A method for evaluating the purity of electronic grade trichlorosilane

A technology of trichlorosilane and evaluation method, applied in chemical instruments and methods, silicon compounds, measuring devices, etc., can solve the problems of long detection period, low precision, danger of trichlorosilane, etc. Safe operation, low cost effect

Active Publication Date: 2015-12-09
青海黄河上游水电开发有限责任公司新能源分公司 +1
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Problems solved by technology

This method not only has a long detection cycle and low precision, but also trichlorosilane is dangerous. Therefore, in order to obtain electronic grade trichlorosilane and produce electronic grade polysilicon, a fast, safe and accurate evaluation of trichlorosilane is urgently needed. silicon device

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  • A method for evaluating the purity of electronic grade trichlorosilane

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Embodiment Construction

[0016] Such as figure 1 Shown, a kind of electronic grade trichlorosilane purity evaluation device, this device comprises chassis 6 and is placed on the bell jar 3 with cooling water jacket on chassis 6, is placed in the bell jar 3 with cooling water jacket The inner tantalum wire 5 and a pair of electrodes 8 passing through the chassis 6 and connected to the power supply. The top of the bell jar 3 with a cooling water jacket is provided with lifting lugs 1 and the bell jar cooling water outlet 2 respectively, and its side walls are respectively provided with a bell jar cooling water inlet 10 and a mirror 11; a pair of electrodes 8 pass through The tantalum wire 5 is connected together; a pair of electrodes 8 are respectively provided with a reaction gas inlet pipe port 7 and a reaction gas outlet pipe port 9, and the reaction gas inlet pipe port 7 and the reaction gas outlet pipe port 9 pass through the chassis 6 and the belt The 3 cavities of the bell jar with the cooling w...

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Abstract

The invention relates to a purity evaluation device for electronic-grade trichlorosilane. The device comprises a chassis, a bell-jar, which is arranged on the chassis and has a cooling water jacket, a tantalum filament, which is arranged in the bell-jar with the cooling water jacket, and a pair of electrodes, which go through the chassis and are connected to the power supply. The top part of the bell-jar with the cooling water jacket is provided with a hanger and a bell-jar cooling water outlet, the side wall of the bell-jar with the cooling water jacket is provided with a bell-jar cooling water inlet and a sight glass; the two electrodes are connected through the tantalum filament, the outside of the pair of electrodes is provided with a reaction gas inlet and a reaction gas outlet, and the reaction gas inlet and the reaction gas outlet go through the chassis and communicate with the cavity of the bell-jar with the cooling water jacket. The purity evaluation device for electronic-grade trichlorosilane has the advantages of simple structure and low cost, achieves the goals of rapid and precise purity measurement, and realizes safety operation.

Description

technical field [0001] The invention relates to a trichlorosilane evaluation device in the technical field of polysilicon, in particular to an electronic-grade trichlorosilane purity evaluation device. Background technique [0002] The main production process of polysilicon is the improved Siemens method, which relies on the chemical vapor deposition reaction of trichlorosilane and hydrogen in the reduction furnace to generate polysilicon. The purity of trichlorosilane directly determines the purity of polysilicon. The purity of trichlorosilane mainly relies on a series of rectification towers for purification. By controlling the operating parameters of each rectification tower, relatively pure trichlorosilane is finally obtained. By analyzing the purity of trichlorosilane components in trichlorosilane, C, O, P, B, metal content and minority carrier life are analyzed, and the operating parameters of the rectification tower with different functions are adjusted. [0003] At...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N33/00C01B33/035
Inventor 刘柏年王秉琳刘刚马波武春青李学峰李春松
Owner 青海黄河上游水电开发有限责任公司新能源分公司
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