Silicon ingot transverse cutting type wire cutting machine

Abstract

The utility model provides a silicon ingot transverse cutting type wire cutting machine which comprises a machine frame, a bearing table and a wire cutting mechanism, an X-direction feeding mechanism is arranged on the machine frame, and the wire cutting mechanism comprises a cutting metal wire and two sets of transverse cutting winding mechanisms. The rack is further provided with a winding and unwinding mechanism. A cutting metal wire is led out from the winding and unwinding mechanism on one side, passes through the auxiliary transverse cutting guide wheel, the transverse cutting supporting wheel and the main transverse cutting guide wheel of the transverse cutting winding mechanism on the side, passes through the main transverse cutting guide wheel, the transverse cutting supporting wheel and the auxiliary transverse cutting guide wheel of the transverse cutting winding mechanism on the other side and is wound by the winding and unwinding mechanism on the other side. The wire cutting machine is reasonable in structural design, the cutting metal wire is provided with the vertical cutting winding station and the transverse cutting winding station, multiple feeding modes are integrated on the same wire cutting machine, and after the wire cutting machine is matched with the winding stations, multiple purposes of transverse cutting, longitudinal cutting, upper and lower end face skin cutting, circumferential side face skin cutting, rotating angle staggered longitudinal cutting and the like can be achieved on silicon ingots. The application range of the wire cutting machine is expanded, and meanwhile the input cost of the machine is reduced.

Description

Technical Field

[0001] This utility model relates to the field of wire cutting machine technology, and in particular to a silicon ingot cross-cutting wire cutting machine. Background Technology

[0002] In silicon wafer production, silicon ingots are grown using processes such as the Czochralski method or directional solidification. These ingots are then further processed through steps such as squaring and cutting to produce silicon wafers that meet production requirements. Currently, silicon ingot production utilizes squaring machines to cut large polycrystalline silicon ingots into smaller cuboid shapes, facilitating subsequent processes such as truncation, grinding, chamfering, and slicing.

[0003] Due to various issues encountered during silicon ingot growth, such as irregular shapes, surface defects (cracks, scratches, contamination, etc.), and potential inhomogeneities in the internal crystal structure, these defects can affect the performance and quality of silicon wafers. Therefore, slicing is necessary to remove these defective parts. Slicing removes areas with poor crystal structures, ensuring higher quality silicon wafers for subsequent cutting. This results in wafers with more complete crystal structures and more stable performance, reducing wafer breakage rates due to surface defects and improving the overall yield of the production process. Furthermore, the smoother, flatter surface of the sliced ​​silicon ingot facilitates subsequent cutting, grinding, and polishing processes, significantly reducing silicon wafer production costs and increasing production efficiency.

[0004] Existing silicon ingot squaring machines typically employ diamond wire cutting technology. Driven by a motor, the diamond wire passes through a series of guide wheels and cutting wheels to cut the silicon ingot horizontally or vertically. Depending on the cutting method and equipment structure, silicon ingot squaring machines can be categorized into various types, such as those using horizontal or vertical feed methods. Different feed directions correspond to different types of squaring machines. When it is necessary to cut silicon ingots vertically and horizontally separately, different squaring machines are required, resulting in large equipment investments and high production costs.

[0005] Therefore, how to design a wire cutting machine that integrates both vertical and horizontal squaring functions has become an urgent problem to be solved. Utility Model Content

[0006] The technical problem to be solved by this utility model is: in order to overcome the shortcomings of the prior art, this utility model provides a silicon ingot horizontal cutting wire cutting machine with a dual winding station design. By switching the winding station, the silicon ingot can be vertically cut and horizontally cut respectively. Furthermore, the silicon ingot can be skin-cutting operation during processing.

