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A circular sealing surface polishing fixture for irregular parts

A sealing surface, irregular technology, applied in the field of circular sealing surface polishing jig, can solve problems such as manual manual processing, and achieve the effect of improving polishing efficiency and polishing quality

Active Publication Date: 2018-07-03
SHENYANG FORTUNE PRECISION EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But for irregular parts, the circular sealing surface on the surface can only be processed manually

Method used

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  • A circular sealing surface polishing fixture for irregular parts
  • A circular sealing surface polishing fixture for irregular parts
  • A circular sealing surface polishing fixture for irregular parts

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0018] Example: such as figure 1 As shown, the present invention includes a turntable base 1 fixedly connected with the polishing turntable, a horizontal fixed rod, a longitudinal fixed rod and a longitudinal fixed rod nut 4, and four radial rails 5 are arranged symmetrically along the circumference in the turntable base 1. Corresponding to the radial track 5 on the side wall, there are threaded holes for installing a horizontal fixing rod. The bottom of the turntable base 1 is provided with a fixing column 6 that can be clamped on the polishing turntable. When in use, irregular parts are placed on the turntable base 1 Between the four radial rails 5, there are four longitudinal fixing rods, which are respectively placed in the radial rails 5 and fixed with nuts. The parts are fixed by the horizontal fixing rods, the longitudinal fixing rods and the longitudinal fixing rod nuts, so that the The center of the circular sealing surface to be thrown coincides with the center of th...

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Abstract

The invention discloses a round sealing surface polishing jig for an irregular part and belongs to the technical field of semiconductor surface treatment and processing. The round sealing surface polishing jig for the irregular part comprises a rotary disc base fixedly connected with a polishing rotary disc, transverse fixing rods, longitudinal fixing rods and longitudinal fixing rod nuts. Four radial tracks are symmetrically disposed in the rotary disc base along the circumference; threaded holes for mounting the transverse fixing rods are formed in the side wall of the rotary disc base by corresponding to the radial tracks; and a fixing column capable of being clamped on the polishing rotary disc is disposed at the bottom of the rotary disc base. During usage, the irregular part is put among the four radial tracks of the rotary disc base, the four longitudinal fixing rods are put in the radial tracks correspondingly and fixed through the nuts, and the part is fixed through the transverse fixing rods, the longitudinal fixing rods and the nuts, so that the circle center of a to-be-polished round sealing surface of the part and the circle center of the rotary disc base coincide. By means of the round sealing surface polishing jig for the irregular part, the round sealing surface of the irregular part can be effectively polished through the rotary disc. The round sealing surface polishing jig for the irregular part is easy and convenient to dismount and easy to fix, and the polishing efficiency and polishing quality of the sealing surface are further improved.

Description

technical field [0001] The invention belongs to the technical field of semiconductor surface treatment and processing, in particular to a circular sealing surface polishing jig for irregular parts. It is suitable for polishing the circular sealing surface of irregular parts in the manufacturing industry of IC equipment (special production equipment for semiconductor devices, integrated circuit chips and flat panel displays). Background technique [0002] At present, in the IC equipment manufacturing industry, the sealing requirements for parts are getting higher and higher, and more and more parts need to be processed to meet the sealing performance requirements of the whole machine. For regular circular parts, the circular sealing surface on the surface can be easily processed by the turntable. However, for irregular parts, the circular sealing surface on the surface can only be manually processed. In view of the above situation, it is necessary to design a polishing fixt...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B24B29/02B24B41/06
CPCB24B29/02B24B41/06
Inventor 安朋娜
Owner SHENYANG FORTUNE PRECISION EQUIP CO LTD
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