Pressure sensor having medium isolation measurement module

A pressure sensor and medium isolation technology, applied in the direction of measuring fluid pressure, measuring devices, instruments, etc., can solve the problems of easy damage of pressure sensor chip, poor durability of pressure sensor, weak corrosion of urea solution, etc., to prevent freezing damage, Effect of extended service life and long service life

Pending Publication Date: 2020-04-14
WUHAN FINEMEMS
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Problems solved by technology

[0005] Aiming at the deficiencies of the prior art, the present invention provides a pressure sensor with a medium isolation measurement module, which has the advantages of strong medium compatibility, etc., and solves the problem of the pressure sensor chip in th

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  • Pressure sensor having medium isolation measurement module
  • Pressure sensor having medium isolation measurement module

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Embodiment Construction

[0026] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the embodiments of the present invention. Obviously, the described embodiments are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0027] see Figure 1-5 , a pressure sensor with a medium isolation measurement module, which includes a protective cover 10, a first housing 20, and a medium isolation module 30 from top to bottom; Bonding, the medium isolation module 30 includes a base 32, the inside of the base 32 is bonded with a pressure chip 39, the lower end of the base 32 is sequentially sealed with a metal part 33 and a pressure interface 35, the metal part 33, the diaphragm 34 and the pressure The in...

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Abstract

The invention relates to the technical field of pressure sensors, and discloses a pressure sensor with a medium isolation measurement module. The pressure sensor sequentially comprises a protective cover, a first housing and a medium isolation module from top to bottom, wherein the medium isolation module comprises a base. According to the pressure sensor with the medium isolation measurement module, a first cavity is formed among the base, a metal piece and a diaphragm to isolate and package silicone oil; a pressure chip is isolated and packaged for protection to prevent direct contact with adetection medium, and corrosion is avoided; a buffer hollow cylinder and the diaphragm are isolated by a limiting circular ring, and accumulated liquid can be rapidly discharged in real time, so thatthe diaphragm is prevented from being damaged by freezing, and the output precision of the sensor can be ensured; the increase of the freezing volume of the detection medium at a low temperature is avoided, the change of the volume can be absorbed by the buffer hollow cylinder, and the purpose of high compatibility is achieved; and overload pressure generated by freezing of a urea solution can beresisted and freezing damage is prevented, and meanwhile, high-precision output is ensured.

Description

technical field [0001] The invention relates to the technical field of pressure sensors, in particular to a pressure sensor with a medium isolation measurement module. Background technique [0002] With the tightening of vehicle emission regulations in the country, automotive exhaust after-treatment SCR systems are gradually becoming popular in commercial vehicles. MEMS (micro-electromechanical system) pressure sensors, as important sensor components for SCR systems, are also facing severe technical challenges. [0003] The pressure sensor in the prior art can only withstand twice the overload pressure and three times the burst pressure, but when the urea solution used in the SCR system freezes at a low temperature, it can generate an overload pressure of 100 MPa, which is much higher than that of ordinary sensors. range, in the outdoor low-temperature freezing environment, the pressure sensor chip is easily damaged, and on the other hand, due to the weak corrosion character...

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Application Information

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IPC IPC(8): G01L19/06
CPCG01L19/06G01L19/0645
Inventor 王小平吴登峰李凡亮曹万
Owner WUHAN FINEMEMS
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