[0007] The technical solution adopted by this utility model to solve its technical problem is as follows: a silicon ingot transverse wire cutting machine, including a frame, a support platform, and a wire cutting mechanism, wherein the silicon ingot is placed on the support platform; the frame is provided with an X-axis feeding mechanism, which drives the support platform to move linearly in the horizontal direction; the wire cutting mechanism includes cutting metal wire and two sets of transverse winding mechanisms, the two sets of transverse winding mechanisms being symmetrically arranged relative to the X-axis feeding mechanism; the frame is provided with a take-up and unwinding mechanism corresponding to each set of transverse winding mechanisms, and the end of the cut metal wire is wound by the corresponding side take-up and unwinding mechanism; each set of transverse winding mechanisms includes a main transverse guide wheel and an auxiliary transverse guide wheel. The machine includes several cross-cutting support wheels; the radial planes of the main cross-cutting guide wheel and the auxiliary cross-cutting guide wheel are parallel to the feed direction of the X-axis feed mechanism and are rotatably arranged relative to the frame; the several cross-cutting support wheels are rotatably arranged relative to the frame and are sequentially arranged between the main cross-cutting guide wheel and the auxiliary cross-cutting guide wheel; the radial plane of the cross-cutting transition wheel is perpendicular to the feed direction of the X-axis feed mechanism; the cutting metal wire is led out from one side of the winding and unwinding mechanism, passes through the auxiliary cross-cutting guide wheel, the cross-cutting support wheel, and the main cross-cutting guide wheel of the cross-cutting winding mechanism on that side, and then passes through the main cross-cutting guide wheel, the cross-cutting support wheel, and the auxiliary cross-cutting guide wheel of the cross-cutting winding mechanism on the other side before being wound up by the winding and unwinding mechanism on the other side.

[0008] In the above scheme, by cooperating with the transverse winding mechanism and the X-axis feeding mechanism, the silicon ingot fed linearly by the X-axis feeding mechanism can be horizontally cut, which can cut the silicon ingot vertically and complete the transverse horizontal cutting action.

[0009] Furthermore, the frame is equipped with a Z-axis feed mechanism that drives the tangent mechanism to move up and down. The Z-axis feed mechanism includes a Z-axis linear guide, a Z-axis slider, a Z-axis lifting worktable, and a Z-axis feed drive mechanism. The Z-axis linear guide is mounted on the frame along the height direction, the Z-axis slider is slidably mounted on the Z-axis linear guide, and the Z-axis lifting worktable is fixed on the Z-axis slider. The Z-axis feed mechanism drives the Z-axis slider to move along the Z-axis linear guide. The transverse cutting and winding mechanism includes transverse cutting supports, which are respectively fixed to the outer end face of the Z-axis lifting worktable. The main transverse cutting guide wheel, transverse cutting support wheel, and auxiliary transverse cutting guide wheel are all rotatably mounted on the corresponding side of the transverse cutting support. Based on the horizontal transverse cutting, a Z-axis feed mechanism is introduced, which drives the transverse cutting and winding mechanism to move up and down, realizing the height adjustment of the horizontal transverse cutting.

[0010] Furthermore, the Z-axis lifting worktable is also equipped with a vertical cutting winding mechanism for each group of transverse cutting winding mechanisms. Each group of vertical cutting winding mechanisms includes a main vertical cutting guide wheel and an auxiliary vertical cutting guide wheel. Both the main and auxiliary vertical cutting guide wheels are rotatably connected to the front end face of the lifting worktable, with the auxiliary vertical cutting guide wheel located above the main vertical cutting guide wheel. The transverse cutting winding mechanism cooperates with the vertical cutting winding mechanism, and the cut metal wire has two winding stations: a transverse cutting winding station and a vertical cutting winding station. In the transverse cutting winding station, the cut metal wire is drawn out from the unwinding mechanism on one side and passes through the auxiliary vertical cutting winding mechanism on that side. After passing through the vertical cutting guide wheel and the main vertical cutting guide wheel, the wire continues to pass through the auxiliary horizontal cutting guide wheel, the horizontal cutting support wheel, and the main horizontal cutting guide wheel of the horizontal cutting winding mechanism on that side. Then, it passes through the main horizontal cutting guide wheel, the horizontal cutting support wheel, and the auxiliary horizontal cutting guide wheel of the horizontal cutting winding mechanism on the other side, and finally through the main vertical cutting guide wheel and the auxiliary vertical cutting guide wheel of the vertical cutting winding mechanism on the other side before being wound up by the unwinding mechanism on the other side. At the vertical cutting winding station, the cut metal wire is led out from the unwinding mechanism on one side, passes through the auxiliary vertical cutting guide wheel and the main vertical cutting guide wheel of the vertical cutting winding mechanism on that side, and then through the main vertical cutting guide wheel and the auxiliary vertical cutting guide wheel of the vertical cutting winding mechanism on the other side before being wound up by the unwinding mechanism on the other side. The winding mechanism design also includes a vertical cutting winding mechanism, which works in conjunction with the horizontal cutting winding mechanism. During use, different stations can be selected as needed to perform horizontal horizontal cutting or vertical cutting of the silicon ingot.

[0011] Furthermore, the winding and unwinding mechanism includes a winding and unwinding motor, a winding and unwinding storage drum, and a winding and unwinding guide roller assembly. The winding and unwinding storage drum is driven at the output end of the winding and unwinding motor. One end of the cutting metal wire is fixed to the winding and unwinding storage drum and wound onto it. The other end passes through the winding and unwinding guide roller assembly and is connected to the corresponding tensioning mechanism on the corresponding side before being wound out. This winding and unwinding mechanism provides reliable operation for winding and unwinding the cutting metal wire.

