Delay measurement circuit and delay measurement method of device under test

A device under test and measurement circuit technology, applied in the direction of single output arrangement, etc., can solve the problems of different equivalent loads and driving strengths, difficulty in ensuring measurement accuracy, and affecting the delay measurement accuracy of the device under test

Active Publication Date: 2021-05-04
SEMICON MFG INT (SHANGHAI) CORP +1
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  • Application Information

AI Technical Summary

Problems solved by technology

However, when configuring the ring oscillator, when the multiplexer is switched, the equivalent load and drive strength of the DUT in the ring oscillator will be different, which will seriously affect the delay of the DUT Measurement accuracy
[0006] Therefore, it is difficult to guarantee the measurement accuracy of the device under test in the delay measurement circuit in the prior art

Method used

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  • Delay measurement circuit and delay measurement method of device under test
  • Delay measurement circuit and delay measurement method of device under test
  • Delay measurement circuit and delay measurement method of device under test

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Embodiment Construction

[0038] As mentioned in the background section, the increasing optimization of electronic process precision increases the difficulty of measuring the delay of electronic devices. However, in the delay measurement circuit of the electronic device in the prior art, since the equivalent load and driving strength of the device under test in the ring oscillator are different during switching, it is difficult to guarantee the measurement accuracy.

[0039] In view of the technical problems described above, the embodiment of the present invention proposes a delay measurement circuit and a delay measurement method of a device under test, wherein the delay measurement circuit may include a loop oscillator and a period measurement unit; wherein the loop The loop oscillator includes at least five oscillating units that are directly or indirectly connected in series to form a ring, and each of the oscillating units includes a device under test, a front switch and a bypass switch; And the c...

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Abstract

A delay measurement circuit and a delay measurement method of a device under test, the delay measurement circuit includes a loop oscillator and a period measurement unit; the period measurement unit is suitable for measuring the oscillation period of the loop oscillator, and according to the loop The oscillating period of the road oscillator obtains the delay of the device under test; the ring oscillator includes at least five oscillating units that are directly or indirectly connected in series to form a ring, and each of the oscillating units includes a device under test, a front switch and A bypass switch; wherein, under the action of a group of control signals, each front switch and bypass switch in the ring oscillator is turned on or off, so that the oscillation unit in the ring oscillator The devices to be tested are connected in series to form an oscillation loop, and are controlled and connected in series in each oscillation unit in the oscillation loop, and only one of the pre-switch and the bypass switch is turned on. The delay measurement circuit of the embodiment of the present invention can greatly improve the delay measurement accuracy of the device to be tested.

Description

technical field [0001] The invention relates to an electronic process deviation detection technology, in particular to a delay measurement circuit and a delay measurement method of a device to be tested. Background technique [0002] In chip design, delay time is one of the most important electrical parameters to measure electronic devices. Due to the existence of electronic process deviation, the delay time of the electronic devices on the chip is different, therefore, it is necessary to measure the delay time of the electronic devices. At the same time, on the chip, a plurality of electronic devices of the same type in the fixed area may also have differences in delay times, and it is also very important to detect deviations in delay times between electronic devices of the same type in the fixed area. Wherein, the electronic device may be a logic gate device, such as an inverter, an AND gate, etc., or may be a combination circuit formed by a logic gate device, which is no...

Claims

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Application Information

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Patent Type & AuthorityPatents(China)
IPC IPC(8): H03K5/13
CPCH03K5/13
Inventor胡军
OwnerSEMICON MFG INT (SHANGHAI) CORP