Straightness error compensation method for etching echelle grating through precision guide rail
A technology of straightness error and precision guide rail, which is applied in the direction of optical devices, measuring devices, instruments, etc., can solve the difference of the echelle grating diffraction wavefront, fail to meet the preparation requirements of the echelle grating, and the straightness of the precision guide rail can no longer be processed and debugging to achieve the effect of improving the straightness error
Active Publication Date: 2016-07-27
昆山上理工光电信息应用技术研究院有限公司
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Problems solved by technology
However, due to the limitation of processing equipment precision and equipment technical precision, the straightness of the precision guide rail cannot be improved by processing and debugging after the equipment is completed.
[0003] The straightness of the precision guide rails currently on the market cannot meet the requirements for the preparation of echelle gratings. The reason is that the existing precision guide rails have large cumulative errors, which will lead to poor diffraction wavefronts of the echelle gratings and fail to meet the requirements of the echelle grating. Echelle grating preparation requirements
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[0026] The embodiments of the present invention are described in further detail below in conjunction with the accompanying drawings, but the present embodiments are not intended to limit the present invention. All similar structures and similar changes of the present invention should be included in the scope of protection of the present invention. The commas in all indicate the relationship between and.
[0027] The embodiment of the present invention provides a method for compensating the straightness error of an echelle grating by using a precision guide rail, which is characterized in that the specific steps are as follows:
[0028] 1) Using a dual-frequency laser interferometer, the grating constant of the echelle grating is used as the step value of the precision guide rail measurement, and the straightness accumulation of the precision guide rail is measured by measuring an actual displacement amount for each step. error data;
[0029] 2) According to the measured strai...
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The invention relates to the technical field of optical devices, in particular to a straightness error compensation method for etching an echelle grating through a precision guide rail.The technical problem that a precision guide rail cannot be used for etching the echelle grating is solved.The method comprises the steps that straightness accumulative error data of the precision guide rail is firstly measured, a precision guide rail straightness accumulative error curve is drawn according to the measured data, and a linear compensation equation is set up according to the precision guide rail straightness accumulative error curve; diffracted wavefront data of the echelle grating etched by the precision guide rail with the linear compensation equation as a stepping value is measured, and a diffracted wavefront curve of the echelle grating is drawn according to the measured data; then a quadratic compensation equation is set up according to the diffracted wavefront curve of the echelle grating; then the precision guide rail with the quadratic compensation equation as a stepping value is used for etching the echelle grating.According to the method, the etched echelle grating has a good diffracted wave face.
Description
technical field [0001] The invention relates to the optical device technology, in particular to a technology of a straightness error compensation method for marking an echelle grating by using a precision guide rail. Background technique [0002] With the rapid development of my country's manufacturing industry, the technical requirements of various industries continue to increase, and the performance indicators of precision guide rails are also "rising". The improvement of guide rail accuracy has become an important research direction, and guide rail straightness is the most important geometric accuracy index of precision guide rails. However, due to the limitation of processing equipment precision and equipment technical precision, the straightness of the precision guide rail cannot be improved through processing and debugging after the equipment is completed. [0003] The straightness of the precision guide rails currently on the market cannot meet the requirements for t...
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CPCG01B11/27
Inventor黄元申董成成盛斌孙乐倪争技周红艳张大伟
Owner昆山上理工光电信息应用技术研究院有限公司