[0012] Furthermore, the tensioning mechanism includes a tensioning guide wheel, a tension arm rocker, and a tensioning servo motor. The tensioning servo motor is fixed to the frame, one end of the tension arm rocker is fixed to the output end of the tensioning servo motor, and the other end is rotatably equipped with a tensioning guide wheel. The cutting wire from the winding and unwinding mechanism is wound around the auxiliary vertical cutting guide wheel on the corresponding side under the tension support of the tensioning guide wheel. The tensioning mechanism is effectively supported between the winding and unwinding mechanism and the winding mechanism, ensuring the tension of the cut metal wire during the cutting process.

[0013] Preferably, the take-up and unwind guide roller assembly includes an upper longitudinal guide roller, a lower longitudinal guide roller, and a transverse guide roller arranged sequentially. The upper longitudinal guide roller, lower longitudinal guide roller, and transverse guide roller are arranged from top to bottom in the height direction, and the cross-section of the cut metal wire between adjacent guide rollers is distributed at 90°. Through the positioning of each guide roller, the cut metal wire connected between the take-up and unwind storage drum and the tension guide roller can be effectively received and unwound, and the position can be rotated from the take-up and unwind mechanism side to the Z-axis lifting worktable.

[0014] Preferably, a deviation correction device is also provided between the take-up and unwinding mechanism and the take-up and unwinding guide roller assembly on the same side. The deviation correction device includes a deviation correction wheel. The cutting metal wire between the take-up and unwinding wire storage drum and the upper longitudinal guide roller contacts the deviation correction wheel and is guided and supported by the deviation correction wheel. Through the design of the deviation correction device, the positional rotation of the take-up and unwinding mechanism side towards the Z-axis lifting worktable is effectively adjusted, making the connection between the cutting metal wire and the take-up and unwinding guide roller assembly smoother and more reasonable.

[0015] Furthermore, in the design of the X-axis feed mechanism, the X-axis feed mechanism includes an X-axis linear guide, an X-axis slider, an X-axis servo motor, a horizontally moving ball screw, and a rotary table. The X-axis linear guides are arranged in pairs along the horizontal direction on the frame, and an X-axis slider is slidably mounted on each X-axis linear guide. The horizontally moving ball screw is mounted on the frame parallel to the X-axis linear guide through a support base. The X-axis servo motor is mounted on the frame and its output end is connected to the horizontally moving ball screw. The X-axis slider is configured to cooperate with the horizontally moving ball screw. The rotary table is fixed to the X-axis slider, and the support platform is mounted on the rotary table.

[0016] Furthermore, the rotary worktable includes a worktable base, a rotary motor, a drive gear, and a rotating gear. The rotary motor is fixed to the worktable base, and the rotating gear and drive gear are rotatably mounted on the worktable base. The output end of the rotary motor is connected to the drive gear and drives the drive gear to rotate. The drive gear is also connected to the rotating gear. The support platform is fixed to the upper surface of the rotating gear. By setting up the rotary worktable and driving the rotary motor, the drive gear and rotating gear can be rotated relative to the worktable base. The rotating gear drives the support platform above it to rotate, thereby rotating the silicon ingot to be processed.

[0017] The beneficial effects of this utility model are that the silicon ingot transverse wire cutting machine provided by this utility model has a reasonable structural design. It has both vertical and transverse wire cutting stations for cutting metal wire. During silicon ingot processing, different winding stations can be selected according to requirements. The vertical and transverse cutting operations of the silicon ingot are completed through the linear feed of the X-axis feed mechanism. Simultaneously, the rotary table design in the X-axis feed mechanism allows the support platform to rotate at an angle on the X-axis feed plane, providing an angle-trimming cutting function. This utility model provides a multi-purpose wire cutting machine that integrates three action modes on the same machine: horizontal transverse cutting, longitudinal vertical cutting, and horizontal angle-trimming cutting. After combination, it can realize various uses such as transverse cutting, longitudinal cutting, top and bottom end face cutting, circumferential side cutting, and angle-trimmed staggered longitudinal cutting of silicon ingots, expanding the application range of the wire cutting machine while reducing the investment cost of the machinery. Attached Figure Description

[0018] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0019] Figure 1 This is the front view of the preferred embodiment of the present invention when using the transverse winding station.

