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Grinding pad with detecting window and manufacturing method thereof

A manufacturing method and technology of grinding pads, which are applied to grinding devices, grinding machine tools, manufacturing tools, etc., can solve the problems of insufficient joint strength, interference of grinding end point detection, leakage, etc., and achieve the effect of low manufacturing cost and simple process

Active Publication Date: 2015-02-04
IV TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the problem with this method is that the bonding strength between the polishing pad and the detection window is insufficient
In other words, for the polishing pad formed by the above method, during the long-term polishing process, the liquid is likely to leak from the joint between the polishing pad and the detection window to the optical detection system, which will interfere with the detection of the grinding end point, thereby affecting to the grinding quality of the object

Method used

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  • Grinding pad with detecting window and manufacturing method thereof
  • Grinding pad with detecting window and manufacturing method thereof
  • Grinding pad with detecting window and manufacturing method thereof

Examples

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no. 1 example

[0040] Figure 1A to Figure 1D It is a schematic top view of a method for manufacturing a polishing pad with a detection window according to an embodiment of the present invention. Figure 2A to Figure 2D corresponding to Figure 1A to Figure 1D Schematic cross-section along section line I-I'. Please refer to Figure 1A and Figure 2A , firstly, a mold 102 is provided, and the mold 102 has an accommodating space S for accommodating molding materials. In this embodiment, the shape and size of the containing space S of the mold 102 are related to the shape and size of the polishing pad to be formed later. In addition, in order to enable those skilled in the art to clearly understand the present invention, in the following figures, only a part of the mold 102 is shown, that is, drawing the upper cover structure of the mold 102 is omitted.

[0041] Next, a pseudo-detection window 104 is preset at a specific position in the accommodating space S of the mold 102, and the specific...

no. 2 example

[0062] Figure 5A to Figure 5E It is a schematic top view of a method for manufacturing a polishing pad with a detection window according to an embodiment of the present invention. Figure 6A to Figure 6E corresponding to Figure 5A to Figure 5E Schematic cross-section along section line III-III'. Figure 5A to Figure 5C as well as Figure 6A to Figure 6C An example with the above Figure 1A to Figure 1C and Figure 2A to Figure 2C The same elements in the embodiments are denoted by the same symbols and will not be described again. in particular, Figure 5A to Figure 5C and Figure 6A to Figure 6C steps with Figure 1A to Figure 1C and Figure 2A to Figure 2C The steps are the same or similar.

[0063] Please refer to Figure 5A and Figure 6A , the mold 102 is firstly provided, and the mold 102 has an accommodating space S. Next, a pseudo-detection window 104 is preset at a specific position in the accommodation space S, and the specific position corresponds to th...

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Abstract

The invention provides a grinding pad with a detecting window and a manufacturing method thereof. The grinding pad is characterized in that firstly, a detecting window to be detected is pre-arranged in a mold; next, a grinding layer precursor is filled in the mold, and then a solidifying procedure is carried out to form a grinding layer, wherein the detecting window to be detected and the grinding layer can be completely separated; then, the detecting window to be detected and the grinding layer are separated so as to form a detecting window opening in the grinding layer. In the forming method of the detecting window opening, the mold with a boss structure can be selected to replace the prepared detecting window. Then, the detecting window precursor is filled in the detecting window opening, and the solidifying procedure is carried out to form the detecting window.

Description

technical field [0001] The invention relates to a grinding pad and a manufacturing method thereof, in particular to a grinding pad with a detection window and a manufacturing method thereof. Background technique [0002] With the progress of the industry, the planarization process is often adopted as a process for producing various components. In the planarization process, the grinding process is often used by the industry. [0003] In general, the polishing process is to press the object to be polished by applying a pressure on the polishing pad, and the object and the polishing pad have a relative movement between each other. Through the mechanical friction generated by relative motion, part of the surface layer of the object is removed, and the surface is gradually flattened to achieve the purpose of flattening. In addition, it is also possible to choose to supply a polishing liquid or a polishing slurry with a chemical mixture on the polishing pad during the polishing ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B37/04B24D3/00B24D11/00B24D18/00
Inventor 白昆哲李炫宗王昭钦杨伟文
Owner IV TECH CO LTD