Annealing furnace with uniform heating function
By introducing clamping and rotating components into the annealing furnace, the problem of uneven heating in the annealing furnace was solved, resulting in higher heating uniformity and production quality.
Patent Information
- Application Number
- CN202422923238.3
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-11-29
- Publication Date
- 2025-10-31
- Estimated Expiration
- 2034-11-29
AI Technical Summary
Existing annealing furnaces have slow heating rates and uneven temperature distribution, making it difficult to meet the process requirements for high-temperature uniformity.
An annealing furnace with a clamping and fixing component and a rotating component was designed. The clamping and fixing component clamps and fixes the workpiece on the rotating frame, and the rotating component drives the workpiece to rotate, thereby achieving uniform heating.
It improves the heating uniformity of the processed parts and enhances production quality.
Smart Images
Figure CN223500116U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of annealing furnace design technology, and in particular to an annealing furnace with uniform heating function. Background Technology
[0002] Annealing furnaces are a process used in semiconductor device manufacturing that involves heating multiple semiconductor wafers to affect their electrical properties. The heat treatment is designed for different effects, such as heating wafers to activate dopants, transforming thin films into thin films or thin films into wafer-substrate interfaces, making densely deposited thin films, changing the state of grown thin films, repairing implanted damage, moving dopants or transferring dopants from one thin film to another or from a thin film into a wafer substrate.
[0003] Common tube furnaces use resistance wires as heating elements. When current passes through the resistance wire, electrical energy is converted into heat energy, which in turn raises the temperature of the furnace tube and the surrounding environment. The heat is transferred to the material to be processed inside the furnace tube to achieve the purpose of heating. However, its heating speed is slow and the temperature distribution is uneven, making it difficult to meet the process requirements that require high temperature uniformity.
[0004] Therefore, it is necessary to provide an annealing furnace with uniform heating function to solve the above-mentioned technical problems. Utility Model Content
[0005] This invention provides an annealing furnace with uniform heating function, which solves the problem of uneven heating.
[0006] To solve the above-mentioned technical problems, this utility model provides an annealing furnace with uniform heating function, comprising: a tube furnace, wherein a sealing assembly is provided at the front end of the tube furnace, and the sealing assembly includes a sealing door and a handle;
[0007] A support and movement assembly is disposed on the surface of the sealing door, and the support and movement assembly includes a support plate and moving wheels;
[0008] A rotating assembly is disposed on the surface of the support plate, and the rotating assembly includes a rotating frame and a drive motor.
[0009] A clamping and fixing assembly is disposed on the surface of the rotating frame, and the clamping and fixing assembly includes a bidirectional threaded rod, a clamping plate, and a rotating disk.
[0010] Preferably, the sealing door is movably installed on the outer surface of the front end of the tubular furnace, and the handle is fixedly installed on the surface of the front end of the sealing door.
[0011] Preferably, the support plate is fixedly connected to the rear end of the sealing door, the support plate is movably embedded inside the tubular furnace, and the moving wheels are movably installed at the bottom of the sealing door.
[0012] Preferably, the two ends of the rotating frame are movably connected to the inner surfaces of the two ends of the support plate, and the drive motor is fixedly connected to one end of the rotating frame.
[0013] Preferably, the bidirectional threaded rod is movably connected inside the front end of the rotating frame, one end of the clamping plate is threadedly connected to the surface of the bidirectional threaded rod, and the rotating disk is fixedly connected to one end of the bidirectional threaded rod.
[0014] Preferably, the surface of the support plate is provided with an impurity cleaning component, the impurity cleaning component includes a receiving groove, the receiving groove is opened on the top surface of the support plate, and a push plate is movably embedded inside the receiving groove.
[0015] Preferably, the bottom of the front end of the receiving trough is provided with a feeding port, and a storage box is fixedly connected to the surface of the support plate at the bottom of the feeding port.
[0016] Compared with related technologies, the annealing furnace with uniform heating function provided by this utility model has the following beneficial effects:
[0017] This utility model provides an annealing furnace with uniform heating function. The workpiece can be clamped and fixed on the rotating frame by the clamping and fixing component, while the rotating component can drive the workpiece to rotate, thereby improving the uniformity of heating of the workpiece and improving the production quality. Attached Figure Description
[0018] Figure 1 A schematic diagram of the structure of a first embodiment of an annealing furnace with uniform heating function provided by this utility model;
[0019] Figure 2 for Figure 1 The diagram shows the rear-side structure.
[0020] Figure 3 for Figure 2 The enlarged schematic diagram of part A shown below;
[0021] Figure 4 This is a schematic diagram of the structure of a second embodiment of an annealing furnace with uniform heating function provided by this utility model.
[0022] Numbered in the diagram: 1. Tubular furnace
[0023] 2. Sealing assembly; 21. Sealed door; 22. Handle.
[0024] 3. Supporting moving components; 31. Support plate; 32. Moving wheels.
[0025] 4. Rotating assembly; 41. Rotating frame; 42. Drive motor.