[0020] Figure 2 This is a rear view of the preferred embodiment of the present invention when using a transverse winding station.

[0021] Figure 3 This is a top view of the preferred embodiment of the present invention when using a transverse winding station.

[0022] Figure 4 This is the front view of the preferred embodiment of the present invention when using a vertical cutting and winding station (the metal wire being cut is represented by a dashed line).

[0023] Figure 5 This is a rear view of the preferred embodiment of the present invention when using a vertical cutting and winding station (the metal wire being cut is indicated by a dashed line).

[0024] Figure 6 This is a top view of the preferred embodiment of the present invention when using a vertical cutting and winding station (the metal wire being cut is represented by a dashed line).

[0025] Figure 7 This is a side view of the preferred embodiment of the present invention (the cutting metal wire is not shown).

[0026] Figure 8 yes Figure 7 Cross-sectional view of AA (cut metal lines not shown).

[0027] In the diagram: 1. Z-axis feed drive mechanism; 2. Tensioning servo motor; 3. Tension arm rocker; 4. Gantry frame; 5. Z-axis linear guide rail; 6. Z-axis lifting worktable; 7. Bearing platform; 8. Worktable base; 9. X-axis slider; 10. X-axis linear guide rail; 11. Box base; 12. X-axis servo motor; 13. Horizontal moving ball screw; 14. Main cross-cutting guide wheel; 15. Cross-cutting support wheel; 16. Main vertical cutting guide wheel; 17. Auxiliary vertical cutting guide wheel; 18. Horizontal guide wheel; 19. Lower longitudinal guide wheel; 20. Upper longitudinal guide wheel; 21. Correcting wheel; 22. Take-up and unwound wire storage drum; 23. Take-up and unwound motor; 24. Auxiliary cross-cutting guide wheel; 25. Rotary gear; 26. Drive gear; 27. Tensioning guide wheel; 28. Cutting metal wire; 29. ​​Cross-cutting bracket. Detailed Implementation

[0028] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams, illustrating only the basic structure of the present invention. Therefore, they only show the components relevant to the present invention. Orientations and references (e.g., up, down, left, right, etc.) are only used to aid in the description of the features in the drawings. Therefore, the following specific embodiments are not intended to be restrictive, and the scope of the claimed subject matter is defined solely by the appended claims and their equivalents.

[0029] like Figures 1 to 8 The silicon ingot cross-cutting wire cutting machine shown is the preferred embodiment of this utility model.

[0030] This multi-purpose wire cutting machine includes a frame, a support platform 7, and a cutting mechanism. The frame includes a housing base 11 and a gantry frame 4 fixed on the housing base 11. The housing base 11 has an elongated slot below the gantry frame 4, and an X-axis feed mechanism is located at the position of this slot. The X-axis feed mechanism drives the support platform 7 to move linearly in the horizontal direction. In the design of the X-axis feed mechanism, the X-axis feed mechanism includes an X-axis linear guide 10, an X-axis slider 9, an X-axis servo motor 12, a horizontal moving ball screw 13, and a rotary table. The X-axis linear guides 10 are distributed in pairs along the horizontal direction on the frame. Each X-axis linear guide 10 is slidably equipped with an X-axis slider 9. The horizontal moving ball screw 13 is mounted on the frame parallel to the X-axis linear guide 10 through a support base. The X-axis servo motor 12 is mounted on the frame and its output end is connected to the horizontal moving ball screw 13 for transmission. The X-axis slider 9 is configured to cooperate with the horizontal moving ball screw 13. The rotary table is fixed to the X-axis slider 9, and the bearing platform 7 is mounted on the rotary table.

[0031] The rotary worktable includes a worktable base 8, a rotary motor, a drive gear 26, and a rotary gear 25. The rotary motor is fixed to the worktable base 8. The rotary gear 25 and drive gear 26 are rotatably mounted on the worktable base 8. The output end of the rotary motor is connected to the drive gear 26 and drives the drive gear 26 to rotate. The drive gear 26 and rotary gear 25 are connected by a transmission method, which can be, but is not limited to, meshing transmission, belt, sprocket, or other transmission methods. The support platform 7 is fixed to the upper surface of the rotary gear 25. By setting up the rotary worktable, the rotary motor drives the drive gear 26 and rotary gear 25 to rotate relative to the worktable base 8. The rotary gear 25 drives the support platform 7 above it to rotate, thereby rotating the silicon ingot to be processed.

