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Stage device

A table device and abutment technology, which is applied in the field of table devices, can solve the problems such as incapability of disposing a vibration damping unit or a column, and reduce the degree of freedom, and achieve the effect of suppressing the enlargement and improving the degree of freedom.

Inactive Publication Date: 2010-09-22
SUMITOMO HEAVY IND LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, in the above-mentioned conventional stand device, since the cable bracket is arranged under the base, the vibration-isolating unit or the column cannot be arranged on this part, and the degree of freedom of design is reduced.

Method used

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Experimental program
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no. 1 Embodiment approach

[0034] figure 1 It is a perspective view showing the stand device 1 according to the first embodiment of the present invention, figure 2 is viewed from above figure 1 The perspective view of the abutment provided by the table device 1, image 3 It is a perspective view of the abutment viewed from below, Figure 4 It is a perspective view of a state in which the lower frame of the base to which the connecting member is connected is supported by the vibration isolation unit.

[0035] Such as figure 1 As shown, the stage device 1 includes a base 10 on which a substrate is mounted, a stage 30 moving on the base 10, a guide rail 40 and a permanent magnet 42 for guiding the movement of the stage 30, and a The lower part, the guide slider 44 guided by the guide rail 40 and the electromagnet 46 facing the permanent magnet 42 are configured so that the stand part 30 moves along the guide rail 40 . In addition, in figure 1 Herein, the longitudinal direction of the base 10 is ...

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PUM

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Abstract

The present invention provides a stage device which restrains a size from getting large, while enhancing flexibility for design as to structure of an under side of a base. The stage device 1 provided with the base 10, and a gantry part 30 movable uniaxial-directionally on the base 10, is provided with: an overhung piece 52 provided overhungingly toward a sideway of the base 10, extended uniaxial-directionally, and provided with a guide rail 40 for guiding moving of the gantry part 30; and a cable carrier 60 provided in an under side of the overhung piece 52 in the sideway of the base 10, deformed to follow the moving of the gantry part 30, and for wiring collectively cables for controlling the gantry part 30.

Description

technical field [0001] The present invention relates to a stage device having a stage portion that moves in a uniaxial direction on a base stage on which a substrate is mounted. Background technique [0002] Conventionally, as a stage device used in the manufacture of various substrates such as liquid crystal panels and semiconductors, for example, a device disclosed in Patent Document 1 is known. This stand device is provided with a base of a can-making structure constructed by connecting can parts in a frame shape, a pair of guide rails provided on both sides of the base, a pair of guide sliders guided along these guide rails, and a horizontal frame on the A beam between a pair of guide sliders. The beam moves along the guide rails, and the defects of the substrate are detected and repaired by cameras and repair equipment mounted on the beam. The base is supported on the stand via the vibration isolation unit. [0003] In this device, a cable bracket is provided. Conne...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/687G02F1/13G02F1/1333B23Q1/25B23Q1/01
CPCG02F1/1303H01L21/68785
Inventor 吉田达矢中森靖仁
Owner SUMITOMO HEAVY IND LTD