A semiconductor structure includes a substrate, a buffer layer, a channel layer, a barrier layer, a doped compound semiconductor layer, and a composite barrier layer. The buffer layer is on the substrate. The channel layer is on the buffer layer. The barrier layer is on the channel layer. The doped compound semiconductor layer is on the barrier layer. The composite barrier layer is on the doped compound semiconductor layer, the composite barrier layer and the barrier layer include the same group III element, and an atomic percentage of the same group III element in the composite barrier layer increases as the composite barrier layer moves away from the doped compound semiconductor layer.