[0032] The gantry frame 4 is equipped with a Z-axis feed mechanism. The Z-axis feed mechanism includes a Z-axis linear guide rail 5, a Z-axis slider, a Z-axis lifting worktable 6, and a Z-axis feed drive mechanism 1. The Z-axis linear guide rail 5 is mounted along the height direction on the frame. The Z-axis slider is slidably mounted on the Z-axis linear guide rail 5. The Z-axis lifting worktable 6 is fixed to the Z-axis slider. The Z-axis feed mechanism drives the Z-axis slider to move along the Z-axis linear guide rail 5. A transverse winding mechanism is provided on the outer end face of the Z-axis lifting worktable 6.

[0033] Specifically, the wire cutting mechanism includes a metal wire cutting 28, two sets of transverse wire cutting and winding mechanisms respectively set on the outer end face of the Z-axis lifting worktable 6, and a vertical wire cutting and winding mechanism respectively set on the Z-axis lifting worktable 6 for each set of transverse wire cutting and winding mechanisms.

[0034] In the transverse winding mechanism, two sets of transverse winding mechanisms are symmetrically arranged relative to the X-axis feed mechanism, and are respectively distributed on the outer end face of the Z-axis lifting worktable 6. Each set of transverse winding mechanisms includes a transverse support 29, a main transverse guide wheel 14, an auxiliary transverse guide wheel 24, and three equally spaced transverse support guides 15. The transverse support 29 is fixed to the outer end face of the Z-axis lifting worktable 6, and the main transverse guide wheel 14, the transverse support guide 15, and the auxiliary transverse guide wheel 24 are all rotatably mounted on the corresponding side of the transverse support 29. The radial planes of the main transverse guide wheel 14 and the auxiliary transverse guide wheel 24 are parallel to the feed direction of the X-axis feed mechanism. The three transverse support guides 15 are sequentially arranged between the main transverse guide wheel 14 and the auxiliary transverse guide wheel 24, and the radial plane of the transverse transition wheel is perpendicular to the feed direction of the X-axis feed mechanism. The cut metal wire 28 is led out from the winding and unwinding mechanism on one side, passes through the auxiliary cross-cutting guide wheel 24, cross-cutting support guide 15 and main cross-cutting guide wheel 14 of the cross-cutting winding mechanism on that side, and then passes through the main cross-cutting guide wheel 14, cross-cutting support guide 15 and auxiliary cross-cutting guide wheel 24 of the cross-cutting winding mechanism on the other side before being wound up by the winding and unwinding mechanism on the other side.

[0035] Each set of vertical cutting winding mechanisms includes a main vertical cutting guide wheel 16 and an auxiliary vertical cutting guide wheel 17. Both the main vertical cutting guide wheel 16 and the auxiliary vertical cutting guide wheel 17 are rotatably connected to the front end face of the lifting worktable, and the auxiliary vertical cutting guide wheel 17 is located above the main vertical cutting guide wheel 16.

[0036] The aforementioned winding mechanism also needs to cooperate with the take-up and unwinding mechanism to provide the cutting wire for the winding mechanism. The gantry 4 is equipped with take-up and unwinding mechanisms corresponding to the winding mechanism, and the end of the cut metal wire 28 is wound by the corresponding side take-up and unwinding mechanism. The gantry 4 is also equipped with a correction mechanism and a tensioning mechanism between the take-up and unwinding mechanism and the winding mechanism.

[0037] Specifically, the take-up and unwinding mechanism includes a take-up and unwinding motor 23, a take-up and unwinding wire storage drum 22, and a take-up and unwinding wire guide roller assembly. The take-up and unwinding wire storage drum 22 is driven at the output end of the take-up and unwinding motor 23. One end of the cut metal wire 28 is fixed to the take-up and unwinding wire storage drum 22 and wound onto it. The other end passes through the take-up and unwinding guide roller assembly and is connected to the corresponding tensioning mechanism on the corresponding side before being wound out. Through the design of the take-up and unwinding mechanism, reliable operation is provided for the take-up and unwinding of the cut metal wire 28.

[0038] The tensioning mechanism includes a tensioning guide wheel 27, a tension arm rocker arm 3, and a tensioning servo motor 2. The tensioning servo motor 2 is fixed on the frame. One end of the tension arm rocker arm 3 is fixed to the output end of the tensioning servo motor 2, and the other end is rotatably equipped with the tensioning guide wheel 27. The cutting wire from the take-up and unwinding mechanism is wound around the auxiliary vertical cutting guide wheel 17 on the corresponding side under the tensioning support of the tensioning guide wheel 27. The tensioning mechanism is effectively supported between the take-up and unwinding mechanism and the winding mechanism, ensuring the tension of the cutting metal wire 28 during the cutting process.