[0026] 5. Clamping and fixing assembly; 51. Bidirectional threaded rod; 52. Clamping plate; 53. Rotating disk.
[0027] 6. Impurity cleaning component; 61. Receiving trough; 62. Push plate; 63. Storage box; 64. Feed inlet. Detailed Implementation
[0028] The present invention will be further described below with reference to the accompanying drawings and embodiments.
[0029] First Embodiment
[0030] Please refer to the following: Figure 1 , Figure 2 and Figure 3 ,in, Figure 1 A schematic diagram of the structure of a first embodiment of an annealing furnace with uniform heating function provided by this utility model; Figure 2 for Figure 1 The diagram shows the rear-side structure. Figure 3 for Figure 2 The enlarged schematic diagram of part A is shown. An annealing furnace with uniform heating function includes: a tube furnace 1, the front end of which is provided with a sealing assembly 2, the sealing assembly 2 including a sealing door 21 and a handle 22;
[0031] A support moving component 3 is disposed on the surface of the sealing door 21, and the support moving component 3 includes a support plate 31 and a moving wheel 32;
[0032] Rotating assembly 4, which is disposed on the surface of the support plate 31, includes a rotating frame 41 and a drive motor 42;
[0033] The clamping and fixing assembly 5 is disposed on the surface of the rotating frame 41. The clamping and fixing assembly 5 includes a bidirectional threaded rod 51, a clamping plate 52, and a rotating disk 53.
[0034] The tube furnace 1 is tubular and uses resistance wire as the heating element. When current passes through the resistance wire, electrical energy is converted into heat energy, which in turn raises the temperature of the furnace tube and the surrounding environment. The heat is transferred to the material to be processed inside the furnace tube to achieve the purpose of heating. The sealing component 2 is used for sealing, the supporting and moving component 3 is used for supporting movement, the rotating component 4 is used to drive the workpiece to rotate, and the clamping and fixing component 5 is used to clamp and fix the workpiece.
[0035] The sealing door 21 is movably installed on the outer surface of the front end of the tubular furnace 1, and the handle 22 is fixedly installed on the surface of the front end of the sealing door 21.
[0036] The sealing door 21 is the same size as the inlet at the front end of the tubular furnace 1. When connected to the front end of the tubular furnace 1, it can seal the inside of the tubular furnace 1. There are two handles 22, which can be used to push the sealing door 21 to move.
[0037] The support plate 31 is fixedly connected to the rear end of the sealing door 21, the support plate 31 is movably embedded inside the tubular furnace 1, and the moving wheel 32 is movably installed at the bottom of the sealing door 21.
[0038] The support plate 31 is U-shaped, with its front end fixedly connected to the surface of the rear end of the sealing door 21, and its rear end slidably embedded inside the tube furnace 1. A slider is fixedly connected to the bottom. A groove is opened on the inner surface of the bottom of the tube furnace 1, and the slider is slidably embedded inside the groove. There are two moving wheels 32, both of which are movably installed at the bottom of the sealing door 21, thereby pushing the sealing door 21. The moving wheels 32 slide on the ground, and the support plate 31 moves back and forth.
[0039] The two ends of the rotating frame 41 are movably connected to the inner surfaces of the two ends of the support plate 31, and the drive motor 42 is fixedly connected to one end of the rotating frame 41.
[0040] The rotating frame 41 consists of two discs fixedly connected by a square frame. The two discs are rotatably connected to the inner surfaces of the front and rear ends of the support plate 31, respectively. The drive motor 42 is fixedly connected to the front end of the rotating frame 41 and is fixedly installed on the front surface of the sealing door 21. Starting the drive motor 42 can realize the rotation of the rotating frame 41.
[0041] The bidirectional threaded rod 51 is movably connected to the interior of the front end of the rotating frame 41, one end of the clamping plate 52 is threaded to the surface of the bidirectional threaded rod 51, and the rotating disk 53 is fixedly connected to one end of the bidirectional threaded rod 51.
[0042] A groove is provided on the inner surface of both the front and rear ends of the rotating frame 41. The bidirectional threaded rod 51 is rotatably connected to the inside of the front groove, and a rod is fixedly connected to the inside of the rear groove. There are two clamping plates 52, and sliders are fixedly connected to both the front and rear ends. The sliders are respectively threaded to the outer surface of the bidirectional threaded rod 51 and slidably sleeved on the outer surface of the connecting rod. The rotating disk 53 is fixedly connected to the left end of the bidirectional threaded rod 51. Rotating the rotating disk 53 can make the bidirectional threaded rod 51 rotate, and the sliders will drive the two clamping plates 52 to move relative to or towards each other, so as to clamp and fix the workpiece.
