate 110 is in a horizontal state, and the rear and front parts of the flower basket 400 are clamped by the vertical plate 110 and the positioning rod 1211 to prevent the flower basket 400 from axially shaking. The upper flange 450 of the flower basket 400 and the lower part of the flower basket 400 are respectively supported by the supporting notch 1121 and the horizontal plate 120 to prevent the flower basket 400 from shaking back and forth. In summary, the flower basket 400 will not shake as a whole during the flipping process, and the flipping is stable, ensuring that the wafers can be stably loaded.

[0037] The horizontal plate 120 and the vertical plate 110 are provided with a plurality of water holes 130 .

[0038] A pre-washing tank 420 is disposed below the movable frame 100 , and a water receiving tray 430 is disposed below the pre-washing tank 420 .

[0039] The pre-wash tank 420 can stably load the pre-wash liquid. When the cross plate 120 is in a horizontal state and carries the flower basket 400 downward, the water hole 130 can evenly transport the pre-wash liquid into the flower basket 400 to pre-wash the wafers in the flower basket 400. The water receiving tray 430 can load the pre-wash liquid overflowing from the pre-wash tank 420 to prevent the pre-wash liquid from spilling everywhere and polluting the environment.

[0040] Based on the above ideal embodiments of the utility model, the relevant staff can make various changes and modifications without deviating from the technical concept of the utility model through the above description. The technical scope of the utility model is not limited to the content of the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A feeding device, characterized in that: include: A support plate (410), the support plate (410) being arranged vertically, and a movable frame (100) having an "L"-shaped cross section being rotatably arranged at the front of the support plate (410); A turning pair (200), wherein a movable end (2111) of the turning pair (200) is hinged to an end of the movable frame (100), wherein In an initial state, the vertical plate (110) of the movable frame (100) is in a vertical state, the horizontal plate (120) of the movable frame (100) is in a horizontal state, the lower part of the flower basket (400) is supported by the horizontal plate (120), and the opening (440) of the flower basket (400) faces upward; when the movable end (2111) is in a minimum stroke, the vertical plate (110) of the movable frame (100) is in a horizontal state, the horizontal plate (120) of the movable frame (100) is in a vertical state, the rear part of the flower basket (400) is supported by the vertical plate (110), and at this time, the opening (440) of the flower basket (400) is in a horizontal state.

2. The feeding device according to claim 1, characterized in that: A pair of connecting plates (111) are provided at the upper part of the vertical plate (110) of the movable frame (100), a pair of fixing plates (411) are provided at the front part of the support plate (410), and the connecting plates and the fixing plates (411) are provided with corresponding latch holes (1111); wherein The latch hole (1111) is suitable for inserting a latch (1112) so that the connecting plate (111) is rotatably arranged on the inner side of the fixing plate (411).

3. The feeding device according to claim 2, characterized in that: The flip pair (200) comprises a flip cylinder (210), a first hinged plate (220) and a second hinged plate (230); the first hinged plate (220) is arranged at the lower part of the flip cylinder (210); the movable end (2111) is the end of the piston rod (211) of the flip cylinder (210); the second hinged plate (230) is arranged at the upper part of the movable end (2111); the front part of the support plate (410) is provided with a hinged support seat (412); The first hinged plate (220) is hinged to the hinged support seat (412), and the second hinged plate (230) is hinged to the end of the connecting plate (111).

4. The feeding device according to claim 3, characterized in that: A connecting rod (1113) is provided on the side wall of the connecting plate (111), and the connecting rod (1113) is hinged to the second hinged plate (230).

5. The feeding device according to claim 1, characterized in that: The rear portion of the support plate (410) is connected to a lifting pair (300), the lifting pair (300) comprising a linear motor (310), a guide rail (320) and a slider (330); the slider (330) is slidably arranged on the guide rail (320) and connected to the driving end of the linear motor (310), and the support plate (410) is arranged on a side wall of the slider (330).

6. The feeding device according to claim 5, characterized in that: A clamping assembly is provided on the movable frame (100), and the clamping assembly is suitable for limiting the position of the flower basket (400).

7. The feeding device according to claim 6, characterized in that: The clamping assembly comprises a plurality of pairs of abutting blocks (112), wherein the abutting blocks (112) are arranged in a mirror image on the front of the vertical plate (110) of the movable frame (100), and the abutting blocks (112) are provided with abutting notches (1121) opposite to each other, wherein The supporting notch (1121) is suitable for supporting the upper part of the flower basket (400).

8. The feeding device according to claim 7, characterized in that: The clamping assembly further comprises a positioner (121), wherein the positioner (121) is arranged on the upper part of the transverse plate (120) of the movable frame (100), and a positioning rod (1211) is arranged at the movable end of the positioner (121), wherein The positioning rod (1211) is suitable for abutting against the front of the flower basket (400).

9. The feeding device according to claim 8, characterized in that: The clamping assembly further comprises a pair of limit bars (122), wherein the limit bars (122) are arranged in a mirror image on the upper part of the horizontal plate (120) of the movable frame (100), wherein The lower part of the flower basket (400) is inserted between the limiting bars (122) to be limited by the limiting bars (122).

10. The feeding device according to claim 1, characterized in that: The horizontal plate (120) and the vertical plate (110) of the movable frame (100) are provided with a plurality of water holes (130).

11. The feeding device according to claim 1, characterized in that: A pre-washing tank (420) is provided below the movable frame (100), and a water receiving tray (430) is provided below the pre-washing tank (420).

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