[0039] The take-up and unwind guide roller assembly includes an upper longitudinal guide roller 20, a lower longitudinal guide roller 19, and a transverse guide roller 18 arranged sequentially. The upper longitudinal guide roller 20, lower longitudinal guide roller 19, and transverse guide roller 18 are arranged from top to bottom in the height direction, and the cross-section of the cutting metal wire 28 between adjacent guide rollers is distributed at 90°. Through the positioning of each guide roller, the cutting metal wire 28 connected between the take-up and unwind storage drum 22 and the tension guide roller 27 can be effectively received and unwound, and the position can be rotated from the take-up and unwind mechanism side to the Z-axis lifting worktable 6.

[0040] A deviation correction device is also provided between the take-up and unwinding mechanism and the take-up and unwinding guide roller assembly on the same side. The deviation correction device includes a deviation correction wheel 21. The cutting metal wire 28 between the take-up and unwinding wire storage drum 22 and the upper longitudinal guide roller 20 contacts the deviation correction wheel 21 and is guided and supported by the deviation correction wheel 21. The deviation correction device is a common mechanism in existing wire cutting machines that use metal wire for cutting, and will not be described in detail here. Through the design of the deviation correction device, the position and direction of the take-up and unwinding mechanism side to the Z-axis lifting worktable 6 are effectively adjusted, making the connection between the cutting metal wire 28 and the take-up and unwinding guide roller assembly smoother and more reasonable.

[0041] Based on the above-mentioned winding and unwinding mechanism providing winding and unwinding operations, the correction device providing correction guidance, and the tensioning mechanism providing tension support for the cutting metal wire 28, in this embodiment, the horizontal cutting winding mechanism and the vertical cutting winding mechanism cooperate to form two different winding lines for the cutting metal wire 28, namely the horizontal cutting winding station and the vertical cutting winding station.

[0042] Cross-cut winding station winding path:

[0043] like Figures 1 to 3As shown, the cutting metal wire 28 is led out from the winding and unwinding mechanism on one side, passes through the correction device, tensioning mechanism, auxiliary vertical cutting guide wheel 17 and main vertical cutting guide wheel 16 of the vertical cutting winding mechanism on that side, and then continues through the auxiliary cross-cutting guide wheel 24, cross-cutting support guide 15 and main cross-cutting guide wheel 14 of the cross-cutting winding mechanism on that side. After passing through the main cross-cutting guide wheel 14, cross-cutting support guide 15 and auxiliary cross-cutting guide wheel 24 of the cross-cutting winding mechanism on the other side, it passes through the main vertical cutting guide wheel 16 and auxiliary vertical cutting guide wheel 17 of the vertical cutting winding mechanism on the other side, and then passes through the tensioning mechanism and correction device on the other side, before being wound up by the winding and unwinding mechanism on the other side. In the cross-cutting winding station, the cutting metal wire 28 is equivalent to winding around the gantry frame in four directions, forming an effective cutting plane.

[0044] Vertical cutting winding circuit:

[0045] like Figures 4 to 6 As shown, the cutting metal wire 28 is led out from the winding and unwinding mechanism on one side, passes through the correction device, tensioning mechanism, auxiliary vertical cutting guide roller 17 and main vertical cutting guide roller 16 of the vertical cutting and winding mechanism on that side, and then passes through the main vertical cutting guide roller 16 and auxiliary vertical cutting guide roller 17 of the vertical cutting and winding mechanism on the other side. Finally, it passes through the tensioning mechanism and correction device on the other side and is wound up by the winding and unwinding mechanism on the other side. In the vertical cutting and winding station, the cutting metal wire 28...

[0046] Thus, according to the cutting requirements, the wire can be wound at the appropriate station before the wire cutting machine starts working. Combined with the Z-axis feed mechanism and the X-axis feed mechanism, it can achieve various uses such as transverse slitting, longitudinal slitting, upper and lower end face cutting, circumferential side cutting, and staggered longitudinal slitting at different angles for silicon ingots.

[0047] 1. Lateral cutting: The transverse cutting winding station is used, and the silicon ingot is cut laterally from top to bottom using the X-axis feed mechanism for linear feeding.

[0048] 2. Vertical cutting: The vertical cutting winding station is adopted. The Z-axis feed mechanism drives the winding mechanism up and down, and the X-axis feed mechanism drives the silicon ingot to feed linearly, so as to perform vertical cutting operation on the silicon ingot in the longitudinal direction.

[0049] 3. Cutting the upper and lower ends: The transverse cutting and winding station is adopted. The X-axis feed mechanism drives the silicon ingot to feed linearly, and the Z-axis feed mechanism drives the winding mechanism to control the cutting height. The upper and lower ends of the silicon ingot are cut separately.