[0043] The working principle of the annealing furnace with uniform heating function provided by this utility model is as follows:
[0044] First, place the workpiece between the two clamping plates 52. Then, rotate the rotating disk 53 to rotate the bidirectional threaded rod 51. The two clamping plates 52 move relative to each other until the two ends of the workpiece are clamped and fixed. Then, push the handle 22 to slide the sealing door 21 toward the front end of the tube furnace 1 until the rotating frame 41 is completely embedded in the interior of the tube furnace 1. The sealing door 21 seals the front end of the tube furnace 1. Then, start the heating system and drive motor 42 inside the tube furnace 1. The drive motor 42 drives the rotating frame 41 to rotate, so that the workpiece is heated evenly.
[0045] Compared with related technologies, the annealing furnace with uniform heating function provided by this utility model has the following beneficial effects:
[0046] This utility model provides an annealing furnace with uniform heating function. The workpiece can be clamped and fixed on the rotating frame 41 by the clamping and fixing component 5, while the rotating component 4 can drive the workpiece to rotate, thereby improving the uniformity of heating of the workpiece and improving the production quality.
[0047] Second Embodiment
[0048] Please refer to the following: Figure 4 Based on the annealing furnace with uniform heating function provided in the first embodiment of this application, the second embodiment of this application proposes another annealing furnace with uniform heating function. The second embodiment is merely a preferred embodiment of the first embodiment, and the implementation of the second embodiment will not affect the separate implementation of the first embodiment.
[0049] Specifically, the second embodiment of this application provides an annealing furnace with uniform heating function, wherein the surface of the support plate 31 is provided with an impurity cleaning component 6, the impurity cleaning component 6 includes a receiving groove 61, the receiving groove 61 is opened on the top surface of the support plate 31, and a push plate 62 is movably embedded inside the receiving groove 61.
[0050] The receiving groove 61 is opened on the surface of the support plate 31 at the bottom of the rotating frame 41, and a sliding groove is opened at the top of both the left and right ends. A slider is fixedly connected to both the left and right ends of the push plate 62, and the two sliders are respectively slidably embedded in the two sliding grooves.
[0051] The bottom of the front end of the receiving groove 61 is provided with a feeding port 64, and a storage box 63 is fixedly connected to the surface of the support plate 31 at the bottom of the feeding port 64.
[0052] The feed inlet 64 is located at the front end of the bottom of the support plate 31. Pulling the push plate 62 towards the front end can push the impurities that fall into the receiving trough 61 towards the front end and move them into the storage box 63 for centralized processing.
[0053] The working principle of the annealing furnace with uniform heating function provided by this utility model is as follows:
[0054] When it is necessary to clean the impurities inside the receiving trough 61, the front end pulls the push plate 62 to push the impurities inside the receiving trough 61 to the front end until they move to the top of the feed inlet 64. The impurities fall into the storage box 63 through the feed inlet 64 for storage.
[0055] Compared with related technologies, the annealing furnace with uniform heating function provided by this utility model has the following beneficial effects:
[0056] This utility model provides an annealing furnace with uniform heating function. By pulling the push plate 62, impurities inside the receiving trough 61 can be pushed into the storage box 63, which is convenient for cleaning and saves manpower.
[0057] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the content of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.
Claims
1. An annealing furnace with uniform heating function, characterized in that, include: A tubular furnace, wherein a sealing assembly is provided at the front end of the tubular furnace, the sealing assembly including a sealing door and a handle; A support and movement assembly is disposed on the surface of the sealing door, and the support and movement assembly includes a support plate and moving wheels; A rotating assembly is disposed on the surface of the support plate, and the rotating assembly includes a rotating frame and a drive motor. A clamping and fixing assembly is disposed on the surface of the rotating frame, and the clamping and fixing assembly includes a bidirectional threaded rod, a clamping plate, and a rotating disk.
2. An annealing furnace with uniform heating function according to claim 1, characterized in that, The sealing door is movably installed on the outer surface of the front end of the tubular furnace, and the handle is fixedly installed on the surface of the front end of the sealing door.
3. An annealing furnace with uniform heating function according to claim 1, characterized in that, The support plate is fixedly connected to the rear end of the sealing door, the support plate is movably embedded inside the tubular furnace, and the movable wheels are movably installed at the bottom of the sealing door.
4. An annealing furnace with uniform heating function according to claim 1, characterized in that, The two ends of the rotating frame are movably connected to the inner surfaces of the two ends of the support plate, and the drive motor is fixedly connected to one end of the rotating frame.
5. An annealing furnace with uniform heating function according to claim 1, characterized in that, The bidirectional threaded rod is movably connected inside the front end of the rotating frame, one end of the clamping plate is threadedly connected to the surface of the bidirectional threaded rod, and the rotating disk is fixedly connected to one end of the bidirectional threaded rod.
6. An annealing furnace with uniform heating function according to claim 1, characterized in that, The surface of the support plate is provided with an impurity cleaning component, which includes a receiving groove. The receiving groove is opened on the top surface of the support plate, and a push plate is movably embedded inside the receiving groove.
7. An annealing furnace with uniform heating function according to claim 6, characterized in that, The bottom of the front end of the receiving trough is provided with a feeding port, and a storage box is fixedly connected to the surface of the support plate at the bottom of the feeding port.