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Circuit pattern inspection device

A technology for inspecting devices and circuit patterns, applied in the directions of measuring devices, measuring electricity, measuring electrical variables, etc., and can solve problems such as inability to cope, confusion, and complicated change operations.

Active Publication Date: 2016-04-27
OHT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] For example, when a pattern group of a plurality of blocks corresponding to the screen size of a display device arranged in a matrix divided into a matrix is ​​used as an inspection object, a conventional inspection probe (inspection electrode) equipped with a pair of inspection probes is used. In the case of inspection by a type circuit pattern inspection device, the number of reciprocating movements is the same as the number of columns of the division, and time is required for pattern inspection.
[0007] In addition, even if multiple inspection probes are installed, the inspection position can be changed before inspection. Before inspection, it is necessary to match the division size (length) of the pattern to be inspected and change the layout. When small-sized display devices are inspected, cumbersome changes are required each time
In addition, it is impossible to deal with inspection boards in which display devices with different screen sizes are mixed in one board.

Method used

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Examples

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Effect test

no. 1 Embodiment approach

[0025] figure 1 It is a figure which shows the appearance structure of the circuit pattern inspection apparatus which concerns on 1st Embodiment of this invention. figure 2 It is a diagram showing the appearance structure of the circuit pattern inspection device viewed from above. In the following description, the direction intersecting with the extending direction of the conductor pattern is referred to as the orthogonal direction in this embodiment ( image 3 The direction of the arrow) is set as the substrate conveying direction or conveying direction.

[0026] The circuit pattern inspection device 1 of the present embodiment includes: a device frame 2 ; an inspection table 14 ; a transport mechanism 3 ; a sensor unit 12 ; a control unit 31 ;

[0027] In the circuit pattern inspection device 1 , the circuit board 21 to be inspected is conveyed by the conveyance mechanism 3 and passed through the inspection table 14 . The position (height) of the circuit board passing th...

no. 2 Embodiment approach

[0067] Next, a circuit pattern inspection device according to the second embodiment will be described.

[0068] Figure 7 It is a block diagram showing the overall configuration of the circuit pattern inspection device. In addition, among the components of this embodiment, the components equivalent to those of the above-mentioned first embodiment are assigned the same reference numerals and their descriptions are omitted.

[0069] In the above-mentioned first embodiment, the positions of the conductor patterns on the substrate are confirmed in advance, the inspection electrodes to be used are selected, inspection signals are applied to only those inspection electrodes to be used, and detection signals are acquired. Therefore, the detection signal processing unit 32 and Processing can be performed on the control unit 31 with a relatively small load. However, the conductor pattern formed on the substrate used in a large display device such as a television is 1 m or more, and w...

no. 3 Embodiment approach

[0080] Next, a circuit pattern inspection device according to a third embodiment will be described.

[0081] Figure 8 It is a block diagram showing the overall configuration of the circuit pattern inspection device. In addition, among the components of this embodiment, the same components as those of the above-mentioned first and second embodiments are assigned the same reference numerals and their descriptions are omitted.

[0082] This embodiment is a device in which sensor units 12 arranged alternately in two rows in the first embodiment described above and sensor units 51 arranged obliquely in steps in the second embodiment are mounted. Therefore, in the control unit 31, there are: a sensor selection unit 46 for selecting an inspection electrode in order to supply an inspection signal to the sensor unit 51; unit) 47; and a second inspection signal supply unit 55 that supplies inspection signals to all inspection electrodes of the sensor unit 51. The detection signal proc...

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Abstract

The circuit pattern inspection device takes a plurality of circuit boards with a single screen size or a mixture of multiple screen sizes as the inspection object, and for each conductor pattern of each pattern group on the substrate, through the inspection electrodes arranged in a staggered manner, according to the conductor pattern Optionally, the inspection signal composed of AC signal is applied and detected by capacitive coupling, so as to implement pass or fail judgment in a non-contact manner.

Description

technical field [0001] The present invention relates to a circuit pattern inspection device for non-contact inspection of defects in each conductor pattern of a conductor pattern group formed on a substrate. Background technique [0002] In recent years, among display devices, a liquid crystal display device using liquid crystal on a glass substrate or a plasma display device using plasma has become mainstream. In the manufacturing process of these display devices, a conductor pattern serving as a circuit wiring formed on a glass substrate is inspected for failure of disconnection and short circuit. [0003] As a general inspection method of a conductor pattern, for example, as described in JP-A-62-269075, it is known to make the tip of an inspection probe touch both ends of a conductor pattern, and to apply a direct current from one inspection probe (probe). It is a contact inspection method (pin-contact (pin contact method)) that checks the signal and detects the DC inspe...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R31/02
CPCG01R31/2806G01R31/2812
Inventor 羽森宽
Owner OHT
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