[0050] 4. Circumferential side cutting: A vertical cutting and winding station is adopted. The X-axis feed mechanism uses a rotary table to drive the silicon ingot to turn according to the cutting position. After turning into position, the X-axis feed mechanism drives the silicon ingot to feed linearly. In conjunction with the Z-axis feed mechanism, the winding mechanism is driven up and down to perform the circumferential side cutting operation on the silicon ingot.

[0051] 5. Interlaced longitudinal cutting at turning angles: It works on the same principle as circumferential side cutting, but the turning angle is different and the linear feed amplitude of the X-axis feed mechanism is different when turning.

[0052] This silicon ingot transverse wire cutting machine features a rational structural design. The cutting metal wire 28 has both vertical and transverse winding stations. During silicon ingot processing, different winding stations can be selected according to requirements. The vertical and transverse cutting operations of the silicon ingot are completed through the linear feed of the X-axis feed mechanism. Simultaneously, the rotary table design in the X-axis feed mechanism allows the support platform 7 to rotate at an angle on the X-axis feed plane, providing angled cutting functionality. This single wire cutting machine integrates three action modes: horizontal transverse cutting, vertical longitudinal cutting, and horizontal angled cutting. After combination, it can perform various applications such as transverse cutting, vertical cutting, top and bottom end face cutting, circumferential side cutting, and angled staggered vertical cutting of silicon ingots, thus expanding the applicability of the wire cutting machine.

[0053] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A silicon ingot cross-cutting wire cutting machine, characterized in that: It includes a frame, a support platform, and a cutting mechanism, with the silicon ingot placed on the support platform; The frame is equipped with an X-axis feed mechanism, which drives the bearing platform to move linearly in the horizontal direction. The tangent mechanism includes a metal wire cutting mechanism and two sets of transverse winding mechanisms, which are symmetrically arranged relative to the X-axis feed mechanism. The frame is equipped with a take-up and unwinding mechanism for each group of transverse cutting and winding mechanisms, and the end of the cut metal wire is wound by the corresponding side take-up and unwinding mechanism; Each cross-cutting winding mechanism includes a main cross-cutting guide wheel, an auxiliary cross-cutting guide wheel, and several cross-cutting support wheels; the radial planes of the main cross-cutting guide wheel and the auxiliary cross-cutting guide wheel are parallel to the feed direction of the X-axis feed mechanism and are rotatably arranged relative to the frame; several cross-cutting support wheels are rotatably arranged relative to the frame and are sequentially arranged between the main cross-cutting guide wheel and the auxiliary cross-cutting guide wheel, and the radial plane of the cross-cutting transition wheel is perpendicular to the feed direction of the X-axis feed mechanism; The cut metal wire is led out from the winding mechanism on one side, passes through the auxiliary cross-cutting guide wheel, cross-cutting support wheel and main cross-cutting guide wheel of the cross-cutting winding mechanism on that side, and then passes through the main cross-cutting guide wheel, cross-cutting support wheel and auxiliary cross-cutting guide wheel of the cross-cutting winding mechanism on the other side before being wound up by the winding mechanism on the other side.

2. The silicon ingot cross-cutting wire cutting machine as described in claim 1, characterized in that: The frame is equipped with a Z-axis feed mechanism that drives the tangent mechanism to move up and down. The Z-axis feed mechanism includes a Z-axis linear guide, a Z-axis slider, a Z-axis lifting worktable, and a Z-axis feed drive mechanism. The Z-axis linear guide is mounted on the frame along the height direction, the Z-axis slider is slidably mounted on the Z-axis linear guide, the Z-axis lifting worktable is fixed on the Z-axis slider, and the Z-axis feed mechanism drives the Z-axis slider to move along the Z-axis linear guide. The transverse winding mechanism includes a transverse cutting bracket, which is fixed on the outer end face of the Z-axis lifting worktable. The main transverse cutting guide wheel, the transverse cutting support wheel, and the auxiliary transverse cutting guide wheel are all rotatably mounted on the corresponding side of the transverse cutting bracket.

