Synchronous trigger calibration method and device in rotating device type spectroscopic ellipsometer

Abstract

The invention discloses a method for synchronously triggering calibration in a rotating device type spectroscopic ellipsometer, which includes the steps of: 1. setting upper layer software preset information, the preset information including motor rotation frequency sequence, the The motor rotation frequency sequence contains multiple different motor rotation frequencies f; II. Correct the preset trigger angle value Ai of the motor by pre-compensating the delay angle; III. Correct the relationship between the motor and the detector by correcting the motor rotation frequency Timing clock skew. The invention also discloses a device for implementing synchronous trigger calibration in the rotating device type spectroscopic ellipsometer. The technical solution disclosed by the invention solves the problems of trigger delay and timing clock deviation in the rotating device type spectroscopic ellipsometer, and improves measurement precision and accuracy.

Description

technical field [0001] The invention relates to a synchronously triggered calibration method and its device, in particular to a synchronously triggered calibration method and its device implemented in a rotating device type spectroscopic ellipsometer. Background technique [0002] Rotating device type spectroscopic ellipsometer is a kind of widely used spectroscopic ellipsometer, including rotating polarizer type, rotating polarizer type, single rotating compensator type and double rotating compensator type ellipsometer, etc. [0003] The rotating device is generally loaded by the motor. The motor is always in motion during the measurement process, and the speed is stable and does not change. To ensure the integrity and accuracy of the measurement data, it is necessary to confirm that the light intensity signal collected by the detector is consistent with the light intensity of the rotating device. The axis positions correspond strictly. This requires the establishment of a...

AI Technical Summary

Problems solved by technology

In this process, the delay of hardware trigger signal switching is unavoidable, which prevents the detector from starting to collect data immediately when the motor sends the trigger signal, thus causing the start signal of the detector to be out of sync with the start signal of the motor

[0005] In addition, each hardware has its own timing clock, there will be errors in the timing clocks of different hardware, and the clocks of the detector and the motion motor will also have errors, which will cause the start and end time of each interval of the measurement period of the rotating device to be different from that of the detection The time of the device does not correspond to

[0006] If the above two error factors cannot be overcome, then the detector and the motion motor cannot be strictly synchronized during measurement, and it is difficult to guarantee the measurement accuracy

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