3. The silicon ingot cross-cutting wire cutting machine as described in claim 2, characterized in that: The Z-axis lifting worktable is also provided with a vertical cutting winding mechanism for each group of horizontal cutting winding mechanisms. Each group of vertical cutting winding mechanisms includes a main vertical cutting guide wheel and an auxiliary vertical cutting guide wheel. The main vertical cutting guide wheel and the auxiliary vertical cutting guide wheel are rotatably connected to the front end face of the lifting worktable, and the auxiliary vertical cutting guide wheel is located above the main vertical cutting guide wheel. The horizontal cutting winding mechanism cooperates with the vertical cutting winding mechanism, and the cutting metal wire has two winding stations, namely the horizontal cutting winding station and the vertical cutting winding station. At the transverse winding station, the cut metal wire is drawn out from the winding mechanism on one side, passes through the auxiliary vertical cutting guide wheel and the main vertical cutting guide wheel of the vertical winding mechanism on that side, continues to pass through the auxiliary transverse cutting guide wheel, the transverse cutting support wheel and the main transverse cutting guide wheel of the transverse winding mechanism on that side, and then passes through the main transverse cutting guide wheel, the transverse cutting support wheel and the auxiliary transverse cutting guide wheel of the transverse winding mechanism on the other side, and then passes through the main vertical cutting guide wheel and the auxiliary vertical cutting guide wheel of the vertical winding mechanism on the other side before being wound up by the winding mechanism on the other side. In the vertical cutting and winding station, the cut metal wire is led out from the winding and unwinding mechanism on one side, passes through the auxiliary vertical cutting guide wheel and the main vertical cutting guide wheel of the vertical cutting and winding mechanism on that side, and then passes through the main vertical cutting guide wheel and the auxiliary vertical cutting guide wheel of the vertical cutting and winding mechanism on the other side before being wound up by the winding and unwinding mechanism on the other side.

4. A silicon ingot cross-cutting wire cutting machine as described in claim 3, characterized in that: The winding and unwinding mechanism includes a winding and unwinding motor, a winding and unwinding storage drum, and a winding and unwinding guide wheel assembly. The winding and unwinding storage drum is driven at the output end of the winding and unwinding motor. One end of the cutting metal wire is fixed to the winding and unwinding storage drum and wound on it. The other end passes through the winding and unwinding guide wheel assembly and is connected to the tensioning mechanism on the corresponding side before being wound out.

5. A silicon ingot cross-cutting wire cutting machine as described in claim 4, characterized in that: The tensioning mechanism includes a tensioning guide wheel, a tensioning arm rocker, and a tensioning servo motor. The tensioning servo motor is fixed on the frame. One end of the tensioning arm rocker is fixed to the output end of the tensioning servo motor, and the other end is rotatably equipped with a tensioning guide wheel. The cutting wire from the winding and unwinding mechanism is wound around the auxiliary vertical cutting guide wheel on the corresponding side under the tensioning support of the tensioning guide wheel.

6. A silicon ingot cross-cutting wire cutting machine as described in claim 5, characterized in that: The winding and unwinding guide roller assembly includes an upper longitudinal guide roller, a lower longitudinal guide roller, and a transverse guide roller arranged sequentially. The upper longitudinal guide roller, the lower longitudinal guide roller, and the transverse guide roller are arranged from top to bottom in the height direction, and the cutting metal wire cross-section between adjacent guide rollers is distributed at 90°.

7. A silicon ingot cross-cutting wire cutting machine as described in claim 6, characterized in that: A correction device is also provided between the take-up and unwinding mechanism on each side and the take-up and unwinding guide wheel assembly. The correction device includes a correction wheel. The cutting metal wire between the take-up and unwinding storage drum and the upper longitudinal guide wheel contacts the correction wheel and is guided and supported by the correction wheel.

8. A silicon ingot cross-cutting wire cutting machine as described in claim 1, characterized in that: The X-axis feed mechanism includes an X-axis linear guide, an X-axis slider, an X-axis servo motor, a horizontally moving ball screw, and a rotary table. The X-axis linear guides are arranged in pairs along the horizontal direction on the frame, and an X-axis slider is slidably mounted on each X-axis linear guide. The horizontally moving ball screw is mounted on the frame parallel to the X-axis linear guide through a support base. The X-axis servo motor is mounted on the frame and its output end is connected to the horizontally moving ball screw. The X-axis slider is configured to cooperate with the horizontally moving ball screw. The rotary table is fixed to the X-axis slider, and the support platform is mounted on the rotary table.

9. A silicon ingot cross-cutting wire cutting machine as described in claim 1, characterized in that: The rotary worktable includes a worktable base, a rotary motor, a drive gear, and a rotary gear. The rotary motor is fixed on the worktable base. The rotary gear and the drive gear are rotatably mounted on the worktable base. The output end of the rotary motor is connected to the drive gear and drives the drive gear to rotate. The drive gear is connected to the rotary gear. The support platform is fixed on the upper surface of the rotary gear.

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